JPH11215795A - Control actuator with magnetosensitive element, and lens mirror cylinder - Google Patents
Control actuator with magnetosensitive element, and lens mirror cylinderInfo
- Publication number
- JPH11215795A JPH11215795A JP2630298A JP2630298A JPH11215795A JP H11215795 A JPH11215795 A JP H11215795A JP 2630298 A JP2630298 A JP 2630298A JP 2630298 A JP2630298 A JP 2630298A JP H11215795 A JPH11215795 A JP H11215795A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- magnetic
- linear motor
- permanent magnet
- control actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lens Barrels (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、レンズ、ミラー等
の被駆動体を高速駆動する用途等に用いる磁気感応素子
付き制御アクチュエータ及びレンズ鏡筒に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control actuator with a magnetically sensitive element and a lens barrel used for driving a driven body such as a lens and a mirror at a high speed.
【0002】[0002]
【従来の技術】従来、ステッピングモータ等の回転型ア
クチュエータを用いて可動レンズ系を動かすレンズ鏡筒
が提案されている。2. Description of the Related Art Conventionally, a lens barrel that moves a movable lens system using a rotary actuator such as a stepping motor has been proposed.
【0003】また、特開平8−149777号では、リ
ニアモータを用いて可動レンズ系を動かすと共に、磁気
感応素子で位置制御を行う光学装置が提案されている。In addition, Japanese Patent Application Laid-Open No. 8-149777 proposes an optical device that moves a movable lens system using a linear motor and controls position using a magnetically sensitive element.
【0004】[0004]
【発明が解決しようとする課題】ビデオカメラ等のレン
ズ鏡筒において、高速にレンズを動かす場合、リニアモ
ータ等を用いる必要性があり、更にレンズの位置制御用
に磁気感応素子等を用いる必要性があった。そのような
状況において小型化しようとする場合、リニアモータと
磁気感応素子とを用いる装置ではリニアモータの漏れ磁
束が磁気感応素子に与える影響が大きく小型化が難しい
問題があった。When moving a lens at high speed in a lens barrel of a video camera or the like, it is necessary to use a linear motor or the like, and further, it is necessary to use a magnetic sensing element or the like for controlling the position of the lens. was there. In an attempt to reduce the size in such a situation, in a device using a linear motor and a magnetically sensitive element, there is a problem that the leakage magnetic flux of the linear motor greatly affects the magnetically sensitive element and it is difficult to reduce the size.
【0005】なお、前記漏れ磁束を低減する手段として
一般的な磁気シールドでは、リニアモータの構造上の制
約があり、前記漏れ磁束を完全に抑制することは困難
で、ある程度の漏れ磁束が残り、これが小型化の障害と
なる。In a general magnetic shield as means for reducing the leakage magnetic flux, there is a restriction on the structure of the linear motor, and it is difficult to completely suppress the leakage magnetic flux. This is an obstacle to miniaturization.
【0006】本発明は、上記の点に鑑み、リニアモータ
と位置制御用磁気感応素子とを用いる構成において外乱
磁界減少用永久磁石を付加することで、磁気感応素子へ
の外乱磁界を減少させ形状の小型化及び位置制御動作の
信頼性の向上を図った磁気感応素子付き制御アクチュエ
ータ及びレンズ鏡筒を提供することを目的とする。In view of the above, the present invention reduces the disturbance magnetic field to the magnetic sensing element by adding a disturbance magnetic field reducing permanent magnet in a configuration using a linear motor and a position control magnetic sensing element. It is an object of the present invention to provide a control actuator with a magnetically sensitive element and a lens barrel, which achieve miniaturization of the device and improve the reliability of the position control operation.
【0007】本発明のその他の目的や新規な特徴は後述
の実施の形態において明らかにする。[0007] Other objects and novel features of the present invention will be clarified in embodiments described later.
【0008】[0008]
【課題を解決するための手段】上記目的を達成するため
に、本発明の磁気感応素子付き制御アクチュエータは、
リニアモータと位置検知用の磁気感応素子とを有する構
成において、前記リニアモータからの漏洩磁界を含む外
乱磁界のうち少なくとも前記磁気感応素子の磁気検出動
作に影響を及ぼす磁界成分を打ち消す向きの磁界を発生
する外乱磁界減少用永久磁石が設けられていることを特
徴としている。In order to achieve the above object, a control actuator with a magnetically sensitive element according to the present invention comprises:
In a configuration having a linear motor and a magnetic sensing element for position detection, in a disturbance magnetic field including a leakage magnetic field from the linear motor, at least a magnetic field in a direction to cancel a magnetic field component that affects a magnetic detection operation of the magnetic sensing element is removed. A permanent magnet for reducing a disturbance magnetic field generated is provided.
