JPH11300261A - Apparatus for cleaning die for coating, method for coating using the same, and apparatus of and method for preparing color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To always hold a cleaning tool under clean condition and to prevent longitudinal lines, etc., from being generated by providing a cleaning tool for removing a coating liq. stuck on the outlet of a die for coating accompanied by movement and providing a washing means for washing this cleaning tool. SOLUTION: In a die coater, when a coating liq. is applied, a base is held on a table by vacuum suction and the coating liq. is fed to a die 1 by means of a liq. feeding device such as a pump. A die cleaning apparatus equipped on the die coater like this is constituted of a cleaning unit 100 which brings a cleaning tool 110 fitted on the apex part into slide-contact with the surroundings of an outlet 2 of the die 1 to scrape excess coating liq., a liq. discharging unit 200 for discharging and recovering unnecessary liq. and a washing unit 300 for washing the cleaning tool 110 with a solvent. In addition, the washing unit 300 always holds the cleaning tool 110 clean by spraying the solvent from a solvent tank 331 to the cleaning tool 110 from a nozzle 320 through a pipe 320.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used, for example, in the field of manufacturing color filters for liquid crystal displays, optical filters, printed boards, integrated circuits, and semiconductors. The present invention relates to an apparatus for cleaning a discharge port of a die for discharging a coating liquid and a periphery thereof, a coating method using the same, and a color filter manufacturing apparatus and a manufacturing method using these apparatuses and methods.

[0002]

2. Description of the Related Art As a method of applying a glass substrate to a member to be applied, there is a die coater application. The die coater is disclosed in Japanese Patent Laid-Open No. 5-2.
As disclosed in JP 08154, a film,
The coating liquid is discharged from the discharge port of the die onto the member to be coated while moving the member to be coated such as a substrate, and a predetermined coating surface is formed on the member to be coated.

When this die coater is used for single-wafer coating of a glass substrate or the like, it is necessary to always keep the area around the die discharge port clean in order to form a coating film having a good appearance and a uniform film thickness. There is.

As means for solving the above problem, as disclosed in Japanese Patent Application Laid-Open No. Hei 7-168015, a cleaning tool made of a polymer material having chemical resistance is slid in contact with the discharge port to discharge the cleaning tool. A cleaning device and a cleaning method for scraping a coating solution adhered to an outlet and its periphery have been proposed.

[0005]

However, in the above-described cleaning apparatus and cleaning method, since the coating liquid adhering to the cleaning tool is transferred to the sliding contact between the die discharge port and the cleaning tool, cleaning is performed many times. When this is done, the transferred coating solution gradually accumulates and grows, which solidifies. Then, the solidified product comes into contact with the member to be coated, and may cause coating defects such as vertical stripes on the coating film surface.

Further, when removing the excess coating liquid adhering to the vicinity of the die discharge port, all of the removed liquid does not fall, but a part of the liquid overflows outside the contact area between the cleaning tool and the die, and adheres to the die. The remaining inconvenience also occurred. Furthermore, if the number of cleanings is increased, the adhered and remaining coating liquid accumulates and solidifies into a large lump, which contacts the end face of the cleaning tool before the cleaning tool and the die come into close contact with each other. And the cleaning surface of the cleaning member cannot come into contact with each other, leaving wiping residue at the discharge port, making it impossible to form a good coating film surface.

Also, the conventional cleaning tool has poor adhesion to the die, and the cleaning tool is pressed against the die with a large force in order to compensate for the poor adhesion.
The shaved abrasion powder adhered to the coating film surface on the substrate, increasing the defect defect rate of the product.

Furthermore, in order to bring the cleaning tool into close contact with the discharge port and make sliding contact with it, it is necessary to make fine adjustments in the positioning of the cleaning tool, but this requires a long time and lowers productivity. Was causing.

The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to always form a good coating surface free from defects on a substrate, so that a wiping residue is left on the lip surface. An object of the present invention is to provide a coating die cleaning apparatus which does not require fine positioning of a cleaning tool, a coating method using the same, and a color filter manufacturing apparatus and a manufacturing method.

