JPH1126541A - Processor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processor, capable of efficiently utilizing a clean room without causing a dead space, when it is installed within the clean room. SOLUTION: Two conveying routes 25, 27, disposed in parallel to each other, are arranged in a direction perpendicular to a longitudinal direction of a cassette carrier 10. Process parts 21a, 21b and 22a to 22c are respectively disposed on both sides of the conveying route 25 along the conveying route 25, and process parts 23a, 23b and 24a, 24b are disposed on both sides of the conveying route 27 along the conveying route 27. These process parts 21a, 21b, 22a to 22c, 23a, 23b and 24a, 24b respectively form a pair of process units, and the total four pairs of process units have one end, which coming into contact with the cassette carrier 10, while being arranged in parallel to each other in a process station 10. If the umber of process units is increased, and a width of the process station 20 is enlarged and coincides with a longitudinal dimension of the cassette carrier 10, the entire processor becomes rectangular.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an object to be processed, such as a glass substrate, by photolithography.
The present invention relates to a processing device such as a coating / developing device for performing a coating / developing process.

[0002]

2. Description of the Related Art Conventionally, as a layout of a processing apparatus, a cassette station and a transport path are arranged orthogonally so as to draw a T-shape, and a plurality of processing units are arranged in a row on both sides of the transport path. , A so-called T-type layout is employed.

FIG. 6 is a plan view of a typical T-type layout processing apparatus.

In this processing apparatus, a plurality of, for example, four cassettes C are set in a row in the Y direction in a cassette station 100, and 25 glass substrates G are arranged in each cassette C while being spaced from each other. It is held horizontally. The loading / unloading mechanism 101 accesses each of the storage cassettes C, pulls out the glass substrate G therein, and transfers the glass substrate G to the transfer path 102.
Is moved to the transport mechanism 201. The transport mechanism 201 that has received the glass substrate G moves linearly on the transport path 202, and the processing units 212 to 2 of the processing units 210 and 211 arranged in a row on each side of the transport path 202.
Deliver to 16. Glass substrate G delivered to each processing unit
Undergoes processes such as resist coating and drying by heating.

An AGV (Auto Guided Vehicle) for transporting a cassette containing substrates between apparatuses in each process.
There is. In the case of processing equipment such as this example, there are many types of processing units, and in the case of parallel processing in which a plurality of the same units are used, the substrates in the cassette are unloaded to each unit or are being unloaded. When the cassette is accessible, the state in which there is no cassette accessible by the AGV occurs, and the processing device determines the AGV avoidance cycle time. In the case of the accommodation cassette C capable of accommodating about the glass substrate G, a sufficient processing speed can be maintained if about four cassettes can be set in the cassette station 100. In other words, the tact balance of the number of processing units, the number of cassettes, the number of stored sheets, the processing device, and the AGV was achieved.

In addition, the combination of the four storage cassettes C and the processing station 200 including about five processing units has a well-balanced configuration, the entire processing apparatus becomes substantially rectangular, and a dead space when disposed in a clean room. Can use the space of the clean room efficiently.

[0007]

However, when the size of the glass substrate G is increased and the number of storage units per storage cassette C is reduced or the number of processing units is increased, the cassette station is required to maintain the tact balance with the AGV. It became necessary to increase the number of storage cassettes C set to 100. Therefore, the cassette station 100
When the length of the processing apparatus is extended to the position indicated by the dotted line 103 in FIG. 6, the length of the processing station 200 in the Y direction becomes larger, and the entire processing apparatus, which has been rectangular in the past, becomes L-shaped, and is hatched in the figure. The dead space D as drawn appears,
There is a problem that the space cost of the clean room increases.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem. Even if the number of cassettes set in a cassette station increases, the balance between the cassette station and the processing station is good, and dead space is generated. It is an object of the present invention to provide a processing apparatus capable of efficiently using a clean room without causing the processing to be performed.

Another object of the present invention is to provide a processing apparatus capable of preventing a non-heating type processing section which is easily affected by heat from being adversely affected by heat generated from a heating type processing section. .

Another object of the present invention is to provide a processing apparatus which can easily perform maintenance management of a processing section requiring high-frequency maintenance such as a coating section and a development section. I do.

