JPH10294404A - Resin sealed electronic device and its manufacture - Google Patents
Resin sealed electronic device and its manufactureInfo
- Publication number
- JPH10294404A JPH10294404A JP9103401A JP10340197A JPH10294404A JP H10294404 A JPH10294404 A JP H10294404A JP 9103401 A JP9103401 A JP 9103401A JP 10340197 A JP10340197 A JP 10340197A JP H10294404 A JPH10294404 A JP H10294404A
- Authority
- JP
- Japan
- Prior art keywords
- sealing resin
- resin
- stress
- coating film
- electronic device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】この発明は、樹脂封止型電子
装置及びその製造方法に関するものである。The present invention relates to a resin-sealed electronic device and a method of manufacturing the same.
【0002】[0002]
【従来の技術】図10に示すように、シリコンチップ等
の電子部品41をリードフレーム40の上に搭載し、電
子部品41を一次封止樹脂42にてモールドしてICパ
ッケージ体43とするとともに、このICパッケージ体
43をエポキシ等の二次封止樹脂44にてモールドする
ことが行われている。つまり、ICパッケージ体43を
更に二次成形(トランスファー成形、ポッティング成
形)することが行われている。2. Description of the Related Art As shown in FIG. 10, an electronic component 41 such as a silicon chip is mounted on a lead frame 40, and the electronic component 41 is molded with a primary sealing resin 42 to form an IC package 43. The IC package 43 is molded with a secondary sealing resin 44 such as epoxy. That is, the secondary molding (transfer molding, potting molding) of the IC package 43 is performed.
【0003】この樹脂封止型電子装置においては、硬化
収縮応力あるいは硬化後の熱応力により電子部品41が
過大な応力を受け、その機能が低下するおそれがある。
つまり、図10に示すように、ICパッケージ体43が
二次封止樹脂44にて覆われている状態から図11に示
すように高温になったり図12に示すように低温になっ
た場合を考える。一次封止樹脂42の熱膨張率をαM と
し二次封止樹脂44の熱膨張率をαE としたときαE >
αM を満足する場合、図11の如く高温になると、二次
封止樹脂44はICパッケージ体43から離れる方向に
膨張する。また、図12の如く低温になると、二次封止
樹脂44はICパッケージ体43を圧迫する方向に収縮
する。このように、温度変化によりICパッケージ体4
3に応力が加わることになる。In this resin-sealed electronic device, there is a possibility that the electronic component 41 receives an excessive stress due to a curing shrinkage stress or a thermal stress after curing, and the function thereof is deteriorated.
That is, as shown in FIG. 10, when the IC package 43 is covered with the secondary sealing resin 44, the temperature becomes high as shown in FIG. 11 or the temperature becomes low as shown in FIG. Think. When the coefficient of thermal expansion of the primary sealing resin 42 is αM and the coefficient of thermal expansion of the secondary sealing resin 44 is αE, αE>
When αM is satisfied, when the temperature rises as shown in FIG. 11, the secondary sealing resin 44 expands in a direction away from the IC package body 43. When the temperature becomes low as shown in FIG. 12, the secondary sealing resin 44 contracts in a direction of pressing the IC package body 43. Thus, the IC package 4
3 will be stressed.
【0004】そこで、応力緩和のために、エポキシ等の
二次封止樹脂自身の低応力化を図ったり、二次封止樹脂
のボリュームを減らすといった構造的工夫が行われてい
るが、製品のフレキシビリティ、その他の部位の信頼性
確保といった点から限界があった。In order to alleviate the stress, structural measures such as lowering the stress of the secondary sealing resin itself such as epoxy and reducing the volume of the secondary sealing resin have been made. There were limitations in terms of flexibility and ensuring the reliability of other parts.
【0005】一方、2つの部材間に生じる応力を低減す
る一手法として2つの部材間にゴムを挟み込むことが一
般的に行われている。この手法を樹脂封止型電子装置に
おいて用いようとすると、一次封止樹脂42と二次封止
樹脂44との間にゴムを介在させることとなり、この場
合、本来ゴムは非圧縮性物質(ポアソン比がほぼ0.
5)のため、ICパッケージ体43を二次封止樹脂44
で完全に覆う樹脂封止型電子装置においては、変形空隙
のない構造であるので、応力緩和の効果が現れない。即
ち、二次封止樹脂44はその硬化時に収縮力を発生する
とともに硬化後の冷熱サイクルを受けた時に多大な応力
を発生するが、ゴム材において外部からの応力を分散さ
せる効果があるのはゴムが変形しうる空隙が確保されて
いる場合に限られている。[0005] On the other hand, as one method of reducing the stress generated between two members, rubber is generally sandwiched between two members. If this technique is used in a resin-sealed electronic device, rubber is interposed between the primary sealing resin 42 and the secondary sealing resin 44. In this case, the rubber is originally an incompressible substance (Poisson). The ratio is almost 0.
For 5), the IC package 43 is replaced with the secondary sealing resin 44.
