JPH1153854A - Head support mechanism and magnetic disc device having provided with the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a positioning actuator which can be driven by a low driving voltage, is not vibrated by the motion of a head support member and can be assembled without using a complex assembly process, improve the head positioning precision of a magnetic disc device and improve the recording density of the magnetic disc device. SOLUTION: A movable part including a slider 5 and a head attaching part 23 is supported by a hinge 24. A magnetic attractive force is generated between a yoke 22 and a soft magnetic film 27 on the attaching part 23 by a coil 18 and the movable part is turned by the magnetic attractive force to correct a positioning error caused by a VCM 10 and a magnetic head 6 is positioned at a target track position. A support part 25 allows the degree of freedom of the slider in a pitching direction and a rolling direction. With this constitution, a rotary disc type information memory device with a high operation velocity and a high recording density can be realized by low cost mass-production without using a high voltage power supply.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording apparatus for recording or reading information on an information recording medium by holding a head on an information recording medium such as a magnetic disk or a magneto-optical disk. The present invention relates to a magnetic disk drive having two driving units for coarse movement and fine movement in a radial head positioning mechanism.

[0002]

2. Description of the Related Art Conventionally, in a magnetic disk drive,
As described in Japanese Patent Application Laid-Open No. 2-250570, there is an actuator for finely adjusting the position of a magnetic head as a positioning mechanism having a two-stage actuator. In this actuator, a cantilever composed of a part of the slider and a laminated piezoelectric body mainly composed of oxides of lead, zirconium, and titanium (PZT) is formed on the slider, and the free end of the beam has a tip. A magnetic head is attached to the section.

When a voltage is applied to each piezoelectric body, each piezoelectric body expands and contracts, whereby the cantilever composed of the piezoelectric body and a part of the slider bends, and the position of the magnetic head is perpendicular to the cantilever. In any direction.
That is, this cantilever has the function of an actuator. This actuator is for positioning the magnetic head with high accuracy in the direction perpendicular to the direction of movement of the load arm, but by changing the direction of a part of the piezoelectric body and the slider that constitute the cantilever, The magnetic head can be relatively moved in a direction parallel to the movement direction of the load arm, and the position of the magnetic head can be finely adjusted so as to correct a positioning error by the voice coil motor.

[0004]

In the above-mentioned conventional example, the positioning accuracy of the magnetic head can be improved, but this actuator does not disclose the following three problems at all.

The first problem is that the driving voltage is high. In the case of a cantilever type actuator using a piezoelectric body,
To obtain a displacement of 1 μm, a high voltage of several tens of volts to 100 volts is required. However, in a conventional magnetic disk drive using a magnetic disk having an outer diameter of 3.5 inches or less, a voice coil motor for positioning is driven using a DC power supply having a maximum voltage of 12V. Therefore, in order to correct a positioning error of about 1 μm generated by a positioning mechanism using a voice coil motor, a high-voltage power supply must be separately prepared. This poses a serious problem in reducing the size and cost of the magnetic disk drive.

[0006] The second problem is that the magnetic head vibrates when positioning by the load arm. Since the magnetic head is attached to the free end of the cantilever type actuator, when the load arm moves with acceleration during the positioning operation by the voice coil motor, the load arm moves parallel to the movement direction of the load arm at the tip of the cantilever. Directional force acts, and the magnetic head vibrates by the force. Since it takes time for the vibration to subside, the time required for positioning the magnetic head at a predetermined position with high accuracy becomes relatively long. This poses a serious problem in increasing the information writing speed and information reading speed of the magnetic disk device.

Third, a plurality of piezoelectric bodies and electrodes must be fixed to a part of the slider having a length of 1 mm to several mm, so that processing is very difficult.

In view of the above problems, the present invention has a low driving voltage, does not vibrate the head due to the movement of the support member supporting the read / write head, and is substantially similar to the semiconductor device manufacturing process. It realizes a manufacturing method and its configuration that can realize an actuator for high-precision positioning that can be manufactured in the process, and furthermore, by using the actuator of the present invention, it is possible to realize high-density recording at low cost and to read / write at high speed in a small size. It is an object to provide a simple magnetic disk device.

[0009]

In order to achieve the above object, in a magnetic disk drive according to the present invention, the positioning device has the following configuration.

[0010] A mounting section for mounting the magnetic head by the positioning device, a first support section for supporting the mounting section, a first drive section for rotating the mounting section in the yaw direction, and the first support section. A joined second support portion;
A second drive unit for moving the second support unit including the first support unit, wherein the first support unit has a small resistance to rotational displacement of the magnetic head in the yaw direction, the pitch direction, and the roll direction. The configuration is such that the drag is increased with respect to other translational displacements.

[0011]

FIG. 1 is a perspective view of a magnetic disk drive according to a first embodiment of the present invention. FIG. 2 is FIG.
FIG. 3 is an enlarged perspective view of the suspension 3 of FIG. In FIG. 1, the base 9
A cover provided to form a box-shaped container provided above is omitted.

In FIG. 1, a magnetic disk device 1 has a magnetic head 6 (see FIG. 3) provided on a slider 5 on a track 7 which is an annular recording area provided on a disk 2 as an information recording medium. To write or read information. Since a large number of tracks 7 are provided concentrically, it is necessary to position the magnetic head 6 on each of them.

A positioning mechanism 8 for positioning the magnetic head moves from one track to another track (target track).
, A settling operation for accurately positioning the target track, and a following operation for sequentially correcting the magnetic head so as to trace the target track accurately.

Hereinafter, the positioning operation is referred to as a seek operation, a settling operation, and a following operation.

In the case of the embodiment shown in FIG. 1, when a 3.5-inch disk is used, the amount of movement of the magnetic head 6 in the seek operation is about 25 from the innermost circumference to the outermost circumference of the recording area of the disk 1.
mm. On the other hand, the accuracy required for the following operation is 1 μm or less.

The positioning mechanism 8 includes a carriage 14 comprising a load arm 12 having a pivot hole and a mount 13 constituting a second support, and a suspension 3 having a magnetic head constituting a first support at its tip. It is composed of

A carriage 14 to which the suspension 3 is joined by a mount 13 swings around a rotation axis supported by a slide bearing type pivot shaft 15, and the fine axis of the carriage 14 on the side of the fine movement actuator 4 on which the magnetic head is mounted. On the opposite side, an actuator for coarse movement that generates a driving force is provided (here, the fine movement actuator 4 refers to the portion of the carriage 14 ahead of the pivot shaft 15).

As an actuator for the coarse movement, a voice coil motor VCM10 comprising a permanent magnet and a coil is used. The voice coil motor 10 has a coil mounted on the carriage 14 side, and a permanent magnet is fixed to the base of the apparatus so as to sandwich the coil. The voice coil motor 10 generates a driving force by receiving an electromagnetic force from a magnetic field generated by the permanent magnet in accordance with the magnitude of the current applied to the carriage 14 side coil, and the carriage 14 is rotated about the rotation axis. It performs a rotary motion.

That is, the load arm 12 also makes a rotational movement about the pivot shaft 15 by this rotational movement.
As a result, an operation of moving and positioning the magnetic head 6 across the disk surface in the radial direction of the magnetic disk is performed.

The positioning mechanism 8 performs seek operation and coarse positioning by a VCM (voice coil motor) 10, and performs fine positioning by the fine movement actuator section 4 (see FIG. 2).

The fine movement actuator section 4 has a structure capable of swinging in the pitch direction and the rolling direction in order to correct the initial angle of the slider 5 at the time of assembly. This will be described later.

The suspension 3 has a fine actuator section 4 at its distal end, and a spring section 11 for generating a load for pressing the slider 5 against the disk 1 is provided on the root side. This spring portion 11 is mounted on a mount 13
To the load arm 12.

The carriage 14 is connected to the load arm 12 and the V
The coil of the CM 10 is provided on the opposite side of the pivot shaft 15.

The magnetic head 6 is mounted on a head slider 5 that floats at a fixed distance from the disk surface by the fluid force of air accompanying the rotation of the disk. Note that a contact type in which the head slider 5 slides directly on the disk may be used. In the case of the contact method, the linear recording density of the disk is further improved.

Next, the structure of the fine movement actuator section 4 will be described with reference to FIG.

The suspension 3 is made of a stainless steel plate (SUS) having a thickness of about 70 μm, is formed by etching, and further has a spring 11 and a flange 1.
6 is made by bending. The portion where the flange 16 stands (the load beam 17) has a very high bending rigidity and is hardly deformed. On the surface of the load beam 17, a thin-film coil 18, a yoke 22 made of a soft magnetic material, a coil driving wire 20 made of copper, and the like are patterned by plating. Although not shown in FIG. 2, wiring for recording signals is similarly patterned on this surface.

