JPH10328932A - Saw wire with abrasive grain and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a saw wire with abrasive grain that can slice material to be sliced efficiently over many hours, and provide a method of manufacturing the saw wire. SOLUTION: Ultrafine grains of 5-20 μm in grain diameter are sprayed to a core wire 41 in a jet air current exceeding the speed of 80 m/sec so as to form innumerable recesses 10 of mat finish. A binder 42A with abrasive grains 42B kneaded therein is applied to these recesses 10. The abrasive grains 42B are made to enter the recesses 10 by drawing of an abrasive grain drawing die, and the outer diameter is uniformed to bake by a baking device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a saw wire with abrasive grains and a method for manufacturing the same, and more particularly, to a saw wire with abrasive grains capable of efficiently slicing an object to be sliced for a long time and a method for manufacturing the same.

[0002]

2. Description of the Related Art In recent years, the diameter of silicon wafers has been increasing, and a large number of wafers can be sliced at the same time, and a high through-top can be expected. Therefore, wafer slices using a wire saw are widely used. Also,
For the improvement, a saw wire with abrasive grains having abrasive grains fixed to the wire surface is used.

FIGS. 5A and 5B show a conventional saw wire with abrasive grains. FIG. 5A shows a vertical cross section of the saw wire with abrasive grains, and FIG. 5B is an AA cross-sectional view thereof. As shown in the figure, the saw wire with abrasive grains 40 is a metal wire having a high tensile strength, for example, a brass-plated piano wire,
A core wire 41 made of a special alloy steel wire, an ultra-high strength alloy wire, an amorphous alloy wire, or the like, or a nonmetallic fiber having a high tensile strength, for example, a carbon fiber or an aramid fiber.
And a paint 42 applied to the outer periphery of the core wire 41. Here, the paint 42 includes a binder 42A made of a material other than metal, for example, an organic material such as a polyamide-imide resin or an inorganic material such as glass, and a binder 4A.
And abrasive grains 42B dispersed in 2A. Abrasive 42B
Generally, GC abrasives, alumina, silicon carbide, or the like is used as the material of the metal.

[0004] Although not shown, the saw wire with abrasive grains 40 is obtained by kneading a solution in which a binder 42A is dissolved in a solvent, dispersing the abrasive grains 42B in the solution,
It is produced by applying a solution in which B is dispersed and mixed on the surface of the core wire 41 and passing it through a heating furnace and baking.

As described above, according to the conventional saw wire with abrasive grains, a metal wire having a high tensile strength is used as the core wire, and the abrasive grains are held on the surface by a binder made of an organic material or an inorganic material. In addition, the slice efficiency in the wafer slice can be improved.

[0006]

However, according to the conventional saw wire with abrasive grains, since the abrasive grains are held in the core wire only by the fixing force of the binder, wear and vibration with the object to be sliced at the time of slicing are caused. As a result, there is a problem that the abrasive grains fall off and the time for efficiently slicing the object to be sliced is short, in other words, the life as a saw wire is short.

[0007]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a saw wire with abrasive grains capable of efficiently slicing an object to be sliced over a long period of time and a method for producing the same.

[0008]

SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, the present invention provides a method in which a binder made of an organic or inorganic material or the like and abrasive particles are kneaded and applied to the surface of a core wire, and the coated abrasive particles are baked and fixed. In the saw wire, the core wire has a fine dent on the surface, and the abrasive grains enter the dent and are fixed to the core wire, thereby providing a saw wire with abrasive grains.

In this case, the depression may be formed by sandblasting or shot peening, or may be formed by chemical polishing or electric field polishing.

[0010] In order to achieve the above object, the present invention provides an infinite number of satin-like depressions in a core wire sent from a core wire sending means, and the surface of the core wire in which the depressions are formed is formed. A binder obtained by kneading a binder made of an organic or inorganic material and abrasive grains is applied, and the core wire coated with the paint is squeezed with an abrasive squeezing die to allow the abrasive grains to enter the dents to make the outer diameter uniform. And baking the abrasive grains and the binder with a baking means and fixing the binder to the core wire.