【0009】前記磁気感応素子付き制御アクチュエータ
において、前記外乱磁界減少用永久磁石を前記リニアモ
ータと前記磁気感応素子との間に配置した構成としても
よい。In the control actuator with a magnetically sensitive element, the permanent magnet for reducing a disturbance magnetic field may be arranged between the linear motor and the magnetically sensitive element.
【0010】本発明のレンズ鏡筒は、リニアモータと位
置検知用の磁気感応素子とを有する磁気感応素子付き制
御アクチュエータで可動レンズ系を駆動する構成におい
て、前記リニアモータからの漏洩磁界を含む外乱磁界の
うち少なくとも前記磁気感応素子の磁気検出動作に影響
を及ぼす磁界成分を打ち消す向きの磁界を発生する外乱
磁界減少用永久磁石が設けられていることを特徴として
いる。The lens barrel according to the present invention is configured such that a movable lens system is driven by a control actuator having a magnetically sensitive element having a linear motor and a magnetically sensitive element for position detection, and wherein a disturbance including a leakage magnetic field from the linear motor is provided. It is characterized in that a disturbance magnetic field reducing permanent magnet that generates a magnetic field in a direction that cancels out a magnetic field component that affects at least the magnetic detection operation of the magnetically sensitive element in the magnetic field is provided.
【0011】[0011]
【発明の実施の形態】以下、本発明に係る磁気感応素子
付き制御アクチュエータ及びレンズ鏡筒の実施の形態を
図面に従って説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a control actuator with a magnetically sensitive element and a lens barrel according to the present invention will be described below with reference to the drawings.
【0012】図1は本発明の第1の実施の形態であって
磁気感応素子付き制御アクチュエータを示す。この図に
おいて、1はリニアモータで、磁気ヨーク2の内部にリ
ニアモータ用永久磁石3を固着し、磁気ヨーク2の一部
で構成される界磁部4の周囲に可動コイル(図示せず)
が移動自在に設けられている。このリニアモータ1は可
動コイルに通電することで可動コイルを界磁部4に沿っ
て直線移動させるようになっている。なお、リニアモー
タ1で駆動されるべき被駆動体はその可動コイルに連結
される。FIG. 1 shows a control actuator with a magnetically sensitive element according to a first embodiment of the present invention. In this figure, reference numeral 1 denotes a linear motor, in which a permanent magnet 3 for a linear motor is fixed inside a magnetic yoke 2, and a movable coil (not shown) is provided around a field section 4 formed by a part of the magnetic yoke 2.
Are provided movably. The linear motor 1 is configured to linearly move the movable coil along the field portion 4 by energizing the movable coil. A driven body to be driven by the linear motor 1 is connected to the movable coil.
【0013】10は磁気スケールであり、長手方向に微
小磁極N,Sを交互に着磁したものであり、例えばリニ
アモータ1で直線駆動される被駆動体に固定されてい
る。被駆動体はカメラやビデオカメラのレンズ鏡筒の場
合、レンズ及びこれと一体の保持枠等となる。Reference numeral 10 denotes a magnetic scale, which is formed by alternately magnetizing minute magnetic poles N and S in a longitudinal direction, and is fixed to a driven body driven linearly by a linear motor 1, for example. When the driven body is a lens barrel of a camera or a video camera, the driven body is a lens and a holding frame integrated with the lens.
【0014】20はMR素子、ホール素子等の位置検知
用磁気感応素子である。磁気スケール10と組み合わせ
て被駆動体の位置制御に用いる場合、高感度のMR素子
を用いることが一般的であり、磁気感応素子20は磁気
スケール10の微小磁極N,Sを交互に着磁した長手面
に対面するように固定配置され、(例えばリニアモータ
1の磁気ヨーク2が固定された装置ケース等に固定さ
れ)、磁気スケール10の動き、つまり被駆動体の動き
を磁気的に検出する。Reference numeral 20 denotes a position-sensitive magnetic sensing element such as an MR element or a Hall element. When used for position control of a driven body in combination with the magnetic scale 10, a high-sensitivity MR element is generally used, and the magnetically sensitive element 20 magnetizes the minute magnetic poles N and S of the magnetic scale 10 alternately. It is fixedly arranged so as to face the longitudinal surface (for example, is fixed to an apparatus case or the like to which the magnetic yoke 2 of the linear motor 1 is fixed), and magnetically detects the movement of the magnetic scale 10, that is, the movement of the driven body. .
