JPS492553A - - Google Patents
Info
- Publication number
- JPS492553A JPS492553A JP47039830A JP3983072A JPS492553A JP S492553 A JPS492553 A JP S492553A JP 47039830 A JP47039830 A JP 47039830A JP 3983072 A JP3983072 A JP 3983072A JP S492553 A JPS492553 A JP S492553A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47039830A JPS492553A (ja) | 1972-04-19 | 1972-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47039830A JPS492553A (ja) | 1972-04-19 | 1972-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS492553A true JPS492553A (ja) | 1974-01-10 |
Family
ID=12563875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47039830A Pending JPS492553A (ja) | 1972-04-19 | 1972-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS492553A (ja) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57211341A (en) * | 1981-06-08 | 1982-12-25 | Derubaato Perii Jiyunia Jiyon | Method and apparatus for detecting weak vagina muscle |
| JPS58122729A (ja) * | 1982-01-06 | 1983-07-21 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 整列装置 |
| JPS61103149U (ja) * | 1984-12-11 | 1986-07-01 | ||
| JPS62248225A (ja) * | 1986-04-21 | 1987-10-29 | Canon Inc | 投影露光装置 |
| JPH04133414A (ja) * | 1990-09-26 | 1992-05-07 | Nec Yamaguchi Ltd | 縮小投影露光装置 |
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1972
- 1972-04-19 JP JP47039830A patent/JPS492553A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57211341A (en) * | 1981-06-08 | 1982-12-25 | Derubaato Perii Jiyunia Jiyon | Method and apparatus for detecting weak vagina muscle |
| JPH0411209B2 (ja) * | 1981-06-08 | 1992-02-27 | ||
| JPS58122729A (ja) * | 1982-01-06 | 1983-07-21 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 整列装置 |
| JPS61103149U (ja) * | 1984-12-11 | 1986-07-01 | ||
| JPS62248225A (ja) * | 1986-04-21 | 1987-10-29 | Canon Inc | 投影露光装置 |
| JPH0618166B2 (ja) * | 1986-04-21 | 1994-03-09 | キヤノン株式会社 | 投影露光装置 |
| JPH04133414A (ja) * | 1990-09-26 | 1992-05-07 | Nec Yamaguchi Ltd | 縮小投影露光装置 |