[0010]

The configuration of the present invention that achieves the above object is as follows. That is, (1) a cleaning tool that removes the coating liquid attached to the discharge port from the die by bringing the coating liquid into contact with the discharge port of the coating die that discharges the coating liquid and moving the coating liquid in the longitudinal direction of the discharge port. The coating die cleaning apparatus, further comprising a cleaning unit for cleaning the cleaning tool in the provided coating die cleaning apparatus.

(2) The coating die cleaning apparatus according to (1), wherein the cleaning means is a nozzle for discharging a cleaning solvent to the cleaning tool.

(3) A cleaning tool for removing the coating liquid attached to the discharge port from the die by bringing the coating liquid into contact with the discharge port of the coating die for discharging the coating liquid and moving the coating liquid in the longitudinal direction of the discharge port. In the coating die cleaning device provided with
A coating die cleaning device, wherein a suction unit for suctioning and removing the coating liquid removed from the discharge port is arranged near the cleaning tool.

(4) A cleaning tool for removing the coating liquid attached to the discharge port from the die by bringing the coating liquid into contact with the discharge port of the coating die for discharging the coating liquid and moving the coating liquid in the longitudinal direction of the discharge port. In the coating die cleaning device provided with
The cleaning tool has a shape that makes line contact along the contour of the discharge port, and further includes a tracing mechanism that maintains line contact between the cleaning tool and the discharge port when the cleaning tool moves. Die cleaning equipment.

(5) The tracing mechanism is a mechanism that freely moves linearly in two directions perpendicular to the longitudinal direction of the discharge port and a rotation mechanism whose axis is the urging direction of the cleaning tool toward the discharge port. The coating die cleaning device according to the above (4), wherein:

(6) A color filter manufacturing apparatus for manufacturing a color filter using the coating die cleaning apparatus according to any one of (1) to (5).

(7) Before or after applying the coating liquid to the member to be coated using a coating die for discharging the coating liquid from the discharge port, the cleaning tool is brought into contact with the discharge port of the die while the cleaning tool is in contact with the discharge port in the longitudinal direction. Wherein the cleaning tool is washed with a solvent before or after the application, in a coating method for removing the coating liquid attached to the discharge port from the die by moving the cleaning tool.

(8) Before or after applying a coating liquid to a member to be coated using a coating die that discharges the coating liquid from a discharge port at the tip, the cleaning tool is brought into contact with the discharge port of the die while the cleaning tool is in contact with the discharge port. In the coating method, in which the coating liquid attached to the discharge port is removed from the die by moving the coating liquid in the longitudinal direction of the outlet, immediately after the coating liquid is removed from the die with the cleaning tool, the discharge port periphery and the cleaning tool are removed. A coating method comprising sucking and discharging the liquid adhering to the substrate.

(9) Before or after applying a coating liquid to a member to be coated using a coating die which discharges the coating liquid from a discharge port at the tip end, the cleaning tool is brought into contact with the discharge port of the die while the cleaning tool is in contact with the discharge port. In the coating method for removing the coating liquid attached to the discharge port from the die by moving the discharge port in the longitudinal direction, the cleaning member and the cleaning member that are in line contact along the contour of the discharge port are attached to the discharge port. A coating method comprising: removing a coating liquid attached to the discharge port while maintaining a line contact by using a contact mechanism.

(10) A method for producing a color filter, comprising producing a color filter using the coating method according to any one of (7) to (9).

According to the coating die cleaning apparatus and the coating method of the above (1) and (7), the cleaning tool is always kept in a clean state, so that the coating liquid adhering to the cleaning tool is transferred around the discharge port of the die. It does not occur, and no solidification of the application liquid accumulates in the discharge port, which does not adversely affect.

According to the coating die cleaning apparatus and the coating method of the above (3) and (8), the coating liquid adhering to the cleaning tool is removed by suction, so that the cleaning tool is always kept clean. In addition, the liquid does not overflow to the area other than the contact area between the die and the cleaning tool, and the liquid can be prevented from adhering and remaining on the die.