【0015】リニアモータ1のリニアモータ用永久磁石
3として、強力な希土類磁石を用いる場合、磁気ヨーク
2を厚くしたり、リニアモータ用永久磁石3のほぼ全体
を囲むようにして、漏れ磁束を最小にしようとしていた
が、各種装置の小型化に伴いリニアモータ1に近接して
磁気スケール10及び磁気感応素子20が配置される結
果、漏れ磁束(図1中点線矢印Pで示す)に起因して数
10ガウス程度の磁界が磁気感応素子20の位置におい
ても現れる。これを相殺するために、外乱磁界減少用永
久磁石30がリニアモータ1と磁気感応素子20との間
となる磁気ヨーク2外側面に固着されている。外乱磁界
減少用永久磁石30は例えばシート状ゴム磁石等が望ま
しい。図1中点線矢印Qで外乱磁界減少用永久磁石30
による磁束を示す。When a strong rare earth magnet is used as the permanent magnet 3 for the linear motor of the linear motor 1, the magnetic flux is minimized by increasing the thickness of the magnetic yoke 2 or surrounding substantially the entire permanent magnet 3 for the linear motor. However, as a result of the magnetic scale 10 and the magnetic sensitive element 20 being arranged close to the linear motor 1 with the miniaturization of various devices, the magnetic flux 10 (shown by a dotted arrow P in FIG. 1) causes A magnetic field of the order of Gauss also appears at the position of the magnetically sensitive element 20. To cancel this, a disturbance magnetic field reducing permanent magnet 30 is fixed to the outer surface of the magnetic yoke 2 between the linear motor 1 and the magnetically sensitive element 20. The permanent magnet 30 for reducing a disturbance magnetic field is preferably, for example, a sheet-like rubber magnet. In FIG. 1, a permanent magnet 30 for reducing a disturbance magnetic field is indicated by a dotted arrow Q in FIG.
FIG.
【0016】ここで、磁気感応素子20の位置でのリニ
アモータ1の漏れ磁束による磁界を互いに直交するX,
Y,Z軸成分に分けて考察したとき、磁気スケール10
の長手方向に一致するX軸成分は磁気スケール10の微
小磁極N,Sに悪影響を及ぼすので、外乱磁界減少用永
久磁石30の磁界により十分にキャンセルして抑制する
必要があり、Z軸成分も磁気感応素子20の磁気検出軸
に一致した方向であり、磁気感応素子20の磁気検出動
作に悪影響を及ぼすため同様に抑制する必要がある。な
お、Y軸成分は磁界が残留しても問題は少ない。Here, the magnetic field due to the leakage magnetic flux of the linear motor 1 at the position of the magnetic sensing element 20 is changed to X, X orthogonal to each other.
When considered separately for the Y and Z axis components, the magnetic scale 10
Since the X-axis component coincident with the longitudinal direction of the magnetic scale 10 adversely affects the minute magnetic poles N and S of the magnetic scale 10, it is necessary to sufficiently cancel and suppress the magnetic field of the disturbance magnetic field reducing permanent magnet 30, and the Z-axis component is also reduced. The direction coincides with the magnetic detection axis of the magnetically sensitive element 20, which adversely affects the magnetic detection operation of the magnetically sensitive element 20. The Y-axis component has few problems even if the magnetic field remains.
【0017】この第1の実施の形態によれば、次の効果
を奏することができる。According to the first embodiment, the following effects can be obtained.
【0018】(1) リニアモータ1からの漏洩磁界のう
ち磁気感応素子20の磁気検出動作に影響を及ぼす磁界
成分を打ち消す向きの磁界を外乱磁界減少用永久磁石3
0で発生しており、小型化によりリニアモータ1と磁気
スケール10とが近接しても磁気感応素子20に悪影響
が及ばないようにすることが可能である。(1) A magnetic field for canceling a magnetic field component that affects the magnetic detection operation of the magnetic sensing element 20 in the leakage magnetic field from the linear motor 1 is changed to a disturbance magnetic field reducing permanent magnet 3.
