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JPS54894A - Manufacture of piezoelectric substarate for elastic surface wave element - Google Patents

Manufacture of piezoelectric substarate for elastic surface wave element

Info

Publication number
JPS54894A
JPS54894A JP6569377A JP6569377A JPS54894A JP S54894 A JPS54894 A JP S54894A JP 6569377 A JP6569377 A JP 6569377A JP 6569377 A JP6569377 A JP 6569377A JP S54894 A JPS54894 A JP S54894A
Authority
JP
Japan
Prior art keywords
piezoelectric
substarate
manufacture
surface wave
wave element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6569377A
Other languages
Japanese (ja)
Other versions
JPS5636807B2 (en
Inventor
Shoichi Washitsuka
Hitoshi Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6569377A priority Critical patent/JPS54894A/en
Publication of JPS54894A publication Critical patent/JPS54894A/en
Publication of JPS5636807B2 publication Critical patent/JPS5636807B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To suppress the generation of the bulk wave by forming a pattern to the protective film provided on the wafer and then etching the piezoelectric single crystal with the fused KOH solution.
JP6569377A 1977-06-06 1977-06-06 Manufacture of piezoelectric substarate for elastic surface wave element Granted JPS54894A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6569377A JPS54894A (en) 1977-06-06 1977-06-06 Manufacture of piezoelectric substarate for elastic surface wave element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6569377A JPS54894A (en) 1977-06-06 1977-06-06 Manufacture of piezoelectric substarate for elastic surface wave element

Publications (2)

Publication Number Publication Date
JPS54894A true JPS54894A (en) 1979-01-06
JPS5636807B2 JPS5636807B2 (en) 1981-08-26

Family

ID=13294341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6569377A Granted JPS54894A (en) 1977-06-06 1977-06-06 Manufacture of piezoelectric substarate for elastic surface wave element

Country Status (1)

Country Link
JP (1) JPS54894A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0538173Y2 (en) * 1988-07-08 1993-09-28
JPH0236509U (en) * 1988-08-31 1990-03-09

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134651A (en) * 1974-09-19 1976-03-24 Toko Inc HYOMENHAFUIRUTAOYOBISONOSEIZOHOHO

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134651A (en) * 1974-09-19 1976-03-24 Toko Inc HYOMENHAFUIRUTAOYOBISONOSEIZOHOHO

Also Published As

Publication number Publication date
JPS5636807B2 (en) 1981-08-26

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