JPH106058A - Laser machining method and its device and manufacture of ink jet printer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable machining of a taper shape wherein a machining pattern becomes larger according to advance into the inner part by forming an object to be machined with a polymer material capable of machining with a laser beam. SOLUTION: A taper shaped nozzle orifice wherein the machining pattern becomes larger according to advance into the inner part is machined to a nozzle plate 12, adhered to an ink jet body 11 with an adhesive and formed with the polymer material capable of machining with the laser beam 14. The laser beam 14 outputted from a laser beam device 13 is made incident on a kaleidoscope 16 with an incident lens 15. The kaleidoscope 16 is provided with a function converting into respective light beams radiating the laser beam 14 toward plural directions. Respective holes of a penetrating pattern corresponding to plural nozzle orifices to be formed in a nozzle plate 12 are formed in an optical mask 17. An image formation lens 18 is provided with a function, stacking plural penetrating laser pattern beam penetrating the optical mask 17 and emitting toward plural directions on the surface of the nozzle plate 12 and then forming the image.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing method and apparatus for forming a tapered hole in a workpiece, for example, a plurality of nozzles for ejecting ink in an ink jet printer, and an apparatus therefor, and a method of manufacturing an ink jet printer. About.

[0002]

2. Description of the Related Art In an ink jet printer, print quality largely depends on the characteristics of a nozzle portion, which is an ink discharge portion, and the characteristics of the nozzle portion are determined by variations in the nozzle diameter and the cross-sectional shape of the nozzle portion.

FIG. 10 is an external view of an ink jet printer head used in such an ink jet printer.
This ink jet printer head has a nozzle plate 2 adhered to an ink jet body 1, and a plurality of nozzle orifices (hereinafter abbreviated as nozzles) 3 are formed in the nozzle plate 2.

In order to achieve high-quality printing with such an ink-jet printer head, the nozzle 3 has a small nozzle diameter variation, and as shown in FIG. ) Is required to be formed in a tapered cross-sectional shape.

[0005] The method of forming such a nozzle 3 is roughly divided into two, one of which uses a metal plate and is known as an electroforming method or an electric discharge machining method, and the other is a method using a polymer material. For example, the first technology (Japanese Patent Application Laid-Open No. 1-108056) and the second technology (Japanese Patent Application Laid-Open No.
No. 330059) and a third technique (Japanese Patent Laid-Open No. 5-330).
No. 064).

The first technique is performed before or after the nozzle plate is joined to the printer head.
A technique is described in which a contact mask having a plurality of openings is fixed to an outer surface of a nozzle plate, and ultraviolet rays (UV) are guided on the nozzle plate to form a nozzle in the nozzle plate through the contact mask.

In the second technique, a nozzle profile is processed by using an optical path shape of an optically collected laser. A nozzle opening is processed at a focal plane of a laser beam, and the nozzle profile is processed. Process on non-light collecting surface. In addition, there is described a technique in which a process is performed in a focal plane and a process in which a process is performed in a non-focal plane a plurality of times, and a technique in which an optical path is matched with a target nozzle profile and processed in one step.

In the third technique, a nozzle plate is formed of a plastic material having a low energy density necessary for ablation, and a flow path plate is formed of glass, resin, metal, or the like.
The beam light is set to a wavelength suitable for ablation of the material of the nozzle plate, and a tapered nozzle hole is formed by using divergent light closer to the irradiated object than the beam waist. A technique for forming by ablation is described.

[0009]

However, in a method such as an electroforming method or an electric discharge machining method using a metal plate, the manufacturing cost is high, and the nozzle plate and the head body are bonded after the nozzle is formed. .

[0010] For this reason, when the nozzle plate and the head main body are bonded to each other, there is a case where a positional shift occurs or the adhesive material blocks the nozzle portion, so that the yield is poor. On the other hand, in the method of processing with a polymer excimer laser, in the second technique, only one nozzle can be formed by a single irradiation of laser light, and when several tens of nozzles are required, processing time is required.

Further, as in the case of the metal plate method, the nozzle plate and the head body are bonded to each other after the processing, so that a positional shift may occur or the adhesive material may block the nozzle portion, resulting in poor yield.

Further, in a commonly used method of simultaneously forming a plurality of nozzles by mask pattern imaging, it is possible to process a tapered shape, but a laser light emitting surface of a workpiece and a workpiece surface are formed. Taper angle (processing angle)
However, it is not suitable for machining a nozzle orifice.

