JPS5478075A - Sample image display device - Google Patents
Sample image display deviceInfo
- Publication number
- JPS5478075A JPS5478075A JP14499477A JP14499477A JPS5478075A JP S5478075 A JPS5478075 A JP S5478075A JP 14499477 A JP14499477 A JP 14499477A JP 14499477 A JP14499477 A JP 14499477A JP S5478075 A JPS5478075 A JP S5478075A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- horizontal
- cathode
- ray tube
- coils
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 abstract 1
Abstract
PURPOSE: To make the whole of display clear and facilitate operation by magnifying only an arbitrary important part on a displayed sample at a large scale factor and observing this part.
CONSTITUTION: Electron beam 3 from electron gun 2 is focused by focusing lense system 4 and is irradiated on sample 5 which is put on sample moving stand 19. At this time, horizontal and vertical scanning coils 9X and 9Y are previously provided between lense system 4 and sample 5, and signals from horizontal and vertical signal generators 6X and 6Y are applied to these coils through scale factor variable circuit 7 and power amplifier 8. Next, two-dimensional electrons from sample 5 are detected by detector 10 and are applied to the grid of cathode-ray tube 12 as brightness modulation signals through video amplifier 11. Meanwhile, scanning signals from generators 6X and 6Y are applied to horizontal and vertical scanning coils 14X and 14Y of cathode-ray tube 12 through power amplifier 13. After that, the reference voltage and the polarity of horizontal and vertical reference power sources 18X and 18Y are changed to magnify a desired position of sample 5 and display this position on cathode-ray tube 12.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14499477A JPS5478075A (en) | 1977-12-05 | 1977-12-05 | Sample image display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14499477A JPS5478075A (en) | 1977-12-05 | 1977-12-05 | Sample image display device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5478075A true JPS5478075A (en) | 1979-06-21 |
Family
ID=15374993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14499477A Pending JPS5478075A (en) | 1977-12-05 | 1977-12-05 | Sample image display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5478075A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5929333A (en) * | 1982-08-11 | 1984-02-16 | Jeol Ltd | Field-of-view shifting device for electron microscope |
| JPS59148254A (en) * | 1983-02-10 | 1984-08-24 | Jeol Ltd | Sample shifting device of scanning electron microscope or the like |
| JPS60145918U (en) * | 1984-03-09 | 1985-09-27 | 株式会社日立製作所 | Automotive air conditioner |
| US6225628B1 (en) | 1996-12-10 | 2001-05-01 | Hitachi, Ltd. | Scanning electron microscope |
-
1977
- 1977-12-05 JP JP14499477A patent/JPS5478075A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5929333A (en) * | 1982-08-11 | 1984-02-16 | Jeol Ltd | Field-of-view shifting device for electron microscope |
| JPH0234421B2 (en) * | 1982-08-11 | 1990-08-03 | Nippon Electron Optics Lab | |
| JPS59148254A (en) * | 1983-02-10 | 1984-08-24 | Jeol Ltd | Sample shifting device of scanning electron microscope or the like |
| JPH0343742B2 (en) * | 1983-02-10 | 1991-07-03 | Nippon Electron Optics Lab | |
| JPS60145918U (en) * | 1984-03-09 | 1985-09-27 | 株式会社日立製作所 | Automotive air conditioner |
| US6225628B1 (en) | 1996-12-10 | 2001-05-01 | Hitachi, Ltd. | Scanning electron microscope |
| US6541771B2 (en) | 1996-12-10 | 2003-04-01 | Hitachi, Ltd. | Scanning electron microscope |
| DE19754647B4 (en) * | 1996-12-10 | 2005-06-02 | Hitachi, Ltd. | scanning Electron Microscope |
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