JPH11300559A - Movable table device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a simple movable table device to manually achieve the movement regulation in two axial directions of a movable table and its turning motion by moving the movable table along two axial directions across each other, and turning it around the axis orthogonal to a plane formed by two axes. SOLUTION: This movable table device is provided with a two-axial guide mechanism 4 to turnably support a movable table 3, a first driving means 5 to drive a moving member on a table base 2 side of the two-axial guide mechanism 4 along a first axial direction, a second moving means 6 to drive a moving member on the movable table 3 side of the two-axial guide mechanism 4 to be driven by the driving means 5 along a second axial direction relative to the moving member on the table base 2 side, and a third means 7 to move a part other than the part to be supported by the two-axial guide mechanism 4 along the direction across the second axial direction relative to the moving member on the table base 2 side of the two-axial guide mechanism 4 to be driven by the driving means 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving table apparatus used for a precision printing machine, a precision processing machine, a precision manufacturing machine, and the like. The present invention relates to a moving table device which is attached so as to be movable along a direction and rotatable about an axis orthogonal to a plane formed by two axes.

[0002]

2. Description of the Related Art Conventionally, as a moving table device used in the above precision printing machine, precision processing machine, precision manufacturing machine, etc., a moving table is mounted on a table base.
A so-called XY table mounted so as to be movable along two axial directions intersecting each other is often used. This X
The Y table holds the work placed on the moving table,
In the precision printing machine and the like, the printing work placed on the moving table is moved only in the biaxial directions. In some cases, an operation of rotating around an axis orthogonal to a plane formed by the two axes is required.

[0003] Therefore, as a moving table device used in the above-mentioned precision printing machine or the like, not only can the moving table be movable along a two-axis direction intersecting with the table base, but also a two-axis machine is formed. A device called a so-called “XYθ table” which is mounted so as to be rotatable about an axis perpendicular to a plane to be used is used.

As a technique relating to this XYθ table, for example, Japanese Patent Application Laid-Open No. 8-99243 and Japanese Patent Application Laid-Open
JP 240246, JP-A 1-224289,
JP-A-4-210347, JP-A-8-21117
No. 3, JP-A No. 8-252733, and JP-A No. 9-252.
42405, JP-A-9-155666, JP-A-9-216138, and the like, or Japanese Utility Model Publication No. 2515316, JP-A-4-354637, JP-A-6-31563, and the like. Kaihei 7-
219636, JP-A-5-77125, JP-A-4-2435, JP-A-3-56895, JP-A-2-20231, JP-A-62-28
Many things, such as 2294, have already been proposed.

[0005] Among the techniques relating to the XYθ table, a typical one will be described.
The vertical / horizontal movement turning table mechanism according to Japanese Patent Publication No. 243 supports a movable table on a base via three XY linear guide mechanisms so as to be movable in all directions, and a movable block included in these XY linear guide mechanisms. The driving force is applied by an individual ball screw device to fix the upper rail of each XY linear guide mechanism to the lower surface of the movable table,
The upper and lower blocks of the XY linear guide mechanism are rotatably connected to each other by pins and bearings.

Further, Japanese Utility Model Publication No. 2515316
The moving table according to the above-mentioned No. 1 supports a movable table on a base via a thrust bearing so as to be movable in all directions, and attaches three driving devices to the base in directions orthogonal to each other, and outputs the driving devices. The shaft is connected to a movable table via a joint.

[0007]

However, the prior art described above has the following problems. That is, in the case of the vertical / horizontal movement turning table mechanism disclosed in Japanese Patent Application Laid-Open No. 8-99243, three X
The movable table is movably supported in all directions via a Y linear guide mechanism, and a driving force is applied to a moving block of the XY linear guide mechanism by an individual ball screw device. Therefore, not only does the configuration of the device become complicated, but also to move the movable table at a position other than the origin or to move it in parallel after rotating it by a predetermined angle, the moving blocks of the three XY linear guide mechanisms are required.
The table must be moved separately by different amounts which are related to each other, which makes the table movement control complicated and makes it easy to control the movement of the table in two axial directions and the movement of the swivel motion with a simple configuration. There was a problem that it was not possible.

On the other hand, the above-mentioned utility model publication No. 25153
Also in the case of the moving table according to No. 16, the movable table is supported on the base via a thrust bearing so as to be movable in all directions, and three driving devices are attached to the base in directions orthogonal to each other. Since the output shaft of the apparatus is configured to be connected to the movable table via a joint, the configuration of the apparatus is similarly complicated, and the movable table is rotated at a position other than the origin, or the predetermined angle is set. In order to move in parallel after rotating only three drives, the three drive units must be moved separately by different amounts which are related to each other, which complicates the control and has a simple configuration, and requires a simple structure. There is a problem that the movement control in the axial direction and the movement control of the turning motion cannot be easily performed.

Therefore, the present invention has been made to solve the above-mentioned problems of the prior art. It is an object of the present invention to move a moving table along two axes intersecting each other. And, of course, it is rotatable around an axis perpendicular to the plane formed by the two axes,
It is an object of the present invention to provide a simple moving table device that can easily perform a movement adjustment and a turning movement of a moving table in two axial directions with a simple configuration.