In the first and third techniques, since the processing can be performed with the nozzle plate adhered to the head body, there is no problem that occurs with the method using the metal plate. Since the processing is performed by bringing the open metal mask into close contact with the processing section, a very small gap (micron order) between the metal mask and the nozzle plate
Therefore, there is a disadvantage that the diameter of the hole changes and the variation in the nozzle diameter is large.

In the third technique, as in the second technique, only one nozzle can be formed by a single laser beam irradiation.
When zero nozzles are required, processing time is required. When a plurality of nozzles are formed at the same time, taper processing can be performed only on one side, not on both sides.

In the first technique, the workpiece needs to be mechanically shaken during laser beam irradiation, and the apparatus itself becomes large. Therefore, an object of the present invention is to provide a laser processing method capable of performing a tapered processing in which a processing pattern increases toward the inside without causing variation in the nozzle diameter in a state where a workpiece is bonded to a predetermined member. And

Further, the present invention provides a laser processing apparatus capable of performing a tapered processing in which a processing pattern becomes larger toward the inside without causing a variation in a nozzle diameter in a state where a workpiece is bonded to a predetermined member. The purpose is to do.

Further, the present invention provides a laser processing apparatus capable of processing a tapered nozzle orifice in which a processing pattern becomes larger toward the inside without causing variation in the nozzle diameter in a state where the nozzle plate is adhered to the ink jet body. The purpose is to provide.

Further, the present invention provides a method of manufacturing an ink jet printer capable of forming a tapered nozzle orifice in which a processing pattern becomes larger toward the inside without causing a variation in the nozzle diameter in a state where the nozzle plate is adhered to the ink jet body. The aim is to provide a method.

[0019]

According to the present invention, an optical mask having a specific transmission pattern formed thereon is irradiated with laser light from a plurality of directions, and a plurality of pattern lights transmitted through the optical mask are covered. This is a laser processing method in which an image is formed by superimposing an image on the surface of a workpiece, and the processing section is temporarily enlarged in accordance with the traveling direction of the laser beam on the workpiece.

According to the second aspect, a laser device for outputting a laser beam, an optical mask on which a specific transmission pattern is formed, and a laser beam output from the laser device are emitted in a plurality of directions to the optical mask. A laser processing apparatus includes: a light conversion optical system for irradiation; and an imaging optical system for overlaying a plurality of lights having different traveling directions transmitted through an optical mask on a surface of a workpiece to form an image.

In such a laser processing apparatus, the laser light output from the laser apparatus is incident on the light conversion optical system, where the laser light is converted into, for example, light emitted in a plurality of directions, and is irradiated on the optical mask. . A plurality of pattern lights emitted in a plurality of directions and transmitted through the optical mask are formed on the surface of the workpiece by the imaging optical system so as to form an image. Thus, in a state where the workpiece is bonded to the predetermined member, a tapered processing in which the processing pattern becomes larger toward the inside can be performed.

According to a third aspect of the present invention, in the laser processing apparatus according to the second aspect, the light conversion optical system is a kaleidoscope, and a laser is provided by closely attaching an optical mask to a laser light emitting end face of the kaleidoscope. Transmit light.

According to the fourth aspect, a laser device for outputting a laser beam, an incident lens disposed on an optical path of the laser beam output from the laser device, and a laser output from the laser device through the incident lens A kaleidoscope that receives light and emits this laser light in a plurality of directions, and an optical mask on which a specific transmission pattern is formed in close contact with the laser light emitting end face of the kaleidoscope, A laser processing apparatus including: an imaging lens configured to superimpose a plurality of lights having different traveling directions transmitted through the optical mask on a surface of a workpiece to form an image.

In such a laser processing apparatus, the laser light output from the laser apparatus is incident on the kaleidoscope through the incident lens, where the laser light is converted into each light radiated in a plurality of directions. Then, the light is irradiated onto an optical mask which is attached in close contact with the end face of the kaleidoscope laser beam. A plurality of pattern lights emitted in a plurality of directions and transmitted through the optical mask are formed on a surface of a workpiece by an imaging lens so as to form an image. Thus, in a state where the workpiece is bonded to the predetermined member, a tapered processing in which the processing pattern becomes larger toward the inside can be performed.

According to a fifth aspect of the present invention, in the laser processing apparatus according to the fourth aspect, the angle of incidence of the laser light on the kaleidoscope or the beam diameter of the laser light is changed to set the processing angle with respect to the workpiece. It can be changed to a value.

