JPS54373B2 - - Google Patents
Info
- Publication number
- JPS54373B2 JPS54373B2 JP892775A JP892775A JPS54373B2 JP S54373 B2 JPS54373 B2 JP S54373B2 JP 892775 A JP892775 A JP 892775A JP 892775 A JP892775 A JP 892775A JP S54373 B2 JPS54373 B2 JP S54373B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP892775A JPS54373B2 (en) | 1975-01-20 | 1975-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP892775A JPS54373B2 (en) | 1975-01-20 | 1975-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5191673A JPS5191673A (en) | 1976-08-11 |
| JPS54373B2 true JPS54373B2 (en) | 1979-01-10 |
Family
ID=11706281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP892775A Expired JPS54373B2 (en) | 1975-01-20 | 1975-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54373B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS581958Y2 (en) * | 1977-02-15 | 1983-01-13 | 日新ハイボルテ−ジ株式会社 | Ion source vacuum exhaust device |
| US6843258B2 (en) * | 2000-12-19 | 2005-01-18 | Applied Materials, Inc. | On-site cleaning gas generation for process chamber cleaning |
-
1975
- 1975-01-20 JP JP892775A patent/JPS54373B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5191673A (en) | 1976-08-11 |