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JPS5487292A - Moisture sensor - Google Patents

Moisture sensor

Info

Publication number
JPS5487292A
JPS5487292A JP15447077A JP15447077A JPS5487292A JP S5487292 A JPS5487292 A JP S5487292A JP 15447077 A JP15447077 A JP 15447077A JP 15447077 A JP15447077 A JP 15447077A JP S5487292 A JPS5487292 A JP S5487292A
Authority
JP
Japan
Prior art keywords
electrodes
film
nylon
thermally adhered
absorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15447077A
Other languages
Japanese (ja)
Inventor
Isao Nemoto
Shinichi Ohashi
Katsuyuki Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15447077A priority Critical patent/JPS5487292A/en
Publication of JPS5487292A publication Critical patent/JPS5487292A/en
Pending legal-status Critical Current

Links

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE: To dispense with high technigues upon production and to prevent easy damage upon use by adhering opposite electrodes to make use of the absorption and liberation of the moisture from the both sides of two hydrophilic films of high molecules which are thermally adhered.
CONSTITUTION: Comb-shaped electrodes 2 and 2' facing each other are formed by the vacuum evaporation of Al on one side of a film 1 of nylon 6 having stable balance moisture absorption, and lead-out terminals are connected with the electrodes 2 and 2'. Another film 1' of nylon 6' is thermally adhered to the side 5 of the film 1, which is formed with the electrodes 2 and 2', and a holding frame 4 having electrically insulating property is provided therearound.
COPYRIGHT: (C)1979,JPO&Japio
JP15447077A 1977-12-23 1977-12-23 Moisture sensor Pending JPS5487292A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15447077A JPS5487292A (en) 1977-12-23 1977-12-23 Moisture sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15447077A JPS5487292A (en) 1977-12-23 1977-12-23 Moisture sensor

Publications (1)

Publication Number Publication Date
JPS5487292A true JPS5487292A (en) 1979-07-11

Family

ID=15584943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15447077A Pending JPS5487292A (en) 1977-12-23 1977-12-23 Moisture sensor

Country Status (1)

Country Link
JP (1) JPS5487292A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856963U (en) * 1981-10-15 1983-04-18 株式会社チノ− moisture sensitive element
JP2003516539A (en) * 1999-12-08 2003-05-13 ゼンジリオン アクチエンゲゼルシャフト Capacitive sensor
JP2006019589A (en) * 2004-07-02 2006-01-19 Denso Corp Semiconductor apparatus
JP2006266809A (en) * 2005-03-23 2006-10-05 Asahi Glass Co Ltd Detection sensor of dew condensation state and plate-shaped member for window of vehicle
US8633047B2 (en) 2011-09-02 2014-01-21 Sensirion Ag Method for manufacturing a sensor chip
CN105366626A (en) * 2015-10-21 2016-03-02 苏州工业园区纳米产业技术研究院有限公司 MEMS capacitance type humidity sensor and manufacturing method thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856963U (en) * 1981-10-15 1983-04-18 株式会社チノ− moisture sensitive element
JP2003516539A (en) * 1999-12-08 2003-05-13 ゼンジリオン アクチエンゲゼルシャフト Capacitive sensor
JP2006019589A (en) * 2004-07-02 2006-01-19 Denso Corp Semiconductor apparatus
JP2006266809A (en) * 2005-03-23 2006-10-05 Asahi Glass Co Ltd Detection sensor of dew condensation state and plate-shaped member for window of vehicle
US8633047B2 (en) 2011-09-02 2014-01-21 Sensirion Ag Method for manufacturing a sensor chip
US9140740B2 (en) 2011-09-02 2015-09-22 Sensirion Ag Sensor chip and method for manufacturing a sensor chip
CN105366626A (en) * 2015-10-21 2016-03-02 苏州工业园区纳米产业技术研究院有限公司 MEMS capacitance type humidity sensor and manufacturing method thereof

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