In the resin-encapsulated electronic device completely covered with, there is no effect of stress relaxation because it has a structure without deformation voids. That is, the secondary sealing resin 44 generates a contraction force at the time of curing and generates a large amount of stress when subjected to a cooling / heating cycle after the curing. However, the rubber material has the effect of dispersing the external stress. This is limited to the case where a space where the rubber can be deformed is secured.
【0006】[0006]
【発明が解決しようとする課題】そこで、この発明の目
的は、一次封止樹脂と二次封止樹脂間に加わる応力を緩
和して信頼性の高い樹脂封止型電子装置を提供すること
にある。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a highly reliable resin-sealed electronic device by relaxing the stress applied between the primary sealing resin and the secondary sealing resin. is there.
【0007】[0007]
【課題を解決するための手段】請求項1に記載の発明
は、一次封止樹脂と二次封止樹脂との間に配置される応
力緩衝用コーティング膜として、母材として弾性体(例
えばゴム)を用いるとともに、この母材中に気泡を散在
させたものを用いたことを特徴としている。According to the first aspect of the present invention, an elastic body (for example, rubber) is used as a base material as a stress buffer coating film disposed between a primary sealing resin and a secondary sealing resin. ), And a material in which air bubbles are scattered in the base material is used.
【0008】よって、温度変化等によって一次封止樹脂
と二次封止樹脂との間に応力が加わった際に、応力緩衝
用コーティング膜における母材である弾性体が変形し
て、散在した気泡の容積が変化する。この気泡の容積変
化にて一次封止樹脂と二次封止樹脂との間の応力が吸収
され、半導体チップ等の電子部品に加わる応力が緩和さ
れる。Accordingly, when stress is applied between the primary sealing resin and the secondary sealing resin due to a temperature change or the like, the elastic body serving as the base material of the stress buffer coating film is deformed, and scattered bubbles are generated. Changes in volume. The stress between the primary sealing resin and the secondary sealing resin is absorbed by the change in the volume of the bubbles, and the stress applied to electronic components such as semiconductor chips is reduced.
【0009】つまり、温度変化等により一次と二次の封
止樹脂の間に応力が加わった際において、応力緩衝用コ
ーティング膜中の気泡が変形代(潰し代)になって応力
緩和が図られる。That is, when a stress is applied between the primary and secondary sealing resins due to a temperature change or the like, the bubbles in the stress buffer coating film become deformation allowances (crush allowances), thereby relaxing the stress. .
【0010】請求項2に記載の発明によれば、第1工程
により、基材の上に配置された電子部品が一次封止樹脂
にてモールドされる。そして、第2工程により、一次封
止樹脂の表面が、母材としての弾性体中に気泡を散在さ
せた応力緩衝用コーティング膜にてコーティングされ
る。さらに、第3工程により、前記応力緩衝用コーティ
ング膜の外周側において前記基材および電子部品が二次
封止樹脂にてモールドされる。According to the second aspect of the present invention, in the first step, the electronic component disposed on the substrate is molded with the primary sealing resin. Then, in the second step, the surface of the primary sealing resin is coated with a stress buffer coating film in which bubbles are dispersed in an elastic body as a base material. Further, in a third step, the base material and the electronic component are molded with a secondary sealing resin on the outer peripheral side of the stress buffer coating film.
【0011】その結果、請求項1に記載の樹脂封止型電
子装置が製造される。ここで、請求項3に記載のよう
に、前記第2工程において、液状弾性素材に中空球フィ
ラーを混入させた溶液を、前記一次封止樹脂の表面にコ
ーティングすると、実用上好ましいものになる。As a result, the resin-sealed electronic device according to the first aspect is manufactured. Here, as described in claim 3, in the second step, it is practically preferable to coat a solution in which a hollow sphere filler is mixed with a liquid elastic material on the surface of the primary sealing resin.
【0012】[0012]
【発明の実施の形態】以下、この発明を具体化した実施
の形態を図面に従って説明する。図1には、本実施形態
における樹脂封止型電子装置の断面図を示す。本装置
は、ガソリンエンジンの点火コイルおよび点火回路を樹
脂モールドしたものである。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view of a resin-sealed electronic device according to the present embodiment. In this device, an ignition coil and an ignition circuit of a gasoline engine are resin-molded.
【0013】図1において、基材としてのリードフレー
ム1の上には電子部品としてのシリコンチップ2が搭載
され、ボンディグワイヤ3にてシリコンチップ2とリー
ドフレーム1aとが電気的に接続されている。このボン
ディグワイヤ3とシリコンチップ2とは一次封止樹脂4
にてモールドされている。このようしてICパッケージ
体(モールド体)5が構成されている。In FIG. 1, a silicon chip 2 as an electronic component is mounted on a lead frame 1 as a base material, and the silicon chip 2 and the lead frame 1a are electrically connected by bonding wires 3. I have. The bonding wire 3 and the silicon chip 2 are connected to a primary sealing resin 4.
Molded at Thus, the IC package body (mold body) 5 is configured.