0, and it is possible to prevent the magnetic sensitive element 20 from being adversely affected even when the linear motor 1 and the magnetic scale 10 approach each other due to the miniaturization.
【0019】(2) 外乱磁界減少用永久磁石30を適切
な位置に設けてリニアモータ1の漏れ磁束による悪影響
を除去することで、磁気スケール10の磁気感応素子2
0による読み取り動作の信頼性が向上する。(2) By disposing the permanent magnet 30 for reducing the disturbance magnetic field at an appropriate position to remove the adverse effect due to the leakage magnetic flux of the linear motor 1, the magnetic sensitive element 2 of the magnetic scale 10 can be removed.
0 improves the reliability of the reading operation.
【0020】図2は本発明の第2の実施の形態を示す。
この場合、リニアモータ1からみて磁気感応素子20の
背面側に外乱磁界減少用永久磁石30が配置されてい
る。外乱磁界減少用永久磁石30の配置以外の構成は前
述した第1の実施の形態と同様であり、同一又は相当部
分に同一符号を付して説明を省略する。FIG. 2 shows a second embodiment of the present invention.
In this case, a disturbance magnetic field reducing permanent magnet 30 is disposed on the back side of the magnetically sensitive element 20 as viewed from the linear motor 1. The configuration other than the disposition of the disturbance magnetic field reducing permanent magnets 30 is the same as that of the above-described first embodiment, and the same or corresponding portions are denoted by the same reference characters and description thereof is omitted.
【0021】この第2の実施の形態の場合も、外乱磁界
減少用永久磁石30は、磁気感応素子20の位置でのリ
ニアモータ1の漏れ磁束による磁界をX,Y,Z軸成分
に分けて考察したとき、X軸成分とZ軸成分を十分抑制
する配置とする。Also in the case of the second embodiment, the disturbance magnetic field reducing permanent magnet 30 separates the magnetic field due to the leakage magnetic flux of the linear motor 1 at the position of the magnetic sensing element 20 into X, Y and Z axis components. When considered, the arrangement is such that the X-axis component and the Z-axis component are sufficiently suppressed.
【0022】図3及び図4は本発明の第3の実施の形態
であって、リニアモータ1と位置検知用の磁気感応素子
20と外乱磁界減少用永久磁石30とを有する磁気感応
素子付き制御アクチュエータ40で可動レンズ系50を
駆動する構造のレンズ鏡筒を示す。これらの図におい
て、可動レンズ系50はレンズ51及びこれと一体の保
持枠52からなり、ガイド軸53によりリニアモータ1
の駆動方向に平行に摺動自在に支持されている。FIGS. 3 and 4 show a third embodiment of the present invention, in which a control is provided with a magnetic sensor having a linear motor 1, a magnetic sensor 20 for detecting a position, and a permanent magnet 30 for reducing a disturbance magnetic field. 4 shows a lens barrel having a structure in which a movable lens system 50 is driven by an actuator 40. In these figures, a movable lens system 50 is composed of a lens 51 and a holding frame 52 integral therewith.
Are slidably supported in parallel to the driving direction of.
【0023】磁気感応素子付き制御アクチュエータ40
の部分は前述した第1の実施の形態と実質的に同じであ
り、リニアモータ1の界磁部4に沿って直線移動する可
動コイル5に被駆動体としての可動レンズ系50の保持
枠52が固着、一体化されている。保持枠52の上部に
は磁気スケール10が固着され、磁気スケール10の微
小磁極N,Sを交互に着磁した長手面に対面するように
磁気感応素子20がレンズ鏡筒のケース側に固定配置さ
れている。また、外乱磁界減少用永久磁石30はリニア
モータ1と磁気感応素子20との間となる磁気ヨーク2
外側面に固着されている。Control actuator 40 with magnetic sensing element
Is substantially the same as that of the first embodiment described above, and the movable frame 5 linearly moving along the field portion 4 of the linear motor 1 is provided with a holding frame 52 of a movable lens system 50 as a driven body. Are fixed and integrated. The magnetic scale 10 is fixed to the upper part of the holding frame 52, and the magnetically sensitive element 20 is fixedly arranged on the case side of the lens barrel so as to face the longitudinal surface where the minute magnetic poles N and S of the magnetic scale 10 are alternately magnetized. Have been. In addition, the permanent magnet 30 for reducing a disturbance magnetic field includes a magnetic yoke 2 between the linear motor 1 and the magnetic sensing element 20.
It is fixed to the outer surface.
【0024】なお、可動レンズ系50及びそれを支持す
る機構以外の構成は前述した第1の実施の形態と同様で
あり、同一又は相当部分に同一符号を付して説明を省略
する。The configuration other than the movable lens system 50 and the mechanism for supporting the movable lens system 50 is the same as that of the first embodiment described above, and the same or corresponding parts are denoted by the same reference characters and description thereof is omitted.
【0025】この第3の実施の形態の場合も、外乱磁界
減少用永久磁石30は、磁気感応素子20の位置でのリ
ニアモータ1の漏れ磁束による磁界をX,Y,Z軸成分
に分けて考察したとき、X軸成分とZ軸成分を十分抑制
する配置とする。Also in the case of the third embodiment, the disturbance magnetic field reducing permanent magnet 30 separates the magnetic field due to the leakage magnetic flux of the linear motor 1 at the position of the magnetic sensing element 20 into X, Y, and Z axis components. When considered, the arrangement is such that the X-axis component and the Z-axis component are sufficiently suppressed.
【0026】なお、外乱磁界は、リニアモータ1の漏れ
磁束以外の磁気発生源によるものを含んでいてもよく、
いずれにしてもリニアモータ1からの漏洩磁界を含む外
乱磁界のうち少なくとも磁気感応素子20の磁気検出動
作に影響を及ぼす磁界成分を打ち消す向きの磁界を外乱
磁界減少用永久磁石30で発生するように設定すればよ
い。Incidentally, the disturbance magnetic field may include a magnetic field generated by a magnetic source other than the leakage magnetic flux of the linear motor 1.
In any case, among the disturbance magnetic fields including the leakage magnetic field from the linear motor 1, a magnetic field in a direction to cancel at least a magnetic field component affecting the magnetic detection operation of the magnetic sensing element 20 is generated by the disturbance magnetic field reducing permanent magnet 30. Just set it.
【0027】また、磁気スケール10はリニアモータ1
で直線駆動される被駆動体に固定されているとしたが、
被駆動体は別の駆動源で駆動されるものであっても本発
明を適用できる。The magnetic scale 10 is a linear motor 1
Is fixed to the driven body that is driven linearly by
The present invention is applicable even if the driven body is driven by another driving source.
【0028】以上本発明の実施の形態について説明して
きたが、本発明はこれに限定されることなく請求項の記
載の範囲内において各種の変形、変更が可能なことは当
業者には自明であろう。Although the embodiments of the present invention have been described above, it is obvious to those skilled in the art that the present invention is not limited to the embodiments and various modifications and changes can be made within the scope of the claims. There will be.
【0029】[0029]
【発明の効果】以上説明したように、本発明によれば、
レンズ、ミラー等を高速駆動する用途において、位置制
御用に磁気感応素子を用いる場合、リニアモータの漏れ
磁束等の影響により小型設計が難しかったが、外乱磁界
減少用永久磁石を付加することによって、磁気感応素子
への外乱磁界の悪影響を除去でき、小型化が可能とな
る。また、磁気感応素子の磁気検出動作の信頼性も向上
する。従って、小型のカメラやビデオカメラのレンズ鏡
筒等の装置を実現できる。As described above, according to the present invention,
When using a magnetically sensitive element for position control in applications that drive lenses and mirrors at high speeds, it was difficult to design a compact design due to the effects of leakage flux from the linear motor, but by adding a permanent magnet for reducing disturbance magnetic fields, The adverse effect of the disturbance magnetic field on the magnetic sensing element can be removed, and the size can be reduced. Further, the reliability of the magnetic sensing operation of the magnetic sensing element is also improved. Therefore, a device such as a lens barrel of a small camera or a video camera can be realized.
【図1】本発明の第1の実施の形態であって、磁気感応
素子付き制御アクチュエータを示す斜視図である。FIG. 1 is a perspective view illustrating a control actuator with a magnetically sensitive element according to a first embodiment of the present invention.
【図2】本発明の第2の実施の形態であって、磁気感応
素子付き制御アクチュエータの主要部を示す斜視図であ
る。FIG. 2 is a perspective view showing a main part of a control actuator with a magnetically sensitive element according to a second embodiment of the present invention.
【図3】本発明の第3の実施の形態であって、磁気感応
素子付き制御アクチュエータを用いたレンズ鏡筒を示す
正面図である。FIG. 3 is a front view showing a lens barrel using a control actuator with a magnetically sensitive element according to a third embodiment of the present invention.
【図4】図3の側断面図である。FIG. 4 is a side sectional view of FIG. 3;
【符号の説明】 1 リニアモータ 2 磁気ヨーク 3 リニアモータ用永久磁石 4 界磁部 5 可動コイル 10 磁気スケール 20 磁気感応素子 30 外乱磁界減少用永久磁石 40 磁気感応素子付き制御アクチュエータ 50 可動レンズ系 51 レンズ 52 保持枠 53 ガイド軸DESCRIPTION OF SYMBOLS 1 Linear motor 2 Magnetic yoke 3 Permanent magnet for linear motor 4 Field part 5 Moving coil 10 Magnetic scale 20 Magnetic sensing element 30 Permanent magnet for reducing disturbance magnetic field 40 Control actuator with magnetic sensing element 50 Moving lens system 51 Lens 52 Holding frame 53 Guide shaft
Claims (3)
子とを有する磁気感応素子付き制御アクチュエータにお
いて、 前記リニアモータからの漏洩磁界を含む外乱磁界のうち
少なくとも前記磁気感応素子の磁気検出動作に影響を及
ぼす磁界成分を打ち消す向きの磁界を発生する外乱磁界
減少用永久磁石が設けられていることを特徴とする磁気
感応素子付き制御アクチュエータ。1. A control actuator with a magnetic sensing element having a linear motor and a magnetic sensing element for position detection, wherein at least one of a disturbance magnetic field including a leakage magnetic field from the linear motor affects a magnetic detection operation of the magnetic sensing element. A control actuator with a magnetically responsive element, comprising: a permanent magnet for reducing a disturbance magnetic field, which generates a magnetic field in a direction to cancel a magnetic field component that exerts a force.
アモータと前記磁気感応素子との間に配置した請求項1
記載の磁気感応素子付き制御アクチュエータ。2. The permanent magnet for reducing a disturbance magnetic field is disposed between the linear motor and the magnetically sensitive element.
A control actuator with a magnetically sensitive element according to the above.
子とを有する磁気感応素子付き制御アクチュエータで可
動レンズ系を駆動するレンズ鏡筒において、前記リニア
モータからの漏洩磁界を含む外乱磁界のうち少なくとも
前記磁気感応素子の磁気検出動作に影響を及ぼす磁界成
分を打ち消す向きの磁界を発生する外乱磁界減少用永久
磁石が設けられていることを特徴とするレンズ鏡筒。3. A lens barrel for driving a movable lens system with a control actuator having a magnetically sensitive element having a linear motor and a magnetically sensitive element for position detection, wherein at least one of disturbance magnetic fields including a leakage magnetic field from the linear motor is provided. A lens barrel, further comprising: a disturbance magnetic field reducing permanent magnet that generates a magnetic field in a direction to cancel a magnetic field component affecting a magnetic detection operation of the magnetic sensing element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2630298A JPH11215795A (en) | 1998-01-26 | 1998-01-26 | Control actuator with magnetosensitive element, and lens mirror cylinder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2630298A JPH11215795A (en) | 1998-01-26 | 1998-01-26 | Control actuator with magnetosensitive element, and lens mirror cylinder |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11215795A true JPH11215795A (en) | 1999-08-06 |
Family
ID=12189569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2630298A Pending JPH11215795A (en) | 1998-01-26 | 1998-01-26 | Control actuator with magnetosensitive element, and lens mirror cylinder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH11215795A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002012824A1 (en) * | 2000-08-04 | 2002-02-14 | Matsushita Electric Industrial Co., Ltd. | Position sensor for electromagnetic actuator |
EP1818135A1 (en) | 2006-02-14 | 2007-08-15 | Fanuc Ltd | Linear drive apparatus |
-
1998
- 1998-01-26 JP JP2630298A patent/JPH11215795A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002012824A1 (en) * | 2000-08-04 | 2002-02-14 | Matsushita Electric Industrial Co., Ltd. | Position sensor for electromagnetic actuator |
US6690158B2 (en) | 2000-08-04 | 2004-02-10 | Matsushita Electric Industrial Co., Ltd. | Position sensor for electromagnetic actuator to detect a position of a shaft |
EP1818135A1 (en) | 2006-02-14 | 2007-08-15 | Fanuc Ltd | Linear drive apparatus |
US7528561B2 (en) | 2006-02-14 | 2009-05-05 | Fanuc Ltd | Linear drive apparatus |
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