JPH10332323A - Optical position detecting device and following image pick-up device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To slantwise detect the position of an object. SOLUTION: Light sending 441 is carried out by a light sending section 410 in a slant direction to the position detecting face 24 of an object 20, and a reflected light 4A2 due to said irradiation is detected by a light receiving section 420. A relative position of the object 20 to the light sending section 410 and a light receiving section 420 in a direction along a crossing line 443 is detected by a position detecting means 321 can detection carried out by the light receiving section 420. Though the sending and receiving of light is carried out in a slant direction, the detection signal and detection data (B, C) of the reflected light which seem as they are detected along the crossing line 443 are obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical position detecting device and a tracking image pickup device, and more particularly to a method for detecting the position of an object whose position changes within a limited range in a specific direction without contact. The present invention relates to a suitable optical position detecting device and a tracking image pickup device suitable for accurately photographing such an object. The optical position detection is generally performed from the same direction as the direction of displacement of the target object or from a direction orthogonal thereto, but in the present invention, it is performed obliquely.
Note that, in the present specification, a tracking imaging device refers to an imaging device that captures an image of an object, and an image of the object, such that the influence of the displacement of the object on the image of the object is suppressed. It means a device provided with means for following the displacement.

[0002]

2. Description of the Related Art A magnetic method, an optical method, a method using a capacitance or an ultrasonic wave, etc. can be mentioned as means for detecting a position of an object in a non-contact manner. In particular, in the case of performing only optically, in that case, a laser rangefinder that directly performs distance detection from the same direction as the displacement direction of the object, or an image taken from a direction orthogonal to the displacement direction of the object A device or the like that performs position detection indirectly by the image processing is used.

When inspecting a rail laid on a ground or underground track as an object, and running an inspection vehicle to photograph a gap between rails or the top surface of a rail, the inspection is performed with respect to a distance between left and right rails. Since the left and right wheels of the car are allowed to have a play of several centimeters, the left and right positions of the rail with respect to the imaging device mounted on the inspection vehicle, that is, the rail positions in the lateral direction perpendicular to the traveling direction relatively vary within the range. However, when the distance meter or the like is mounted on an inspection vehicle, the mounting of the distance meter or the like directly beside the rail is prohibited by rules due to interference with a guide rail and the like. Therefore, in such a case, the relative displacement of the rail need not be detected, or indirect position detection by image processing is performed.

A track inspection device 3 whose schematic diagram is shown in FIG.
Numeral 0 is a basic / general device used by being mounted on the vehicle body 11 of the inspection vehicle 10, and attached to the vehicle body 11 between the wheels 12 of the inspection vehicle 10 toward the rail top surface 21 of the rail 20. And an image processing unit 32 that processes image data taken by the camera 31 and records the data on a video tape or sends the data to a display unit 33 for display. Then, as the inspection vehicle 10 travels, the rails to be inspected are photographed one after another. However, continuing the photographing with sufficient resolution and accuracy requires a huge amount of data, which hinders storage and retrieval. Because of the coming, the rail gap 22 that is particularly important as an inspection target is selected and intermittently imaged.

Conventionally, as a trajectory inspection device for photographing a rail while having an imaging device such as a camera and image processing means,
JP-A-3-165207 and JP-A-3-2252
No. 08, JP-A-3-225209 and the like are known. FIG. 6 shows a structural diagram of the track inspection apparatus. In the track inspection apparatus, a trigger unit 43 is installed in a vehicle body 11 together with an image processing unit 32, and a camera 31
A strobe 51 for illumination is arranged around the camera 31, and a laser light transmitting unit 41 and a laser light receiving unit 4 are provided outside the front and rear of the strobe 51.
2 is also provided.

