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JPS54121150A - Optical production of blaze grating - Google Patents

Optical production of blaze grating

Info

Publication number
JPS54121150A
JPS54121150A JP2895678A JP2895678A JPS54121150A JP S54121150 A JPS54121150 A JP S54121150A JP 2895678 A JP2895678 A JP 2895678A JP 2895678 A JP2895678 A JP 2895678A JP S54121150 A JPS54121150 A JP S54121150A
Authority
JP
Japan
Prior art keywords
film
grating
blaze
angle
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2895678A
Other languages
Japanese (ja)
Inventor
Keiichi Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2895678A priority Critical patent/JPS54121150A/en
Publication of JPS54121150A publication Critical patent/JPS54121150A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE: To produce a blaze grating optically with ease and in a short time irrespective of sizes of grating face by forming a metal thin film in pattern form and exposing the photosensitive resin film provided thereon in saw tooth form from the transparent substrate side.
CONSTITUTION: A Cr thin film 2 is evaporated on the optically polished surface of a glass substrare 1 and a photo resist film 3 is coated. Next, a photo resist mask 21 of desired patterns is formed and the Cr this film patterns 22 are formed by hydrochloric acid etching of the thin film 2. a photosensitive resin film 4 is coated thereon is such a manner that its thickness (d) staisfies d to pcot θ (P is the pitch of diffraction grating; θ is blaze angle). Next, the parallel light 23 perpendicular to the substrate 1 first, then the parallel light 24 of the angle α subsequently given angles and finally becoming an angle θ in the film 4 are exposed, whereby saw tooth form photosensitive regions 25 are created. Next, only the non-exposed regions 26 are left by developement processing and an Al this film 28 is evaporated on the surface of the grating 27 formed, whereby the blaze grating 29 is manufactured.
COPYRIGHT: (C)1979,JPO&Japio
JP2895678A 1978-03-13 1978-03-13 Optical production of blaze grating Pending JPS54121150A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2895678A JPS54121150A (en) 1978-03-13 1978-03-13 Optical production of blaze grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2895678A JPS54121150A (en) 1978-03-13 1978-03-13 Optical production of blaze grating

Publications (1)

Publication Number Publication Date
JPS54121150A true JPS54121150A (en) 1979-09-20

Family

ID=12262858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2895678A Pending JPS54121150A (en) 1978-03-13 1978-03-13 Optical production of blaze grating

Country Status (1)

Country Link
JP (1) JPS54121150A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02219002A (en) * 1989-02-20 1990-08-31 Matsushita Electric Ind Co Ltd Diffraction grating and its production
WO1997013245A1 (en) * 1995-10-03 1997-04-10 Asahi Glass Company Ltd. Optical head device and production method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02219002A (en) * 1989-02-20 1990-08-31 Matsushita Electric Ind Co Ltd Diffraction grating and its production
WO1997013245A1 (en) * 1995-10-03 1997-04-10 Asahi Glass Company Ltd. Optical head device and production method thereof
US6271966B1 (en) 1995-10-03 2001-08-07 Asahi Glass Company Ltd. Optical head device including an optically anisotropic diffraction grating and process for its production

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