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JPS5421272A - Metal photo mask - Google Patents

Metal photo mask

Info

Publication number
JPS5421272A
JPS5421272A JP8683077A JP8683077A JPS5421272A JP S5421272 A JPS5421272 A JP S5421272A JP 8683077 A JP8683077 A JP 8683077A JP 8683077 A JP8683077 A JP 8683077A JP S5421272 A JPS5421272 A JP S5421272A
Authority
JP
Japan
Prior art keywords
photo mask
metal
metal photo
mask
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8683077A
Other languages
Japanese (ja)
Inventor
Haruyuki Hoshika
Teruhiko Yamazaki
Yoichi Akasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8683077A priority Critical patent/JPS5421272A/en
Publication of JPS5421272A publication Critical patent/JPS5421272A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To establish a mask not peeled off even with cleaning, by inserting a mixture layer of metal and glass between the substrate and the metallic thin film, in providing a metal mask having the pattern formed with metallic thin film on a glass substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP8683077A 1977-07-19 1977-07-19 Metal photo mask Pending JPS5421272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8683077A JPS5421272A (en) 1977-07-19 1977-07-19 Metal photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8683077A JPS5421272A (en) 1977-07-19 1977-07-19 Metal photo mask

Publications (1)

Publication Number Publication Date
JPS5421272A true JPS5421272A (en) 1979-02-17

Family

ID=13897720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8683077A Pending JPS5421272A (en) 1977-07-19 1977-07-19 Metal photo mask

Country Status (1)

Country Link
JP (1) JPS5421272A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173250A (en) * 1985-01-28 1986-08-04 Mitsubishi Electric Corp Photomask material
JPS6334549A (en) * 1986-07-30 1988-02-15 Nissin Electric Co Ltd Exposure mask and its production
WO2002005032A1 (en) * 2000-07-07 2002-01-17 Hitachi, Ltd. Method of manufacturing integrated circuit

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173250A (en) * 1985-01-28 1986-08-04 Mitsubishi Electric Corp Photomask material
JPS6334549A (en) * 1986-07-30 1988-02-15 Nissin Electric Co Ltd Exposure mask and its production
WO2002005032A1 (en) * 2000-07-07 2002-01-17 Hitachi, Ltd. Method of manufacturing integrated circuit
US6794207B2 (en) 2000-07-07 2004-09-21 Renesas Technology Corp. Method of manufacturing integrated circuit
US6936406B2 (en) 2000-07-07 2005-08-30 Renesas Technology Corp. Method of manufacturing integrated circuit
US6958292B2 (en) 2000-07-07 2005-10-25 Renesas Technology Corp. Method of manufacturing integrated circuit
CN100334687C (en) * 2000-07-07 2007-08-29 株式会社日立制作所 Method of manufacturing integrated circuit

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