[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS55155454A - Scanning electron microscope equipped with electromagnetic radiation type electron gun - Google Patents

Scanning electron microscope equipped with electromagnetic radiation type electron gun

Info

Publication number
JPS55155454A
JPS55155454A JP6306579A JP6306579A JPS55155454A JP S55155454 A JPS55155454 A JP S55155454A JP 6306579 A JP6306579 A JP 6306579A JP 6306579 A JP6306579 A JP 6306579A JP S55155454 A JPS55155454 A JP S55155454A
Authority
JP
Japan
Prior art keywords
electron gun
electromagnetic radiation
emitter
microscope equipped
radiation type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6306579A
Other languages
Japanese (ja)
Other versions
JPS6244381B2 (en
Inventor
Shuichi Saito
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP6306579A priority Critical patent/JPS55155454A/en
Publication of JPS55155454A publication Critical patent/JPS55155454A/en
Publication of JPS6244381B2 publication Critical patent/JPS6244381B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To prevent a emitter from being damaged by the discharge in the unstable region, by means of stopping the operation of a radial electron beam when a probe current becomes under the effective value. CONSTITUTION:An electron beam emitted from a cold cathode type electron gun consisting of the emitter 1, a drawing electrode, and an accelerating electrode, is focused by the focusing lens and it is projected on a test sample 8. The probe electric signal from a amplifier 17 is transmitted to a comparator 18. When the detecting probe electric signal becomes below the standard signal set point, a control circuit 20 enables the operation of the electron gun to stop by controlling a DC high voltage generating circuit 3 and a DC power supply unit 5.
JP6306579A 1979-05-22 1979-05-22 Scanning electron microscope equipped with electromagnetic radiation type electron gun Granted JPS55155454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6306579A JPS55155454A (en) 1979-05-22 1979-05-22 Scanning electron microscope equipped with electromagnetic radiation type electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6306579A JPS55155454A (en) 1979-05-22 1979-05-22 Scanning electron microscope equipped with electromagnetic radiation type electron gun

Publications (2)

Publication Number Publication Date
JPS55155454A true JPS55155454A (en) 1980-12-03
JPS6244381B2 JPS6244381B2 (en) 1987-09-19

Family

ID=13218561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6306579A Granted JPS55155454A (en) 1979-05-22 1979-05-22 Scanning electron microscope equipped with electromagnetic radiation type electron gun

Country Status (1)

Country Link
JP (1) JPS55155454A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441159A (en) * 1987-08-07 1989-02-13 Hitachi Ltd Inspecting device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849374A (en) * 1971-10-22 1973-07-12
JPS50103251A (en) * 1974-01-11 1975-08-15

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849374A (en) * 1971-10-22 1973-07-12
JPS50103251A (en) * 1974-01-11 1975-08-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441159A (en) * 1987-08-07 1989-02-13 Hitachi Ltd Inspecting device

Also Published As

Publication number Publication date
JPS6244381B2 (en) 1987-09-19

Similar Documents

Publication Publication Date Title
US3291959A (en) Procedure and equipment for the automatic focussing of the charge carrier beam in devices for the working of materials by means of a charge carrier beam
ES477927A1 (en) X-ray tubes
US3786268A (en) Electron gun device of field emission type
GB982669A (en) Improvements in or relating to electron beam generators
JPS5730253A (en) Secondary electron detector for scan type electron microscope
US3378670A (en) Method of craterless electron beam welding
EP0434018B1 (en) Electron accelerator
JPS55155454A (en) Scanning electron microscope equipped with electromagnetic radiation type electron gun
EP0856349A3 (en) Apparatus for processing gas by electron beam
US3786305A (en) Field emission electron gun
US3925706A (en) Field emission electron gun device of the automatic control type
JPS5760658A (en) Cathode ray tube for light source
GB1183751A (en) Charged Particle Generator with Electromagnetic Current Control.
JPS54149568A (en) Scanning electron microscope
DE3681817D1 (en) DEVICE FOR FOCUSING ADJUSTMENT OF A CATHODE RAY TUBE.
US2806978A (en) Alignment of television camera tubes
JPS556829A (en) Electron beam exposure method
JP3825933B2 (en) Electron beam irradiation apparatus, electron beam drawing apparatus using the electron beam irradiation apparatus, scanning electron microscope, and point light source type X-ray irradiation apparatus
JPS54149569A (en) Scanning electron microscope
JPS5563822A (en) Electron beam device
JPS556737A (en) Scan electron microscope
JPS54149567A (en) Scanning electron microscope
JPS5648042A (en) X-ray tube
JP2621369B2 (en) Electron beam processing equipment
JPS586142Y2 (en) Wehnelt power supply for electron guns