JPS4976013A - - Google Patents
Info
- Publication number
- JPS4976013A JPS4976013A JP11827872A JP11827872A JPS4976013A JP S4976013 A JPS4976013 A JP S4976013A JP 11827872 A JP11827872 A JP 11827872A JP 11827872 A JP11827872 A JP 11827872A JP S4976013 A JPS4976013 A JP S4976013A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Stepping Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11827872A JPS4976013A (de) | 1972-11-25 | 1972-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11827872A JPS4976013A (de) | 1972-11-25 | 1972-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4976013A true JPS4976013A (de) | 1974-07-23 |
Family
ID=14732684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11827872A Pending JPS4976013A (de) | 1972-11-25 | 1972-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4976013A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190045315A (ko) | 2017-03-30 | 2019-05-02 | 제이엑스금속주식회사 | 스퍼터링 타겟 및 그 제조 방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3445741A (en) * | 1967-04-17 | 1969-05-20 | Gerber Scientific Instr Co | Fractional step rotary stepping motor and control system therefor |
-
1972
- 1972-11-25 JP JP11827872A patent/JPS4976013A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3445741A (en) * | 1967-04-17 | 1969-05-20 | Gerber Scientific Instr Co | Fractional step rotary stepping motor and control system therefor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190045315A (ko) | 2017-03-30 | 2019-05-02 | 제이엑스금속주식회사 | 스퍼터링 타겟 및 그 제조 방법 |