JPH11231336A - Liquid crystal panel, liquid crystal display device using the same, electronic device, and method of manufacturing liquid crystal panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid crystal panel which enables high-precision alignment among a transparent substrate constituting the liquid crystal panel and other electronic parts and substrates. SOLUTION: A liquid crystal panel 10 provided with a transparent substrate 11, where a metallic wiring pattern which electrically controls a liquid crystal material is formed, and a metallic oxide film interposed between the transparent substrate 11 and the metallic wiring pattern is provided with a positioning mark 71 for alignment to a driver IC 50 in an end part mounting side 11A of the transparent substrate 11, and the metallic oxide film is removed to expose the surface of the transparent substrate 11 in an area A in the vicinity of the peripheral edge of the positioning mark 71. Since the transparent substrate 11 is exposed in the area A in the vicinity of the peripheral edge of the positioning mark 71, the boundary part of the positioning mark 71 can be accurately recognized, and the precision of alignment is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a transparent substrate on which a metal wiring pattern for electrically controlling a liquid crystal material is formed,
The present invention relates to a liquid crystal panel including the transparent substrate and a metal oxide film interposed between the metal wiring patterns, a liquid crystal display device using the liquid crystal panel, an electronic device, and a method for manufacturing a liquid crystal panel.

[0002]

2. Description of the Related Art Conventionally, liquid crystal display devices using liquid crystal panels have been used in electronic devices such as mobile phones and personal computers.
The use of a liquid crystal display device makes it possible to reduce the weight and thickness of display portions for images, characters, and the like.
The weight can be reduced. A liquid crystal panel used in such a liquid crystal display device includes a pair of transparent glass substrates disposed to face each other with a predetermined gap, and a liquid crystal substance hermetically sealed in the gap between the glass substrates. Be composed.

A metal wiring pattern is formed on at least one of the opposing surfaces of a pair of glass substrates in order to control a screen by applying a voltage to a liquid crystal material for each pixel. For example, TFT (Thin Film Trans)
In the case of an istor) type liquid crystal panel, the metal wiring pattern includes a scanning line and a data line arranged in a grid on one glass substrate, and a thin film transistor formed in a pixel unit defined by the scanning line and the data line. With
The liquid crystal material is electrically controlled using the thin film transistor as a switching element.

[0004] Also, TFD (Thin Film Di)
In the case of an (ode) type liquid crystal panel, the metal wiring pattern includes a plurality of data lines arranged in parallel on the facing surface of one glass substrate and a plurality of metal wiring patterns arranged in a direction orthogonal to the data lines on the facing surface of the other glass substrate. The semiconductor device includes scanning lines arranged in parallel and a diode formed in a pixel unit defined by the data line and the scanning line. The diode is used as a switching element to electrically control a liquid crystal material.

The metal wiring patterns of these TFT and TFD type liquid crystal panels are made of metal such as tantalum (Ta), and a base film of metal oxide, In the case of tantalum, an oxide film (TaOx) of tantalum intervenes to ensure the adhesiveness between the two.

On the other hand, a driver I is mounted on an end of a glass substrate of such a liquid crystal panel in order to drive the liquid crystal panel.
C is directly implemented (COG) or TCP (Tape
Carrier Package) is connected.

[0007] Since this driver IC sends an electric signal to the above-mentioned scanning lines and data lines, it must be accurately mounted at a predetermined position on a glass substrate.

For this reason, usually, a positioning mark is provided on a glass substrate, the glass substrate is irradiated with light, and the positioning mark is detected by transmitted light or reflected light, so that the position between the glass substrate and a driver IC or the like is determined. We are adjusting.

[0009]

However, when a positioning mark is provided on a glass substrate constituting the above-mentioned liquid crystal panel, since a metal oxide film such as TaOx is formed on the glass substrate, the positioning mark is formed by transmitted light. There is a problem that it is difficult to accurately detect the position of the mark.

That is, a metal wiring pattern on a glass substrate is formed through a plurality of times of sputtering, etching and the like, and the thickness of a metal oxide film such as TaOx tends to be non-uniform. Therefore, there is a problem that the transmitted light or the reflected light of the positioning mark is refracted or irregularly reflected to blur the boundary between the positioning mark and a portion other than the position, and that the position of the positioning mark cannot be accurately detected.

In particular, when the metal oxide film is made of TaOx,
Since the refractive index of the TaOx film itself is large, there is a problem that it is difficult to accurately detect the positioning mark.

