JPS4980975A - - Google Patents
Info
- Publication number
- JPS4980975A JPS4980975A JP12252672A JP12252672A JPS4980975A JP S4980975 A JPS4980975 A JP S4980975A JP 12252672 A JP12252672 A JP 12252672A JP 12252672 A JP12252672 A JP 12252672A JP S4980975 A JPS4980975 A JP S4980975A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252672A JPS4980975A (en) | 1972-12-08 | 1972-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252672A JPS4980975A (en) | 1972-12-08 | 1972-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4980975A true JPS4980975A (en) | 1974-08-05 |
Family
ID=14838020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12252672A Pending JPS4980975A (en) | 1972-12-08 | 1972-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4980975A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6212945U (en) * | 1986-03-20 | 1987-01-26 | ||
| JP2006173346A (en) * | 2004-12-15 | 2006-06-29 | Matsushita Electric Ind Co Ltd | Manufacturing method of organic metal gas phase growing device and semiconductor |
| JP2012248876A (en) * | 2008-02-15 | 2012-12-13 | Veeco Instruments Inc | Apparatus and method for batch non-contact material characterization |
| US8958061B2 (en) | 2011-05-31 | 2015-02-17 | Veeco Instruments Inc. | Heated wafer carrier profiling |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3602192A (en) * | 1969-05-19 | 1971-08-31 | Ibm | Semiconductor wafer processing |
-
1972
- 1972-12-08 JP JP12252672A patent/JPS4980975A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3602192A (en) * | 1969-05-19 | 1971-08-31 | Ibm | Semiconductor wafer processing |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6212945U (en) * | 1986-03-20 | 1987-01-26 | ||
| JPS6236280Y2 (en) * | 1986-03-20 | 1987-09-16 | ||
| JP2006173346A (en) * | 2004-12-15 | 2006-06-29 | Matsushita Electric Ind Co Ltd | Manufacturing method of organic metal gas phase growing device and semiconductor |
| JP4524175B2 (en) * | 2004-12-15 | 2010-08-11 | パナソニック株式会社 | Metal organic vapor phase growth apparatus and semiconductor manufacturing method |
| JP2012248876A (en) * | 2008-02-15 | 2012-12-13 | Veeco Instruments Inc | Apparatus and method for batch non-contact material characterization |
| US8958061B2 (en) | 2011-05-31 | 2015-02-17 | Veeco Instruments Inc. | Heated wafer carrier profiling |
| US9653340B2 (en) | 2011-05-31 | 2017-05-16 | Veeco Instruments Inc. | Heated wafer carrier profiling |