【0014】なお、シリコンチップ2以外にも、アルミ
ナ基板を用いた回路基板(プリント基板)をリードフレ
ーム1上に搭載したパッケージ体に具体化してもよい。
一方、樹脂封止型電子装置の筐体(ハウジング)6の内
部における下部には点火コイル7が配置されるととも
に、同じく筐体6の内部における点火コイル7の上方に
は前述のICパッケージ体5が配置されている。筐体6
の内部には二次封止樹脂8が充填され、点火コイル7お
よび前述のICパッケージ体5が二次封止樹脂8にてモ
ールドされている。二次封止樹脂8には注型エポキシ樹
脂を用いている。この注型エポキシにおいては、硬化収
縮応力や硬化後の熱応力によりICパッケージ体5が過
大な応力を受け、その機能が低下するおそれがある。こ
れについては図10〜図12を用いて説明したのでここ
では説明は省略するが、要は図11の如く高温になる
と、二次封止樹脂8はICパッケージ体5から離れる方
向に膨張し、図12の如く低温になると、二次封止樹脂
8はICパッケージ体5を圧迫する方向に収縮する。こ
のように、温度変化によりICパッケージ体5に応力が
加わることになる。In addition, a circuit board (printed board) using an alumina substrate other than the silicon chip 2 may be embodied as a package mounted on the lead frame 1.
On the other hand, an ignition coil 7 is arranged at a lower portion inside a housing (housing) 6 of the resin-encapsulated electronic device, and the IC package 5 is provided above the ignition coil 7 inside the housing 6. Is arranged. Case 6
Is filled with a secondary sealing resin 8, and the ignition coil 7 and the aforementioned IC package body 5 are molded with the secondary sealing resin 8. Cast epoxy resin is used for the secondary sealing resin 8. In this cast epoxy, the IC package body 5 receives an excessive stress due to the curing shrinkage stress or the thermal stress after curing, and the function may be deteriorated. Since this has been described with reference to FIGS. 10 to 12, the description is omitted here. In short, when the temperature becomes high as shown in FIG. 11, the secondary sealing resin 8 expands in a direction away from the IC package body 5, When the temperature becomes low as shown in FIG. 12, the secondary sealing resin 8 contracts in a direction of pressing the IC package body 5. Thus, a stress is applied to the IC package body 5 due to the temperature change.
【0015】そこで、図1に示すように、一次封止樹脂
4と二次封止樹脂8との間には、両封止樹脂間に加わる
応力を緩和するための応力緩衝用コーティング膜9が配
置されている。応力緩衝用コーティング膜9は、図2に
示すように、母材として弾性体、本実施形態ではゴム1
0を用いるとともに、この母材中に気泡11を散在させ
たものを用いている。応力緩衝用コーティング膜9の膜
厚は、0.5mm程度である。Therefore, as shown in FIG. 1, between the primary sealing resin 4 and the secondary sealing resin 8, a stress buffer coating film 9 for relaxing the stress applied between both sealing resins is provided. Are located. As shown in FIG. 2, the stress buffer coating film 9 is an elastic body as a base material, and in this embodiment, the rubber 1
0 is used and air bubbles 11 are scattered in the base material. The thickness of the stress buffer coating film 9 is about 0.5 mm.
【0016】この応力緩衝用コーティング膜9は、図1
0〜図12において緩衝領域となり、ICパッケージ体
5の熱的変形および二次封止樹脂8の熱的変形に伴いそ
の体積が変化する。The stress buffer coating film 9 is formed as shown in FIG.
In FIG. 0 to FIG. 12, a buffer region is provided, and its volume changes with the thermal deformation of the IC package body 5 and the secondary sealing resin 8.
【0017】つまり、各部の熱的変形は拘束のない場合
には定変位量だけ変形することから、例えば緩衝領域が
全くその変形に拘束を与えないなら、一次封止樹脂4と
二次封止樹脂8との熱膨張率の不整合による熱応力は発
生しない。これを満足させる緩和層としては体積変化で
きることが必要となる。That is, since thermal deformation of each part is deformed by a constant displacement amount when there is no constraint, for example, if the buffer region does not restrict the deformation at all, if the primary sealing resin 4 and the secondary sealing resin 4 No thermal stress occurs due to the mismatch of the coefficient of thermal expansion with the resin 8. The relaxation layer that satisfies this requires that the volume can be changed.
【0018】即ち、図3に示すように、応力緩衝用コー
ティング膜9が無い場合には、特性線P1にて示す如く
ICパッケージ体5には歪み量δに比例した力Fが加わ
るが、応力緩衝用コーティング膜9を設けることにより
気泡11が潰れ代となり、特性線P2にて示す如く所定
の歪み量δ1までは殆ど力FがICパッケージ体5に加
わらない。That is, as shown in FIG. 3, when the stress buffer coating film 9 is not provided, a force F proportional to the strain amount δ is applied to the IC package body 5 as shown by the characteristic line P1, but the stress F is applied. The provision of the buffer coating film 9 causes the air bubbles 11 to be a crushing allowance, and almost no force F is applied to the IC package body 5 up to a predetermined amount of distortion δ1 as shown by the characteristic line P2.