According to a sixth aspect of the present invention, in the laser processing apparatus of the fourth aspect, a rectangular slit is disposed on the laser optical axis between the laser device and the incident lens, and the opening area of the slit is changed. Thus, the processing angle with respect to the workpiece can be changed to a predetermined value.

According to a seventh aspect of the present invention, in the laser processing apparatus according to the fourth aspect, a beam expander is disposed on a laser optical axis between the laser device and the incident lens, and a projection magnification of the beam expander is changed. By doing so, the processing angle with respect to the workpiece can be changed to a predetermined value.

According to the eighth aspect, a nozzle plate is attached to an ink jet body for storing ink in an ink jet printer, and thereafter, a plurality of nozzle holes whose processing cross sections become larger toward the inside of the nozzle plate are formed. In a laser processing apparatus, a laser device that outputs a laser beam, an incident lens disposed on an optical path of the laser beam output from the laser device, and the laser beam output from the laser device is incident through the incident lens, A kaleidoscope that emits the laser light in a plurality of directions, and an optical system in which a transmission pattern corresponding to a plurality of nozzle holes is formed on a nozzle plate that is attached to a laser light emitting end face of the kaleidoscope. A mask and a plurality of lights emitted in a plurality of directions transmitted through the optical mask. An imaging lens for imaging overlaid on the surface of the nozzle plate, a laser processing apparatus having a.

With such a laser processing apparatus, the laser light output from the laser apparatus is incident on the kaleidoscope through the incident lens, where the laser light is converted into each light radiated in a plurality of directions. Then, the light is irradiated on the optical mask on which the transmission pattern corresponding to the plurality of nozzle holes is formed.

A plurality of pattern lights emitted through the optical mask and emitted in a plurality of directions are superimposed and imaged on the surface of the nozzle plate by the imaging lens. Thereby, in the state where the nozzle plate is adhered to the ink jet body, it is possible to process the tapered nozzle hole whose processing pattern becomes larger toward the inside.

According to the ninth aspect, in the method of manufacturing an ink jet printer including an ink jet body for storing ink and a nozzle plate attached to the ink jet body, a specific light transmitting pattern is formed after the nozzle plate is mounted. The formed optical mask is irradiated with laser light from a plurality of directions, the laser light transmitted through the optical mask is irradiated on the nozzle plate, and the laser light existing on the nozzle plate is irradiated on the nozzle plate. This is a method for manufacturing an ink jet printer in which processing in which a processing cross section parallel to the emission surface becomes larger toward the emission surface is temporarily performed.

In this way, in the state where the nozzle plate is adhered to the ink jet body, it is possible to process a tapered nozzle hole whose processing pattern becomes larger toward the inside,
The yield is good and the manufacturing time can be shortened.

[0033]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. The laser processing method of the present invention irradiates each light from a plurality of directions on an optical mask having a specific transmission pattern, for example, a transmission pattern corresponding to a plurality of nozzle orifices in an ink jet printer, and transmits the optical mask. A plurality of pattern lights are superimposed and imaged on the surface of the nozzle plate, and the nozzle plate is processed with a tapered nozzle orifice whose processing pattern (nozzle diameter) increases toward the inside.

FIG. 1 is a block diagram of a laser processing apparatus to which such a laser processing method is applied. In this laser processing apparatus, a case where the present invention is applied to the manufacture of an inkjet printer head 10 used in an inkjet printer will be described.

This ink jet printer head 10
Has a nozzle plate 12 adhered to the ink jet body 11 with an adhesive, and in this state, the nozzle orifice diameter is 40 μm,
A case where a nozzle having a nozzle orifice pitch of 1 μm is formed will be described.

The nozzle plate 12 is made of a polymer material that can be processed by a laser beam. Therefore, a tapered nozzle orifice whose processing pattern becomes larger toward the inside of the nozzle plate 12 is processed.

The laser device 13 is an excimer laser device that generates an ultraviolet laser beam 14. This laser device 1
The beam size of the ultraviolet laser beam 14 output from 3 is formed in a square of 10 mm × 10 mm.

An incident lens 15, a kaleidoscope 16, an optical mask 17, and an imaging lens 18 are arranged on the optical path of the ultraviolet laser light 14 output from the laser device 13.

