JPS5422000A - Process for producing alpha-type silicon nitride - Google Patents
Process for producing alpha-type silicon nitrideInfo
- Publication number
- JPS5422000A JPS5422000A JP8626077A JP8626077A JPS5422000A JP S5422000 A JPS5422000 A JP S5422000A JP 8626077 A JP8626077 A JP 8626077A JP 8626077 A JP8626077 A JP 8626077A JP S5422000 A JPS5422000 A JP S5422000A
- Authority
- JP
- Japan
- Prior art keywords
- particle size
- silicon nitride
- type silicon
- producing alpha
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Abstract
PURPOSE: To provide the subject process comprising the steps of : heating and nitriding shaped articles of a metal powder having a particle size less than the predetermined particle size in a low temperature range of N2 or NH3 atmospheric temperature, then pulverizing the same to a particle size less than the predetermined particle size, and renitriding the same in a temperature range higher than said range, whereby the quality of α-Si3N4 is improved and unnitrided matters are reduced.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8626077A JPS6047203B2 (en) | 1977-07-19 | 1977-07-19 | Method for manufacturing α-type silicon nitride |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8626077A JPS6047203B2 (en) | 1977-07-19 | 1977-07-19 | Method for manufacturing α-type silicon nitride |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5422000A true JPS5422000A (en) | 1979-02-19 |
JPS6047203B2 JPS6047203B2 (en) | 1985-10-21 |
Family
ID=13881840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8626077A Expired JPS6047203B2 (en) | 1977-07-19 | 1977-07-19 | Method for manufacturing α-type silicon nitride |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6047203B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5888107A (en) * | 1981-11-16 | 1983-05-26 | Denki Kagaku Kogyo Kk | Continuous preparation of alpha-type silicon nitride |
JPH02225304A (en) * | 1989-02-27 | 1990-09-07 | Denki Kagaku Kogyo Kk | Production of silicon nitride, silicon nitride powder and use of the same powder |
-
1977
- 1977-07-19 JP JP8626077A patent/JPS6047203B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5888107A (en) * | 1981-11-16 | 1983-05-26 | Denki Kagaku Kogyo Kk | Continuous preparation of alpha-type silicon nitride |
JPH028964B2 (en) * | 1981-11-16 | 1990-02-28 | Denki Kagaku Kogyo Kk | |
JPH02225304A (en) * | 1989-02-27 | 1990-09-07 | Denki Kagaku Kogyo Kk | Production of silicon nitride, silicon nitride powder and use of the same powder |
Also Published As
Publication number | Publication date |
---|---|
JPS6047203B2 (en) | 1985-10-21 |
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