【0019】また、図1に示すように、リードフレーム
1aは筐体6を貫通するリード端子12に接続され、リ
ード端子12にて外部からの接続が行われるようになっ
ている。また、リードフレーム1は点火コイル7のリー
ド端子7aと接続されている。そして、リード端子12
を介してシリコンチップ2に形成された回路にバッテリ
電圧が供給され、所定の点火タイミングにて点火コイル
7により高電圧を生成して点火プラグに高電圧を供給す
るようになっている。As shown in FIG. 1, the lead frame 1a is connected to a lead terminal 12 penetrating through the housing 6, and the lead terminal 12 is connected to the outside. The lead frame 1 is connected to a lead terminal 7a of the ignition coil 7. And the lead terminal 12
, A battery voltage is supplied to a circuit formed in the silicon chip 2, a high voltage is generated by the ignition coil 7 at a predetermined ignition timing, and the high voltage is supplied to the ignition plug.
【0020】次に、製造方法を説明する。図4に示すよ
うに、リードフレーム1の上にシリコンチップ2を搭載
し、ワイヤ3にてシリコンチップ2とリードフレーム1
aとをボンディングする。そして、ボンディグワイヤ3
とシリコンチップ2とを一次封止樹脂4にてモールドし
て、ICパッケージ体5とする。Next, the manufacturing method will be described. As shown in FIG. 4, a silicon chip 2 is mounted on a lead frame 1, and the silicon chip 2 and the lead frame 1 are connected by wires 3.
a is bonded. And bondig wire 3
And the silicon chip 2 are molded with the primary sealing resin 4 to form an IC package 5.
【0021】引き続き、図5に示すように、ICパッケ
ージ体5を応力緩衝用コーティング膜9にて被覆する。
応力緩衝用コーティング膜9によるコーティグ処理は、
図6に示す3つの工程よりなる。Subsequently, as shown in FIG. 5, the IC package 5 is covered with a coating film 9 for stress buffering.
The coating process using the stress buffer coating film 9 is as follows.
It comprises three steps shown in FIG.
【0022】まず、液状弾性素材である液状シリコーン
樹脂を用意するとともに、図7に示す中空球フィラー
(カプセル)20を用意する。中空球フィラー20は、
その径Dが80μm程度の微粒体である。液状シリコー
ン樹脂としては、例えば、東レ社製CY52ー227を
用い、また、中空球フィラー20としては、例えば、日
本フィライト社製DU−80を用いる。そして、液状シ
リコーン樹脂と適量の中空球フィラー20とを混合させ
る。ここで、液状シリコーン樹脂に対する中空球フィラ
ー20の混合比は、40vol%程度とする。First, a liquid silicone resin as a liquid elastic material is prepared, and a hollow sphere filler (capsule) 20 shown in FIG. 7 is prepared. The hollow sphere filler 20
The fine particles have a diameter D of about 80 μm. As the liquid silicone resin, for example, CY52-227 manufactured by Toray Industries, Inc. is used, and as the hollow sphere filler 20, for example, DU-80 manufactured by Nippon Philite Co., Ltd. is used. Then, the liquid silicone resin and an appropriate amount of the hollow sphere filler 20 are mixed. Here, the mixing ratio of the hollow sphere filler 20 to the liquid silicone resin is about 40 vol%.
【0023】そして、液状シリコーン樹脂に中空球フィ
ラー20を混入させた溶液中にICパッケージ体5をデ
ィッピングして一次封止樹脂4の表面にコーティングす
る(図6に示す塗膜工程)。引き続き、150℃、20
分間の加熱にて硬化させる(図6に示す熱硬化工程)。
その結果、液状シリコーン樹脂に中空球フィラー20が
分散した状態のまま固化される。なお、応力緩衝用コー
ティング膜9においてゴム10中に気泡11が散在する
ことは応力緩衝用コーティング膜9の断面写真により確
認している。Then, the IC package 5 is dipped in a solution in which the hollow sphere filler 20 is mixed into the liquid silicone resin, and coated on the surface of the primary sealing resin 4 (coating process shown in FIG. 6). Subsequently, at 150 ° C., 20
The resin is cured by heating for a minute (a thermal curing step shown in FIG. 6).
As a result, the hollow sphere filler 20 is solidified while being dispersed in the liquid silicone resin. It is confirmed from the cross-sectional photograph of the stress buffer coating film 9 that the bubbles 11 are scattered in the rubber 10 in the stress buffer coating film 9.
【0024】このように中空球フィラー20を液状樹脂
に混合させ塗膜することにより下記のような効果を奏す
る。 (1)中空球フィラー20の添加量を調整することによ
り、応力緩衝用コーティング膜9中の気泡11の総量を
調整でき、適切な応力緩和が可能となる。By mixing the hollow sphere filler 20 with the liquid resin to form a coating film, the following effects can be obtained. (1) By adjusting the addition amount of the hollow sphere filler 20, the total amount of the bubbles 11 in the stress buffer coating film 9 can be adjusted, and appropriate stress relaxation can be achieved.