These are covered by a protective cover 61 attached to the lower surface of the vehicle body 11. Then, through the transparent window 62, the laser light transmitting unit 41 and the laser light receiving unit 42 detect the rail play 22, and the camera 31 images the rail play 22. Specifically, the laser light transmitting unit 41
The rail top surface 21 is irradiated with a slit-shaped laser beam 44, and the reflected light is received by the laser light receiving unit 42. When the beam irradiation position reaches the rail gap 22 where the rail top surface 21 is interrupted, the laser beam The rail gap 22 is detected based on the interruption of the reflection. Rail gap 22
Is detected, the trigger unit 4 is activated based on the detection signal A.
The trigger for executing the imaging process is sent from 3 to the strobe 51 and the camera 31. In this way, the imaging of the rail play is performed from directly above the rail based on the detection of the rail play.

[0007]

Since the position of the rail image (image of the object) obtained in this way fluctuates left and right in the image area, only the rail image portion is taken out and the rest is discarded. If the amount is to be compressed, the image processing unit must perform processing such as pattern matching to detect the left and right positions of the rail image in the image area.

However, indirect position detection by image processing requires a considerable amount of data processing, and thus has the disadvantage that it is difficult to perform real-time detection and continuous detection. For this reason, when performing continuous imaging or imaging that is not continuous but is repeated in a short period of time, it is often unnecessary to detect the relative displacement of an object such as a rail, in which case data compression and the like are abandoned. I had no choice.

Therefore, it is not allowed to directly measure the position of the object from the direction of displacement, and to measure the position of the object from a direction orthogonal to the direction of displacement of the object and indirectly measure the image by image processing. In order to enable position detection at a practical level even in a situation where it cannot be made in time, it is an issue to devise a device that can optically detect the relative position of an object from the remaining direction.

The present invention has been made to solve such a problem, and has as its object to realize an optical position detecting device for detecting the position of an object obliquely.
Another object of the present invention is to realize a tracking image pickup device that can accurately image a target object by including the optical position detection device.

[0011]

Means for Solving the Problems The structure, operation and effect of each means for solving the problems described above will be described below.

[First Solution] An optical position detecting device according to a first solution (as described in claim 1 at the time of filing of the present application) is an irradiation mark (on a position detection surface of an object). A light transmitting unit that performs irradiation that makes a linear shape oblique to the (the) position detection surface of the (the) object, and a detection mark (on the position detection surface of the object) that is linear A light receiving unit that performs detection or performs a planar detection including a linear detection mark obliquely with respect to the position detection surface (of the object); and the light receiving unit that receives reflected light due to irradiation from the light transmitting unit. An optical position detection device comprising: a position detection unit that detects a position of the target object based on detection by the light transmission unit and the light reception unit, wherein the light transmission unit and the light reception unit are configured to irradiate an optical path surface from the light transmission unit and the light reception unit. A part where the line of intersection with the detection optical path surface to the light-receiving part hits the position detection surface (of the object) And it is characterized in that it is disposed.

[0013] In the optical position detecting device according to the first solution, light is transmitted from the oblique position to the position detecting surface of the object by the light transmitting unit, and reflected light due to the irradiation is transmitted. Detection by the light receiving unit. Then, the relative position between the object and the light transmitting unit and the light receiving unit in the direction along the intersection line is detected by the position detecting unit based on the detection by the light receiving unit. Thus, the position is detected obliquely from the position detection surface of the object.

More specifically, since the light transmitting unit and the light receiving unit satisfy the above-described specific conditions and relationships, a point where a linear irradiation mark and a linear detection mark intersect on the position detection surface of the object. Since only the reflected light is detected, the detection of the position by the position detecting means is based on the point-like reflection on the intersection line. Then, although the light transmission and the light reception are performed obliquely, a detection signal and detection data of the reflected light are obtained as if they were detected along the intersection line.

Thus, even in a situation where the detection system cannot be arranged directly beside or near the position detecting surface of the target object to directly detect and measure the position, the intersection line is located next to the position detecting surface. Since the same processing can be performed and the same result can be obtained as if the detection system were directly arranged horizontally, it can be said that the detection and measurement were performed from the side in a pseudo manner. Therefore, position detection can be performed much more easily than actually performing detection and measurement from the side. Therefore, according to the present invention, it is possible to realize an optical position detection device that detects the position of an object obliquely.