[0010]

According to a first aspect of the present invention, a moving table is provided so as to be movable along a biaxial direction intersecting each other with respect to a table base. In a moving table device attached rotatably around an axis orthogonal to a plane formed by two axes, a moving table with respect to the table base,
A two-axis guide mechanism for movably guiding along the two-axis directions crossing each other and rotatably supporting the moving table, and a moving member on the table base side of the two-axis guide mechanism,
A first driving means for driving along the first axial direction, and a moving member on the moving table side of the biaxial guide mechanism driven by the first driving means, with respect to the moving member on the table base side. A second driving means for driving the movable table along a second axial direction, and a portion other than rotatably supported by a biaxial guide mechanism of the moving table, driven by the first driving means. Third driving means for driving the moving member on the table base side of the biaxial guide mechanism in a direction intersecting with the second axial direction is provided.

The biaxial guide mechanism is, for example, one that guides the movable table movably along the X-axis direction and the Y-axis direction orthogonal to each other and that rotatably supports the movable table. However, the two axial directions guided by the two-axis guide mechanism are not limited to the orthogonal X-axis direction and the Y-axis direction, but may be two axial directions intersecting at a predetermined angle. As the biaxial guide mechanism, for example, a first track rail attached to the table base side, a moving block movably attached to the first track rail via a number of rolling elements, And a second track rail movably mounted in a direction orthogonal to the first track rail via a number of rolling elements. The shape is not limited to this.

That is, as the biaxial guide mechanism, for example, a first track rail having a wide width and having a concave portion having a U-shaped cross section opened upwardly attached to the table base side, and a first track rail of the first track rail. A first moving block movably mounted in the recess through a number of rolling elements, a second track rail mounted on the upper portion of the moving block so as to be orthogonal to the first track rail; A second track block that guides the second track rail movably in a direction orthogonal to the first track rail via a number of rolling elements can be used. In this case, the biaxial guide mechanism is mounted so as to rotatably support the moving table via a turning mechanism provided on the moving table side.

The biaxial guide mechanism includes a first track rail having a wide width and an upwardly open U-shaped concave portion attached to the table base, and a large number of concave portions in the first track rail. A first moving block movably attached via the rolling elements of the first and second moving blocks;
A second track rail having a wide U-shaped recess opening upward, and moving in a direction orthogonal to the first track rail via a number of rolling elements in the recess of the second track rail. A second movable block that is freely guided may be used.

The two-axis guide mechanism configured as described above is driven, for example, by a turning mechanism provided on the moving table side.
The moving table is mounted so as to rotatably support the moving table, but is not limited to this. A moving block movably mounted on the first track rail via a number of rolling elements, and an upper portion of the moving block The pivot mechanism may be arranged between the first track rail and the second track rail so as to be movable via a number of rolling elements and to be orthogonal to the first track rail.

[0015] As the biaxial guide mechanism, a first track rail having a wide width and an upwardly open concave portion having a U-shaped cross section attached to the table base side, and a first track rail inside the first concave portion of the first track rail. A first moving block movably mounted on the moving block via a number of rolling elements, a second track rail mounted on an upper portion of the moving block so as to be orthogonal to the first track rail, In the case of using a second moving block that guides the track rail movably through a number of rolling elements in a direction orthogonal to the first track rail, when the track rail is in a recessed portion of the first track rail, Between the moving block on the side that is movably mounted via a number of rolling elements and the moving block on the side where the second track rail is movably mounted via a number of rolling elements, ie, the first movement Block Of the intermediate, it may be configured to place the turning mechanism.

Further, as the above-mentioned biaxial guide mechanism, a first track rail having a wide width and an upwardly open concave portion having a U-shaped cross section attached to the table base side, and a large number of concave portions of the first track rail are provided. A moving block movably mounted via a rolling element, and a second wide block having a concave portion having a U-shaped cross section opened upward and mounted on the upper portion of the moving block so as to be orthogonal to the first track rail. A track rail and a second moving block which is guided movably in a direction orthogonal to the first track rail through a number of rolling elements in a concave portion of the second track rail are used. In this case, a turning mechanism may be arranged between the moving block and the second track rail.

As described above, the turning mechanism may be provided on the moving table side or may be provided in the middle of the biaxial guide mechanism. However, when the turning mechanism is provided on the moving table side, the force for driving the moving table is directly transmitted through the turning mechanism provided on the moving table side, so that the force is applied to the center of gravity of the moving table. The driving force can be transmitted in a substantially parallel direction, and when the moving table is driven, an unbalanced moment load does not act on the rolling elements of the turning mechanism and the movement of the moving table can be performed more smoothly. It can be carried out.

It is sufficient that the biaxial guide mechanism bears a load in the lateral direction, and other linear bearings utilizing rolling guides, as well as sliding bearings, may be used.

The biaxial guide mechanism rotatably supports the moving table. For example, a second track rail, which is a moving member on the moving table side, moves via a rotatable turning mechanism. Attached to the table. However, the biaxial guide mechanism only needs to rotatably support the moving table, and the turning mechanism that rotatably supports the moving table does not necessarily need to be provided integrally with the biaxial guide mechanism. You may comprise so that it may be assembled as a member.

Further, the drive means is constituted by, for example, a screw feed (ball screw or the like) mechanism, and is provided with a nut portion to which a feed screw shaft is screwed with a biaxial guide mechanism. As described above, it is preferable that the driving means be constituted by the screw feed mechanism, since the positioning in the screw axis direction is performed by the screw engaging portion between the screw shaft and the nut portion while the screw shaft is stopped. As the driving means, for example, a driving mechanism including a screw feed mechanism is used, and the amount of movement of the screw feed mechanism is detected by a vernier provided on a manual handle, a linear encoder mounted on a moving member, or the like. In addition, although the above-mentioned drive means is attached to the table base side which is a fixed side, it is needless to say that the drive means may be attached to the movable table side which is a movable side.

The moving table is guided by a biaxial guide mechanism so as to be movable in two axial directions crossing each other, and a moving member on the table base side of the biaxial guide mechanism is
By being manually driven along the first axial direction by the first driving means, it is possible to move the lens linearly and manually along the first axial direction.

In the moving table, the moving member on the moving table side of the two-axis guide mechanism driven by the first driving means is manually moved by the second driving means to the moving member on the table base side. By driving along the second axial direction, it is possible to move the shutter linearly and manually along the second axial direction.

Further, the moving table has a portion other than rotatably supported by the biaxial guide mechanism of the moving table, and a moving member on the table base side of the biaxial guide mechanism driven by the first driving means. On the other hand, by manually driving the movable table along a direction intersecting with the second axial direction by the third driving means, a rotational moment is applied to the moving table, and the rotational moment is perpendicular to the plane formed by the two axes. It is possible to perform a rotational movement manually or the like about an axis to be rotated.

Further, the second driving means for driving the moving table in the second axial direction comprises a moving member on the moving table side of the biaxial guide mechanism driven by the first driving means, and a moving member on the table base side. Since the moving member is configured to be driven along the second axial direction with respect to the moving member, the moving member on the table base side of the biaxial guide mechanism driven by the first driving means is moved in the first driving direction. After being driven along the first axial direction by the means, the moving member on the moving table side of the biaxial guide mechanism driven by the first driving means is moved in the second direction with respect to the moving member on the table base side. By driving along the second axial direction by the driving means,
The driving of the moving table in the first axial direction and the driving of the moving table in the second axial direction can be performed independently of each other, and the driving of the moving table in the two axial directions can be performed by a simple operation. Becomes

Further, in order to rotate the moving table, a portion other than rotatably supported by the biaxial guide mechanism of the moving table is replaced with a table of the biaxial guide mechanism driven by the first driving means. The moving member on the substrate side may be manually driven by a third driving means in a direction intersecting with the second axial direction by hand or the like. The moving table can be completely separated and the rotating operation of the moving table can be performed by a simple operation.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the illustrated embodiment.

Embodiment 1 FIGS. 1 and 2 are block diagrams showing a moving table apparatus according to Embodiment 1 of the present invention.

As shown in FIGS. 1 and 2, the moving table apparatus 1 according to the first embodiment is roughly divided into a table base 2, a moving table 3, and the moving table 3.
One biaxial guide mechanism 4 for guiding the movable table 3 rotatably along two axial directions crossing each other and along one axial direction, and the two axial guide mechanism 4 The first driving means 5 for driving the moving member on the side of the table base 3 along the Y-axis direction, and the two-axis guide mechanism 4 driven by the first driving means 5 on the side of the moving table 3 The second driving means 6 for driving the moving member along the X-axis direction with respect to the moving member on the table base 2 side, and the rotatable support by the two-axis guide mechanism 4 of the moving table 3 A third driving means 7 for driving the part of the biaxial guide mechanism 4 driven by the first driving means 5 on the table base 3 side along the Y-axis direction; It is constituted so that it may be provided.

As shown in FIGS. 1 and 2, the table base 2 is formed in the shape of a flat square plate with chamfered corners, and the moving table 3 is a circle having a diameter slightly smaller than that of the table base 2. It is formed in a plate shape. On the table base 2, one biaxial guide mechanism 4 is arranged at the center. For example, as shown in FIG. 1, the position P of the rotating shaft on which the biaxial guide mechanism 4 rotatably supports the moving table 3 is set as an initial state before starting the driving. The two-axis guide mechanism 4 rotatably supports the moving table 3 in the positional relationship shown in FIG.

As shown in FIG. 1, the biaxial guide mechanism 4 has a track rail 8 extending in the Y-axis direction at the center of the table base 2 along the vertical direction (Y-axis direction) of the table base 2. It is installed short. The above two-axis guide mechanism 4
Is a short track rail 8 in the Y-axis direction mounted on the table base 2 as described above, and a moving block 9 movably mounted on the track rail 8 in the Y-axis direction via a large number of balls as rolling elements. And the track rail 8 is connected to the moving block 9 via a number of balls as rolling elements.
And a short X-axis track rail 10 movably mounted in a direction perpendicular to the X-axis direction.

Further, the structure of the biaxial guide mechanism 4 will be described in detail. As shown in FIG. 3, the biaxial guide mechanism 4 includes a track rail 8 in the Y-axis direction, a moving block 9 and an X-axis guide.
The moving table 3 is composed of an axial track rail 10.
Are movably guided in two axes (XY axes) orthogonal to each other, and a linear guide mechanism that rotatably supports the moving table 3. As shown in FIG. 3 (a), guide portions 16 projecting in trapezoidal shapes are formed on both sides of the track rail 8 in the Y-axis direction. A ball rolling groove 18 on which the ball 17 as a number of rolling elements rolls is located at the corner,
There are a total of four articles, two articles each. As shown in FIG. 3A, a lower surface of the moving block 9 is provided with a first concave portion 19 having a U-shaped cross section into which the track rail 8 in the Y-axis direction is inserted. As shown in FIG. 3 (b), a second concave portion 20 having a U-shaped cross section into which the track rail 10 in the X-axis direction is inserted is provided on the upper surface of the vertical direction 9 so as to be orthogonal to the first concave portion 19. I have. Further, a moving block 8 facing the left and right sides of the track rail 8 in the Y-axis direction.
As shown in FIG. 4B, the left and right ball rolling grooves 1 of the track rail 8 in the Y-axis direction are formed on the left and right inner side surfaces of the first concave portion 19.
8, four ball rolling grooves 21 are provided.

As shown in FIGS. 4A and 4B, four ball escape passages 22 corresponding to the four ball rolling grooves 21 of the first concave portion 19 are formed in the lower portion of the moving block 9. Are provided in parallel at the bottom of the moving block 9 and the first
As shown in FIG. 4C, four direction change paths 2 connecting both ends of the ball rolling groove 21 of the moving block 9 and both ends of the ball escape passage 22 are provided at both ends along the longitudinal direction of the concave portion 19.
3 is provided.

The track rail 8 in the Y-axis direction and the first recess 1
As shown in FIG. 4B, the contact directions of the four rows of balls 17 interposed between the ninth and ninth lines 9 are symmetrical at a predetermined angle α with respect to a horizontal line H passing through the center of the upper and lower two ball rows. It is inclined. In this embodiment, the contact angle line L connecting the contact point between the center of the ball 17 and the ball rolling groove 21 is defined by the first recess 19.
And has an open contact structure that opens toward the outside opposite to the first concave portion 19, and the ball 17 is appropriately preloaded. Of course, the first recess 19
May be an inward-opening contact structure that opens inward.

On the other hand, as shown in FIGS. 4 (a) and 4 (d), ball rolling grooves 26 in which a total of four balls 25 are rolled on each of the left and right side surfaces of the track rail 10 in the X-axis direction. Are also provided on the left and right inner side surfaces of the second concave portion 20 of the moving block 9 facing the left and right side surfaces of the track rail 10 in the X-axis direction.
Four ball rolling grooves 27 corresponding to the left and right ball rolling grooves 26 of the track rail 10 in the X-axis direction are provided.

The upper end of the moving block 9 has a second
Four ball escape passages 28 corresponding to the four ball rolling grooves 27 of the concave portion 20 are provided in parallel, and both ends of the second concave portion 20 of the moving block 9 are provided as shown in FIG. ,
A side cover 30 having four direction change paths 29 connecting both ends of each ball rolling groove 27 of the moving block 9 and both ends of the ball escape passage 28 is provided.

Further, the track rail 10 in the X-axis direction and the second
As shown in FIG. 4D, the contact directions of the four rows of balls 25 interposed between the concave portions 20 are symmetrical with respect to a horizontal line H passing through the middle of the upper and lower two rows of ball rolling grooves 26. Predetermined angle α
It is inclined. In this embodiment, the contact angle line L connecting the contact point between the center of the ball 25 and the ball rolling groove 26 closes toward the inside of the second recess 20 and opens outward toward the outside opposite to the second recess 20. It has an open contact structure. Of course, an inward-opening contact structure that opens toward the inside of the second recess 20 may be used. Note that a preload is appropriately applied to the ball 25 as well.

Next, the structure of the turning mechanism 31 for rotatably supporting the moving table 3 with respect to the track rail 10 in the X-axis direction of the biaxial guide mechanism 4 will be described in detail.

As shown in FIGS. 3 and 5, the turning mechanism 31 includes an inner race 32 and an outer race 33 which are formed in an annular shape.
The reference numerals 3 are concentrically fitted with each other. In this embodiment, an inner race 32 is fixed to the track rail 10 in the X-axis direction, and the movable table 3
The outer race is fixed to the outer race 33.
Many rollers 34 are interposed between the races 32 and 33 as rolling elements.

As shown in FIG. 3, the inner race 32 and the linear track rail 10 in the X-axis direction are formed as shown in FIG.
They are connected to each other via a joint member 70. The joint member 70 includes a first joint plate 71 to which the track rail 10 in the X-axis direction is fixed, and a disc-shaped second joint plate 72 to which the inner race 32 is fixed. Joint plate 71
And the second joint plate 72 are fixed to each other by bolts 73. Further, a step projection 74 is provided on the outer periphery of the second joint plate 72, and the inner race 32 is fitted to the step projection 74 from above in a fitted state. The holding member 7 is fixed to the upper end surface of the step projection 74 by a bolt 73.
5 is fixedly secured between the holding member 75 and the step 74a at the root position of the step projection 74.
Are fixed in a state of being clamped from above and below.

On the other hand, the movable table 3 to which the outer race 33 is fixed is provided with a circular opening 76 through which the pressing member 75 of the inner race 32 can be inserted from above. A circular stepped recess 77 is provided on the inner peripheral lower edge of the outer race 3.
3 is mounted in the fitted state. Further, the step recess 7
A pressing member 78 for holding down the outer race 33 is fastened and fixed to the opening edge of the bolt 7 by a bolt 73, and the outer race 33 is sandwiched between the holding member 78 and the stepped portion 77 a of the stepped recess 77 from above and below. Fixed in state.

Further, on the outer peripheral surface of the inner race 32, as shown in FIG. 5B, two upper and lower roller rolling surfaces 35 which open outward in the radial direction at an angle of about 90 degrees,
A first raceway groove 37 is formed. on the other hand,
On the inner peripheral surface of the outer race ring 33, a second raceway groove formed of two upper and lower roller rolling surfaces 38, 39 which face the first raceway groove 37 and open inward in the radial direction at an angle of about 90 degrees. 40 are formed.

As shown in FIG. 5A, a part of the roller 34 interposed between the first raceway groove 37 and the second raceway groove 40 is an upper roller rolling surface of the first raceway groove 37. 35, and the lower roller rolling surface 39 of the second raceway groove 40 is rotatably interposed. The remaining rollers 34 are connected to the lower roller rolling surface 36 of the first raceway groove 37 and the second raceway. The groove 40 is rotatably interposed between the groove 40 and the upper roller rolling surface 38.