According to the coating die cleaning apparatus and the coating method of the above (4) and (9), since the cleaning tool has a tracing mechanism, the initial fine positioning of the cleaning tool becomes unnecessary, and Since the cleaning tool can always slidably contact the discharge port with a line contact, even if the cleaning tool presses the discharge port with a relatively weak pressing force, the cleaning tool is always in close contact with the vicinity of the discharge port to enhance the cleaning effect. The wear resistance of the cleaning tool can also be improved.

According to the color filter manufacturing apparatus and the manufacturing method of the above (6) and (10), since the color filter is manufactured using the coating die cleaning apparatus and the coating method of the present invention, a good coating film is always obtained. It can produce high-quality products with surfaces.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic perspective view showing an example in which a coating die cleaning device 10 of the present invention is applied to a die coater as a coating device.

Referring to FIG. 1, the die coater 8 includes a die 1, a coating die cleaning device 10 for cleaning the die 1 before or after coating, a base 4, a table 5, and a column 7. Here, the die 1 is attached to the column 7 via an elevating mechanism (not shown) so that the die 1 can be raised and lowered. Also,
The table 5 is attached to the base 4 via a reciprocating mechanism (not shown) so that the lower part of the die 1 can move straight in the directions of arrows 5A and 5B. At the time of coating, the substrate 6 is held on the table 5 by vacuum suction, and the coating liquid is supplied to the die 1 by a liquid sending device such as a pump (not shown).

Next, the configuration of the coating die cleaning apparatus 10 will be described. FIG. 2 is a schematic flowchart showing an example of the coating die cleaning apparatus of the present invention. FIG. 3 is an enlarged perspective view of the cleaning unit of FIG.

The coating die cleaning apparatus 10 includes a cleaning unit 100 that slides a cleaning tool 110 attached to a tip portion around the discharge port 2 of the die 1 to scrape and remove excess coating liquid. A drain unit 200 for discharging and collecting unnecessary liquid, and a cleaning unit 30 for cleaning a cleaning tool with a solvent.
0.

The cleaning unit 100 includes a cleaning tool 110,
A cleaning tool holding member 120 for holding the cleaning tool, and a cleaning tool support 1 for elastically supporting the cleaning tool holding member 120 in the direction of separation and contact between the discharge port and the cleaning tool.
30, a tray 140 for receiving a liquid falling from the discharge port,
And a driving device 150 for driving the tray and the cleaning tool in the longitudinal direction of the discharge port 2.

FIG. 4 is a front sectional view of the cleaning tool, and FIG. 5 is a side sectional view of the cleaning tool.

Referring to FIGS. 4 and 5, the cleaning tool 110 has an edge 111 of 2 mm or less in the longitudinal direction of the discharge port so that the cleaning tool 110 can make line contact with the die 1. Edge part 111
Is a lip surface contact edge 111A that contacts the lip surface 3
And a lip side surface contact edge 111B in contact with the side surface of the lip surface. The length of 111B is preferably 3 mm or more in order to prevent the scraped coating liquid from reaching the top of the edge portion and attaching to the die. By bringing the cleaning tool 110 into line contact with the lip surface 3, a blade effect is generated, and the ability to remove the coating liquid is greatly enhanced as compared with the case of surface contact.

When the cleaning tool comes into sliding contact with the die, it is preferable that the front surface in the moving direction of the cleaning tool and the lip surface 3 make oblique contact. That is, the cleaning tool contact angle 110C is 45 degrees to 135 degrees.
It is preferred to be in the range of degrees. For angles outside this range,
A sufficient effect of scraping the coating liquid cannot be obtained.

As a material of the cleaning tool, a polymer resin which does not damage the lip surface is preferable. As the polymer resin, a fluorine resin, a urethane resin, an acrylic resin, a polyester resin,
Polypropylene resin, silicone rubber, ethylene propylene rubber, fluorine rubber and the like can be used, but those having elasticity so as to be able to adhere to the die are preferable. Further, it is preferable to select a material having chemical resistance to the used coating liquid. Further, conductive powder may be mixed into the polymer resin in order to remove static electricity generated in the cleaning tool 110 and prevent dust from adhering. As conductive powder, conductive carbon, platinum, nickel, silver,
Copper or the like is preferable, and the mixing ratio is 40% by weight to 1%.
00% by weight is preferred.