It is still another object of the present invention to provide a processing apparatus capable of efficiently transporting an object between the carrying-in / out means and the processing section.

[0012]

According to a first aspect of the present invention, there is provided a processing apparatus comprising two or more transport paths arranged substantially in parallel with each other and arranged along each of the transport paths. Processing unit, carrying-in / out means for carrying in / out the object to / from each transport path, and a transport mechanism for transporting the workpiece to each processing unit and the carrying-in / out means via each transport path. Have.

According to a second aspect of the present invention, there is provided the processing apparatus according to the first aspect, wherein the processing units are disposed on both sides of each transport path.

According to a third aspect of the present invention, there is provided the processing apparatus according to the first aspect, wherein the loading / unloading means includes a loading table for loading a plurality of storage cassettes in a line substantially orthogonal to the transport path. And a transport mechanism that moves in a direction substantially orthogonal to the transport path and transports the object in and out of the storage cassette.

According to a fourth aspect of the present invention, there is provided a processing apparatus according to the first aspect of the present invention, wherein the two transport paths are arranged substantially in parallel with each other, the heating type processing section is disposed along the two transport paths, A non-heating type processing unit disposed outside along the transport path, a loading / unloading unit for loading / unloading the workpiece to / from each transport path, A transport mechanism for transporting to and from the loading / unloading means.

According to a fifth aspect of the present invention, there is provided a processing apparatus according to the fourth aspect, wherein a maintenance section is provided between the processing sections disposed between the two transport paths. It has a passage.

According to a sixth aspect of the present invention, there is provided the processing apparatus according to the fourth or fifth aspect, wherein a heating-type processing unit disposed between the two conveying paths is provided with air on the upper part thereof. Curtain that regulates the flow of air.

A processing apparatus according to a seventh aspect of the present invention is the processing apparatus according to any one of the fourth to sixth aspects, wherein the carrying-in / out means moves the plurality of storage cassettes in a direction substantially orthogonal to the transport path. The apparatus includes a mounting table that is mounted in a row, and a transport mechanism that moves in a direction substantially orthogonal to the transport path and transports an object to and from the storage cassette.

According to another aspect of the present invention, there is provided a processing apparatus comprising: two conveying paths arranged substantially in parallel with each other; a heating type processing section disposed along the two conveying paths therebetween; A coating unit and / or a developing unit disposed along the transport path outside the transport path, loading / unloading means for loading / unloading the target object into / from each transport path, and processing the target object via each transport path. And a transport mechanism for transporting to and from the loading / unloading means.

A processing apparatus according to a ninth aspect of the present invention is the processing apparatus according to the eighth aspect, wherein the processing units other than the coating unit and the developing unit are disposed along two transport paths therebetween. Is provided with a curtain at the upper part thereof for restricting the flow of air.

According to a tenth aspect of the present invention, in the processing apparatus of the eighth or ninth aspect, the loading / unloading means places a plurality of storage cassettes in a line substantially orthogonal to the transport path. A mounting table; and a transport mechanism that moves in a direction substantially orthogonal to the transport path and transports the object to and from the storage cassette.

The processing apparatus of the present invention according to the eleventh aspect is characterized in that two transport paths are disposed substantially in parallel with each other, along the two transport paths, outside the two transport paths, and the two transport paths. A processing unit arranged in a line between the roads,
The apparatus includes a loading / unloading means for loading / unloading the object to / from each transport path, and a transport mechanism for transporting the workpiece to each processing unit and the loading / unloading means via each transport path.

A processing apparatus according to a twelfth aspect of the present invention is the processing apparatus according to the eleventh aspect, wherein the processing unit disposed between the two transport paths is connected to both of the two transport paths. The processing unit is capable of transporting an object between the processing units.

A processing apparatus according to a thirteenth aspect of the present invention is the processing apparatus according to the eleventh or twelfth aspect, wherein the processing unit disposed between the two transport paths is a heating type processing unit. The processing device of the present invention according to claim 14, wherein
14. The processing apparatus according to claim 13, wherein the processing unit disposed between the two transport paths has a curtain on an upper portion thereof for restricting a flow of air.

