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JPS544558B2 - - Google Patents

Info

Publication number
JPS544558B2
JPS544558B2 JP6193872A JP6193872A JPS544558B2 JP S544558 B2 JPS544558 B2 JP S544558B2 JP 6193872 A JP6193872 A JP 6193872A JP 6193872 A JP6193872 A JP 6193872A JP S544558 B2 JPS544558 B2 JP S544558B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6193872A
Other languages
Japanese (ja)
Other versions
JPS4921982A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6193872A priority Critical patent/JPS544558B2/ja
Publication of JPS4921982A publication Critical patent/JPS4921982A/ja
Publication of JPS544558B2 publication Critical patent/JPS544558B2/ja
Expired legal-status Critical Current

Links

JP6193872A 1972-06-20 1972-06-20 Expired JPS544558B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6193872A JPS544558B2 (en) 1972-06-20 1972-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6193872A JPS544558B2 (en) 1972-06-20 1972-06-20

Publications (2)

Publication Number Publication Date
JPS4921982A JPS4921982A (en) 1974-02-26
JPS544558B2 true JPS544558B2 (en) 1979-03-07

Family

ID=13185610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6193872A Expired JPS544558B2 (en) 1972-06-20 1972-06-20

Country Status (1)

Country Link
JP (1) JPS544558B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0141060Y2 (en) * 1984-06-22 1989-12-06

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5213771A (en) * 1975-07-22 1977-02-02 Mitsubishi Electric Corp Semiconductor unit manufacturing process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0141060Y2 (en) * 1984-06-22 1989-12-06

Also Published As

Publication number Publication date
JPS4921982A (en) 1974-02-26

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