FIG. 6 is a schematic perspective view showing an example of the cleaning tool holding member to which the cleaning tool is attached. Referring to this, suction ports 121A and 121B are arranged on the slopes 124A and 124B of the cleaning tool holding member 120. This suction port 121
A and 121B are connected to a drain pump 210 via a pipe 122.
And the like, is connected to a suction source, and sucks a liquid adhering to the cleaning tool, and also sucks a coating liquid overflowing in a region other than the contact portion when slidingly contacting the die 1. The suctioned coating liquid is sent to the waste liquid tank 220 as a waste liquid. The pressure at the time of suction is preferably 10 Torr to 600 Torr at the suction port 121, and more preferably 100 Torr to 500 Torr.
Is good. By suctioning, the liquid can be prevented from remaining on the cleaning tool 110, so that the liquid does not adhere again to the die 1 from the cleaning tool 110. Further, at the time of sliding contact, the cleaning tool 1
The liquid overflowing outside the contact area between the die 10 and the die 1 is also sucked, so that the coating liquid does not remain around the discharge port.

Referring to FIG. 3, the cleaning tool support portion 130 includes a support member A131 and a support member B13 for holding the support member A.
2. It is composed of a roller 133 disposed on the lower surface of the support member A. The support member A131 has a hole 134 into which the protrusion 123 of the cleaning tool holding member is inserted so as to freely hold the cleaning tool holding member 120 within a predetermined range. At this time, the rotatable range is preferably -10 degrees to 10 degrees. Since the support member A131 is disposed on the roller 133, the cleaning tool 110 can freely move in a direction parallel to the lip surface 3 in a direction perpendicular to the longitudinal direction of the die. The movable range at this time is preferably within 5 mm in the width direction of the lip surface 3. Further, the support member B132 is elastically supported on the lower surface thereof by a spring 135, so that the cleaning tool 110 separates from and contacts the discharge port 2 in the first direction.
The lip surface 3 can be pressed to 10B. With the above mechanism, the edge portion 111 of the cleaning member 110 can easily come into line contact along the lip surface 3, so that the position adjustment of the cleaning tool becomes unnecessary and the lip surface 3 of the cleaning member 110 becomes unnecessary.
The pressing force on the cleaning member can be set small, and the wear of the cleaning member can be significantly reduced.

The tray 140 has a suction port 141 inside.
And sucks and discharges the accumulated liquid by a suction device (not shown). The sucked liquid is used as waste liquid in waste liquid tank 2
20.

On the other hand, as shown in FIG.
Cleaning unit 300 for cleaning by attaching a solvent to 10
Are a nozzle 310 for discharging a solvent, an on-off valve 334 connected to the nozzle via a pipe 320, and a solvent tank 3
31, a compressed air line 332 for applying pressure thereto, and a pressure regulating valve 3
33.

The nozzle 310 is located at the edge 1 of the cleaning tool 110.
It is preferable to discharge the liquid in a plane fan shape so that the solvent adheres to the entire area of the eleventh surface. The type of the solvent discharged from the nozzle 310 is preferably the same as the solvent component contained in the used coating liquid, but the coating liquid itself may be used.

It is preferable that the nozzle has a mechanism capable of arbitrarily adjusting the discharge direction at the upper part of the cleaning tool so that the solvent is attached to an appropriate position of the cleaning tool. The pressure is preferably 0.02 to obtain sufficient detergency without the solvent being scattered around.
1 MPa to 0.7 MPa, more preferably 0.01 MPa
a to 0.05 MPa, and the discharge amount of the solvent at one time is 0.1 MPa.
5 cc to 5 cc is preferred.

In addition, it is preferable to provide a cover around the product so that even if the solvent is scattered, it does not adhere to products flowing in the line or peripheral devices.

As described above, the cleaning tool 110 can always be maintained in a clean state by spraying the solvent. Therefore, even if the cleaning tool 110 is brought into contact with the lip surface 3 thereafter, the coating liquid does not adhere again. .

Next, an example of a coating method using the coating die cleaning apparatus of the present invention will be described with reference to FIGS.

First, before applying the coating liquid on the substrate 5,
The inside of the die 1 is filled with a coating liquid. . To fill the coating liquid, the coating liquid is sent to the die 1 from the coating liquid tank via a pipe such as a tube by using a liquid feeding means such as a pressure feed or a pump (not shown). At this time, since the coating liquid is discharged from the discharge port 2, the drive device 150 moves the tray 140 to the lower side of the discharge port 2 in advance, and drives the drain pump 210 while receiving the discharged coating liquid. Then, the application liquid accumulated in the tray 140 is discharged from the suction port 141.

When the inside of the die 1 is completely filled with the coating liquid, the liquid supply to the die 1 is stopped, and the discharge port 2 is cleaned. In the cleaning step, first, the cleaning device 110 is raised to a preset position by the driving device 150, and is brought into contact with the sliding contact start portion 2A of the die. At this time, the contraction amount of the spring 135 shown in FIG. 3 is adjusted so that the pressing force of the cleaning tool 110 against the discharge port 2 is appropriate. The parallel movement and rotation of the tool holding member 120 cause the cleaning tool 110
Follows and adheres to the shape of the lip surface 3.

Next, the cleaning tool 1 is driven by the driving device 150.
When 10 is moved toward the sliding contact end portion 2B of the die,
The cleaning tool 110 moves while maintaining the line contact with the lip surface 3, and scrapes off the excess application liquid attached around the discharge port.
At this time, the drainage pump 210 is operated at the same time to suck the coating liquid adhering to the cleaning tool holding member 120 and the coating liquid adhering around the discharge port, and discharge the liquid to the waste liquid tank 220 to discharge the coating liquid. Remove. When the work is completed, wait position 1
Return to 10A.

When the cleaning tool 110 is stopped at the standby position 110A, the cleaning unit 300 is operated and the nozzle 310 is stopped.
The cleaning tool 110 is washed by discharging the solvent toward the cleaning tool from the cleaning tool 110. In order to further enhance the cleaning effect, at the same time, the drainage pump 210 is operated to suck the application liquid and the solvent adhering to the cleaning tool 110 from the suction port 121 shown in FIG. Discharge.

When the filling of the coating liquid into the die and the cleaning operation are completed, the coating step is started.

First, the substrate 6 is transferred onto the table 5 via a loader (not shown), and is held by suction while being positioned by a positioning device (not shown).
Next, when the table 5 moves straight in the direction 5A and the application start portion of the substrate reaches the position of the discharge port 2, the die 1 descends until a predetermined distance from the substrate application surface is secured. Next, when the application liquid is started to be discharged from the discharge port at a discharge amount capable of obtaining a predetermined film thickness, the table 5 is moved in the 5A direction to form a coating film surface on the substrate. Further, when the application end portion of the substrate 6 has almost reached the position of the ejection port, the ejection of the application liquid is stopped and the die 1 is raised. Further, the table 5 is moved to the end position, and when stopped, the suction is released, the substrate is taken out by an unloader (not shown), and is conveyed to the next step.

After the removal of the substrate, the table 5 moves in the direction 5B, passes below the die 1, and returns to the origin position. At the same time, the cleaning tool is moved to the lower side of the discharge port 2, and after rising, the cleaning tool is slid into contact with the discharge port as described above to scrape off the coating liquid adhering around the discharge port.
Remove. After the cleaning tool 110 returns to the standby position 110A after sliding contact with the lip surface 3, the nozzle 21
At 0, the cleaning tool is washed, and the above-described series of application steps is repeated.

The cleaning tool may be washed every time one substrate is coated, or may be washed every two to five substrates.
In this embodiment, the tray 140 and the cleaning tool 110 are moved together, but may be moved separately.

The coating die cleaning apparatus of the present invention is effective for cleaning around the discharge port of a slit die for coating a liquid on a substrate surface.
It can be used for cleaning a slit die for applying a coating solution for each of R, G, and B pixels, a resist solution, and an overcoat agent in a single sheet.

[0051]

EXAMPLE A cleaning device for a slit die having a length in the longitudinal direction of the discharge port of 550 mm and a width of the lip surface of 3 mm was manufactured.

The cleaning tool was formed by molding a silicone rubber die so as to have a contact length of 1 mm in the longitudinal direction of the discharge port on the lip surface. The cleaning tool was attached such that 110C in FIG. . The cleaning tool holding member is elastically supported by a spring having a spring constant of 0.98 N / mm in a direction perpendicular to and away from the discharge port, and a φ3 mm roller is arranged so that the cleaning tool holding member can move freely in the width direction of the lip surface by 3 mm. Further, the cleaning tool holding member was rotatably held by a ball bearing in a range of -5 to 5 degrees around the biasing direction of the cleaning tool with respect to the discharge port.

The cleaning tool holding member was provided with two 2 mm square suction ports, and suction was performed at 600 Torr with the suction ports.

The cleaning liquid used is propylene glycol monomethyl ether acetate having a concentration of 99.5% or more, and the nozzle for discharging the liquid is a flat spray nozzle for discharging the liquid in a plane fan shape. The cleaning liquid was applied to the contact portion with the die. Note that the discharge amount of the cleaning liquid was 1 cc in one discharge.

Solid concentration 15 from coating solution tank to die
%, After filling with a resist solution having a viscosity of 5 cp
Coating on 650 size glass substrate (film thickness 1.7 after drying)
μm) and the cleaning operation of the die by this cleaning device is 10,000
Performed consecutively. The cleaning operation was performed as follows.

1) Washing by applying a washing liquid to a cleaning tool. Start suction from suction port. 2) Move the cleaning tool from the standby position to the end of the die. 3) Stop the cleaning tool, raise the cleaning tool to contact the discharge port, and then slide the cleaning tool to return the cleaning tool to the standby position. 4) End of suction by the suction unit.

As a result, the coating liquid did not remain around the discharge port and solidified, the adhesion between the cleaning tool and the die was always secured, and no wiping residue was observed. Along with this, no coating defects such as the coating surface on the glass substrate and vertical stripes were observed. Furthermore, as a result of observing the tip of the cleaning tool with a microscope,
No problematic wear was observed, and no contamination of the substrate by the wear powder was observed.

[0058]

As described above, when the coating die cleaning apparatus of the present invention is used for cleaning the discharge port of the coating die, the cleaning liquid is discharged from the nozzles to clean the cleaning tool. Is always kept in a clean state, so that even when coating is repeatedly performed, the coating liquid does not adhere to the lip surface from the cleaning tool, and defects on the coating surface such as vertical stripes can be prevented.

Further, by providing the suction unit on the member holding the cleaning tool, excess liquid adhering to the cleaning tool and the die can be efficiently discharged, so that a good coating surface is always formed on the member to be coated. , Contributes to quality improvement.

Further, by using a tracing mechanism, the discharge port of the die and the cleaning tool are brought into sliding contact with each other with a low contact pressure by line contact, and the coating liquid attached to the die discharge port can be removed, so that the wear of the cleaning tool is greatly reduced. And prevent contamination of the substrate by abrasion powder,
It contributes to the improvement of the yield.

Further, this copying mechanism enables the cleaning tool to follow the shape of the lip surface without any adjustment, so that a sufficient cleaning effect can be obtained without finely positioning the cleaning tool, and the productivity can be improved. Contribute to the improvement of

According to the coating method using the coating die cleaning apparatus of the present invention, even when coating is repeatedly performed, the area around the discharge port of the die is always clean. Can be formed, which contributes to the improvement of product quality.

Further, according to the color filter manufacturing apparatus and the manufacturing method of the present invention, a high quality color filter can be manufactured with high productivity.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing an example of a coating device to which a coating die cleaning device of the present invention is applied.

FIG. 2 is a schematic flow chart showing an example of a coating die cleaning device of the present invention.

FIG. 3 is a schematic perspective view of a cleaning unit of FIG. 1;

FIG. 4 is a front sectional view of the cleaning tool of FIG. 3;

FIG. 5 is a side sectional view of the cleaning tool of FIG. 3;

FIG. 6 is a schematic perspective view of the cleaning tool holding member of FIG. 3;

[Explanation of symbols]

 1: Die 2: Discharge port 3: Lip surface 4: Base 5: Table 5A: Table feed direction 5B: Table return direction 6: Substrate 7: Support column 8: Die coater 100: Cleaning unit 110: Cleaning tool 110A: Cleaning tool standby Position 110B: Cleaning Tool-Die Separation Direction 110C: Cleaning Tool Contact Angle 111: Edge 111A: Lip Surface Contact Edge 111B: Lip Side Contact Edge 120: Cleaning Tool Holder 121A, 121B: Suction Port 122: Pipe 123: Projections 124A, 124B: Slope 130: Cleaning support 131: Support member A 132: Support member B 133: Roller 134: Hole 135: Spring 140: Tray 141: Suction port 150: Driving device 200: Drain unit 210: Drain Liquid pump 220: Waste liquid tank 300: Cleaning unit 310: Nozzle 320: Ip 331: Solvent supply tank 332: Compressed air line 333: Pressure regulating valve 334: Open / close valve

Claims (10)

[Claims] 1. A cleaning tool for removing a coating liquid attached to a discharge port from the die by bringing the coating liquid into contact with a discharge port of a coating die for discharging the coating liquid and moving the coating liquid in a longitudinal direction of the discharge port. The coating die cleaning apparatus, further comprising a cleaning unit for cleaning the cleaning tool in the provided coating die cleaning apparatus. 2. The coating die cleaning apparatus according to claim 1, wherein said cleaning means is a nozzle for discharging a cleaning solvent to said cleaning tool. 3. A cleaning tool for removing a coating liquid attached to the discharge port from the die by bringing the coating liquid into contact with a discharge port of a coating die for discharging the coating liquid and moving the coating liquid in a longitudinal direction of the discharge port. In the provided coating die cleaning device, a suction unit for suctioning and removing the coating liquid removed from the discharge port is arranged near the cleaning tool. 4. A cleaning tool for removing a coating liquid attached to the discharge port from the die by bringing the coating liquid into contact with a discharge port of a coating die for discharging the coating liquid and moving the coating liquid in a longitudinal direction of the discharge port. In the coating die cleaning device provided, the cleaning tool has a shape that makes line contact along the contour of the discharge port, and a line mechanism between the cleaning tool and the discharge port when the cleaning tool moves. A coating die cleaning apparatus, further comprising: 5. The tracing mechanism comprises a mechanism that freely linearly moves in two directions orthogonal to a longitudinal direction of the discharge port, and a rotation mechanism whose axis is a biasing direction of the cleaning tool toward the discharge port. The coating die cleaning device according to claim 4, wherein 6. An apparatus for manufacturing a color filter, comprising manufacturing a color filter using the coating die cleaning apparatus according to any one of claims 1 to 5. 7. A cleaning tool is brought into contact with a discharge port of a die before or after applying the coating liquid to a member to be coated using a coating die for discharging the coating liquid from the discharge port, and the coating liquid is applied in a longitudinal direction of the discharge port. A coating method for removing a coating liquid attached to the discharge port from the die by moving the cleaning tool with a solvent before or after coating. 8. Before or after applying a coating liquid to a member to be coated using a coating die for discharging a coating liquid from a discharge port at a tip portion, a cleaning tool is brought into contact with the discharge port of the die. In the coating method of removing the coating liquid attached to the discharge port from the die by moving the coating liquid in the longitudinal direction, immediately after removing the coating liquid from the die with the cleaning tool, the discharge port periphery and the cleaning tool A coating method characterized by sucking and discharging attached liquid. 9. A cleaning tool is brought into contact with a discharge port of a die before or after applying a coating liquid to a member to be coated using a coating die for discharging the coating liquid from a discharge port at a tip end portion. In the coating method of removing the coating liquid adhering to the discharge port from the die by moving the cleaning member in the longitudinal direction of the discharge port, the cleaning member that makes line contact along the contour of the discharge port and the cleaning member contact the discharge port. A coating method comprising: removing a coating liquid attached to the discharge port while maintaining line contact using a copying mechanism. 10. A method for producing a color filter, comprising producing a color filter using the coating method according to claim 7. Description: