JPS4966060A - - Google Patents
Info
- Publication number
- JPS4966060A JPS4966060A JP47107999A JP10799972A JPS4966060A JP S4966060 A JPS4966060 A JP S4966060A JP 47107999 A JP47107999 A JP 47107999A JP 10799972 A JP10799972 A JP 10799972A JP S4966060 A JPS4966060 A JP S4966060A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47107999A JPS5138577B2 (en) | 1972-10-30 | 1972-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47107999A JPS5138577B2 (en) | 1972-10-30 | 1972-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4966060A true JPS4966060A (en) | 1974-06-26 |
| JPS5138577B2 JPS5138577B2 (en) | 1976-10-22 |
Family
ID=14473405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47107999A Expired JPS5138577B2 (en) | 1972-10-30 | 1972-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5138577B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5221764A (en) * | 1975-08-13 | 1977-02-18 | Hitachi Ltd | Scattering electron checking diaphragm |
| JPS52129272A (en) * | 1976-04-23 | 1977-10-29 | Nippon Telegr & Teleph Corp <Ntt> | Charge beam diameter control unit |
-
1972
- 1972-10-30 JP JP47107999A patent/JPS5138577B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5221764A (en) * | 1975-08-13 | 1977-02-18 | Hitachi Ltd | Scattering electron checking diaphragm |
| JPS52129272A (en) * | 1976-04-23 | 1977-10-29 | Nippon Telegr & Teleph Corp <Ntt> | Charge beam diameter control unit |
| JPS5812979B2 (en) * | 1976-04-23 | 1983-03-11 | 日本電信電話株式会社 | Charged beam diameter control device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5138577B2 (en) | 1976-10-22 |