The incident lens 15 is for making the ultraviolet laser light 14 output from the laser device 13 incident on the kaleidoscope 16. At this time, the incident angle α of the ultraviolet laser light 14 on the kaleidoscope 16 is, for example, It is set to 5.7 °. The incident lens 15 is made of quartz and has a focal length of 50 mm.

The callide scope 16 includes the incident lens 15
And has a function of converting the ultraviolet laser light 14 into respective lights radiated in a plurality of directions.

That is, this callide scope 16
As shown in FIG. 2, each of the ultraviolet laser beams that have transmitted, reflected once, reflected twice,... Multiple times, and transmitted, reflected once, twice,. It has a function of emitting light.

Specifically, the kaleidoscope 16 is made of mirror-finished aluminum and has a size of 5 mm × 5 mm × 100 mm.
It is formed in a rectangular parallelepiped of 0 mm. An optical mask 17 is closely attached to the laser emission end face of the kaleidoscope 16.

This optical mask 17 is used for the nozzle plate 1
Each of the holes 19 of the transmission pattern corresponding to the plurality of nozzle orifices to be formed in No. 2 is formed. Specifically, the optical mask 17 is made of copper, and has holes 19 having a diameter of 80 μm and a pitch of 282 μm formed in a straight line.

The optical mask 17 may be provided with a coating on the laser irradiation side surface of the ultraviolet laser light 14 so as to reflect the laser light. The imaging lens 18 has a plurality of transmitted laser pattern lights emitted in a plurality of directions transmitted through the optical mask 17, that is, transmitted once, reflected twice, reflected twice from the kaleidoscope 16 and passed through the optical mask 17. It has a function of forming an image by superimposing each of the ultraviolet laser beams reflected twice on the surface of the nozzle plate 12.

The imaging lens 18 is formed of quartz, has a focal length of 60 mm, and is arranged such that the imaging magnification is 1/2. The incident angle β of the ultraviolet laser beam irradiated on the nozzle plate 12 by the imaging lens 18 is set to, for example, 11.7 °.

The distance between the incident lens 15 and the incident end face of the kaleidoscope 16 is 50 mm, the distance a between the optical mask 17 and the imaging lens 18 is 180 mm, and the distance between the imaging lens 18 and the surface of the nozzle plate 12 is Is 90
mm.

Next, the operation of the apparatus configured as described above will be described. Ultraviolet laser light 14 from laser device 13
Is output, the ultraviolet laser light 14 is condensed by the incident lens 15 and enters the kaleidoscope 16. At this time, the incident angle α of the ultraviolet laser beam 14 to the kaleidoscope 16 is 5.7 °.

In the kaleidoscope 16, the incident ultraviolet laser beam 14 is internally transmitted as shown in FIG.
Reflected twice, reflected twice,... A plurality of times, and then transmitted, reflected once, reflected twice,.

Each of the ultraviolet laser beams emitted from the kaleidoscope 16 passes through the optical mask 17 attached to the laser light emitting end face of the kaleidoscope 16 and reaches the imaging lens 18.

Therefore, the optical mask 17 has transmission, one-time reflection, two-time reflection,
Each of the ultraviolet laser beams reflected a plurality of times is incident from each direction, and as shown in FIG. 4, the ultraviolet laser beams are transmitted once, reflected twice, reflected twice,. The light having the pattern by each transmitted beam is obtained.

At this time, the outgoing angle of the light having the pattern by each transmitted beam emitted from the optical mask 17 is equal to the incident angle α to the kaleidoscope 16 and is 5.7 °. Then, light having a pattern of each transmitted beam emitted from the kaleidoscope 16 is transmitted to the kaleidoscope 16 at the position of the imaging lens 18 as shown in FIG.
Around the transmitted beam pattern f ₁ that does not reflected once at the inner, single reflection, double reflection, ... each transmission beam pattern f ₂ corresponding to the multiple reflections, f _3, ... f _n are arranged vertically symmetrically It becomes a pattern.

Each of the transmitted beam patterns f ₂ , f
_3, ... if f _n is incident on the imaging lens 18, the imaging lens 18, the pattern f _2, f ₃ by the transmitted beam as shown in FIG. 6, condenses the ... f _n, superimposed 1 An image is formed on the surface of the nozzle plate 12 as a pattern by one transmitted beam.

Since the imaging magnification by the imaging lens 18 at this time is ２, the processing pattern on the surface of the nozzle plate 12 has a diameter of 40 μm and a pitch of 141 μm.
It becomes the pattern of.

The incident angle β with respect to the nozzle plate 12
Is 11.7 °, so that the diameter is 40 μm and the taper angle is 1
1.7 ° nozzles are formed at a pitch of 141 μm. More specifically, as shown in the enlarged view of the Q portion in FIG. 6 of FIG. 7, each transmitted beam pattern f ₂ , f _{3 ,.}
Is the image forming position of the image forming lens 18, that is, the nozzle plate 1
2, and the angle of incidence on the surface of the nozzle plate 12 at this time is equal at any point of the pattern by each transmitted beam.

Each of the transmitted beam patterns f ₂ , f ₃ ,... F _n after being overlapped is transmitted while spreading. Therefore, all nozzles have equal incidence angles of 11.7 °.
In the nozzle plate 12, a plurality of nozzles having a diameter of 40 μm and a taper angle of 11.7 ° are formed at a pitch of 141 μm.

As described above, in the first embodiment, the ultraviolet laser light 14 output from the laser device 13 is used.
Is converted into respective laser beams emitted in a plurality of directions by a kaleidoscope 16 and irradiates an optical mask 17, and a plurality of transmitted beam pattern lights emitted in a plurality of directions transmitted through the optical mask 17 are formed by an imaging lens 18. Since an image is formed by being superimposed on the surface of the nozzle plate 12, a tapered nozzle orifice whose processing pattern becomes larger toward the inside of the nozzle plate 12 adhered to the ink jet body 11 can be processed.

Further, in processing such a nozzle orifice, a plurality of nozzles can be simultaneously formed at a pitch of 141 μm. Therefore, a plurality of nozzles can be formed simultaneously with the nozzle plate 12 adhered to the ink jet body 11, so that the nozzle plate 12 may be misaligned with respect to the ink jet body 11, or the adhesive may block the nozzle portion. Therefore, the yield is improved and the manufacturing time can be reduced.

The taper angle of the nozzle orifice formed in the nozzle plate 12 is determined by the angle of incidence of the ultraviolet laser beam on the kaleidoscope 16, specifically, the focal length of the incident lens 15 and the beam size of the ultraviolet laser beam 14. Can be arbitrarily changed by changing.

The present invention is not limited to the above embodiment, but may be modified as follows. For example, by using two cylindrical lenses having different focal lengths for the incident lens 15 or using a laser beam having a rectangular beam shape, nozzles having different taper angles in the vertical and horizontal directions can be formed.

As shown in FIG. 8, a rectangular slit 20 is disposed on the laser optical axis between the laser device 13 and the incident lens 15, and the size of the slit 20 is changed to change the size of the slit. The taper angle processed on the nozzle plate 12 as a workpiece may be arbitrarily changed.

As shown in FIG. 9, a beam expander 21 is disposed on the laser optical axis between the laser device 13 and the incident lens 15 and the magnification of the beam expander 21 is changed to process the beam. The taper angle processed on the nozzle plate 12 as an object may be arbitrarily changed.

As the optical mask 17, a surface on the laser irradiation side of the ultraviolet laser beam 14 coated with a laser beam is used, and a slit coated with the laser beam is applied to the laser of the kaleidoscope 16. It may be attached in close contact with the incident end face. in this case,
The slit that is in close contact with the kaleidoscope 16 makes the coated side adhere to the kaleidoscope 16.

[0063]

As described above in detail, according to the first aspect of the present invention, in a state where the workpiece is bonded to a predetermined member, the diameter of the processing pattern increases toward the inside without variation in the nozzle diameter. A laser processing method capable of processing a tapered shape can be provided.

According to the second to seventh aspects of the present invention, in a state where the workpiece is bonded to a predetermined member, the diameter of the processing pattern becomes larger toward the inside without causing a variation in the nozzle diameter. A laser processing device capable of processing can be provided.

According to the fifth to seventh aspects of the present invention, in a state where the workpiece is bonded to a predetermined member, the diameter of the processing pattern becomes larger toward the inside without causing a variation in the nozzle diameter. It is possible to provide a laser processing apparatus capable of performing processing and arbitrarily changing a taper angle of a processing pattern.

According to the eighth aspect of the present invention, when the nozzle plate is adhered to the ink jet body, the processing of the tapered nozzle orifice in which the processing pattern becomes larger toward the inside without causing variation in the nozzle diameter is performed. And a laser processing apparatus capable of performing the above.

According to the ninth aspect of the present invention, in the state where the nozzle plate is adhered to the ink-jet body, the processing of the tapered nozzle orifice in which the processing pattern becomes larger toward the inside without causing a variation in the nozzle diameter. Can be provided.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of a laser processing apparatus according to the present invention.

FIG. 2 is a schematic view showing the operation of a kaleidoscope.

FIG. 3 is an external view of an optical mask.

FIG. 4 is a view showing a transmitted beam pattern from an optical mask.

FIG. 5 is a diagram showing a transmitted beam pattern at an imaging lens position.

FIG. 6 is a diagram showing an image forming state of each transmitted beam pattern.

FIG. 7 is a diagram showing a processing operation of a tapered shape.

FIG. 8 is a configuration diagram showing a modification.

FIG. 9 is a configuration diagram showing a modification.

FIG. 10 is an external view of an ink jet printer head.

FIG. 11 is a view showing the shape of a nozzle orifice.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Ink-jet printer head, 11 ... Inkjet body, 12 ... Nozzle plate, 13 ... Laser device, 15 ... Incident lens, 16 ... Kaleidoscope, 17
... optical mask, 18 ... imaging lens.

Claims (9)

[Claims] 1. An optical mask on which a specific transmission pattern is formed is irradiated with laser light from a plurality of directions, and a plurality of pattern lights transmitted through the optical mask are superimposed on a surface of a workpiece to form an image. A laser processing method comprising: performing a processing on the workpiece to temporarily increase a processing cross section according to a traveling direction of the laser beam. 2. A laser device for outputting a laser beam, an optical mask on which a specific transmission pattern is formed, and a laser beam emitted from the laser device in a plurality of directions to irradiate the optical mask. A laser processing apparatus, comprising: a conversion optical system; and an imaging optical system that forms an image by superimposing a plurality of lights having different traveling directions transmitted through the optical mask on a surface of the workpiece. 3. The laser light transmission system according to claim 2, wherein the light conversion optical system is a kaleidoscope, and the optical mask is closely attached to a laser light emitting end face of the kaleidoscope to transmit the laser light. Laser processing equipment. 4. A laser device for outputting a laser beam, an incident lens disposed on an optical path of the laser beam output from the laser device, and a laser beam output from the laser device incident through the incident lens. A kaleidoscope that emits the laser light in a plurality of directions; an optical mask having a specific transmission pattern formed in close contact with a laser light emitting end face of the kaleidoscope; and A laser processing apparatus comprising: an imaging lens configured to form an image by superimposing a plurality of transmitted light beams having different traveling directions on a surface of the workpiece. 5. The processing angle for the workpiece can be changed to a predetermined value by changing an incident angle of the laser light on the kaleidoscope or a beam diameter of the laser light. 5. The laser processing apparatus according to 4. 6. A square slit is disposed on a laser optical axis between the laser device and the incident lens, and a processing angle with respect to the workpiece is changed to a predetermined value by changing an opening area of the slit. The laser processing device according to claim 4, wherein the laser processing device is capable of being used. 7. A beam expander is arranged on a laser optical axis between the laser device and the incident lens, and a processing angle of the beam expander is changed by a predetermined value by changing a projection magnification of the beam expander. 5. The laser processing apparatus according to claim 4, wherein the laser processing apparatus is variable. 8. A laser processing apparatus in which a nozzle plate is attached to an ink-jet body for storing ink in an ink-jet printer, and thereafter a plurality of nozzle holes whose processing cross-section increases toward the inside of the nozzle plate are formed. A laser device for outputting a laser beam; an incident lens disposed on an optical path of the laser beam output from the laser device; and a laser beam output from the laser device incident through the incident lens. And a mask having a transmission pattern corresponding to the plurality of nozzle holes formed on the nozzle plate attached in close contact with the laser light emitting end face of the kaleidoscope. And a plurality of light beams transmitted through the optical mask and emitted in a plurality of directions. Laser machining apparatus being characterized in that anda imaging lens for imaging overlaid on the surface of the nozzle plate. 9. An ink jet body containing ink,
In a method for manufacturing an ink jet printer comprising a nozzle plate attached to the ink jet body, after the nozzle plate is attached, an optical mask on which a specific light-transmitting pattern is formed is irradiated with laser light from a plurality of directions. The nozzle plate is irradiated with a plurality of laser beams transmitted through the optical mask, and a processing section parallel to the emission surface of the nozzle plate is parallel to the emission surface of the laser light located in the nozzle plate. A method for manufacturing an ink jet printer, characterized in that processing for increasing the size is performed for a while.