【0025】このように、中空球フィラー20の含有
率、粒径を選択することにより、目的とする塗膜の体積
変化率を設定でき、材料混合により応力緩和効果を容易
にコントロールできる。 (2)液状樹脂を用いた塗膜であるため(例えばディッ
ピング法により塗膜するため)、ICパッケージ体5の
リード端子1aの部分等も完全にコーティングすること
ができる。つまり、ディッピング法ではなく図8に示す
ように弾性を有するキャップ材30にてICパッケージ
体5を覆う場合には、ICパッケージ体5のリード端子
1aの部分はキャップ材30にて覆いにくい部分となる
が、ディッピング法を用いればリード端子1aの部分も
完全に覆うことができる。このことは、その後の二次成
形時液状樹脂ポッティングを例えば真空注入する場合、
コーティング膜9の内部に樹脂が浸入することなく緩衝
効果が確保できる。Thus, by selecting the content and the particle size of the hollow sphere filler 20, the volume change rate of the target coating film can be set, and the stress relaxation effect can be easily controlled by mixing the materials. (2) Since it is a coating film using a liquid resin (for example, because of coating by a dipping method), a portion of the lead terminal 1a of the IC package body 5 and the like can be completely coated. That is, when the IC package 5 is covered with the cap material 30 having elasticity as shown in FIG. 8 instead of the dipping method, the lead terminals 1 a of the IC package 5 are hardly covered with the cap material 30. However, if the dipping method is used, the portion of the lead terminal 1a can be completely covered. This means that, for example, when the liquid resin potting during the subsequent molding is vacuum-injected,
The buffering effect can be secured without the resin entering the inside of the coating film 9.
【0026】このように、塗膜される構造物は、必要部
位を塗膜形成することができる。 (3)液状樹脂を用いた塗膜であるため(例えばディッ
ピング法により塗膜するため)、角部を有するICパッ
ケージ体5においてもその角部になだらかな曲面をもた
せて成形できる。このことから、応力集中が緩和でき、
二次ポッティング材のクラック発生を抑制することがで
きる。As described above, the structure to be coated can form a coating on a required portion. (3) Since it is a coating film using a liquid resin (for example, because of coating by a dipping method), the IC package body 5 having a corner can also be formed with a gentle curved surface at the corner. From this, stress concentration can be reduced,
Cracking of the secondary potting material can be suppressed.
【0027】このように、塗膜される構造物は、その形
状によらなず塗膜形成することができる。 (4)塗膜中の気泡11は単独で存在するため、後工程
での例えばエポキシ含浸等の工程においても気泡11が
埋まることはない。Thus, the structure to be coated can be formed regardless of its shape. (4) Since the air bubbles 11 in the coating film are present alone, the air bubbles 11 will not be buried even in a subsequent step such as epoxy impregnation.
【0028】なお、ディップ材は特に液状シリコーン樹
脂である必要はなく、液状柔エポキシ剤(例えば、セメ
ンダイン社製EPー001)でもよい。このようにする
と、二次ポッティング材がエポキシの場合、共材のため
その化学的密着性が確保でき、熱伝導及び応力分散の観
点から更に優れたものとなる。The dip material does not need to be a liquid silicone resin, but may be a liquid soft epoxy agent (for example, EP-001 manufactured by Cemendyne). In this case, when the secondary potting material is epoxy, the chemical adhesion can be ensured because the material is a common material, and further excellent in terms of heat conduction and stress dispersion.
【0029】製造工程の説明に戻り、ICパッケージ体
5を応力緩衝用コーティング膜9にてコーティングした
後において、図1に示すように、筐体6内に点火コイル
7を装着するとともに、ICパッケージ体5を配置す
る。さらに、液状のエポキシ樹脂8を筐体6内に充填し
て硬化(固化)させる。Returning to the description of the manufacturing process, after the IC package body 5 is coated with the stress buffer coating film 9, as shown in FIG. The body 5 is placed. Further, the housing 6 is filled with a liquid epoxy resin 8 and cured (solidified).
【0030】なお、応力緩衝用コーティング膜9のコー
ティングはディップ以外にもスプレー、キャスティン
グ、リキッドインジェクションモールド等にて行っても
よい。次に、図9を用いてエポキシ樹脂8の硬化収縮応
力の低減効果について説明する。The coating of the stress buffer coating film 9 may be performed by spraying, casting, liquid injection molding or the like in addition to dip coating. Next, the effect of reducing the curing shrinkage stress of the epoxy resin 8 will be described with reference to FIG.