An object of the present invention is to provide a liquid crystal panel having a transparent substrate on which a metal wiring pattern for electrically controlling a liquid crystal material is formed, and a metal oxide film interposed between the transparent substrate and the metal wiring pattern. The present invention provides a liquid crystal panel capable of positioning a transparent substrate with another member with high accuracy, a liquid crystal display device using the liquid crystal panel, an electronic device, and a method of manufacturing a liquid crystal panel.

[0013]

A liquid crystal panel according to the present invention comprises a transparent substrate on which a metal wiring pattern for electrically controlling a liquid crystal material is formed, and a metal interposed between the transparent substrate and the metal wiring pattern. A liquid crystal panel including an oxide film, wherein the transparent substrate is provided with a positioning mark for positioning with another electronic component, a substrate, or the like, and the metal oxide film is removed near a periphery of the positioning mark. And the surface of the transparent substrate is exposed.

Here, as a metal constituting the metal wiring pattern, for example, tantalum (Ta) can be considered, and as a metal oxide film for securing the adhesion between the tantalum layer and the transparent substrate, an oxide of tantalum (TaOx) is used. ) Can be considered.

Further, as the positioning mark, for example,
If the detection is performed using transmitted light, it is preferable to employ a positioning mark composed of a material that blocks transmitted light, in other words, for example, it is conceivable that the mark is formed by a metal thin film such as tantalum, Its shape is also circular,
Various things such as rectangles are conceivable.

According to the present invention, since the metal oxide film is removed near the periphery of the positioning mark and the surface of the transparent substrate is exposed, it is possible to accurately grasp the boundary between the positioning mark and a portion other than the position. Thus, the alignment of the transparent substrate with another member or the like can be performed with high accuracy.

In the above, it is preferable to use a positioning mark made of a metal different from the metal contained in the metal oxide film as the above-mentioned positioning mark.
For example, when the metal oxide film is made of TaOx, it is preferable that the positioning mark is made of chromium (Cr).

That is, since the positioning mark is made of a metal different from the metal contained in the metal oxide film,
The metal oxide film near the periphery can be removed without covering the positioning mark with a photoresist or the like, and the positioning mark is not eroded by the etching process. Therefore, it is possible to form a positioning mark having a clear boundary portion without complicating the process.

Further, according to the method of manufacturing a liquid crystal panel of the present invention, there is provided a transparent substrate on which a metal wiring pattern for electrically controlling a liquid crystal material is formed, and a metal oxide layer interposed between the transparent substrate and the metal wiring pattern. A method for manufacturing a liquid crystal panel, comprising: a film; and a positioning mark provided on the transparent substrate for aligning the transparent substrate and other electronic components, the substrate, and the like, wherein the metal oxide film is formed on the transparent substrate. An oxide film forming step to form thereon, a mark forming step of providing the positioning mark on the metal oxide film, and an etching step of removing a metal oxide film near the periphery of the positioning mark by etching. It is characterized by being.

According to the present invention, since the metal oxide film near the periphery is removed by the etching step after the formation of the positioning mark, the positioning mark which can achieve high accuracy of the positioning is provided. It can be provided only by removing the metal oxide film to the minimum necessary. Further, since the metal oxide film is removed by the etching step, the step of removing the metal oxide film can be performed in substantially the same step as the step of forming the metal wiring pattern. In the above, it is preferable that the above-described method for manufacturing a liquid crystal panel includes a masking step of performing a masking process according to the position and shape of the positioning mark after the mark forming step and before the etching step.

That is, since the masking step is included, after the positioning mark is formed, the positioning mark can be covered and protected by the masking process, and the erosion of the positioning mark by the etching step can be prevented. Therefore, the boundary between the positioning mark and another portion can be made clear, and the alignment of the transparent substrate with another member or the like can be more accurately performed.

The above-mentioned positioning marks include:
It is preferable to employ a positioning mark composed of a metal different from the metal contained in the metal oxide film.

That is, when the metal oxide film is made of TaOx and the positioning mark is made of Ta,
If the etching for removing TaOx is performed as it is, the positioning mark is also eroded at the same time. On the other hand, TaO
When a metal oxide film is formed by x and a positioning mark is formed by Cr, the positioning mark is not eroded even if etching for removing TaOx is performed.

Therefore, a liquid crystal panel having a clear boundary between the positioning mark and a portion other than the positioning mark can be manufactured without providing a masking step, and the liquid crystal panel manufacturing step can be simplified. In particular, in the case of a TFD type liquid crystal panel, metal Cr is a part of a diode formed in a pixel unit, and a positioning mark can be provided on a glass substrate together with the formation of the diode, which significantly simplifies the process. .