A concave notch 21 is provided at the center near the tip of the load beam 17, and a yoke 22 is also formed on the notch surface by sputtering or the like, and is connected to the yoke wiring 19.

A pair of yokes 22 are provided on both sides of the notch, and a magnetic attraction can be generated in the yoke 22 by energizing the respective coils 18.

At the tip of the load beam 17, a slider mounting portion 23, a hinge 24, a support portion 25, and a frame 26 are integrally formed. Further, a part of the slider mounting portion has a convex shape extending toward the concave notch 21, and a soft magnetic film 27 such as permalloy is formed on the surface facing the yoke 22 by sputtering or vacuum evaporation. Is formed.

The support 25 is thinned by half-etching from the side not seen in FIG. When viewed locally, the support portion 25 is a beam-shaped member extending from the load beam 17 toward the frame 26. The support portion 25 has a horizontally long cross section by reducing its thickness, and is easily deformed in the vertical direction, and is easily deformed in the horizontal direction. It is difficult to do. This support 25
The suspension 3 has a central axis in the longitudinal direction as a symmetric axis, one at each side, and both of them bend in the same direction in the vertical direction to give a degree of freedom of rotation in the pitch direction of the slider, and each of them bends in the opposite direction. Gives the freedom of rotation of the slider in the roll direction. Here, the vertical direction is a direction perpendicular to the surface on which the coil 18 of the load beam 17 is mounted in FIG. 2, and the horizontal direction is an in-plane direction.

As described above, by allowing the slider to freely rotate in the pitch direction and the roll direction, the initial angular error of the slider 5 during assembly can be corrected. Actually, this error is small, so that even if the support portion 25 is deformed, the position change of the soft magnetic material 27 facing the yoke 22 in the notch portion 21 also causes a problem in the operation of the fine movement actuator portion 4.
This is not a problem. As described above, in the apparatus according to the present embodiment, the slider 5 can be rotated in the pitch and roll directions, the initial inclination of the slider generated at the time of assembly can be corrected, and the slight inclination generated by the floating of the slider during operation can be allowed. .

At the same time, this structure has a shape that is not easily deformed in directions other than the pitch, roll and yaw directions. Therefore, the resonance frequency of the vibration mode in the translation direction increases, and unnecessary vibration does not occur.

Since the fine movement actuator section 4 is located at a position close to the magnetic head 6 at the tip, it is possible to drive the vibration mode in which the entire suspension 3 vibrates so as to cancel the influence of the vibration. The frequency band of vibration that can be followed when viewed as a mechanism can be improved.

Also, in FIG.
A head slider 5 on which a magnetic head is mounted is adhered to a surface side invisible. If the slider mounting portion 23 is also thinned by half etching from the surface to which the slider is bonded, the height of the entire suspension 3 to which the slider 5 is mounted can be reduced, which is advantageous in mounting. However, depending on the size of the slider 5, it is necessary to take measures such as making the thickness of the slider mounting portion 23 slightly larger than that of the support portion 25 in consideration of contact with the support portion 25.

The frame 26 is provided so as to connect the tips of the two support portions 25, from which the two hinges 24 extend while narrowing in the direction of the suspension base. The hinge 24 has a vertically long section, and does not allow rotation in the pitch direction or the roll direction. Further, the hinge 24 is connected to the slider mounting portion 23.

FIG. 3 is a plan view of the vicinity of the slider 5 of FIG. 2 as viewed from the disk surface side. FIG. 4 is a plan view showing another state of the same portion as FIG. The operation of the fine movement actuator unit 4 of the present embodiment will be described using these.

The center 28 connecting the longitudinal axes of the two hinges 24 becomes the center of rotation of the portion composed of the slider 5 and the slider mounting portion 23. When a magnetic attractive force is generated in the yoke 22 by energizing one of the coils 18, an attractive force is generated in the soft magnetic film 27, and the slider mounting portion 23 rotates around the rotation center 28.

At this time, if the magnetic head is located at a position distant from the center of rotation, the magnetic head 6 moves in a direction crossing the track, and a small displacement of the magnetic head 6 is obtained. Since the maximum displacement of the magnetic head 6 is actually about several μm, the rotation angle displacement of the slider mounting portion 23 is very small.

Strictly speaking, the direction of the magnetic head also rotates with respect to the track. However, in practice, the distance between the yaw rotation center of the slider and the magnetic head is sufficiently large compared to the size of the magnetic head itself. Also, since the rotation angle of the slider itself is very small, it does not matter.

According to the present invention, the center of mass of the entire movable member driven by the fine actuator 4 such as the slider 5 and the slider mounting portion 23 and the load arm 12
With the center 28 of rotation of the movable member that rotates. As a result, even when the load arm 12 moves with acceleration due to the positioning operation by the VCM 10 and an inertial force in the translation direction is applied to the center of mass of the movable member such as the slider mounting portion 23 at the tip of the load arm 12, the movable member is Since it has only a rotational degree of freedom about that point, it does not vibrate due to this inertial force.
Accordingly, it is possible to position the magnetic head at a predetermined position at a very high speed.

In order to provide a center of rotation for rotation in these two directions, a dimple may be provided so as to be in contact with one point on the upper surface of the slider mounting portion 23. The position of the dimple must match the center of rotation 28 determined by the position of the two hinges 24. In this case, the rotation center position in the yaw direction is more easily determined.

Further, since the electromagnetic attraction force can generate a large attractive force even at a low voltage, a DC power supply of about 5 V is required to correct a positioning error of about 1 μm generated by a positioning mechanism using a voice coil motor. Is enough. This indicates that the power supply voltage generally supplied to the magnetic disk drive can be used as it is.

Next, the positioning operation in the magnetic disk drive of this embodiment will be described.

When the load arm 12 is moved by the VCM 10 as the first actuator, the magnetic disk 1 is positioned on a predetermined track. However, since there is a limit in positioning accuracy by the VCM, there is an error between a target track position and an actual magnetic head position. The amount of error is detected to determine the amount of movement required for correction, and a current corresponding to the amount of correction is supplied to the coil 18 of the fine actuator unit 4 as the second actuator.

As a result, as described above, magnetic attraction acts between the yoke 22 and the soft magnetic film 27, and the entire movable portion including the slider 5 rotates around the rotation center 28, and the magnetic head 6 moves. The amount of movement of the magnetic head 6 at this time is
Since it is uniquely determined by the current value flowing through the coil 18, the number of turns of the coil 18, and the bending rigidity of the hinge 24, VC
The magnetic head 6 can be positioned at the target track position by detecting an error between the actual position determined by M10 and the target track position and supplying a current corresponding to the detected value to the coil 18. Becomes

In the magnetic disk drive described in this embodiment, the relative displacement of the movable member with respect to the load beam 17 is determined from the magnitude of the magnetic attraction force calculated from the value of the current flowing through the coil 18 and the spring constant of the movable member supporting spring. Can be estimated.

Next, a method of manufacturing the load arm used in the magnetic disk drive of this embodiment will be described. In the suspension 3 used in this embodiment, first, a thin stainless steel plate is etched to form a notch portion 21, a slider mounting portion 23, a support portion 25, a frame 26, and a hinge 24.
Is integrally formed. Further, the thickness of the support portion 25 and the slider mounting portion 23 is reduced by half etching from the side where the slider is mounted.

Next, a compound of iron and nickel or a thin film of nickel is directly formed on the slider mounting portion 23 at a position facing the notch portion 22 by sputtering or vacuum evaporation to form a soft magnetic film 27. Form.
Further, the portions of the yokes 19 and 22 and the coil 18 are also provided on the load arm with an insulating film, a first layer electrode serving as a coil, a first interlayer insulating film, a soft magnetic film serving as a yoke, a second interlayer insulating film, and a coil. Are sequentially laminated to form a monolithic structure. So far, multiple suspensions can be built on a single seat.

This is separated for each piece, and the flange 16 of the load beam 17 and the spring portion 11 for applying a pressing load to the disk of the slider are subjected to plastic deformation such as bending by a pressing method in order to give initial deformation. If necessary, a thick plate is spot-welded to the mount 31 to reinforce it.

Finally, the slider 5 is fixed to the back surface of the slider mounting portion with an adhesive, fixed to the load arm 12 of the magnetic disk drive of this embodiment, and assembled with the other VCMs 10 and the disk 1.

According to the above-described manufacturing process, the movable member of the fine movement actuator portion 4 having the most important function in the present embodiment can be formed integrally with the suspension 3, so that complicated processes such as assembly are not used at all. In addition, it can be manufactured in exactly the same way as the conventional processing of the load arm.

The yokes 19 and 22 and the coil 1
Reference numeral 8 denotes a yoke made of a soft magnetic material foil made of a compound of iron and nickel, and a coil formed by winding a large number of copper-coated wires around the yoke at a position facing the soft magnetic film 20 on the load beam 17. Alternatively, it may be fixed with an adhesive. In addition, the driving force generating member including the yoke, the coil, and the soft magnetic film can all be surface-mounted on the load beam 17, and thus has a structure excellent in mass productivity.

Although the suspension 3 is formed by etching a thin stainless steel plate, it may be formed by etching a silicon wafer. In addition, a mold is made of photoresist on a metal substrate, a copper plating film is grown in it, and finally the photoresist and metal substrate are dissolved by a solvent and an etchant, respectively. May be.

Alternatively, of the suspension 3, up to the load beam 17 is formed of stainless steel by the above-described method, and the support portion 25 and the slider mounting portion 23 of the fine movement actuator portion 4 are formed by etching a silicon wafer and joined. At this time, the three-dimensional structure such as the hinge 24 having a vertically long cross section can be formed by using the RIE (reactive ion etching) method or the like, so that the range of the shape design can be expanded. Further, a resin material such as polyimide can be used.

As is clear from the above description,
The magnetic disk drive of this embodiment can be manufactured by (1) almost the same method as the conventional method of manufacturing a magnetic disk drive.

(2) Since the magnetic head does not vibrate even during the movement of the load arm, high-speed positioning is possible.

(3) Since the magnetic head positioning mechanism that can be driven at a low voltage of about 5 V is provided, the positioning accuracy can be easily improved, and a higher recording density can be realized.

FIG. 5 is a perspective view showing details of the fine movement actuator section 4 of the second embodiment.

The fine movement actuator section 4 in the first embodiment pulls and drives the soft magnetic film 27 on the slider mounting section 23 by the magnetic attraction generated in the yoke 22. On the other hand, in this embodiment, in the magnetic field generated by the permanent magnet 29 provided on the load beam 17, the coil 30
The present embodiment is different from the first embodiment in that a voice coil type fine movement actuator that drives a movable part including the slider mounting part 23 using Lorentz force generated by applying a current to the actuator.
Other structures such as the support portion 25 and the hinge 24 are the same as those of the first embodiment.

The structure of the support portion 25 and the like can be manufactured by the same method as in the first embodiment. The coil 30 and the like may be formed by winding a copper thin wire and then affixed to the slider mounting portion 23. Alternatively, they may be formed by laminating thin films.

The operation method of the fine positioning actuator unit 4 for positioning the head of this embodiment is the same as that of the previous embodiment. That is, first, the magnetic head 6 is moved near a predetermined position by the VCM 10 that directly moves the load beam 17. Next, an error is detected between the final target track position and the actual position, and a current is supplied to the coil 30 so as to correct the difference. Thus, the movable member is driven by the above-described action, and control is performed so that the positioning error becomes zero, so that high positioning accuracy can be obtained.

Since the magnitude of the magnetic attraction used in the first embodiment is almost proportional to the square of the current flowing, a complicated calculation must be performed in order to obtain a current value required for positioning. . On the other hand, in the voice coil type actuator used in the second embodiment, the magnitude of the Lorentz force, which is the driving force, is proportional to the flowing current. The structure is more advantageous for speeding up.

Also in this embodiment, the relative displacement of the movable member with respect to the load beam 17 can be estimated from the magnitude of the electromagnetic force calculated from the value of the current flowing through the coil 18 and the spring constant of the movable member supporting spring.

In the second embodiment, the coil 30 is mounted on the slider mounting portion 23 and the permanent magnet 2 is mounted on the load beam 17.
The moving magnet 9 may be replaced with a permanent magnet 29 on the slider mounting portion 23 and a coil 30 on the load beam 17. In this case, the movable member including the slider mounting portion 23 is driven by the reaction force generated in the permanent magnet 29,
The effect is the same. Further, since there is no coil 30 on the movable member, there is an advantage that the number of wires passing through the support portion 25 and the hinge 24 can be reduced.

FIG. 6 is a diagram showing details of the fine movement actuator section in the third embodiment. The disk 1, the VCM 10 for coarse movement, and the like are omitted because they are the same as in the first embodiment. The suspension 3 is also the first up to the load beam 17
The structure is the same as that of the embodiment.

In the third embodiment, the slider mounting portion 23 is supported by two upwardly-curved support portions 32 extending from the tip of the load beam 17. A depression 33 is provided on the upper surface of the slider mounting portion 23,
A support frame 35 having a projection 34 opposed thereto is mounted on the upper surface side of the load beam 17. The position of the depression 33 is the center of rotation of the movable part in the yaw direction, and is provided so as to coincide with the center of mass of the movable part as in the first and second embodiments. Also depression 3
The effect is the same even if 3 and the projection 34 are attached to the opposite members, respectively.

A coil 30 is surface-mounted on the end of the slider mounting portion 23 close to the suspension base as in the second embodiment. In addition, a permanent magnet 29 fixed to the support frame faces directly above this. These constitute a voice coil type fine movement actuator. The operation method is the same as in the second embodiment.

FIG. 7 is an assembly view of the fine movement actuator according to the third embodiment.

The curved support portion 32 and the slider mounting portion 23
7 is formed integrally with the load beam 17 by etching. Thereafter, a portion indicated by oblique lines in FIG. 7 is half-etched from the side where the slider is mounted, and is further formed into a curved support portion 32 by pressing. Finally, the support frame 35 to which the permanent magnet 29 is attached is bonded to the load beam 17.

By the curved support portion 32, the rigidity and rigidity of the slider mounting portion 23 including the slider 5 in the yaw direction can be reduced, and the movable portion including the slider 5 is allowed to rotate, and the movement of the magnetic head position across the track is prevented. to enable.
Further, it is rotatable in the pitch direction and the roll direction around the point pressed by the projection 34. Thereby, the initial angle error of the slider can be corrected.

Although omitted in FIG. 6, as shown in FIG. 7, on the load beam 17 and the slider mounting portion 23, a wiring 44 for supplying a current to the coil 30 and a recording / reproducing signal for the magnetic head 6 are provided. Is patterned. The signal wiring 43 is connected to the pad 41 at the tip of the slider mounting portion 23. The wires 42 are pressed against the signal pads on the slider 5 by wire bonding to complete the wiring. The same method can be used for other embodiments.

In the third embodiment, a magnetic attraction type fine movement actuator as in the first embodiment is also possible.

FIG. 8 is a diagram showing details of the fine movement actuator section in the fourth embodiment. The disk 1, the VCM 10 for coarse movement, and the like are omitted because they are the same as in the first embodiment. FIG. 9 is an assembly view of the fine movement actuator section of the fourth embodiment.

The structure of the suspension 3 up to the load beam 17 is the same as that of the first embodiment. In the fourth embodiment, the slider mounting portion 23 is supported by four support portions 36 having a vertically long section at the tip of the load beam 17. A depression 33 is formed on the upper surface of the slider mounting portion 23.
And a stator 4 having a projection 34 opposed thereto.
Numeral 0 is cantilevered from the upper surface side of the load beam 17.

The support portion 36 is in the shape of a swastika arranged in a point-symmetrical shape with respect to the position of the depression 33 and has a vertically long cross section. Is low. Similarly, the slider has a rotational degree of freedom in the pitch direction or the roll direction.

Such a swastika-shaped support portion shape is sometimes used to lower the rigidity in the vertical translation direction, but in this embodiment, since the four support portions 36 have a vertically long cross section, the support portion 36 has a vertically long section. Has a high rigidity, and its center is pressed by the projection 34 provided on the stator 40. Therefore, the rigidity in the vertical translation direction is very high.

Also in this embodiment, the position of the depression 33 which is the center of rotation of the movable part in the yaw direction is provided so as to coincide with the center of mass of the movable part as in the first and second embodiments. I have.

A permanent magnet 37 is arranged in an arc shape around the depression 33 of the slider mounting portion 23, and a yoke 39 is provided on a surface of the stator 40 facing the yoke 39. It passes through the center of the formed planar coil 38. Coil 38
When a current flows through the slider mounting portion 23, an attractive force or a repulsive force is generated between the yoke 39 and the permanent magnet 37.
Is obtained around the depression 33. Accordingly, the slider 5 also rotates, and the magnetic head 6 at the end of the slider 5 is displaced in a direction crossing the track.

Although not shown in FIGS. 8 and 9, current wiring for supplying current to the coil 38 and wiring for recording signals are similarly patterned on this surface.

In a magnetic disk drive having a fine movement actuator for positioning the magnetic head, it is necessary to know the position of the movable member driven by the fine movement actuator with respect to the load beam 17. In the fourth embodiment, the relative displacement of the movable member is obtained by estimating the amount of rotational displacement from the electromagnetic force generated in the coil 38 and the value of the rotational rigidity of the support portion 36 in the yaw direction.

On the other hand, by providing another position detecting coil 41 (not shown) on the surface of the stator 40, the movement of the permanent magnet 37 on the movable member causes the position detecting coil 4 to move.
1 may be configured to detect from the electromagnetic induction voltage generated. By using such a method, the position of the movable member with respect to the load arm can be obtained with high accuracy and at high speed. Therefore, the magnetic disk device described in this embodiment is more advantageous for high speed and high density. .

A method of manufacturing the fine movement actuator according to the fourth embodiment will be described.

First, the method of manufacturing the suspension 3 is performed by etching stainless steel as in the first or second embodiment. The support portion 36 is preferably formed by etching such as RIE, which can form a vertically long cross section, based on a material such as silicon. If a monolithic structure is manufactured by a manufacturing technique such as etching as described above, the cost can be reduced by manufacturing a large amount.

The planar coil 38 is formed by forming an insulating film, a first layer electrode serving as a coil, a first interlayer insulating film, a soft magnetic film serving as a yoke, a second interlayer insulating film, and a coil on the surface of the stator 40. It is desirable to form a monolithic structure by sequentially laminating the second layer electrodes, but it is also possible to wind a thin copper wire. In the case where a conventional processing technique such as winding a copper wire to manufacture a coil is used, there is an advantage that large manufacturing equipment does not need to be used.

As a problem in each of the above embodiments, it is considered that the magnetic force generated by the coil or the permanent magnet used as the driving force generating member has an adverse effect on the magnetic head and causes noise in information writing and reading. Can be However, as shown in FIG. 5, the distance b between the driving force generating member and the magnetic head is much larger than the distance a between the magnetic head 6 and the magnetic disk 1, and a is about 50 nanometers. , B are on the order of one millimeter. Since the degree of the magnetic force decreases in inverse proportion to the square of the distance, the influence of the driving force generating member on writing and reading in the magnetic head is about 10 −19. Even if the difference between the magnetic force of the magnetic head and the magnetic force of the driving force generating member is considered, the above value indicates that the influence of the magnetic force generated by the driving force generating member on writing and reading is almost negligible. Therefore, it can be understood that noise caused by the driving force generating member is not a problem.

The embodiment according to the present invention has been described with reference to the drawings. In any of the embodiments, since a positioning mechanism having a high positioning accuracy and a high frequency band by a two-stage actuator for coarse / fine movement can be used, a high track density can be realized, thereby achieving at least 5 Gbit / inc.
High recording density equivalent to h2 is achieved.

In each of the above embodiments, a recording / reproducing element including a magnetoresistive element may be used as the magnetic head, or only an inductive head, or other magnetic heads, or further, an optical element may be used. Can also be used.

In the description of each of the above embodiments, the pitch direction refers to a rotation direction having a rotation axis in a direction parallel to the recording medium and perpendicular to the moving direction of the recording medium.
A rotation direction having a rotation axis in the moving direction of the recording medium. The yaw direction is a rotation direction having a rotation axis perpendicular to the recording medium surface.

In the drawings used in the above description, the aspect ratio and the dimensional ratio of each part are not always correct for the sake of explanation.

[0090]

According to the embodiments of the present invention, the head can be driven at a low voltage of 5 volts or less, and there is no vibration at the time of the positioning operation of the supporting member for supporting the head. And an actuator for positioning the head that can perform the operation. Further, by achieving a high track density by a two-stage positioning mechanism using this fine movement actuator, there is an effect that a high-density, large-capacity magnetic recording apparatus can be provided.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating a first embodiment of the present invention.

FIG. 2 is a detailed view of a fine movement actuator according to the first embodiment of the present invention.

FIG. 3 is a plan view near a slider according to the first embodiment of the present invention.

FIG. 4 is a plan view illustrating a different state of the same part as in FIG. 3;

FIG. 5 is a detailed view of a fine movement actuator according to a second embodiment of the present invention.

FIG. 6 is a detailed view of a fine movement actuator according to a third embodiment of the present invention.

FIG. 7 is an exploded view of a fine actuator unit according to a third embodiment of the present invention.

FIG. 8 is a detailed view of a fine movement actuator according to a fourth embodiment of the present invention.

FIG. 9 is an exploded view of a fine actuator unit according to a fourth embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Disk, 5 ... Slider, 4 ... Fine actuator part, 15 ... Pivot shaft, 18 ... Coil, 25 ... Support part,
31: Yoke, 41: Pad, 42: Bonding wire, 43: Signal wiring, 44: Driving wiring.

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Tetsuya Hamaguchi 502 Kandamachi, Tsuchiura-shi, Ibaraki Pref.

Claims (8)

[Claims] 1. A magnetic disk device comprising: a magnetic head for converting information on a disk for recording information and recording / reproducing the information; and a positioning device for positioning the magnetic head for recording / reproduction. A mounting portion for mounting the magnetic head, a first support portion for supporting the mounting portion,
A first drive unit for rotating the attachment unit in the yaw direction, a second support unit joined to the first support unit, and a second drive unit for moving the second support unit, The first support portion has a small resistance to rotational displacement in the yaw direction, the pitch direction, and the roll direction with respect to the magnetic head,
A magnetic disk drive having a support structure having a large resistance against other translational displacements. 2. A magnetic disk drive comprising: a magnetic head for converting information on a disk for recording information for recording / reproducing; and a positioning device for positioning the magnetic head so as to face a point on the disk. In the positioning device, a mounting portion for mounting the magnetic head, a first support portion for supporting the mounting portion,
A first drive unit for rotating the attachment unit in the yaw direction, a second support unit joined to the first support unit, and a second drive unit for moving the second support unit; The magnetic disk device according to claim 1, wherein the mounting portion is rotatable in a yaw direction, a roll direction, and a pitch direction. 3. The first support according to claim 1, wherein the first support has two laterally elongated beams extending in parallel from the second support and a tip thereof. And a beam-shaped deformable portion having two longitudinally long cross-sectional shapes connected to the frame, and a center line of the deformable portion is attached to an opposite end of the deformable portion. A magnetic disk drive wherein the mounting portions are connected so as to intersect at a substantially central portion of the portions. 4. The beam according to claim 1, wherein the first support portion has two laterally long cross sections extending in parallel from the second support portion and curved in a convex shape. A third support portion having the mounting portion provided at the tip of the beam, having a depression or projection at one point on the upper surface of the mounting portion, and having a projection or depression provided to fit into the depression or projection. Wherein the mounting portion is rotatable about the depression or the protrusion by the first driving portion. 5. The first supporting portion according to claim 1, wherein the first supporting portion has four longitudinally long beam-shaped members, and the beam-shaped members extend from four directions and extend halfway. It is bent at right angles in the in-plane direction, is connected to the mounting portion, is arranged in a point-symmetrical shape around the center of the mounting portion, has a depression or projection at the center of the mounting portion, and is provided so as to fit into the depression or projection. The magnetic disk drive according to claim 1, further comprising a third supporting portion having a projection or a depression, wherein the mounting portion is rotated about the depression or the projection by the first driving portion. 6. A magnetic disk drive according to claim 1, wherein said first drive section is made of a hard magnetic material provided on one of a mounting section and a second support section. And a driving means using an electromagnetic force comprising a coil provided on the other side. 7. A head support device comprising a support member for supporting a slider having a magnetic head, a suspension to which the support member is attached, and a carriage to which the suspension is joined, wherein the suspension supports the support member. A head provided with a mounting portion, and a driving portion for rotating the support member in the yaw direction, wherein the mounting portion is configured to reduce a resistance against a rotational displacement and increase a resistance against a translational displacement. Support device. 8. The suspension according to claim 7, wherein the mounting portion is formed of two beams having a predetermined angle at a predetermined interval on a tip side of the suspension, and connects the support member and the suspension. A head support mechanism.