[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS5451777A - Method of slicing semiconductor bar - Google Patents

Method of slicing semiconductor bar

Info

Publication number
JPS5451777A
JPS5451777A JP11828377A JP11828377A JPS5451777A JP S5451777 A JPS5451777 A JP S5451777A JP 11828377 A JP11828377 A JP 11828377A JP 11828377 A JP11828377 A JP 11828377A JP S5451777 A JPS5451777 A JP S5451777A
Authority
JP
Japan
Prior art keywords
semiconductor bar
slicing semiconductor
slicing
bar
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11828377A
Other languages
Japanese (ja)
Inventor
Akio Nakamura
Kouhei Toyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to JP11828377A priority Critical patent/JPS5451777A/en
Publication of JPS5451777A publication Critical patent/JPS5451777A/en
Pending legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP11828377A 1977-10-01 1977-10-01 Method of slicing semiconductor bar Pending JPS5451777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11828377A JPS5451777A (en) 1977-10-01 1977-10-01 Method of slicing semiconductor bar

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11828377A JPS5451777A (en) 1977-10-01 1977-10-01 Method of slicing semiconductor bar

Publications (1)

Publication Number Publication Date
JPS5451777A true JPS5451777A (en) 1979-04-23

Family

ID=14732825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11828377A Pending JPS5451777A (en) 1977-10-01 1977-10-01 Method of slicing semiconductor bar

Country Status (1)

Country Link
JP (1) JPS5451777A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04122608A (en) * 1990-09-14 1992-04-23 Shin Etsu Handotai Co Ltd Method and apparatus for severing single crystal ingot by slicer with inner peripheral blade

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3321871A (en) * 1964-03-05 1967-05-30 Cavitron Ultrasonics Inc Ultrasonic cleaning methods and apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3321871A (en) * 1964-03-05 1967-05-30 Cavitron Ultrasonics Inc Ultrasonic cleaning methods and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04122608A (en) * 1990-09-14 1992-04-23 Shin Etsu Handotai Co Ltd Method and apparatus for severing single crystal ingot by slicer with inner peripheral blade

Similar Documents

Publication Publication Date Title
JPS53148273A (en) Method of producing semiconductor
JPS542671A (en) Method of producing semiconductor
JPS5487646A (en) Selective etching method
JPS5446485A (en) Method of producing semiconductor
JPS53107287A (en) Method of producing semiconductor
JPS53128286A (en) Method of producing semiconductor
JPS5427376A (en) Method of producing semiconductor
JPS53128273A (en) Method of producing semiconductor
JPS546784A (en) Method of producing semiconductor
JPS5419677A (en) Method of producing semiconductor
JPS5417672A (en) Method of stabilizing semiconductor piece
JPS53138292A (en) Method of producing semiconductor
JPS5422159A (en) Method of producing semiconductor
JPS5458375A (en) Method of producing semiconductor
JPS548468A (en) Method of producing semiconductor
JPS5324800A (en) Method of guarding
JPS5390776A (en) Method of producing semiconductor
JPS5419358A (en) Method of producing semiconductor element
JPS5499284A (en) Method of cutting article out
JPS5451388A (en) Method of producing semiconductor
JPS53124965A (en) Method of producing semiconductor
JPS5451777A (en) Method of slicing semiconductor bar
JPS5394190A (en) Method of producing semiconductor
JPS54985A (en) Method of producing semiconductor
JPS543466A (en) Method of producing semiconductor