【0031】まず、図9(a)に示すように、応力緩衝
用コーティング膜9のない場合には、ICパッケージ体
5において受ける応力により発生する表面歪εは、−2
00μsである。ここで、表面歪εとは、単位長さの材
料が20℃から150℃に温度変化した際の材料の長さ
の変化量を指す。即ち、20℃において長さLであった
ものが150℃において長さL’に変化した場合におい
ては、 ε=(L−L’)/L にて定義されるものである。First, as shown in FIG. 9A, when the stress buffer coating film 9 is not provided, the surface strain ε generated by the stress applied to the IC package body 5 is -2.
00 μs. Here, the surface strain ε refers to the amount of change in the length of a material having a unit length when the temperature of the material changes from 20 ° C. to 150 ° C. That is, when the length L at 20 ° C. changes to the length L ′ at 150 ° C., it is defined by ε = (L−L ′) / L.
【0032】また、図9(b)に示すように、中空球フ
ィラーを含有しないシリコーンゴム35を厚さ0.5m
m塗膜した場合には、上記表面歪εは、−120μsと
なる。As shown in FIG. 9 (b), a silicone rubber 35 containing no hollow sphere filler is coated with a thickness of 0.5 m.
When m coatings are formed, the surface strain ε is −120 μs.
【0033】さらに、図9(c)に示すように、中空球
フィラーを含有したシリコーンゴム(コーティング膜
9)を厚さ0.5mm塗膜した場合には、上記表面歪ε
は、0〜−10μsとなる。Further, as shown in FIG. 9 (c), when a silicone rubber (coating film 9) containing a hollow sphere filler was applied to a thickness of 0.5 mm, the surface strain ε was reduced.
Is 0 to −10 μs.
【0034】このように、通常上記液状シリコーン樹脂
を硬化してなる硬化物は、ゴム弾性を示すが、その機械
的性質は非弾性変形、非圧縮性変形をもつことになる
が、応力緩和層としてのゴム弾性体は体積変化が求めら
れるが、その非圧縮性により応力緩和性が十分発揮でき
ないが、気泡11を散在することにより応力を緩和する
ことができようになる。つまり、シリコーンゴム等の非
圧縮性物質を緩衝層として使用するに際し、気体を封止
した中空球フィラー20を混入させることにより、その
ゴム弾性を残しつつ、緩衝層として圧縮性をもたせるこ
とにより応力緩和層として優れたものとなる。As described above, a cured product obtained by curing the above-mentioned liquid silicone resin usually exhibits rubber elasticity, and its mechanical properties include inelastic deformation and incompressible deformation. Although the rubber elastic body is required to change in volume, the incompressibility of the rubber elastic body cannot sufficiently exert the stress relaxation property, but the stress can be relaxed by scattering the bubbles 11. That is, when an incompressible substance such as silicone rubber is used as the buffer layer, the hollow sphere filler 20 that seals the gas is mixed in, so that the rubber elasticity is maintained and the compressive property is provided as the buffer layer. It becomes excellent as a relaxation layer.
【0035】このように本実施の形態は、下記の特徴を
有する。 (イ)一次封止樹脂4と二次封止樹脂8との間に配置さ
れる応力緩衝用コーティング膜9として、母材としてゴ
ム10を用いるとともに、この母材中に気泡11を散在
させたものを用いたので、温度変化等によって一次封止
樹脂4と二次封止樹脂8との間に応力が加わった際に、
応力緩衝用コーティング膜9における母材であるゴム1
0が変形して、散在した気泡11の容積が変化する。こ
の気泡11の容積変化にて一次封止樹脂4と二次封止樹
脂8の間の応力が吸収され、シリコンチップ2に加わる
応力が緩和される。つまり、温度変化等により一次と二
次の封止樹脂4,8との間に応力が加わった際におい
て、応力緩衝用コーティング膜9中の気泡11が変形代
(潰し代)になって応力緩和が図られる。 (ロ)リードフレーム1の上に配置されたシリコンチッ
プ2を一次封止樹脂4にてモールドし、一次封止樹脂4
の表面を、母材としてのゴム10中に気泡11を散在さ
せた応力緩衝用コーティング膜9にてコーティングし、
さらに、応力緩衝用コーティング膜9の外周側において
リードフレーム1およびシリコンチップ2を二次封止樹
脂8にてモールドするようにした。その結果、上記
(イ)の樹脂封止型電子装置が得られる。 (ハ)応力緩衝用コーティング膜9の成膜工程として、
液状弾性素材に中空球フィラー20を混入させた溶液
を、一次封止樹脂4の表面にコーティングすると、前述
したように実用上好ましいものになる。As described above, this embodiment has the following features. (A) As a stress buffer coating film 9 disposed between the primary sealing resin 4 and the secondary sealing resin 8, rubber 10 was used as a base material, and bubbles 11 were dispersed in the base material. When a stress is applied between the primary sealing resin 4 and the secondary sealing resin 8 due to a temperature change or the like,
Rubber 1 as a base material in the stress buffer coating film 9
0 is deformed, and the volume of the scattered bubbles 11 changes. The stress between the primary sealing resin 4 and the secondary sealing resin 8 is absorbed by the change in the volume of the bubbles 11, and the stress applied to the silicon chip 2 is reduced. That is, when a stress is applied between the primary and secondary sealing resins 4 and 8 due to a temperature change or the like, the bubbles 11 in the stress buffer coating film 9 become deformation allowances (crushing allowances) and stress relaxation occurs. Is achieved. (B) The silicon chip 2 placed on the lead frame 1 is molded with the primary sealing resin 4,
Is coated with a stress buffer coating film 9 in which bubbles 11 are dispersed in rubber 10 as a base material,
Further, the lead frame 1 and the silicon chip 2 are molded with the secondary sealing resin 8 on the outer peripheral side of the stress buffer coating film 9. As a result, the resin-sealed electronic device (a) is obtained. (C) As a process of forming the stress buffer coating film 9,
When the surface of the primary sealing resin 4 is coated with a solution in which the hollow sphere filler 20 is mixed in the liquid elastic material, it becomes practically preferable as described above.
