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JPS5421700A - Ion-beam processing method - Google Patents

Ion-beam processing method

Info

Publication number
JPS5421700A
JPS5421700A JP8695977A JP8695977A JPS5421700A JP S5421700 A JPS5421700 A JP S5421700A JP 8695977 A JP8695977 A JP 8695977A JP 8695977 A JP8695977 A JP 8695977A JP S5421700 A JPS5421700 A JP S5421700A
Authority
JP
Japan
Prior art keywords
ion
processing method
ions
beam processing
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8695977A
Other languages
Japanese (ja)
Inventor
Toshio Kasai
Yoshio Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8695977A priority Critical patent/JPS5421700A/en
Publication of JPS5421700A publication Critical patent/JPS5421700A/en
Pending legal-status Critical Current

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To improve the removal processing by collision processing and chemical reaction, as well as to reduce the processing defect, through ionizing compound of carbon fluoride into ions of carbon fluoride and ions of fluorine and applying beams of these ions.
COPYRIGHT: (C)1979,JPO&Japio
JP8695977A 1977-07-20 1977-07-20 Ion-beam processing method Pending JPS5421700A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8695977A JPS5421700A (en) 1977-07-20 1977-07-20 Ion-beam processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8695977A JPS5421700A (en) 1977-07-20 1977-07-20 Ion-beam processing method

Publications (1)

Publication Number Publication Date
JPS5421700A true JPS5421700A (en) 1979-02-19

Family

ID=13901402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8695977A Pending JPS5421700A (en) 1977-07-20 1977-07-20 Ion-beam processing method

Country Status (1)

Country Link
JP (1) JPS5421700A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037130A (en) * 1983-08-10 1985-02-26 Comput Basic Mach Technol Res Assoc Patterning method of thin-film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037130A (en) * 1983-08-10 1985-02-26 Comput Basic Mach Technol Res Assoc Patterning method of thin-film

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