According to a fifteenth aspect of the present invention, in the processing apparatus according to any one of the eleventh to fourteenth aspects, the loading / unloading means includes a plurality of storage cassettes arranged in a direction substantially orthogonal to the transport path. The apparatus includes a mounting table that is mounted in a row, and a transport mechanism that moves in a direction substantially orthogonal to the transport path and transports an object to and from the storage cassette.

In the processing apparatus according to the first aspect, two or more transport paths are provided substantially in parallel, and the processing units are disposed along the transport paths. Therefore, the length of the cassette station in the Y direction and the length of the processing station in the Y direction are arranged. And the outer shape of the entire processing apparatus becomes rectangular, and dead space when installed in a clean room can be eliminated.

In the processing apparatus according to the second aspect, since the processing units are arranged on both sides of each transport path, the number of processing units to be arranged increases, and the clean room can be used efficiently.

According to a third aspect of the present invention, as the loading / unloading means, a loading table for loading a plurality of storage cassettes in a line in a direction substantially orthogonal to the transport path; And a transfer mechanism for transferring the object in and out, the object can be efficiently stored and transported in a limited space, and the clean room can be used efficiently.

In the transfer device according to the fourth aspect, two transfer paths are disposed substantially in parallel, and the processing units are disposed along the transfer paths. Therefore, the length of the cassette station in the Y direction and the length of the processing station in the Y direction are determined. The outer shape of the entire processing apparatus becomes rectangular in accordance with the length, and dead space when the processing apparatus is installed in a clean room can be eliminated.

According to the fifth aspect of the present invention, since a maintenance path is provided between the processing units disposed between the two transport paths, two rows are provided between the two transport paths. Even when the processing units are arranged, these processing units can be easily maintained and managed through this passage.

In the transfer device according to the sixth aspect, since a curtain for regulating the flow of air is provided above the heating-type processing unit disposed between the two transfer paths, heat generated from the heating-type processing unit is It is possible to effectively prevent diffusion to the vicinity of the processing section disposed outside the transport path. In addition, the heat generated in the clean room can be concentrated and effectively exhausted, thereby reducing maintenance costs.

According to a seventh aspect of the present invention, as the loading / unloading means, a loading table for loading a plurality of storage cassettes in a line substantially orthogonal to the transport path, and And a transfer mechanism for transferring the object in and out, the object can be efficiently stored and transported in a limited space, and the clean room can be used efficiently.

In the transfer device of the present invention, since the processing units such as the coating unit and the developing unit, which need to be maintained and managed at high frequency, are arranged outside the transfer path, the maintenance management of the coating unit and the developing unit is performed. It can be done easily.

In the processing apparatus according to the ninth aspect, since a curtain for regulating the flow of air is provided above the heating type processing unit disposed between the two transport paths, heat generated from the heating type processing unit is It is possible to effectively prevent diffusion to the vicinity of a processing unit that is easily affected by heat, such as a coating unit and a developing unit disposed outside the transport path. In addition, the heat generated in the clean room can be concentrated and effectively exhausted, thereby reducing maintenance costs.

According to a tenth aspect of the present invention, as the loading / unloading means, a loading table for loading a plurality of storage cassettes in a line in a direction substantially orthogonal to the transport path; And a transfer mechanism for transferring the object in and out, the object can be efficiently stored and transported in a limited space, and the clean room can be used efficiently.

In the processing apparatus according to the eleventh aspect, two transport paths are disposed substantially in parallel, and three processing units are provided along the two transport paths between the outside of the transport path and between the two transport paths. Since they are arranged in a row, the length of the cassette station in the Y direction matches the length of the processing station in the Y direction, so that the outer shape of the entire processing apparatus is rectangular, and dead space when installed in a clean room can be eliminated.

In the transfer apparatus according to the twelfth aspect, since the processing unit capable of transferring the object to be processed between the two transfer paths is disposed between the two transfer paths, Flexibility can be given to the way of transport, and the workpiece can be transported efficiently.

In the transfer device according to the thirteenth aspect, since the heating-type processing section is disposed between the two transfer paths, heat generated from the heating-type processing section is diffused near the processing section disposed outside the transfer path. Can be effectively prevented.

In the transfer device according to the fourteenth aspect, since a curtain for restricting the flow of air is provided above the processing section disposed between the two transfer paths, the processing section disposed between the two transfer paths can be used. The generated heat can be effectively prevented from diffusing in the vicinity of the processing section disposed outside the transport path. In addition, the heat generated in the clean room can be concentrated and effectively exhausted, thereby reducing maintenance costs.

According to a fifteenth aspect of the present invention, as the loading / unloading means, a loading table for loading a plurality of storage cassettes in a line substantially orthogonal to the transport path, And a transfer mechanism for transferring the object in and out, the object can be efficiently stored and transported in a limited space, and the clean room can be used efficiently.

[0041]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a plan view of an apparatus for coating and developing an LCD glass substrate according to an embodiment of the present invention.

In this coating / developing apparatus, a cassette station 10, a processing station 20, a standby section 30, a processing station 40, and an interface section 50, which form a loading / unloading port for a workpiece, are arranged in this order in the X direction. An exposure device 60 is disposed, for example, next to the interface unit 50, and the glass substrate G is exchanged between the processing station 40 and the exposure device 60 via the interface unit 50. The cassette station 10 serving as a loading / unloading unit is provided with a mounting table 11 for loading the storage cassette C, a loading / unloading mechanism 12, and a loading / unloading path 13 serving as a moving path of the loading / unloading mechanism 12. The mounting table 11 has a rectangular shape extending in the Y direction so that a plurality of, for example, eight, storage cassettes C can be set in a line in the vertical direction (Y direction) in the drawing.

The accommodating cassette C is, for example, a box-shaped container provided with an opening in the front of a cube. Inside the accommodating cassette C, a plurality of glass substrates G as objects to be processed, for example, 12 substrates are horizontally arranged at predetermined intervals. Will be accommodated. Each glass substrate G is accommodated so as to be movable in the horizontal direction, and is slid from the front surface of the accommodation cassette C to be taken in and out.

The loading / unloading mechanism 12 moves along the loading / unloading path 13
It can move in the direction, can move up and down in the Z direction, and can rotate in the θ direction. The loading / unloading mechanism 12 has a pair of tweezers 12a which can be moved forward and backward in the X direction on the upper front surface.

In the processing station 20, two transport paths 25 and 27 arranged in parallel to each other are provided in the X direction. The processing units 21a and 21
b and 22a to 22c are arranged along the transport path 25, respectively. Processing units 21a arranged in a line on one side
And 21b constitute a set of processing units 21, and the processing unit 2
2a to 22c constitute a set of processing units 22.

Similarly, on both sides of the transport path 27, the processing units 23
a and 23b, and processing units 24a to 24c are arranged along the transport path 27. The processing units 23a and 23b each include one set of the processing unit 23a, and the processing units 24a to 24c each include one set of the processing unit 24. Make up.

A space 29 is provided between the processing unit 22 and the processing unit 23, and the space 29 maintains the processing units 22a to 22c and 23a to 23c constituting the processing unit 22 and the processing unit 23. It constitutes a passage for management.

On the other hand, the processing units 21a, 21b, 24a and 24b constituting the processing units 21 and 24 are maintained and managed from outside the coating / developing apparatus. Therefore, it is convenient to arrange the processing units such as the coating device and the developing device, which need to perform maintenance and inspection frequently, in the processing units 21 and 24.

The processing units 21 and 24 located on both outer sides of the processing station 20 in the Y direction are disposed such that the outer edges thereof are respectively aligned with both ends of the cassette station 10 in the Y direction, and Is a rectangle.

Each processing unit 21a constituting each processing unit
Examples of-24b include a coating device such as a spin coater, a developing device, a heating device represented by a hot plate and a dryer, and a cooling device for cooling the glass substrate G heated by the dryer. Each of these processing units 21a to 24b is divided into a heating-type processing unit such as a hot plate and a dryer and a non-heating-type processing unit that is easily affected by heat from the outside such as a coating device. It is arranged at a position where the heat generated from the processing unit including the built-in heating type processing unit diffuses to the vicinity of the processing unit including the non-heating type processing unit and does not affect the non-heating type processing unit.

For example, the processing units 22a to 22c and 23a to
23c is provided with a heating unit and a drying unit, and processing units 21a to 21c.
A coating unit and a developing unit are arranged at positions 21b and 24a to 24b.

A curtain 70 is provided above the processing units 22 and 23.

FIG. 2 is a view showing the coating / developing apparatus of this embodiment as viewed from the side in the X direction, and FIG. 3 is a view showing the coating / developing apparatus of this embodiment as viewed from the side in the Y direction. FIG.

The curtain 70 is made of, for example, a rectangular transparent resin sheet, and covers the area from the outside along the outer edge of the area occupied by the processing units 22, 23 and the maintenance passage 29. The sheet is attached by fixing one side of the sheet to the ceiling of a clean room.

The transport mechanisms 26 and 28 can move in the X direction along the transport paths 25 and 27, can move up and down in the Z direction, and can rotate in the θ direction. Transport mechanism 26
And 28 are provided with tweezers 26a and 28a, respectively, which can be advanced and retracted in the Y direction on the upper front surface thereof.

Next, the operation of the coating / developing apparatus thus configured will be described.

The mounting table 11 of the coating / developing apparatus of this embodiment
When the accommodating cassette C accommodating twelve glass substrates G is set thereon and the coating / developing apparatus is started, first, the carrying-in / out mechanism 12 accesses the accommodating cassette C to take out the glass substrate G accommodated therein. While holding the glass substrate G, it moves on the carry-in / out path 13, stops at the position facing the left end of the transfer path 25 in the drawing, and rotates in the θ direction to rotate the tweezers 12.
a is turned to the right side in the figure. Meanwhile, the processing station 20
On the side, the transport mechanism 26 is moved to the left end on the transport path 25 in synchronization with the transport mechanism 12.

At the left end of the transport path 25 in FIG.
Receives the glass substrate G from the loading / unloading mechanism 12, moves on the transport path 25 rightward in the figure, stops at a predetermined processing unit, for example, in front of the processing unit 21a, and rotates in the θ direction to draw the tweezers 26a. The glass substrate G is set in the processing unit 21a by moving the glass substrate G upward in the drawing toward the middle upward.

When the process in the processing section 21a is completed,
The glass substrate G is taken out from the processing unit 21a, and the glass substrate G is sequentially transported to the subsequent processing unit in the same manner as described above.

The transport mechanism 28 also moves in the X direction along the transport path 27 similarly to the transport mechanism 26, and
2, standby unit 30, processing units 23a to 23c, 24a and 2
The glass substrate G is conveyed to and from the substrate 4b.

When the processing at the processing station 20 is completed, the wafer is transported to the processing station 40 via the standby unit 30, and when the processing is completed, the wafer is transported to the adjacent exposure apparatus 60 via the interface unit 50. After the exposure is completed, the glass substrate G is transported again to the interface unit 50, the processing unit 40, the standby unit 30, and the processing unit 20, and is delivered from the processing unit 20 to the loading / unloading mechanism 12 via the transport mechanism 26 or 28, and is unloaded. Is accommodated in the accommodation cassette C.

In this embodiment, the cassette station 1 is set so that eight storage cassettes C can be set on the mounting table 11.
Processing station 2 in response to the length of
0, four rows of processing units 21 to 24 are arranged so that the length of the processing station 20 in the Y direction coincides with the length of the cassette station 10 in the Y direction. Thus, it is possible to prevent a dead space from being generated when the apparatus is installed in a clean room.

In this embodiment, a heating type processing unit such as a hot plate or a dryer is connected to the inner processing units 22 and 23.
On the other hand, a non-heating type processing unit such as a coating unit which is easily affected by heat is disposed as a processing unit in the outer processing units 21 and 24, and a heating type processing unit and a coating unit are disposed in separate processing units. Accordingly, it is possible to prevent the application unit from receiving heat from the hot plate and hindering the application process.

Further, in this embodiment, the processing unit 2
Since the curtain 70 is provided on the upper portions of the processing units 21 and 22, the heat generated from the processing units 22 and 23 is
It is possible to more reliably prevent the coating portion from being adversely affected by diffusion to 24.

In particular, the coating section and the developing section are easily affected by heat, and defective products often occur because external heat adversely affects the coating step and the developing step.

For this reason, the heating type processing unit is disposed in the processing units 22 and 23 distant from the processing units 21 and 24 in which the coating unit and the developing unit are disposed. By providing 70, it is possible to reliably prevent the heat from the heating-type processing unit from diffusing to the coating unit and the developing unit, so that the occurrence rate of defective products in the coating unit and the developing unit can be reduced. Since the product yield can be improved, an extremely great effect is brought about.

In this embodiment, the processing unit 22
, A maintenance management path is provided between the processing units 22 and 23, so that the processing units 22 and
Maintenance management for a to 22c and 23a to 23c can be easily performed.

Next, a second embodiment of the present invention will be described.

FIG. 4 is a plan view of a coating and developing apparatus according to the second embodiment.

In the coating / developing apparatus of the present embodiment, along the two transport paths 85 and 87 in the processing station 20,
The processing units 81a and 81b and 83a and 83b are arranged outside the two transport paths 85 and 87 in a row, respectively. On the other hand, common processing units 82a to 82c are provided between the transport paths 85 and 87. Is arranged. Each of these processing units 82a to 82c has a structure capable of taking the glass substrate G in and out of both of the transport mechanisms 86 and 88, respectively.

FIG. 5 is a diagram schematically showing a cross section of the processing unit 82 cut at the processing section 82a.

Openings 91 and 92 are respectively provided on the left and right sides of the housing 90 of the processing section 82a in the figure, and a heating device 93 and a holding table 94 are provided inside.

In the coating / developing apparatus of this embodiment, since both of the transport mechanisms 86 and 88 can access the processing unit 82, the transport mechanisms 86 and 88 are used as the transport path of the processing substrate G. It can be used selectively and can be transported efficiently.

The present invention is not limited to the above embodiment.

For example, the length of the cassette station 10 in the Y direction is set so that nine or more cassettes C can be set, and the number of processing units constituting the processing station 20 is set to the length of the cassette station 10 in the Y direction. Correspondingly, five or more rows can be provided.

In the above embodiment, the heating type processing unit is disposed in the processing unit inside the processing station, and the non-heating type processing unit which is easily affected by heat is disposed in the external processing unit. Conversely, it is also possible to arrange a non-heated processing unit inside the processing unit and a heated type processing unit outside the processing unit.

Further, in the above-described embodiment, the explanation has been given by taking as an example the apparatus for coating / developing an LCD glass substrate. However, the present invention is not limited to the heat treatment of an LCD glass substrate and other objects to be processed, for example, a silicon wafer. The present invention can be similarly applied to an apparatus, a plasma apparatus, an etching apparatus, an ashing apparatus, a sputtering apparatus, an ion implantation apparatus, a plasma CVD apparatus, a single-wafer CVD apparatus, an inspection apparatus, a cleaning apparatus, an exposure apparatus, and other apparatuses.

[0079]

As described above in detail, according to the first aspect of the present invention, two or more transport paths are disposed substantially in parallel, and the processing section is disposed along the transport paths. When the length of the station in the Y direction matches the length of the processing station in the Y direction, the outer shape of the entire processing apparatus becomes rectangular,
Dead space when installed in a clean room can be eliminated.

According to the second aspect of the present invention, since the processing units are arranged on both sides of each transport path, the number of the processing units is increased, and the clean room can be used efficiently.

According to the third aspect of the present invention, as the loading / unloading means, a loading table for loading a plurality of storage cassettes in a line substantially orthogonal to the transport path, and moving in a direction substantially orthogonal to the transport path. Since a transfer mechanism for loading and unloading an object to and from the storage cassette is employed, the object to be processed can be efficiently stored and transported in a limited space, and a clean room can be used efficiently. .

According to the fourth aspect of the present invention, two transfer paths are provided substantially in parallel, and the processing section is disposed along the transfer paths. The length of the processing apparatus coincides with the length in the Y direction, and the outer shape of the entire processing apparatus becomes rectangular, so that a dead space when installed in a clean room can be eliminated.

According to the fifth aspect of the present invention, since the maintenance path is provided between the processing units disposed between the two transport paths, the maintenance path is provided between the two transport paths. Even if two rows of processing units are arranged, these processing units can be easily maintained and managed through this passage.

According to the sixth aspect of the present invention, since a curtain for regulating the flow of air is provided above the heating-type processing unit disposed between the two transport paths, the curtain generated from the heating-type processing unit is provided. It is possible to effectively prevent the heat from diffusing near the processing section disposed outside the transport path. In addition, the heat generated in the clean room can be concentrated and effectively exhausted, thereby reducing maintenance costs.

According to the seventh aspect of the present invention, the loading / unloading means includes a loading table for loading a plurality of storage cassettes in a line substantially orthogonal to the transport path, and moving in a direction substantially orthogonal to the transport path. Since a transfer mechanism for loading and unloading an object to and from the storage cassette is employed, the object to be processed can be efficiently stored and transported in a limited space, and a clean room can be used efficiently. .

According to the present invention, since the processing units such as the coating unit and the developing unit, which need to perform maintenance management at high frequency, are arranged outside the transport path, the coating unit and the developing unit are arranged. Maintenance management can be performed easily.

According to the ninth aspect of the present invention, since a curtain for regulating the flow of air is provided above the heating-type processing unit disposed between the two transport paths, the curtain generated from the heating-type processing unit is provided. It is possible to effectively prevent heat from diffusing in the vicinity of a processing unit that is easily affected by heat, such as a coating unit and a developing unit disposed outside the transport path. In addition, the heat generated in the clean room can be concentrated and effectively exhausted, thereby reducing maintenance costs.

According to the tenth aspect of the present invention, as the loading / unloading means, a loading table for loading a plurality of storage cassettes in a line substantially orthogonal to the transport path, and moving in a direction substantially orthogonal to the transport path. Since a transfer mechanism for loading and unloading an object to and from the storage cassette is employed, the object to be processed can be efficiently stored and transported in a limited space, and a clean room can be used efficiently. .

According to the eleventh aspect of the present invention, two transport paths are provided substantially in parallel, and along these two transport paths,
Since the processing units are arranged in three rows outside the transport path and between the two transport paths, the length of the cassette station in the Y direction coincides with the length of the processing station in the Y direction, so that the outer shape of the entire processing apparatus is rectangular. Thus, a dead space when installed in a clean room can be eliminated.

According to the twelfth aspect of the present invention, since the processing section capable of transporting the object to be processed between the two transport paths is disposed between the two transport paths. It can provide flexibility in the way of transporting treated objects,
The object to be processed can be efficiently transported.

According to the thirteenth aspect of the present invention, since the heating-type processing section is disposed between the two transport paths, heat generated from the heating-type processing section is generated in the vicinity of the processing section disposed outside the transport path. Can be prevented effectively.

According to the fourteenth aspect of the present invention, since a curtain for regulating the flow of air is provided above the processing unit disposed between the two transport paths, the curtain is disposed between the two transport paths. The heat generated from the processing unit can be effectively prevented from diffusing to the vicinity of the processing unit arranged outside the transport path. In addition, the heat generated in the clean room can be concentrated and effectively exhausted, thereby reducing maintenance costs.

According to the fifteenth aspect of the present invention, as the loading / unloading means, the mounting table for mounting a plurality of storage cassettes in a line substantially orthogonal to the transport path, and moving in a direction substantially orthogonal to the transport path, Since a transfer mechanism for loading and unloading an object to and from the storage cassette is employed, the object to be processed can be efficiently stored and transported in a limited space, and a clean room can be used efficiently. .

[Brief description of the drawings]

FIG. 1 is a plan view showing an overall configuration of a coating and developing apparatus according to a first embodiment of the present invention.

FIG. 2 is a diagram illustrating a processing station of the coating and developing apparatus according to the first embodiment of the present invention when viewed from an X direction.

FIG. 3 is a diagram illustrating a state in which the coating and developing apparatus according to the first embodiment of the present invention is viewed from a Y direction.

FIG. 4 is a plan view showing an overall configuration of a coating and developing apparatus according to a second embodiment of the present invention.

FIG. 5 is a partially enlarged view of a section of a processing station of a coating and developing apparatus according to a second embodiment of the present invention.

FIG. 6 is a plan view showing the overall configuration of a conventional T-type layout coating / developing apparatus.

[Explanation of symbols]

 G Glass substrate (object to be processed) 25, 27 Transport path 21a to 24b Processing section C Storage cassette (load-in / out means) 11 Mounting table (load-in / out means) 12 Load-in / out mechanism (load-in / out means) 13 Load-in / out path (load-in / out) Means) 26, 28 Transport mechanism 29 Pathway for maintenance management 70 Curtain

Claims (15)

[Claims] A plurality of transport paths arranged substantially in parallel with each other; a processing unit disposed along each of the transport paths; and a loading / unloading unit for loading / unloading an object to / from each transport path. A processing apparatus, comprising: a transport mechanism configured to transport an object to be processed to each processing unit and the loading / unloading unit via each of the transport paths. 2. The processing apparatus according to claim 1, wherein the processing units are arranged on both sides of each of the transport paths. 3. The processing apparatus according to claim 1, wherein said loading / unloading means includes: a mounting table for mounting a plurality of storage cassettes in a line substantially orthogonal to the transport path; A processing apparatus, comprising: a loading / unloading mechanism that moves and transfers an object to and from the storage cassette. 4. A conveyance path arranged substantially in parallel with each other, a heating-type processing section disposed along and along the two conveyance paths, and a heating-type processing section disposed along and outside the two conveyance paths. A non-heating type processing section, carrying-in / out means for carrying in / out an object to / from each transport path, and a transport mechanism for transporting the workpiece to each processing section and the carrying-in / out means via each transport path. A processing device comprising: 5. The processing apparatus according to claim 4, further comprising a maintenance path between the processing units disposed between the two transport paths. apparatus. 6. The processing apparatus according to claim 4, wherein the heating-type processing unit includes a curtain on an upper portion thereof for regulating a flow of air. 7. The processing apparatus according to claim 4, wherein the loading / unloading means includes a loading table for loading a plurality of storage cassettes in a line substantially orthogonal to a transport path. A processing apparatus, comprising: a carrying-in / out mechanism that moves in a direction substantially orthogonal to a transport path and carries in / out an object to / from the storage cassette. 8. A conveyance path disposed substantially parallel to each other, a heating-type processing unit disposed along and along the two conveyance paths, and a heating-type processing unit disposed outside along the two conveyance paths. Coating / development unit, loading / unloading means for loading / unloading the object to / from each transport path, and transport for transporting the workpiece to each processing unit / loading / unloading means via each transport path. A processing device comprising a mechanism. 9. The processing apparatus according to claim 8, wherein the heating-type processing unit disposed along the two transport paths has a curtain at an upper portion thereof for restricting the flow of air. Processing equipment. 10. The processing apparatus according to claim 8, wherein said loading / unloading means includes: a mounting table for mounting a plurality of storage cassettes in a line substantially orthogonal to the transport path; And a loading / unloading mechanism for moving the workpiece in and out of the housing cassette. 11. Two transport paths arranged substantially in parallel to each other, and one row is arranged along the two transport paths, outside the two transport paths, and between the two transport paths. A processing unit; loading / unloading means for loading / unloading the object to / from each transport path; and a transport mechanism for transporting the workpiece to each processing unit and the loading / unloading means via the transport path. A processing device characterized by the above-mentioned. 12. The processing apparatus according to claim 11, wherein the processing unit disposed between the two transport paths transports the workpiece between both of the two transport paths. A processing unit capable of performing the following. 13. The processing apparatus according to claim 11, wherein the processing unit disposed between the two transport paths is a heating type processing unit. 14. The processing apparatus according to claim 13, wherein the processing unit disposed between the two transport paths has a curtain on an upper portion thereof for regulating a flow of air. apparatus. 15. The processing apparatus according to claim 11, wherein the loading / unloading unit loads the plurality of storage cassettes in a line substantially orthogonal to the transport path. A processing apparatus, comprising: a carrying-in / out mechanism that moves in a direction substantially orthogonal to a transport path and carries in / out an object to / from the storage cassette.