[0011]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
An embodiment of the present invention will be described in detail.

FIG. 1 shows a saw wire with abrasive grains according to an embodiment of the present invention. The same parts as those in FIG. 5 are denoted by the same reference numerals and symbols, and thus redundant description will be omitted. However, in this embodiment, in the point that Different from conventional saw wire with abrasives.

FIG. 2 shows a cord 41 in which the countless pear-shaped depressions 10 are formed. Countless dents 10
Before applying the coating material 42 in which the binder 42A and the abrasive grains 42B are kneaded to the core wire 41, sandblasting, that is, ultra-fine particles having a particle size of 5 to 20 μm are discharged into a jet airflow exceeding a speed of 80 m / sec. Then, it is formed by spraying on the core wire 41.

The size of the recess 10 formed in the core wire 41 must be balanced with the particle size of the abrasive grains 42B to be fixed. In the case of using SiC abrasive grains having a grain diameter of 4 to 12 μm, the strongest fixing force is obtained when sandblasting is performed with a grain diameter of 5 to 20 μm. In addition, the size of the abrasive grains 42B to be used inevitably varies, but since the abrasive grains of large particles easily enter the recess 10 on the surface of the wire core 41, the apparent outer diameter of the saw wire with abrasive grains is Become uniform.

FIG. 3 shows a state in which the object to be sliced 30 (for example, a silicon wafer) is sliced using the saw wire 40 with abrasive grains. As shown in the drawing, when the saw wire 40 with abrasive grains is pressed against the sliced object 30 and the sliced object 30 is sliced in the direction of the arrow, the reaction force of the sliced object 30 acts on the abrasive grains 42B. However, since the abrasive grains 42B enter and are fixed in the recesses 10, the abrasive grains 42B can sufficiently withstand the reaction force. Thereby, the sliced object 3
The slice processing of 0 is performed efficiently, and the abrasive grains are less likely to fall off.

As a reference example, a saw wire with an abrasive grain using a surface smooth core wire and a saw wire with an abrasive grain according to the present invention were brought into contact with a rotating wheel having an outer diameter of 90 mm on which a # 2000 sandpaper was adhered to the surface. The state of the abrasive grains falling off was compared. As a result, the saw wire with an abrasive grain of the present invention has 2
Although the life was more than 00 rotations, the abrasive wire with a smooth cored wire had a large variation and a large number of abrasive grains dropped off at 20 to 50 rotations. Therefore, the life of the saw wire at the time of actual slicing is 4 to 5 in the saw wire with abrasives according to the present invention.
It can be more than double.

Hereinafter, a method for manufacturing a saw wire with abrasive grains according to an embodiment of the present invention will be described with reference to FIG.
As shown in FIG.
1, a sandblasting device 12 for spraying ultrafine particles on the surface of the core wire 41 sent from the core wire sending device 11 to form an innumerable pear-like dent 10, and a sandblasting device 12. A paint application device 13 for applying the paint 42 to the core wire 41 in which the countless pear-shaped depressions 10 are formed;
It is manufactured by a baking device 14 for baking the saw wire 40 with the abrasive grain coated with 2 and a winding device 15 for winding the saw wire 40 with the abrasive grain that is burned and fixed by the baking device 14.

The manufacturing process of the saw wire with abrasive grains by the above apparatus will be described. First, the core wire 41 is sent from the core wire sending device 11 and supplied to the sandblasting device 12. next,
Ultrafine particles having a particle size of 5 to 20 μm are sprayed onto the core wire 41 supplied to the sandblasting device 12 by a superfine particle spraying machine 12A in a jet stream exceeding a speed of 80 m / sec to form an innumerable satin-like dent 10. . Then, the core wire 41 in which the countless pear-shaped depressions 10 are formed is supplied to the paint application device 13, and the vanida application unit 13 containing abrasive grains is supplied.
The paint 42 is applied by A, and the saw wire 40 with abrasive grains to which the paint 42 is applied is squeezed by the abrasive grain squeezing die 13B. At this time, the abrasive grains 42B in the paint 42 enter the recess 10 by the drawing of the abrasive grain drawing die 13B, and the outer diameter becomes uniform. The saw wire with abrasive grains 40 having a uniform outer diameter is supplied to the printing device 14, baked by the printing device 14, and wound by the winding device 16. Thus, the production of the saw wire with abrasive grains is completed.

As described above, the binder 42A mixed with the abrasive grains 42B is applied to the dents 10 formed on the surface of the core wire 41, squeezed by the abrasive grain dies 13B, and then baked through the printing device 14 to obtain the structure shown in FIG. As shown in the figure, the abrasive grains 42B enter the recess 10 of the core wire 41, and the abrasive grains 42B
And the core wire 41 are firmly adhered to the saw wire 40 with abrasive grains.

The countless pits formed on the surface of the core wire are generated by a mechanical method such as shot peening or an electrochemical method such as chemical polishing (etching) or electric field polishing in addition to sandblasting. Can be done. In the case of electropolishing, a DC +12 V is applied to the core wire to allow the core wire to pass through a 5% sulfurous acid solution, and a negative electrode is arranged in this solution, so that the surface of the core wire has a roughened surface.

A similar effect can be expected by using a stranded wire as the core wire instead of providing a depression on the surface of the core wire and allowing the abrasive grains to bite into the dent between the wires of the core wire.

[0022]

As described above, according to the saw wire with abrasive grains and the method of manufacturing the same according to the present invention, an infinite number of satin-like dents are formed in the core wire sent from the core wire sending means. The surface of the formed core is coated with a coating material obtained by kneading a binder made of an organic or inorganic material and abrasive grains, and the coated core is squeezed with an abrasive grain squeezing die to allow the abrasive grains to enter the recess. The outer diameter is made uniform and the abrasive grains and binder are baked by the baking means so that they are fixed to the core wire. Even if the reaction force of the object to be sliced acts on the abrasive grains during slicing, it is sufficient for this reaction force The slicing object can be sliced efficiently for a long time.

[Brief description of the drawings]

1A and 1B are diagrams showing a saw wire with abrasive grains according to an embodiment of the present invention, wherein FIG. 1A is a cross-sectional view, and FIG.
It is A sectional drawing.

FIG. 2 is a diagram showing countless satin-like depressions formed on the surface of a cord;

FIG. 3 is a diagram showing a state in which an object to be sliced is sliced using a saw wire with abrasive grains according to an embodiment of the present invention.

FIG. 4 is a diagram illustrating a method for manufacturing a saw wire with abrasive grains according to an embodiment of the present invention.

FIG. 5 is a view showing a conventional saw wire with abrasive grains,
(A) is a longitudinal sectional view, (b) is an AA sectional view of (a).

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 dent 11 core wire sending device 12 sand blasting device 12A ultra fine particle spraying machine 13 paint coating device 13A abrasive grain containing binder coating unit 13B abrasive grain drawing die 14 printing device 15 winding device 30 object to be sliced 40 saw wire with abrasive 41 core wire 42 paint 42A binder 42B abrasive

Claims (4)

[Claims] 1. A saw wire with abrasive grains, which is obtained by applying a binder obtained by kneading a binder made of an organic or inorganic material and abrasive grains onto the surface of a core wire and baking and fixing the core wire, wherein the core wire has a fine recess on the surface. The saw wire with abrasive grains, wherein the abrasive grains enter the recess and are fixed to the core wire. 2. The saw wire with abrasive grains according to claim 1, wherein the recess is formed by sandblasting or shot peening. 3. The saw wire with abrasive grains according to claim 1, wherein the recess is formed by chemical polishing or electric field polishing. 4. An infinite number of satin-like dents are formed in the core wire sent from the core wire sending means, and a binder and an abrasive made of an organic or inorganic material are formed on the surface of the core wire in which the dent is formed. The kneaded paint is applied, the core wire coated with the paint is squeezed with an abrasive grain squeezing die, and the abrasive grains are allowed to enter the recesses to make the outer diameter uniform, and the baking means is used to bond the abrasive grains and the binder. A method of manufacturing a saw wire with abrasive grains, wherein the saw wire is baked and fixed to the core wire.