【0036】なお、封止樹脂の硬化は加熱を用いたが、
紫外線照射等の手法により行ってもよい。In addition, although heating was used for curing the sealing resin,
It may be performed by a method such as ultraviolet irradiation.
【図1】 実施の形態における樹脂封止型電子装置の断
面図。FIG. 1 is a cross-sectional view of a resin-sealed electronic device according to an embodiment.
【図2】 応力緩衝用コーティング膜の断面図。FIG. 2 is a cross-sectional view of a stress buffer coating film.
【図3】 歪み量と力との関係を示す図。FIG. 3 is a diagram illustrating a relationship between a strain amount and a force.
【図4】 樹脂封止型電子装置の製造工程を説明するた
めの断面図。FIG. 4 is a cross-sectional view for explaining a manufacturing process of the resin-sealed electronic device.
【図5】 樹脂封止型電子装置の製造工程を説明するた
めの断面図。FIG. 5 is a cross-sectional view for explaining a manufacturing process of the resin-sealed electronic device.
【図6】 樹脂封止型電子装置の製造工程を説明するた
めの工程図。FIG. 6 is a process chart for explaining a manufacturing process of the resin-sealed electronic device.
【図7】 中空球フィラーの断面図。FIG. 7 is a sectional view of a hollow sphere filler.
【図8】 比較のための樹脂封止型電子装置の断面図。FIG. 8 is a cross-sectional view of a resin-sealed electronic device for comparison.
【図9】 封止樹脂により加わる応力を説明するための
断面図。FIG. 9 is a cross-sectional view illustrating stress applied by a sealing resin.
【図10】 封止樹脂により加わる応力を説明するため
の断面図。FIG. 10 is a sectional view for explaining stress applied by a sealing resin.
【図11】 封止樹脂により加わる応力を説明するため
の断面図。FIG. 11 is a cross-sectional view illustrating stress applied by a sealing resin.
【図12】 封止樹脂により加わる応力を説明するため
の断面図。FIG. 12 is a cross-sectional view for explaining stress applied by a sealing resin.
1…リードフレーム、2…シリコンチップ、4…一次封
止樹脂、8…二次封止樹脂、9…応力緩衝用コーティン
グ膜、10…ゴム、11…気泡DESCRIPTION OF SYMBOLS 1 ... Lead frame, 2 ... Silicon chip, 4 ... Primary sealing resin, 8 ... Secondary sealing resin, 9 ... Stress buffer coating film, 10 ... Rubber, 11 ... Bubbles
Claims (3)
ドする一次封止樹脂と、 前記一次封止樹脂によりモールドされた前記基材および
電子部品をモールドする二次封止樹脂と、 前記一次封止樹脂と二次封止樹脂との間に配置され、両
封止樹脂間に加わる応力を緩和するための応力緩衝用コ
ーティング膜と、を備えた樹脂封止型電子装置におい
て、 前記応力緩衝用コーティング膜として、母材として弾性
体を用いるとともに、この母材中に気泡を散在させたも
のを用いたことを特徴とする樹脂封止型電子装置。A first sealing resin that molds an electronic component disposed on a base material; a second sealing resin that molds the base material and the electronic component molded with the primary sealing resin; A resin sealing type electronic device comprising: a primary sealing resin and a secondary sealing resin; and a stress buffer coating film for relaxing stress applied between the two sealing resins. A resin-encapsulated electronic device, wherein an elastic body is used as a base material as the buffer coating film, and air bubbles are scattered in the base material.
止樹脂にてモールドする第1工程と、 前記一次封止樹脂の表面を、母材としての弾性体中に気
泡を散在させた応力緩衝用コーティング膜にてコーティ
ングする第2工程と、 前記応力緩衝用コーティング膜の外周側において前記基
材および電子部品を二次封止樹脂にてモールドする第3
工程と、を備えたことを特徴とする樹脂封止型電子装置
の製造方法。2. A first step of molding an electronic component disposed on a base material with a primary sealing resin, wherein air bubbles are scattered on an elastic body as a base material on the surface of the primary sealing resin. A second step of coating with a stress buffer coating film, and a third step of molding the substrate and the electronic component with a secondary sealing resin on the outer peripheral side of the stress buffer coating film.
And a method of manufacturing a resin-sealed electronic device.
フィラーを混入させた溶液を、前記一次封止樹脂の表面
にコーティングするものである請求項2記載の樹脂封止
型電子装置の製造方法。3. The resin-encapsulated electronic device according to claim 2, wherein the second step is to coat a solution in which a hollow sphere filler is mixed into a liquid elastic material on the surface of the primary sealing resin. Production method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10340197A JP3820674B2 (en) | 1997-04-21 | 1997-04-21 | Resin-sealed electronic device and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10340197A JP3820674B2 (en) | 1997-04-21 | 1997-04-21 | Resin-sealed electronic device and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10294404A true JPH10294404A (en) | 1998-11-04 |
JP3820674B2 JP3820674B2 (en) | 2006-09-13 |
Family
ID=14353041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10340197A Expired - Lifetime JP3820674B2 (en) | 1997-04-21 | 1997-04-21 | Resin-sealed electronic device and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3820674B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012142516A (en) * | 2011-01-06 | 2012-07-26 | Denso Corp | Semiconductor device |
JP2014110249A (en) * | 2012-11-30 | 2014-06-12 | Shindengen Electric Mfg Co Ltd | Structure for embedding semiconductor device, and method of embedding semiconductor device |
JP2014143373A (en) * | 2013-01-25 | 2014-08-07 | Mitsubishi Electric Corp | Semiconductor device and method for manufacturing semiconductor device |
CN113977835A (en) * | 2021-10-26 | 2022-01-28 | 海鹰企业集团有限责任公司 | Ultrasonic transducer probe encapsulating method |
DE102019207263B4 (en) | 2018-05-21 | 2024-12-19 | Denso Corporation | Electronic Device |
-
1997
- 1997-04-21 JP JP10340197A patent/JP3820674B2/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012142516A (en) * | 2011-01-06 | 2012-07-26 | Denso Corp | Semiconductor device |
JP2014110249A (en) * | 2012-11-30 | 2014-06-12 | Shindengen Electric Mfg Co Ltd | Structure for embedding semiconductor device, and method of embedding semiconductor device |
JP2014143373A (en) * | 2013-01-25 | 2014-08-07 | Mitsubishi Electric Corp | Semiconductor device and method for manufacturing semiconductor device |
DE102019207263B4 (en) | 2018-05-21 | 2024-12-19 | Denso Corporation | Electronic Device |
CN113977835A (en) * | 2021-10-26 | 2022-01-28 | 海鹰企业集团有限责任公司 | Ultrasonic transducer probe encapsulating method |
Also Published As
Publication number | Publication date |
---|---|
JP3820674B2 (en) | 2006-09-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6321734B1 (en) | Resin sealed electronic device and method of fabricating the same and ignition coil for internal combustion engine using the same | |
US20030042615A1 (en) | Stacked microelectronic devices and methods of fabricating same | |
US5458716A (en) | Methods for manufacturing a thermally enhanced molded cavity package having a parallel lid | |
US6601294B1 (en) | Method for making a packaged semiconductor device | |
JP3581268B2 (en) | Semiconductor device with heat sink and method of manufacturing the same | |
JPS60257546A (en) | Semiconductor device and manufacture thereof | |
US3999285A (en) | Semiconductor device package | |
US4888634A (en) | High thermal resistance bonding material and semiconductor structures using same | |
TW546790B (en) | Semiconductor package having a resin cap member | |
US4139859A (en) | Semiconductor device package | |
KR900002454A (en) | Semiconductor device and manufacturing method | |
JP3820674B2 (en) | Resin-sealed electronic device and manufacturing method thereof | |
JP7091696B2 (en) | Physical quantity sensor and semiconductor device | |
JP3916026B2 (en) | Semiconductor device package and manufacturing method thereof | |
JP4366700B2 (en) | Method for manufacturing semiconductor device package | |
KR20040014420A (en) | Packaged electronic component and method for packaging an electronic component | |
JPS6315448A (en) | Semiconductor device | |
CN113130422B (en) | Power module and preparation method thereof | |
US7436060B2 (en) | Semiconductor package and process utilizing pre-formed mold cap and heatspreader assembly | |
JP3014873B2 (en) | Method for manufacturing semiconductor device | |
CN115985859A (en) | Cavity formed in semiconductor packaging molding compound and method of forming | |
JPH07249714A (en) | Composite semiconductor device | |
JPS61240664A (en) | Semiconductor device | |
JPS63107050A (en) | Resin seal type semiconductor device | |
JPH08264686A (en) | Resin sealed semiconductor device and its manufacture |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040309 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20040909 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060228 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060428 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20060530 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20060612 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090630 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100630 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100630 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110630 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110630 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120630 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120630 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130630 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140630 Year of fee payment: 8 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |