JPH11231148A - Film forming holder for optical fiber - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form a film only on the end surface of the optical fiber and to prevent the optical fiber from intertwining. SOLUTION: A hole 14 for fixation is formed penetrating a substrate holder 11 and the diameter on the side of its surface 15 is nearly equal to the diameter of a ferrule 16 ' into which an optical fiber 16 is inserted to spread the end part of the hole 14 for fixation on the side of the reverse surface 17, so that the insertion is facilitated; and a storage part 21 consisting of a back plate 22 and a cylindrical body 23 is fitted detachably onto the back surface of the sthstrate holder 11 and held in level with the surface, and the excessive-length part of the optical fiber 16 is wound around a winding part 27 clamped to the substrate holder 11 and back plate 22 by screwing rod bodies 28.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a holder for holding an optical fiber used for forming a thin film or the like on an end face of the optical fiber by, for example, an ion beam sputtering apparatus.

[0002]

2. Description of the Related Art A conventional film forming apparatus such as a vacuum deposition apparatus is manufactured on the assumption that a film is formed on a substrate such as glass on a flat plate, and a holder for holding the film forming substrate is also provided on the flat plate. It was made only for fixing things. Further, this substrate holder is provided with a central axis in order to make the film thickness distribution uniform during thin film formation, and performs film formation by rotating the axis at a constant speed around the axis.

[0003]

In this conventional substrate holder, it is not possible to hold a long object such as an optical fiber in the substrate holder so that a film is formed on the end face of the optical fiber. In addition, the film adheres to portions other than the end surface of the optical fiber. The present invention enables film formation on an optical fiber end face,
It is an object of the present invention to provide an optical fiber holder which is protected so that a film does not adhere to other portions and in which an optical fiber can be easily attached.

[0004]

In order to solve the above-mentioned problems, in the optical fiber holder according to the present invention, at least one surface of the substrate holder has a fiber fixing hole having the same diameter as the optical fiber tip surface. The optical fiber has a structure in which the optical fiber is inserted into the fixing hole, and the end face of the optical fiber is aligned with one surface of the holder and can be fixed to the holder. Further, a portion of the optical fiber fixing hole on the surface side opposite to the one surface of the substrate holder is a conical peripheral surface insertion portion whose diameter gradually increases as approaching this surface. This makes it easy to set (mount) the optical fiber on the substrate holder.

On the opposite side of the one side of the substrate holder, there is provided an optical fiber storage section capable of storing an extra length of the optical fiber fixed in the optical fiber fixing hole.

[0006]

FIG. 1 shows an embodiment of the present invention.
One end of a rotating shaft 12 is inserted into the center of the disk-shaped substrate holder 11, and the substrate holder 11 is fixed to the rotating shaft 12. In this embodiment, a plurality of optical fiber fixing holes 14 are formed at equal intervals on one circle centered on the rotation shaft 12. Substrate holder 1 of optical fiber fixing hole 14
The diameter of the surface (surface) 15 on the film-forming side of 1 is substantially the same as the diameter of the optical fiber 16 to be formed on the end face, and the optical fiber 16 is inserted into the optical fiber fixing hole 14. The optical end face of the optical fiber 16 is connected to the deposition surface 15 of the substrate holder 11.
And the optical fiber 16 is positioned on the same plane as the substrate holder 1.
1 can be held. Normally, the tip of the optical fiber 16 is inserted and protected in a so-called ferrule 16 ′, and the ferrule 16 ′ is inserted into the optical fiber fixing hole 14. Therefore, the diameter of the fixing hole 14 is slightly larger than the diameter of the ferrule 16 '.

[0007] The substrate holder 1 of the optical fiber fixing hole 14
The end opposite to the film-forming surface (front surface) 15 is an insertion portion 14a of a conical inner peripheral surface whose diameter gradually increases as approaching the opposite surface (back surface) 17, ie, an optical fiber. The fixing hole 14 is formed in a funnel shape so that the optical fiber 16 can be easily inserted into the optical fiber fixing hole 14.

[0008] The optical fiber 16 is inserted into the optical fiber fixing hole 14, and the optical fiber is fixed by the optical fiber fixing washer 18 with the front end surface of the optical fiber 16 substantially flush with the surface 15 of the substrate holder 11. It is suppressed. In this example, the washer 18 for fixing the optical fiber has a plate ring shape,
The outer peripheral surface of the optical fiber 1 inserted into the fixing hole 14 is
6, that is, in contact with the inner circumference of the array circle of ferrules 16 ',
The ferrule 16 ′ is pushed outward with respect to the rotation shaft 12 and is fixed to the substrate holder 11. The washer 18 for fixing the optical fiber is fixed to the substrate holder 11 with screws 19.

On the back surface 17 side of the substrate holder 11, an optical fiber 16 having a distal end inserted and fixed in an optical fiber fixing hole 14.
The optical fiber storage unit 21 for storing is configured to be detachable. For example, a back plate 22 is loosely inserted on the rotating shaft 12 at a distance from the back surface 17 of the substrate holder 11, and the back plate 22 has a diameter substantially equal to the diameter of the substrate holder 11. The cylindrical body 23 with the holder 11 and the back plate 22 inserted at both ends is fixed to the substrate holder 11 and the back plate 22 by, for example, screws 24 and 25, respectively.
The space surrounded by the substrate holder 11, the back plate 22, and the cylindrical body 23 constitutes the optical fiber storage section 21. The back plate 22 is removed by removing the screw 25, so that the optical fiber 16 can be attached to and removed from the substrate holder 11. In this case, the screw 24 may be removed, and the tubular body 23 may be removed to improve workability. These back plate 22, cylindrical body 2
The attachment and detachment of 3 is not limited to screws, but may be by other means.

Further, in this example, when the optical fiber 16 is relatively long, the optical fiber winding section 27 is provided in the optical fiber storage section 21 so that the optical fiber 16 can be easily stored in the optical fiber storage section 21. . For example, one end of a plurality of rods 28 is fixed to the back surface 17 of the substrate holder 11 at substantially equiangular intervals about the rotation axis 12 by, for example, being screwed, and the rod 28 is an end opposite to the screw. There is a brim,
It is screwed into the substrate holder 11 through a small hole formed in the back plate 22. Before this screw tightening, the cylindrical optical fiber winding part 27 is arranged so as to surround the plurality of rods 28,
Of the optical fiber winding part 27 by the
1 and the back plate 22 for fixing.

That is, each optical fiber 16 is inserted into each fixing hole 14 with the surface 15 of the substrate holder 11 placed on a work table (not shown) having a high-precision flat surface, and the tip of the optical fiber 16 is worked. The optical fiber 16 is fixed on the table, and each optical fiber 16 is fixed with the washer 18 for fixing the optical fiber. Thereafter, an optical fiber winding portion 27 is arranged so as to surround a screw hole into which the rod 28 is to be screwed. The back plate 22 is arranged, and the back plate 2
The rod 28 is passed through the small hole 2 to the substrate holder 11.
Of the substrate holder 11 and the back plate 22
And the optical fiber winding part 27 are fixed to each other. In this state, the optical fiber 16 is rotated by the rotation shaft 12 in a direction in which the substrate holder 11 is fixed to the film formation, and the optical fiber 16 is wound around the winding portion 27.
The cylindrical body 23 is wound up and the cylindrical body 23 is held in the state where all the optical fibers 16 are stored in the storage section 21.
Fix to 2.

[0012]

As described above, according to the present invention, the optical fiber 16 is connected to the optical fiber fixing hole 1 of the substrate holder 11.
4, the front end surface thereof substantially coincides with the surface 15 of the substrate holder 11, and
By substantially matching the diameter of the optical fiber 16 with the diameter of the optical fiber 16, a film can be formed only on the distal end face of the optical fiber 16.

Since the conical inner peripheral surface insertion portion 14a is provided in the optical fiber fixing hole 14, the optical fiber 16 can be easily attached to the substrate holder 11. Since the optical fiber storage section 21 is provided, even if the optical fiber is relatively long, the optical fiber is not entangled by the rotation of the substrate holder 11. In particular, by providing the winding portion 27 and winding the optical fiber 16 around it, there is no possibility that the optical fiber 16 is entangled.

When the optical fiber 16 is relatively short, the back plate 22 and the winding portion 27 are omitted, that is, the optical fiber attached to the substrate holder 11 on the back side of the substrate holder 11 while leaving only the cylindrical body 23. Just attach the cover around 16,
It is possible to prevent the film from adhering to portions other than the end surface of the optical fiber 16.

[Brief description of the drawings]

FIG. 1A is a plan view showing an embodiment of the present invention, and FIG. 1B is a sectional view taken along line AA of FIG.

Claims (4)

[Claims] An optical fiber is inserted through a substrate holder,
An optical fiber holder for film formation, characterized in that at least one end surface of the substrate holder is formed with an optical fiber fixing hole having a diameter substantially equal to the diameter of the optical fiber to be formed. 2. The optical fiber fixing hole according to claim 1, wherein said substrate holder has a conical peripheral surface insertion portion whose diameter gradually increases as a portion at least close to a surface opposite to said one surface approaches the opposite surface. The optical fiber holder for film formation according to claim 1, wherein the optical fiber holder is formed. 3. On the opposite side of the one side of the substrate holder,
3. The film-forming optical fiber holder according to claim 1, wherein a cover that shields the optical fiber whose one end is inserted into the optical fiber fixing hole from a film-forming source is attached. 4. An optical fiber storage device according to claim 3, wherein a surface of said cover opposite to said substrate holder is closed, and an optical fiber storage portion for storing said optical fiber is detachable. Optical fiber holder for membrane.