Further, a liquid crystal display device according to the present invention includes any one of the liquid crystal panels described above and a semiconductor element for controlling the liquid crystal panel. For example, a driver IC is directly mounted on a transparent substrate. A mounted COG type liquid crystal display device or a liquid crystal display device in which TCP is connected to an end of a transparent substrate are conceivable.

An electronic apparatus according to the present invention includes the above-described liquid crystal display device and a housing for accommodating the liquid crystal display device.
It is a mobile phone, a wristwatch, a notebook computer, or the like.

In such a liquid crystal display device and electronic equipment, since the liquid crystal panel is employed to improve the assembling accuracy of the liquid crystal display device, defective electronic equipment including the liquid crystal display device may be generated. The rate can be reduced, and the manufacturing cost can be reduced.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an exploded perspective view of a TFD type liquid crystal panel 10 according to the first embodiment.

The liquid crystal panel 10 has a pair of transparent glass substrates 11 and 12 which are opposed to each other with a predetermined gap.
A liquid crystal material 13 hermetically sealed in a gap between the pair of glass substrates 11 and 12; and a polarizing plate 14 disposed outside the pair of glass substrates 11 and 12 and having polarization directions orthogonal to each other. 15 are included.

The white light W from the backlight or the like
1 enters the liquid crystal material 13 via the lower polarizing plate 14 and the glass substrate 11 in FIG. 1 and is twisted according to the orientation state of the liquid crystal material 13 to form the upper glass substrate 12 and the polarizing plate 15. Are emitted through On the opposite surface of the lower glass substrate 11 facing the upper glass substrate 12, a TFD (to be described later) is used to change the alignment state of the liquid crystal substance 13.
A metal wiring pattern 30 including an element portion 32 is formed.

As shown in FIG. 2, the metal wiring pattern 30 includes a plurality of data lines 31 arranged in parallel on the glass substrate 11, and a TFD element portion 32 which performs a switching operation in accordance with a signal from the data line 31. And this TFD element section 3
And a pixel electrode 33 made of an ITO film for applying a voltage to the liquid crystal material 13 in response to the switch operation of No. 2.

As shown in the detailed sectional view of FIG. 3, the TFD element portion 32 includes a Ta layer 321 serving as a metal wiring, a Ta ₂ O ₅ layer 322 formed on the Ta layer 321,
A bidirectional diode having a steep threshold characteristic consisting ₂ O ₅ layer Cr layer 323 formed on the 322, Cr
The layer 323 is electrically connected to the pixel electrode 33.

The Ta layer 3 of the TFD element section 32
Between the glass substrate 11 and the glass substrate 11 is T
The a ₂ O ₅ film 34 is interposed, and the Ta ₂ O ₅ film 34 ensures the adhesion between the Ta layer 321 and the glass substrate 11.

Since the data line 31 is also formed of a Ta layer, in order to secure the adhesiveness to the glass substrate 11, the data line 31 is provided between the Ta layer and the glass substrate 11 as described above.
A Ta ₂ O ₅ layer is interposed.

On the other hand, as shown in FIG. 1, a lattice black formed by sputtering Cr on the glass substrate 12 is formed on the surface of the upper glass substrate 12 which faces the lower glass substrate 11. The mask 41 and the black mask 4
The R, G, and B color filters 42 arranged in pixel units defined by 1 and the black mask 41 and the color filters 42 are arranged so as to cover them, and are orthogonal to the data lines 31 on the lower glass substrate 11. And a plurality of scanning lines 43 made of an ITO film arranged in parallel in the direction.

The liquid crystal panel 10 having such a TFD type structure
As shown in FIG. 4, a liquid crystal display device 60 is configured by mounting driver ICs 50 and 80 as semiconductor elements in order to output a data line 31 signal and control the liquid crystal material 13.

That is, the liquid crystal display device 60 includes the liquid crystal panel 10 described above and the end mounting sides 11A, 12A of the glass substrates 11, 12 other than the display portion 10A of the liquid crystal panel 10.
It is configured to include driver ICs 50 and 80 mounted thereon. Although not shown in FIG. 4, the driver I
The terminal of C50 is connected to the data line 31 formed on the glass substrate 11, and is mounted on the end of the glass substrate 11 in order to ensure the adhesion between the Ta layer constituting the data line 31 and the glass substrate 11. _Ta 2 _{0 5} film 34 on the side 11A are formed. Although not shown, each terminal of the driver IC 80 on the glass substrate 12 is connected to the above-described scanning line 43.

Then, the edge mounting side 11 of the glass substrate 11
A circular positioning mark 71 is formed on A in order to align the glass substrate 11 with the driver IC 50.

In the case of the TFD type liquid crystal panel 10, as described above, the driver IC is also provided on the upper glass substrate 12.
Since it is necessary to mount 80, a positioning mark 71 is formed to align the driver IC 80 with the glass substrate 12.

The positioning mark 71 is made of a Ta metal film provided on the Ta ₂ O ₅ film 34 on the glass substrate 11, as shown in the detailed sectional view of FIG. In the region A, the Ta ₂ O ₅ film 34 is removed, and the surface of the glass substrate 11 is exposed.

Such a positioning mark 71 is formed by a sputtering method or the like in the step of forming the metal wiring pattern 30. Specifically, the positioning mark 71 is formed in the following procedure. After cleaning the glass substrate 11, a Ta ₂ O ₅ film 34 to be a metal oxide film is formed on the glass substrate 11 by a sputtering method (oxide film forming step).

Further, a Ta layer 321 constituting a metal wiring is formed on the Ta ₂ O ₅ film 34 by a sputtering method.

The metal wiring pattern 30 and the positioning mark 7 are formed on the glass substrate 11 by photolithography.
1 is covered with a photoresist, and the other portion of the Ta film is removed by etching (mark forming step).

The TFD element section 32 is formed by anodization.
The Ta ₂ O ₅ layer 322 is formed on the surface of the Ta layer 321.

After performing a masking process according to the position and the shape of the positioning mark 71 (masking step), the T near the periphery of the positioning mark 71 is etched by etching.
The a ₂ O ₅ film 34 is removed.

A driver IC 50 for driving liquid crystal is mounted on the liquid crystal panel 10 provided with the positioning marks 71 formed as described above. That is, by irradiating the positioning mark 71 with transmitted light and detecting the relative position between the end mounting side 11A of the liquid crystal panel 10 and the driver IC 50 with high accuracy, the liquid crystal panel 10 and the driver IC 5 are detected.
Zero alignment is performed. Then, both are physically and electrically connected by an anisotropic conductive sheet (ACF) to complete a COG type liquid crystal display device 60 including the liquid crystal panel 10 and the driver IC 50 serving as a semiconductor element.

The driver IC 80 is also mounted on the glass substrate 12 on which the color filters 42 are arranged. However, the procedure and structure are substantially the same as those described above, and the description thereof will be omitted. The liquid crystal display device 60 is incorporated in the housing of various electronic devices and used as a display portion for information, images, and the like. For example, the liquid crystal display device 60 is incorporated in the housing 401 of the mobile phone 400 shown in FIG. Is incorporated in a housing 501 of the notebook computer 500 shown in FIG.

According to the above-described first embodiment, the following effects can be obtained.

That is, since the Ta ₂ O ₅ layer 322 which is a metal oxide film is removed near the periphery of the positioning mark 71 and the surface of the glass substrate 11 is exposed, the boundary between the positioning mark 71 and the other portion can be accurately determined. The positioning of the glass substrate 11 and the driver IC 50 constituting the liquid crystal panel 10 can be performed with high accuracy. In particular, the effect is remarkable in the liquid crystal panel 10 in which the Ta ₂ O ₅ layer 322 having a large refractive index is formed.

Further, since the Ta ₂ O ₅ layer 322 near the periphery is removed by the etching process after the positioning mark 71 is formed in the above-described manufacturing method of the liquid crystal panel 10, the Ta ₂ O ₅ layer 322 is required. With only minimal removal, a clear positioning mark 71 at the boundary can be provided.

Further, since the Ta ₂ O ₅ layer 322 is removed by the etching step, the step of removing the Ta ₂ O ₅ layer 322 can be performed in substantially the same step as the step of forming the metal wiring pattern 30.

Since the masking step is included, the Ta ₂ O ₅ layer 3 near the periphery of the positioning mark 71
22 is removed by etching.
The outer peripheral portion is not eroded by the positioning mark 1, and the outline of the boundary portion of the positioning mark 71 can be made clear.
When mounting the driver IC 50 on 1A, it is possible to increase the accuracy of the positioning of both.

Since the liquid crystal display device 60 includes such a liquid crystal panel 10, the defect rate of the liquid crystal display device 60 can be reduced, and the electronic device 4
The manufacturing costs of the devices 00 and 500 can be greatly reduced.

Next, a second embodiment of the present invention will be described. In the following description, the description of the same or similar parts or the like as the already described parts or members will be simplified or omitted.

In the first embodiment, the liquid crystal panel 10
The positioning mark 71 provided on the substrate was formed of metal Ta contained in the Ta ₂ O ₅ film 34 as a metal oxide film.

On the other hand, the positioning marks 171 provided on the liquid crystal panel 110 according to the second embodiment are different from those shown in FIG.
As shown in the figure, the point is that a Cr metal film is formed on the Ta ₂ O ₅ layer 322 by a sputtering method.

The positioning mark 171 is formed together with the metal wiring pattern 30 in the same manner as described above. Specifically, the positioning mark 171 is formed in the following procedure.

After cleaning the glass substrate 11, a Ta 2 O 5 film 34 serving as a metal oxide film is formed on the glass substrate 11 by a sputtering method (an oxide film forming step).

Further, a Ta layer 321 constituting a metal wiring is formed on the Ta ₂ O ₅ film 34 by a sputtering method.

The metal wiring pattern 30 is covered with a photoresist on the glass substrate 11 by photolithography, and the other portion of the Ta metal film is removed by etching. The surface of the Ta layer 321 is made of Ta ₂ O by anodization.
_Five layers 322 are formed.

The TFD element section 3 of the Ta ₂ O ₅ layer 322
Then, Cr is sputtered on a portion corresponding to No. 2 and a portion corresponding to the driver IC mounting position to form a Cr layer 323 and a positioning mark 171.

The TFD is formed by photolithography.
The element portion 32 and the positioning mark 171 are covered with a photoresist, and the other portion of the Cr metal film is removed by etching (mark forming step).

The Ta ₂ O ₅ layer 322 formed on the surface of the metal wiring pattern 30 is covered with a photoresist, and the Ta ₂ O ₅ film 34 near the positioning mark 171 is removed by etching (etching step).

The procedure for mounting the driver IC and the like on the liquid crystal panel 110 as described above,
For information on how to use the liquid crystal display device with C
Since it is substantially the same as the above-described first embodiment, the description thereof is omitted.

According to the liquid crystal panel 110 according to the second embodiment, the following effects can be obtained in addition to the effects (1) described in the first embodiment.

That is, since the positioning mark 171 is made of a metal (Cr) different from the metal (Ta) contained in the Ta ₂ O ₅ film 34 serving as a base, the positioning mark 171 is not covered with the photoresist. The Ta ₂ O ₅ film 34 can be removed by etching at a portion near the peripheral edge of the positioning mark 171, and the positioning mark 171 is not eroded by the etching process.
Therefore, the positioning mark 171 having a clear outline at the boundary portion is provided.
Can be formed without complicating the process.

In particular, since the positioning mark 171 is formed of metallic Cr, the
In the step of forming the layer 323, the marks described above can be formed at the same time.

The present invention is not limited to the above embodiments, but includes the following modifications.

That is, the method of manufacturing the positioning mark in the first embodiment described above includes a masking step of covering the positioning mark 71 with the photoresist.
The present invention is not limited to this, and an etching step of removing the Ta ₂ O ₅ film 34 on the glass substrate 11 without performing the masking processing of the positioning mark 71 may be performed. In this case, as shown in FIG. 9, the Ta ₂ O ₅ film 34 partially remains on the outer peripheral portion of the positioning mark 271 provided on the liquid crystal panel 210. However, the positioning accuracy between the glass substrate and other electronic components such as a driver IC is determined by the structure and denseness of the wiring such as a metal wiring pattern. Even with 271, it is possible to achieve sufficiently high accuracy.

Further, the liquid crystal display device 60 according to the first embodiment is of the COG type. However, the present invention is not limited to this, and the present invention is applicable to a case where a TCP is connected to the mounting side of the glass substrate 11. Even if it is used, the same effects as described above can be enjoyed.

In each of the embodiments described above, the present invention is applied to the TFD type liquid crystal panels 10 and 110.
The present invention may be applied to a TFT type liquid crystal panel and an STN type liquid crystal panel.

In each of the above-described embodiments, Ta is used as the metal constituting the metal wiring pattern 30. However, the present invention is also applicable to the case where other metals are used as the material of the wiring pattern. can do.

Furthermore, in each of the above-described embodiments, the positioning marks 71 and 171 are used for aligning the glass substrate 11 constituting the liquid crystal panel 10 with the driver ICs 50 and 80. The present invention is not limited thereto, and the present invention may be used, for example, when performing positioning of a pair of glass substrates that are arranged to face each other.

In addition, specific structures, shapes, and the like when the present invention is implemented may be other structures and the like as long as the object of the present invention can be achieved.

[0076]

According to the liquid crystal panel and the method of manufacturing the liquid crystal panel of the present invention as described above, the metal oxide film serving as the base is removed near the periphery of the positioning mark, and the surface of the transparent substrate is exposed. In addition, it is possible to accurately grasp the boundary portion of the positioning mark, and it is possible to accurately perform the alignment between the transparent substrate and other members. Therefore, in the manufacture of the liquid crystal display device, the defect rate can be reduced,
The manufacturing cost of an electronic device can be significantly reduced.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view illustrating a structure of a liquid crystal panel according to a first embodiment of the present invention.

FIG. 2 is a plan view illustrating a structure of a metal wiring pattern in the embodiment.

FIG. 3 is a cross-sectional view illustrating a structure of a TFD element section in the embodiment.

FIG. 4 shows a driver I in the liquid crystal panel in the embodiment.
It is a top view showing the liquid crystal display device which mount C.

FIG. 5 is a sectional view illustrating a positioning mark provided on a glass substrate of the liquid crystal panel of the embodiment.

FIG. 6 is a schematic perspective view illustrating a portable electronic device using the liquid crystal display device including the liquid crystal panel of the embodiment.

FIG. 7 is a schematic perspective view showing another portable electronic device using the liquid crystal display device including the liquid crystal panel of the embodiment.

FIG. 8 is a cross-sectional view illustrating a positioning mark provided on a liquid crystal panel according to a second embodiment of the present invention.

FIG. 9 is a cross-sectional view illustrating deformation of a positioning mark provided on a liquid crystal panel.

[Explanation of symbols]

10, 110, 210 Liquid crystal panel 11, 12 Transparent substrate 13 Liquid crystal material 30 Metal wiring pattern 34 Metal oxide film (Ta ₂ O ₅ film) 50, 80 Other electronic components, substrates, etc. 71, 171, 271 Positioning mark 60 Liquid crystal display Apparatus 400, 600 Electronic equipment

Claims (9)

[Claims] 1. A liquid crystal panel comprising: a transparent substrate on which a metal wiring pattern for electrically controlling a liquid crystal material is formed; and a metal oxide film interposed between the transparent substrate and the metal wiring pattern. The transparent substrate is provided with a positioning mark for positioning with another electronic component, a substrate, or the like. In the vicinity of the periphery of the positioning mark, the metal oxide film is removed to expose the surface of the transparent substrate. A liquid crystal panel characterized by the above-mentioned. 2. The liquid crystal panel according to claim 1, wherein the positioning mark is made of a metal different from a metal included in the metal oxide film. 3. The liquid crystal panel according to claim 1, wherein the metal forming the metal wiring pattern is tantalum (T).
a) wherein the metal oxide film is an oxide of this tantalum (TaOx)
A liquid crystal panel characterized by comprising: 4. The liquid crystal panel according to claim 3, wherein the positioning mark is made of chromium (Cr). 5. A liquid crystal display device comprising: the liquid crystal panel according to claim 1; and a semiconductor element for controlling the liquid crystal panel. 6. An electronic apparatus, comprising: the liquid crystal display device according to claim 5; and a housing in which the liquid crystal display device is housed. 7. A transparent substrate on which a metal wiring pattern for electrically controlling a liquid crystal substance is formed, a metal oxide film interposed between the transparent substrate and the metal wiring pattern, and provided on the transparent substrate. A method of manufacturing a liquid crystal panel including a positioning mark for positioning the transparent substrate and other electronic components, the substrate, and the like, wherein an oxide film forming step of forming the metal oxide film on the transparent substrate; A method for manufacturing a liquid crystal panel, comprising: a mark forming step of providing the positioning mark on a metal oxide film; and an etching step of removing a metal oxide film near the periphery of the positioning mark by etching. . 8. The method for manufacturing a liquid crystal panel according to claim 7, wherein after the mark forming step and before the etching step,
A method for manufacturing a liquid crystal panel, comprising a masking step of performing a masking process according to the position and shape of the positioning mark. 9. The method for manufacturing a liquid crystal panel according to claim 7, wherein the positioning mark is made of a metal different from a metal included in the metal oxide film. .