[Second solving means] The optical position detecting device of the second solving means (as described in claim 2 at the beginning of the application) is the optical position detecting device of the first solving means. The light transmitting unit and the light receiving unit are characterized in that the intersection lines are arranged so as to be substantially orthogonal to the position detection surface (of the object).

Here, the above-mentioned "substantially orthogonal" means that, in addition to being strictly orthogonal, even if there is some deviation, the fluctuation amount of the orthogonally projected component is inaccurate in detection / measurement accuracy. Is within the range that does not cause the above.

In the optical position detecting device according to the second solving means, even when a change in the position of the object in a direction parallel to the position detecting surface is caused to overlap, the direction of the change is not changed. Does not affect the positions of the reflection point and the detection point on the intersection line. As a result, undesired fluctuations in the detection position due to displacements in directions that do not need to be detected are avoided. Can be measured. Moreover, unlike the case where a point-like light transmission is performed simply from an oblique direction, the detection point of the reflected light on the position detection surface does not move in the position detection surface due to the displacement component in the horizontal direction. Is allowed over almost the entire area of the surface, so that there is a large margin in specific application conditions and design specifications.

[Third Solution] A tracking image pickup apparatus according to a third solution is provided with the following image pickup device and tracking means in addition to the optical position detecting device of the first solution. That is, the tracking imaging device (as described in claim 3 at the beginning of the application) includes: an imaging device that captures an image of the object from a direction parallel to or along the position detection surface of the object; A light transmitting unit that performs linear irradiation at an angle with respect to the position detection surface, and a surface that performs detection at which the detection mark is linear with respect to the position detection surface or includes a linear detection mark A light receiving unit that performs shape detection obliquely with respect to the position detection surface, and a position detecting unit that detects the position of the target object based on detection by the light receiving unit with respect to reflected light due to irradiation from the light transmitting unit, A tracking imaging device comprising: a tracking unit configured to track an image of the object on the position detection surface based on the detection by the position detection unit;
The light transmitting unit and the light receiving unit are characterized in that an intersection line between an irradiation optical path surface from the light transmitting unit and a detection optical path surface to the light receiving unit hits the position detection surface. Is what you do.

Here, the above "direction along the position detection surface"
This means that in addition to the direction that is strictly parallel to the position detection surface, even if there is a slight shift, it falls within a range that does not cause harmful distortion or the like in the image.

In the follow-up image pickup apparatus of the third solution, the position of the object is obliquely detected by the light transmitting section, light receiving section, and position detecting means corresponding to the above-described optical position detecting apparatus. Is done. Further, the image of the object is taken from the direction along the position detection surface of the object by the imaging device, and the image of the object is made to follow the position detection surface by the following means based on the detection of the position detection means. .

Thus, even in a situation where the detection system cannot be arranged directly beside the position detection surface of the object or in the vicinity thereof to directly detect and measure the position, the image of the object can be captured and the pattern can be obtained. Needless to perform data processing such as matching, the image of the target object always comes to a desired fixed position in the image area. Therefore, according to the present invention, it is possible to realize a follow-up imaging device that can accurately capture an image of an object by including the optical position detection device that detects the position of the object obliquely.

[Fourth Solution] The follow-up image pickup device of the fourth solution (as described in claim 4 at the beginning of the application) is the follow-up image pickup device of the third solution, wherein The tracking means is configured to partially remove the output of the imaging device while changing the selection range according to the output of the position detection means.

In the tracking image pickup apparatus according to the fourth solution, the function of the tracking means is to change the selection range according to the output of the position detection means or to partially remove the output of the imaging apparatus. This is accomplished by such signal processing and data processing. These processes are easily realized by a simple additional circuit, an input program, and the like. This makes it possible to easily realize a tracking image pickup device that tracks and images an object.

[Fifth Solution Means] The follow-up imaging apparatus of the fifth solution means (as described in claim 5 at the beginning of the application) is the follow-up image pickup apparatus of the third solution means, The tracking means moves the imaging device in the direction of displacement of the object in accordance with the output of the position detection means.