As described above, the roller 34 rotatably interposed between the upper roller rolling surface 35 of the first track groove 37 and the lower roller rolling surface 39 of the second track groove 40, The lower roller rolling surface 37 and the upper roller rolling surface 3 of the second raceway groove 40
The rollers 34 rotatably interposed between the eight are so-called “cross roller type” arranged alternately at right angles.
It has become. As shown in FIG. 5A, a spacer retainer 41 is interposed between the rollers 34.

In the arrangement of the rollers 34, the direction of the rotation axis may be changed every third and third rotation, instead of alternately making the rotation axes orthogonal, and various arrangements are possible. Further, a preload is applied to a number of rollers 34 interposed between the inner race 32 and the outer race 33. In this embodiment, the application of the preload to the roller 34 is performed by, as shown in FIG.
When the upper and lower roller rolling surfaces 35 and 36 freely contact the rollers 34, a gap is formed between the upper and lower portions 32a and 32b of the inner race 32. By tightening up and down until there is no gap between the upper and lower portions 32a and 32b, each roller 34 is compressed by a predetermined amount to apply a preload.

In addition, as a configuration for applying a preload to the roller 34, a slit (not shown) is provided on the outer race 33 at only one location along the circumferential direction, and the outer race 33 is formed in the step recess 42 of the moving table 3. When mounted, the slit of the outer race 33 may be narrowed and reduced in diameter, and the roller 34 may be pressed from the left and right to apply a preload.

As described above, by forming the turning mechanism 31 with the rollers 34 interposed between the inner race 32 and the outer race 33, the structure of the inner and outer races 32, 33 enables the turning mechanism 31 to move in the direction of the turning axis. Load to compress, load to pull in the direction of the pivot axis,
A support structure having high rigidity can be obtained against loads from all directions, such as a load acting in a direction perpendicular to the pivot axis and a moment load in a direction in which the pivot axis is inclined. Therefore, a lightweight and highly rigid support structure can be obtained.

Further, as shown in FIG. 1, the moving table device 1 according to the embodiment forms a moving block 9 as a moving member of the biaxial guide mechanism 4 on the table base 3 side along the Y-axis direction. A first driving means 5 for driving, and a track rail 10 in the X-axis direction, which is a moving member on the moving table 3 side of the biaxial guide mechanism 4 driven by the first driving means 5, are attached to the table base 2. The second driving means 6 for driving the moving member on the side along the X-axis direction, and the part other than rotatably supported by the two-axis guide mechanism 4 of the moving table 3 are the first driving means. And a third driving unit 7 for driving the moving member on the table base 3 side of the biaxial guide mechanism 4 driven by the driving unit 5 along the Y-axis direction. I have.

As shown in FIGS. 1 and 2, the first driving means 5 is constituted by a feed screw mechanism 46 for converting the rotational movement of the manual handle 11 into a linear movement. The feed screw mechanism 46 includes a nut 48 fixed to a first frame 9 a attached to the moving block 9 of the biaxial guide mechanism 4 so as to surround the track rail 8 in the Y-axis direction. And a screw shaft 49 to be provided. At the base end of the screw shaft 49, the screw shaft 49 is inserted through a rod-shaped portion 49a on which no screw is threaded.
A manual handle 11 for manually rotating the is mounted. The distal end of the screw shaft 49 is in contact with the end face of the track rail 8 in the Y-axis direction of the biaxial guide mechanism 4, and the other end face of the track rail 8 in the Y-axis direction and the first frame. A spring 50 is interposed between the spring 50 and the spring 9a.

As shown in FIGS. 1 and 2, the second drive means 6 is provided with a feed screw mechanism 51 for converting the rotational movement of the manual handle 12 into a linear movement as in the case of the first drive means 5. It is constituted by. The feed screw mechanism 51
Is a nut 52 fixed to a second frame 9b attached to the moving block 9 of the biaxial guide mechanism 4 so as to surround the track rail 10 in the X-axis direction, and a screw shaft 53 screwed to the nut 52. And a configuration including A manual handle 12 for manually rotating the screw shaft 53 is attached to the base end of the screw shaft 53 via a rod-shaped portion 53a on which no screw is threaded. The tip of the screw shaft 53 is in contact with the end face of the track rail 10 in the X-axis direction of the biaxial guide mechanism 4 and
A spring 54 is interposed between the other end surface of the track rail 10 in the X-axis direction and the second frame 9b.

Further, as shown in FIGS. 1 and 2, the third drive means 7 is constituted by a feed screw mechanism 55 for converting the rotational movement of the manual handle 13 into a linear movement. The feed screw mechanism 55 includes a nut 57 connected to the moving block 9 of the biaxial guide mechanism 4 via a bracket 56, and a screw shaft 58 screwed to the nut 57. At the base end of the screw shaft 58,
A manual handle 1 for manually rotating the screw shaft 58 via a rod-shaped portion 58a on which the screw is not threaded.
3 is attached. The distal end of the screw shaft 58 is in contact with a pushing plate 59 projecting from the lower surface of the moving table 3 and is projected from the pushing plate 59 and the second frame 9b. A spring 62 to which a ball 61 is fixed at a tip end is interposed between the plate 60 and the plate 60. The ball 61 is fixed to the tip of the spring 62 when the moving table 3 is moved along the X-axis direction by the second driving means 6, as described later.
When the moving table 3 is rotated by the third driving means 7, the pushing plate 59 moves or rotates together with the moving table 3, and the contact position between the pushing plate 59 and the tip of the spring 62 is shifted. This is because even if the ball 59 slides, the ball 59 absorbs this displacement.

In the above configuration, the moving table apparatus according to the first embodiment can move the moving table along two axes intersecting each other as follows.
In addition to being rotatable about an axis perpendicular to the plane formed by the two axes, it is easy to manually adjust the movement of the moving table in two directions and to make a pivotal movement with a simple configuration. It is possible to do.

That is, in the moving table apparatus 1 according to the first embodiment, in the initial state before the moving table 3 is moved, for example, the moving table 3 is stopped at the position shown in FIG. Now, for example, without changing the attitude of the moving table 3 from this state,
Is moved in parallel along the Y-axis direction, the manual handle 11 of the first driving means 5 for driving the moving block 9 of the biaxial guide mechanism 4 along the Y-axis direction is moved in a predetermined direction. By rotating, the short screw shaft 49 connected to the manual handle 11 is rotated. Then, the nut 48 screwed to the screw shaft 49 is fed and moved in the Y-axis direction with the rotation of the screw shaft 49, so that the first nut 48 screwed to the screw shaft 49 is The moving block 9 of the biaxial guide mechanism 4 fixed via the frame 9a also
Move along the Y-axis direction. As a result, the moving table 3 connected to the moving block 9 of the biaxial guide mechanism 4
Along with the moving block 9 of the biaxial guide mechanism 4, it moves by a predetermined amount Δy along the Y-axis direction.

Next, when the moving table 3 is moved in parallel along the X-axis direction, the second track for driving the track rail 10 of the biaxial guide mechanism 4 in the X-axis direction along the X-axis direction is used. By rotating the manual handle 12 of the drive means 6 in a predetermined direction, the screw shaft 53 connected to the manual handle 12 is rotated in the same direction. Then, since the nut 52 screwed to the screw shaft 53 is fed and moved in the X-axis direction with the rotation of the screw shaft 53, the second nut is screwed to the nut 52 screwed to the screw shaft 53. The moving block 9 of the biaxial guide mechanism 4 fixed via the frame 9b also
It moves along the X-axis direction. As a result, the moving table 3 connected to the track rail 10 in the X-axis direction of the two-axis guide mechanism 4 via the turning mechanism 31 allows the two-axis guide mechanism 4
Along with the moving block 9 along the X-axis direction, a predetermined amount Δx
Just to move.

Further, when the moving table 3 is turned around a turning axis O orthogonal to a plane formed by the XY axes, the pushing plate 59 of the moving table 3 is moved along the Y-axis direction. Handle 1 of the third drive means 7 to be pushed and pushed
The screw shaft 58 connected to the manual handle 13 is rotated in a predetermined direction by rotating the screw 3 in a predetermined direction. At this time, when rotating the moving table 3 in the counterclockwise direction, the push plate 59 of the moving table 3 is moved downward in the figure as shown in FIG. On the other hand, when rotating the moving table 3 in the clockwise direction, the push plate 59 of the moving table 3 is moved upward in the figure in FIG.

Then, the screw shaft 5 of the third driving means 7 is moved.
As shown in FIG. 1, the nut 57 screwed with the nut 8 is fixed by the first and second driving means 5 and 6 via the bracket 56, and does not move along the X-axis and Y-axis directions. Since it is connected to the moving block 9 of the shaft guide mechanism 4, the screw shaft 58 screwed to the nut 57 moves along the Y-axis direction with the rotation of the screw shaft 58. Therefore, the pushing plate 59 projecting from the lower surface of the moving table 3 is pushed by the screw shaft 59, and the moving table 3 is moved.
Is rotated by a predetermined angle θ as shown in FIG. Note that the moving table 3 has a rotation axis O
In addition to the rotation about the center, it is possible to rotate at a desired turning radius about an arbitrary turning axis. That is, in order to rotate the moving table 3 around a desired turning axis at a desired turning radius, the moving block 9 of the two-axis guide mechanism 4 is moved by the first driving means 5 along the Y-axis direction by a predetermined amount Δy. And the second driving means 6 moves the track rail 10 in the X-axis direction of the biaxial guide mechanism 4 in the X-axis direction.
What is necessary is just to move by a predetermined amount Δx along the axial direction, and to further push the pushing plate 59 of the moving table 3 by the third drive means 7 along the Y-axis direction. By doing this,
The moving table 3 includes first, second, and third driving units 5,
With the turning radius determined according to the driving amounts Δx, Δy, θ by 6, 7, it is possible to rotate around a desired turning axis.

When the moving table 3 is moved in any direction on the XY plane by the moving table device 1 and the moving table 3 is rotated in the θ direction about the rotation axis O, The operation of moving the table 3 in the X-axis direction, the operation of moving the moving table 3 in the Y-axis direction, and the operation of rotating the moving table 3 in the θ direction may be arbitrarily combined. In the moving table apparatus 1 according to this embodiment, the driving means for moving the moving table apparatus 1 in the Y-axis direction is the first driving means 5, and the moving table apparatus 1 is moved in the X-axis direction. The driving means is the second driving means 6, and the moving table device 1
Is a third driving means 7 for rotating the moving table 3 in the Y-axis direction since the driving means are completely separated from each other. The operation, the operation of moving in the X-axis direction, and the operation of rotating by the angle θ can be performed separately or simultaneously, and adjustment for moving the moving table 3 to a predetermined position at a predetermined angle can be performed. It can be performed more easily and in a shorter time.

That is, the moving table 3 is moved in an arbitrary direction on the XY plane by the moving table device 1, and
When rotating the moving table 3 in the θ direction about the rotation axis O, the first driving means 5 is manually driven to move the moving table 3 by a desired amount along the Y-axis direction. By moving the moving table 3 by a desired amount along the X-axis direction by manually driving the second driving means 6 while moving, and further manually driving the third driving means 7, The operation of rotating the moving table 3 by a desired angle θ about the rotation axis O can be simultaneously executed.
The movement adjustment in the Y-axis direction and the θ direction can be performed independently of each other, and the movement adjustment of the moving table 3 can be performed more easily and in a shorter time. In addition, the moving table 3
It is needless to say that the operation of moving in the Y-axis direction, the operation of moving in the X-axis direction, and the operation of rotating by an angle θ may be performed separately.

As described above, in the moving table apparatus 1 according to the first embodiment, the operation of rotating the moving table 3 at a position other than the origin, or moving the moving table 3 by a predetermined angle and then moving it in parallel is a simple operation. It can be done by control. Further, in the moving table device 1, by driving only the first driving means 5, the moving table 3
It is possible to easily move the moving table 3 linearly in the X-axis direction by driving the second drive means 6 while easily moving the moving table 3 linearly in the axial direction. I have. In addition, since the first, second, and third driving units 5, 6, and 7 are configured to be driven manually, the configuration can be simplified.

In order to adjust the amount of rotation of the manual handles 11, 12, 13 constituting the first, second, and third drive means 5, 6, 7, a scale for positioning is provided.
Verniers may be provided on the manual handles 11, 12, and 13, and the first, second, and third driving means 5, 6, 7,
The linear encoder may be attached to a member driven by the linear encoder.

In the first embodiment, the first, second, and third driving means 5, 6, 7 are connected to the manual handles 11, 1,
It was configured to be driven by 2, 13 but the manual handle 1
By changing the drive systems 1, 12, and 13 to a drive system including a motor, automation can be easily performed as needed. In this case, regarding the feed in the θ direction, it is necessary to substitute a combination of a uniaxial guide mechanism and a rotary bearing instead of the connection by the illustrated spring and ball.

In the first embodiment, the driving means is composed of a feed screw mounted on the table base and a nut mounted on the moving block of the first two-axis guide mechanism. Alternatively, the feed screw may be attached to the moving table, and the net portion may be attached to the moving block of the first biaxial guide mechanism.

In the first embodiment, the second driving means 6 and the track rail 10 in the X-axis direction of the biaxial guide mechanism 4 are used.
Can be used as an Xθ table. At that time, the turning mechanism 31 attached to the biaxial guide mechanism 4 is left on the moving block 9 as it is.

Second Embodiment FIG. 6 shows a second embodiment of the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals and described. The configuration of a plurality of biaxial guide mechanisms that guides the moving table along two axial directions intersecting each other and that can move largely along one axial direction, and rotatably supports the moving table, This is different from the first embodiment.

That is, in the moving table apparatus 1 according to the third embodiment of the present invention, as shown in FIG. 6, the two-axis guide mechanism 4 is attached to the short Y mounted on the table base 2.
An axial track rail 100, a first moving block 101 movably attached to the Y-axis track rail 100 via a large number of balls as rolling elements, and A track rail 102 in the X-axis direction fixed and mounted in a direction orthogonal to the track rail, and is movably mounted on the track rail 102 in the X-axis direction via a number of balls as rolling elements. And a second moving block 103.

The structure of the biaxial guide mechanism 4 will be described in detail. As shown in FIG. 6, the biaxial guide mechanism 4 includes a track rail 100 in the Y-axis direction, a first moving block 101, and an X-axis guide mechanism. Linear guide, which is constituted by a track rail 102 and a second moving block 103, which guides the moving table 3 movably in two axes (XY axes) orthogonal to each other, and rotatably supports the moving table 3. Mechanism.

The track rail 100 in the X-axis direction is shown in FIG.
As shown in FIG. 7A and FIG. 7A, a pair of support wall portions 104 supporting the first moving block 101 so as to sandwich the first moving block 101 therebetween.
And a bottom wall portion 105 connecting these support wall portions 104 to each other.
A ball rolling groove 107 is formed on the inner peripheral surface of the ball. A total of four ball rolling grooves 108 are formed on the left and right outer surfaces of the first moving block 101, two upper and lower balls corresponding to the ball rolling grooves 107 formed on the inner periphery of the support wall 104.

On the other hand, in the first moving block 101, four ball escape passages 109 corresponding to the four ball rolling grooves 108 on both right and left sides are provided in parallel, as shown in FIG. 7 (b). At both ends, side covers 111 having four directional rolling paths 110 connecting both ends of the ball rolling groove 108 and both ends of the ball escape passage 109 are provided.

The left and right support walls 1 of the first track rail 100
04 and ball rolling groove 1 on the outer surface of the first moving block 101
08, the contact direction of the four rows of balls 106 interposed is
As shown in FIG. 7 (a), the ball is symmetrically inclined at a predetermined contact angle α with respect to a horizontal line H passing through the centers of the upper and lower two rows of balls. In the third embodiment, the contact angle line connecting the contact point between the ball 106 and the ball rolling groove 108 opens toward the center of the first moving block 101 and the first moving block 1
It has an inward-opening contact structure that closes toward the outside opposite to 01.

A screw hole 1 extending parallel to the left and right ball rolling grooves 108 is provided at the center of the first moving block 101.
A screw shaft 113 is screwed into the screw hole 112. It is preferable that a ball is rotatably interposed between the screw hole 112 and the screw shaft 113 to form a ball screw shaft.

Further, both ends of the screw shaft 113 are
As shown in (b), a bearing support 114 fixed to the first track rail 100 rotatably supports via a bearing 115. Further, the screw shaft 113
Is connected to a rotating shaft of a manual handle (not shown).

On the other hand, on the lower surface of the second moving block 103, as shown in FIG. 6, there is provided a second concave portion 116 into which the second track rail 102 fixed on the first moving block 101 is inserted. ing. The second track rail 102
A ball rolling groove 118 for rolling a total of four balls 117 is provided on both left and right sides of the second moving block 10 facing the left and right sides of the second track rail 102.
The second track rail 10 is provided on the left and right inner side surfaces of the second concave portion 116 of FIG.
Four-row ball rolling grooves 119 corresponding to the two left and right ball rolling grooves 118 are provided.

In the second moving block 103, FIG.
As shown in (c), four ball escape passages 120 corresponding to the four ball rolling grooves 119 of the second recess 116 are also provided in parallel, and the four ball escape passages 120 of the second moving block 103 are provided. At both ends, side covers 122 having four direction change paths 121 connecting both ends of each ball rolling groove 118 of the moving block 103 and both ends of the ball escape passage 120 are provided.

Further, the contact directions of the four rows of balls 117 interposed between the second track rail 102 and the second recess 116 are as shown in FIG.
Are symmetrically inclined by a predetermined angle α with respect to a horizontal line H passing through the middle of the horizontal axis. In this embodiment, the contact angle line connecting the contact point between the ball 117 and the ball rolling groove 119 is defined by the second concave portion 116.
And has an outward-opening contact structure that opens toward the inside opposite to the second recess 116 and closes toward the inside.

As shown in FIG. 6, the two-axis guide mechanism 4 configured as described above rotatably supports the movable table 3 via the turning mechanism 31 configured in the same manner as in the first embodiment. doing.

As described above, the two-axis guide mechanism 4 is connected to the first track rail 100 or the second track rail 102 having a large width.
By supporting the moving table 3, the moving table 3 can be supported in a more stable state, and can be supported even with a large load applied to the moving table 3. Further, by integrally providing a drive mechanism including the screw hole 112 and the screw shaft 113 in the two-axis guide mechanism 4, the configuration of the apparatus can be simplified.

The other configuration and operation are the same as those of the above-described embodiment, and the description thereof will be omitted.

Third Embodiment FIG. 8 shows a third embodiment of the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals and described. The configuration of the first track rail, the moving block, and the second track rail is the same as that of the first embodiment, but the position of the turning mechanism is not the moving table side but the moving block is moved up and down by the first up and down. The first embodiment is divided into a first moving block and a second moving block, and a turning mechanism is disposed between the first moving block and the second moving block. Is different.

That is, in the moving table apparatus 1 according to the third embodiment of the present invention, as shown in FIG. 8, the biaxial guide mechanism 4 uses the turning mechanism 31 instead of the moving table 3 to move the moving block 9. The first moving block 9a is divided into a first moving block 9a and a second moving block 9b, and a turning mechanism 31 is arranged between the first moving block 9a and the track rail 10 in the X-axis direction. Except for this point, the other configuration and operation are the same as those of the first embodiment, and thus the description thereof is omitted.

[0079]

As described above, according to the present invention,
The moving table can be moved along a two-axis direction crossing each other, and can be rotated around an axis orthogonal to a plane formed by the two axes. It is possible to provide a simple type moving table device capable of easily performing the movement adjustment and the turning movement of the table in two axial directions.

[Brief description of the drawings]

FIG. 1 is a plan view showing a moving table device according to an embodiment of the present invention.

FIG. 2 is a partially cutaway side view showing a moving table apparatus according to an embodiment of the present invention.

FIGS. 3A and 3B are cross-sectional configuration diagrams each showing a biaxial guide mechanism.

4 (a) to 4 (e) are configuration diagrams each showing a biaxial guide mechanism.

5 (a) and 5 (b) are a partially broken perspective view showing a turning mechanism and a cross-sectional configuration view of a main part in an attached state, respectively.

6 (a) and 6 (b) are cross-sectional configuration diagrams each showing a two-axis guide mechanism of a moving table device according to Embodiment 2 of the present invention.

FIGS. 7A to 7E show Embodiment 2 of the present invention.
FIG. 2 is a configuration diagram illustrating a two-axis guide mechanism of the moving table device according to the first embodiment.

8 (a) and 8 (b) are cross-sectional configuration diagrams each showing a two-axis guide mechanism of a moving table device according to Embodiment 3 of the present invention.

[Explanation of symbols]

1: moving table device, 2: table base, 3: moving table, 4: biaxial guide mechanism, 5: first driving means, 6:
Second driving means, 7: second driving means, 11, 12, 1
3: Manual handle, 31: turning mechanism.

Claims (1)

[Claims] 1. A moving table for a table base,
A moving table device movably mounted along two axial directions intersecting each other and rotatably mounted around an axis perpendicular to a plane formed by the two axes, wherein the moving table is mounted on the table base. A movable member on the table base side of the biaxial guide mechanism, wherein the biaxial guide mechanism movably guides the movable table along biaxial directions intersecting each other, and rotatably supports the movable table.
A first driving means for driving along the axial direction of the moving table, and a moving member on the moving table side of the biaxial guide mechanism driven by the first driving means, A second driving means for driving along the second axial direction, and a two-axis driven by the first driving means for a portion other than rotatably supported by a two-axis guide mechanism of the moving table. A moving table device comprising: a third driving means for driving a moving member on the table base side of the guide mechanism in a direction intersecting the second axial direction.