In the tracking imaging apparatus of the fifth solution, since the imaging apparatus itself is moved by the tracking means in accordance with the output of the position detecting means, the target object is directly output at the output of the imaging apparatus. Image always comes to a desired fixed position in the image area. As a result, it is not necessary to take a wide image including the position fluctuation range of the target object, so that a small and inexpensive imaging apparatus corresponding to only the imaging range when the target object is not displaced can be adopted.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the optical position detecting device and the follow-up imaging device of the present invention achieved by the above-described means will be described with reference to embodiments. The first embodiment embodies the first, second, third, and fourth solving means described above. In the second embodiment, the above-described first, second, third, and fifth solving means are embodied.

[First Embodiment] A specific configuration of a trajectory inspection device for photographing a rail from above as an optical position detection device and a follow-up imaging device of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing the outline thereof, and corresponds to FIG. 6 in the conventional example. FIG. 2 is a perspective view of a light transmission / reception state with respect to a rail side surface, and FIG. 3 is an example showing a relationship between a change in a rail position and a rail image in an image image.

This track inspection apparatus (see FIG. 1) is mounted on the body 11 of the inspection car 10 and used as in the prior art, but includes a laser transmitting section 410 (light transmitting section) and a laser receiving section 420. (Light receiving section) and a position signal generating circuit 321 (position detecting means) are added, and the image processing section 32 is replaced by an image processing section 320, which is different from the conventional example (see FIG. 1A). ). That is, the laser transmitting unit 4
10 and the laser light receiving section 420 are arranged so as to be obliquely above the rail 20 when mounted on the vehicle body 11, and are also shifted to the inside of the track (see FIG. 1B), and further, the position signal The generation circuit 321 (position detection means) detects the position of the target object based on the detection (B) by the laser receiving unit 420 with respect to the reflected light (442) by the irradiation (441) from the laser transmitting unit 410, and then detects the position. The image processing unit 320 changes the selection range according to the output (C), and partially discards the output of the camera 31 (imaging device).

In the laser transmitting section 410, the light emitting section has a slit shape or a line shape, and the laser beam irradiation path surface 441 emerging therefrom expands in a fan shape to form a side surface of the head of the rail 20 (object). It is positioned diagonally above the rail 20 so that linear irradiation is performed on a range including 24 (position detection surface). As a result, the laser light transmitting unit 410 performs the irradiation in which the irradiation mark, that is, the laser beam reflection line 441a becomes linear, obliquely toward the rail head side surface 24 (FIGS. 1C and 1C). d), FIGS. 2A and 2B
reference).

The laser light receiving section 420 is provided with a raster scan type CCD camera to take a two-dimensional image in which a number of scanning lines are arranged vertically and take out and use a line signal and line-shaped data for a specific scanning line. The laser beam detection path surface 442 reaching there is fan-shaped and is positioned obliquely above the rail 20 so that linear detection is performed in a range including the rail head side surface 24. Thus, the laser light receiving unit 420 obliquely detects a linear detection mark, that is, a planar detection including the laser beam detection line 442a (FIG. 1C,
(D), see FIGS. 2 (c) and 2 (d)). Note that a one-dimensional line sensor may be used instead of the two-dimensional imaging device,
When the detection trace (442a) is detected to be linear by such a sensor, the configuration of the laser light receiving unit 420 is straightforward.

The arrangement of the laser transmitting section 410 and the laser receiving section 420 is arranged obliquely above and below the same head side face 24 of the rail 20, and irradiation / detection at the rail head side face 24 is performed. It is installed inclined to a point. Further, the directions of the laser transmitting unit 410 and the laser receiving unit 420 are adjusted so that the laser beam irradiation path surface 441 and the laser beam detection path surface 442 cross at the height of the rail head side surface 24. An extension of an intersection line 443 between the laser beam irradiation path surface 441 as an irradiation light path surface from the laser light transmitting unit 410 and the laser beam detection path surface 442 as a detection light path surface to the laser light receiving unit 420 is substantially horizontal. In this state, further fine-tuning is also performed so that the vertical cross section 443 contacts the vertical rail head side surface 24 from the side, and the abutment line 443 is substantially perpendicular to the rail head side surface 24 at the time of contact. Can be Thereby, the laser beam reflection line 441a and the laser beam detection line 442a that intersect at the contact point of the intersection line 443 on the rail head side surface 24 emerge (see FIG. 2E), and the reflected light from the intersection point The light is received, and the position of the side surface at the intersection line 443 is detected as a bright spot in the linear laser light reception signal 420a (B) (see FIGS. 3A and 3D). .

The position signal generation circuit 321 has a peak detection circuit, a time-lapse circuit, and the like (not shown). The position signal generation circuit 321 measures an elapsed time until a peak appears when the laser light receiving section 420 is sequentially input from the right end, for example. As a position signal C to the image processing unit 320. Thereby, the horizontal distances X and X + x between the laser transmitting unit 410 and the like and the rail head side surface 24 are determined as the relative positions of the target on the intersection line 443 (FIG. 3A,
(D)).

The image processing section 320 includes a position signal generation circuit 321 in addition to image data from the camera 31 as described later.
When the image data from the camera 31 is input, not all of them are taken in, but only some of them are selectively taken in according to the position signals C. This allows
The image processing unit 320 requires less image data to be processed, and can grasp the position of the rail image in the screen area in advance. The camera 31
(Imaging device) is mounted on the rail top surface 21 from directly above the rail 20, that is, from a direction parallel to the position detection surface 24 of the object.
And an image of the rail gap 22.

The mode of use and operation of the trajectory inspection apparatus of this embodiment will be described with reference to the drawings. FIG.
(A), (b), and (c) are schematic diagrams and a laser reception signal in a state where the wheel 12 is pressed against the rail 20 from the inside, that is, the right side in the figure, a full image image transmitted from the camera 31, and an image processing unit 320 3 (d), (e), and (F) show the images captured by the wheels 12.
Is a schematic diagram in a state in which it is shifted away from the rail 20 to the inside, that is, to the right side in the figure, a laser light receiving signal, an entire image image transmitted from the camera 31, and an image image taken into the image processing unit 320.

First, when the wheel 12 is pressed against the rail 20, that is, when the horizontal distance between the rail head side surface 24 and the laser transmitting section 410 is the distance X, the laser receiving signal 420a starts from the right end. A reflection point (black point in the figure) is detected at a position corresponding to the distance X (see FIG. 3A), and the value is sent to the image processing unit 320. Further, in this state, the image data in which the rail image 20a (image of the target object) is shown, for example, in the center of the image area 31a is transmitted from the camera 31 to the image processing unit 320 (see FIG. 3B).

The image processing section 320 selects and captures only the narrow image area 320a from the wide image area 31a. The image area 320a is determined to be wide enough to include the rail image 20a and to have a position corresponding to the distance X slightly inside the right end (see FIG. 3C). Others are discarded.

Next, when the wheel 12 is laterally separated from the rail 20, that is, when the horizontal distance between the rail head side surface 24 and the laser transmitting section 410 is the distance X + x, the laser light receiving signal 420a Distance X from right end
A reflection point is detected at a position corresponding to + x (FIG. 3D)
), And the value is sent to the image processing unit 320. In this state, the image data of the rail image 20a deviated from the center by a distance x to the left in the image area 31a and is offset is transmitted from the camera 31 to the image processing unit 320 (see FIG. 3E). .

When the value of the position signal C received from the position signal generation circuit 321 is increased by the distance x, the image processing section 320 reads the narrow image area 320a from the wide image area 31a. A portion shifted to the left by an amount corresponding to the distance x is selected and captured. Also in this image area 320a, the rail image 20a is reflected slightly inside from the right end (see FIG. 3 (f)), and other parts of the image area 31a are discarded.

Thus, in each case, the horizontal relative position of the rail head side surface 24 is detected based on the reflection on the intersection line 443a, and the rail image is obtained by signal processing and data processing based on the detection. 20a is made to follow the rail head side surface 24.

[Second Embodiment] FIG. 4 shows a specific configuration of a trajectory inspection device for photographing a rail from above as an optical position detection device and a follow-up imaging device according to the present invention.
This will be described with reference to the schematic diagram shown in FIG. FIG. 4 (a)
1A and FIG. 6A show a cross section of the track inspection device from the side of the rail and the inspection vehicle 10 as in FIG. 1A and FIG. 6A, and FIG. It is a view of the cross section of the trajectory inspection device from the traveling direction.

This apparatus is different from that of the first embodiment in that the image 20a of the objects 21 and 22 follows the position detecting surface 24 indirectly by the data processing of the image processing unit 320. Instead, the camera 31 or the like is moved in the direction of displacement of the rail head side surface 24, that is, in the horizontal direction, in accordance with the output C of the position signal generation circuit 321.
Is performed directly by moving in a direction orthogonal to the longitudinal direction of the.

To enable horizontal movement of the camera 31, the laser transmitting section 410, the laser receiving section 420 and the like, a slider mechanism is introduced. Then, the slider fixing portion 611 is attached to the bottom surface of the vehicle body 11, and the camera 31
And the like are attached to the lower surface of the slider movable portion 612. Further, in order to drive the movement of the slider movable portion 612, the servo controller 613 generates a servo control signal such that the value of the position signal C always becomes a predetermined constant value.
A servo motor 614 for rotating the ball screw 615 in accordance with the servo control signal to horizontally move the slider movable portion 612 is also provided on the vehicle body 11.

In this apparatus, even if the lateral relative position between the vehicle body 11 and the rail 20 changes, the slider is so set that the relative position between the laser receiving section 420 and the rail head side surface 24 on the intersection line 443 is constant. The movable section 612 is controlled and driven by the drive circuit 613 and the motor 614.
Then, with the movement of the slider movable portion 612, the lateral relative position between the camera 31 and the rail 20 is always kept constant.

Thus, the rail image 20a always appears in the same area in the image area 31a output from the camera 31. In addition, the image area 320a (FIG. 3C,
Since image data corresponding to (f) is obtained, the camera 31 can be small and inexpensive.

[0046]

As is apparent from the above description, in the optical position detecting device according to the first solving means of the present invention, the linear irradiation trace and the linear irradiation trace are formed on the position detecting surface of the object. Reflection light is detected only where the detection mark intersects, so that the detection signal and detection data of the reflected light as if they were directly detected along the intersection line between the irradiation light path surface and the detection light path surface There is an advantageous effect that an optical position detection device that can be obtained in a pseudo manner and as a result, the position of the object can be easily detected obliquely can be realized.

In the optical position detecting device according to the second solution of the present invention, the positions of the reflection points and the detection points on the intersection line are not affected by the displacement component in the direction parallel to the position detection surface. This has the advantageous effect that the position of the object can be accurately measured even if the detection is performed diagonally.

Further, in the tracking imaging apparatus according to the third solving means of the present invention, the position of the object is detected obliquely, and based on the detection, the image of the object is moved relative to the position detection plane. By being able to follow, even if it is not possible to place the detection system next to the position detection surface of the object and directly detect and measure the position, capture the image of the object There is an advantageous effect that a follow-up imaging apparatus that can accurately capture an image of an object without performing data processing such as pattern matching can be realized.

In the tracking image pickup apparatus according to the fourth solution of the present invention, the function of the tracking means is performed by signal processing and data processing, so that the tracking image picking up the target object is performed. There is an advantageous effect that the imaging device can be easily realized.

According to a fifth aspect of the present invention, in the follow-up image pickup apparatus, the image pickup apparatus itself moves and the image of the target object is directly moved to a desired fixed position in the image area at the output of the image pickup apparatus. With such an arrangement, there is an advantageous effect that a small and inexpensive imaging device corresponding to only the imaging range when the object is not displaced can be adopted.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a trajectory inspection device as a first embodiment of an optical position detection device and a tracking imaging device according to the present invention.

FIG. 2 is a perspective view of a light transmitting / receiving state with respect to a rail side surface.

FIG. 3 is an example showing a relationship between a change in a rail position and a rail image in an image.

FIG. 4 is a schematic diagram of a trajectory inspection device as a second embodiment of the optical position detection device and the tracking imaging device of the present invention.

FIG. 5 is a general schematic diagram of a trajectory inspection device.

FIG. 6 shows a conventional trajectory inspection device.

[Explanation of symbols]

Reference Signs List 10 inspection vehicle 11 body 12 wheels 20 rail (object for imaging and position detection) 20a rail image (image of object) 21 rail top surface (imaging surface) 22 rail gap (imaging surface) 24 rail head side surface (displacement) Surface, position detection surface) 30 trajectory inspection device 31 camera (imaging device) 31a image area 32 image processing unit (rail position detection unit in image, rail tracking unit in image) 33 display unit 41 laser transmission unit 42 laser reception unit 43 Trigger section (idle detection means; track structure detection means; imaging timing determination means) 44 Laser beam reflection line (reflection trace, irradiation trace) 51 Strobe (illumination means) 61 Cover 62 Transparent window 320 Image processing section (rail in image) Follow-up means) 320a image area 321 position signal generation circuit (position detection means) 410 laser light transmission section (light transmission section) 420 laser light reception Section (light receiving section) 420a laser light receiving signal (reflected light detection signal on intersection line) 441 laser beam irradiation path surface (light transmission path development surface,
Irradiation light path surface) 441a Laser beam reflection line (reflection trace, irradiation trace) 442 Laser beam detection path surface (light receiving path development surface,
Detection optical path surface 442a Laser beam detection line (detection trace) 443 Intersecting line (optical path surface intersection line) 611 Slider fixing part (following means) 612 Slider movable part (following means) 613 Drive circuit (following means) 614 Motor (following means) ) 615 Ball screw (follow-up means)

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code FI G01B 11/14 G01B 11/14 H

Claims (5)

[Claims] A light-transmitting unit for irradiating the irradiation mark linearly with respect to the position detection surface of the object; and detecting the light detection mark linearly with respect to the position detection surface. A light receiving unit that performs or performs a planar detection including a linear detection mark obliquely with respect to the position detection surface, and the target object based on detection by the light receiving unit of reflected light by irradiation from the light transmitting unit. An optical position detecting device comprising: a position detecting means for detecting a position of the light transmitting unit and the light receiving unit,
An optical position detecting device, wherein an intersection line between an irradiation light path surface from the light transmitting unit and a detection light path surface to the light receiving unit hits the position detection surface. 2. The optical position detecting device according to claim 1, wherein the light transmitting section and the light receiving section are arranged such that the intersection line is substantially orthogonal to the position detecting surface. 3. An imaging device for taking an image of an object from a direction parallel to or along the position detection surface of the object, and an irradiation device in which irradiation traces are linearly oblique to the position detection surface. A light transmitting unit for performing the detection, and a light receiving unit for performing the detection in which the detection mark becomes linear with respect to the position detection surface or performing the detection of the surface including the linear detection mark with respect to the position detection surface. When,
Position detecting means for detecting a position of the object based on detection by the light receiving section of reflected light by irradiation from the light transmitting section; and detecting the position of the image of the object based on the detection by the position detecting means. A tracking unit configured to follow a surface, wherein the light transmitting unit and the light receiving unit intersect an irradiation optical path surface from the light transmitting unit and a detection optical path surface to the light receiving unit. A tracking imaging apparatus, wherein a line is disposed at a position where the line hits the position detection surface. 4. A tracking imaging apparatus according to claim 3, wherein said tracking means partially removes an output of said imaging apparatus while changing a selection range according to an output of said position detection means. . 5. A tracking imaging apparatus according to claim 3, wherein said tracking means moves the imaging apparatus in a direction of displacement of the object in accordance with an output of the position detection means.