JPH10268163A - Aligning device for light module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To properly make alignment between arrays like the alignment between a laser diode array and an optical fiber array by measuring the quantity of the light generated from the first light module via the second light module, and aligning the first light module and the second light module. SOLUTION: A laser diode array 2 held by a chuck section 13 is moved in the direction Y and the direction Z by the first moving device 21, a fiber array 3 held by a chuck section 34 is moved in the direction Z and rotated in the direction of θZ by the second moving device 51, and both arrays 2, 3 are kept in contact with each other. The light quantity is measured by a photodiode array connected to the fiber array 3, and the laser diode array 2 and fiber array 3 are aligned. A controller 60 controls the actions of individual devices and controls all actions at the time of aligning.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical module aligning apparatus for aligning and fixing, for example, a first optical module comprising a laser diode array and a second optical module comprising a fiber array. .

[0002]

2. Description of the Related Art Conventionally, when a laser diode and an optical fiber or, for example, a photodiode and an optical fiber are fixed, light cannot pass unless the cores of the two are aligned. It is necessary to match the center with the order of submicron. As an example of such a technology, it is necessary to match the center of both the laser diode of the laser diode array and the optical fiber of the fiber array, for example, the "mounting technology in optical communication" circuit mounting technology, Vol.10, No. .5 (1995).

[0003]

In the above-mentioned prior art, however, although it is necessary to match the center of each laser diode of the array of laser diodes and each optical fiber of the fiber array, it is disclosed. There was no disclosure or suggestion about a centering device for performing the above. In addition, there is an apparatus for aligning a single-core optical module including a laser diode and an optical fiber. However, as in the above-described alignment of the laser diode array and the fiber array, the present invention is directed to the alignment between arrays. Has not been developed yet, and disclosure of such an apparatus has been desired.

An object of the present invention is to solve the above-mentioned problems,
An object of the present invention is to provide an optical module alignment apparatus that can suitably perform alignment between arrays, such as alignment between a laser diode array and an optical fiber array.

[0005]

According to the present invention, there is provided an optical module alignment apparatus for aligning and fixing a first optical module and a second optical module. First chuck means for holding the optical module, first moving means for moving the first chuck means, second chuck means for holding the second optical module, and moving the second chuck means The second moving means, these first chuck means, the first moving means, controlling the operation of the second chuck means and the second moving means,
By measuring the amount of light generated from the first optical module through the second optical module, comprising a control means for aligning the first optical module and the second optical module, Is what you do.

In the present invention, the first optical module and the second optical module are movably chucked, and the first optical module and the second optical module are relatively moved by the control means in that state. By moving through the second optical module to measure the amount of light generated from the first optical module, even if the first optical module and the second optical module are array-shaped, Preferably, the first optical module and the second optical module can be aligned and fixed as required.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram showing the configuration of an example of an optical module alignment device of the present invention. In the example shown in FIG. 1, the optical module alignment apparatus 1 is configured to align a laser diode array 2 as a first optical module and a fiber array 3 as a second optical module. The optical module centering device 1 shown in FIG. 1 includes a first chuck device 11 for chucking and holding a laser diode array 2 on a base 4 and a first movement for moving the first chuck device 11. Device 21 and second chuck device 3 for chucking and holding fiber array 3
1 and a second moving device 51 for moving the second chuck device 31, and the first chuck device 11, the first moving device 21, the second chuck device 31, By controlling the operation of the second moving device 51 and measuring the amount of light generated from each laser diode of the laser diode array 2 through each corresponding optical fiber of the fiber array 3, the laser diode array 2 and the fiber Controller 51 for aligning with array 3
Is provided. 61 is a CCD for observation
A camera 71 is a probe device for supplying power to the laser diode array 2.

The target laser diode array 2
Is constituted, for example, by arranging a plurality of laser diodes in a line at regular intervals on a ceramic substrate. Also,
The target fiber array 3 is configured by, for example, arranging the same number of optical fibers as the number of laser diodes of the laser diode array 2 on a V-groove substrate at a constant interval. Details of these configurations will be described in the section of the centering method described later. Since the laser diodes of the laser diode array 2 and the optical fibers of the fiber array 3 are arranged at equal intervals in a line as described above, their centers always match if the positional relationship between them can be set correctly. . However, the laser diode array 2 and the fiber array 3 are separate members, and it is very difficult to position them relative to each other. This is performed by the optical module alignment apparatus of the present invention.

A first chuck device 11 includes a laser diode chuck 13 for centering and chucking a laser diode 2 in a housing 12, and a chuck 1 for the laser diode 2.
3 for moving the chuck 3 in the Z direction in the figure. First moving device 21
Is a Y-direction moving section 22 that moves the laser diode 2 in the Y direction by moving the housing 12 in the Y direction in the figure.
And an X-direction moving unit 23 provided on the base 4 and moving the laser diode 2 in the X direction by moving the Y-direction moving unit 22 in the X direction in the figure.

The second chuck device 31 includes a support portion 33 for supporting the fiber array 3 provided on the housing 32.
A fiber array chuck section 34 for chucking the fiber array 3 by chucking a connector in which the fiber array 3 is integrated with the fiber array 3; a fixing cylinder 35 for fixing the chuck section 34; By measuring the amount of movement in the direction, the fiber array 3
And a linear gauge 36 for measuring the amount of movement in the Z direction. The second moving device 51 rotates the housing 32 in the θz direction in FIG.
A rotating part 52 for rotating in the direction, and provided on the base 4,
A Z-direction moving unit 53 moves the fiber array 3 in the Z direction by moving the rotating unit 37 in the Z direction in the figure.

The control section 60 controls the operation of each of the above-described devices, and controls all operations when the laser diode array 2 and the fiber array 3 described later are aligned. The CCD camera 61 is used for observing the chuck state of the laser diode array 2 and the fiber array 3 and the like. The probe device 71
A probe unit 72 for supplying power required for light emission for the alignment operation to the laser diode 2 and an XYZ stage 73 for moving the probe unit 72 in the X, Y, and Z directions in the figure. I have. Further, a welding machine (not shown) for welding and fixing the laser diode array 2 and the fiber array 3 after the alignment operation is completed is usually provided.

Next, a method for chucking the laser diode array 2 and the fiber array 3 will be described. 2 and 3 are a plan view and a side view for explaining a method of chucking the laser diode array 2 and the fiber array 3 according to the present invention. In the examples shown in FIGS. 2 and 3, the same members as those in the example shown in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted. In this example, the chuck of the laser diode array 2 sucks the laser diode array 2 placed on the suction unit 16 from the bottom surface by the vacuum suction device 15 provided in the housing 12 and holds the laser diode array 2 from the side surface. This is performed by chucking with a pair of side chucks 17-1 and 17-2.

Reference numeral 18 denotes a laser diode array 2
Are centering chuck claws for centering the laser diode array 2 with respect to the fiber array 3 in a state where the main surface of the laser diode 2 and the fiber array 3 are brought into close contact with each other. A pair of side chucks 17-1 and 17
Assuming that the tip of -2 and the tip of the centering chuck claw 18 are R-shaped as shown in the figure, when the centering operation of the laser diode array 2 is performed by the centering chuck claw 18, the position of the laser diode array 2 remains chucked. Can be slightly changed, and this is preferable because it does not hinder the centering operation.

In this embodiment, the fiber array 3
The vacuum chuck 37 provided on the support portion 33 attaches a heat sink 5 provided integrally with the lower portion of the fiber array 3 on the suction portion 38 and sucks the heat from the bottom surface. This is achieved by chucking the connector 6 provided integrally with the chuck unit 34 with the chuck unit 34.

FIGS. 4 and 5 are a plan view and a side view for explaining another example of the method of chucking the fiber array 3 according to the present invention. In the example shown in FIGS. 4 and 5,
The same members as those in the example shown in FIGS. 2 and 3 are denoted by the same reference numerals, and description thereof will be omitted. In the example shown in FIGS. 4 and 5, the fiber array 3 in the example shown in FIGS. 2 and 3 is used.
The difference from the chucking method of the above is that a pressing portion 39 for directly pressing the heat sink 5 provided integrally with the fiber array 3 is provided in the chuck portion 34. This pressing part 3
9 so that the heat sink 5 can be directly pressed,
The pressing direction of the chuck claw 18 of the centering claw that presses the laser diode array 2 from the back surface substantially coincides with the pressing direction of the pressing portion 39, and the close contact state between the laser diode array 2 and the fiber array 3 is improved. preferable.

FIGS. 6A and 6B are a front view and a side view showing the structure of another example of the second chuck device 31 of the fiber array 3 according to the present invention. In the example shown in FIG. 6, the difference from the second chuck device 31 in the above-described example is that a fiber array 3 is pressed into a casing 32 by applying a pressing force to a chuck portion 34 and a laser diode array 2 is formed.
And a holder 41 for receiving the support portion 33 is provided in the housing 32 via a guide rail 42, and the projection 43 of the holder 41 is provided with a pair of fixing clamp modules 44-1. 4
4-2. In this example,
The pressing force between the fiber array 3 and the laser diode array 2 can be controlled by the spring 40. Also, the clamp modules 44-1 and 44-
2, the spring 43 is sandwiched between the projections 43.
The fiber array 3 can be fixed at the position by pressing with zero. If the pressing force of the spring 40 is weak, the laser diode array 2 and the fiber array 3 are displaced during welding, and if the pressing force is strong, the laser diode array 2 and the fiber array 3 do not come off during welding but cannot be aligned. Therefore, the pressing force of the spring 40 is controlled to obtain an optimum pressing force that can be aligned and does not shift even when welding is performed in that state.

Next, a method for aligning the laser diode array 2 and the fiber array 3 in the above-described embodiment will be described. FIG. 7 is a view showing the concept of a method for aligning the laser diode array 2 and the fiber array 3 in the present invention. In the example shown in FIG. 7, the laser diode array 2 configured by arranging seven laser diodes 7 in a line at equal intervals is moved by the first moving device 21 in the Y and Z directions, and the seven optical fibers 8 are moved. Are arranged in a line in a row corresponding to the laser diode 7, and the fiber array 3 is moved by the second moving device 51 in the Z direction and the θz direction about the optical fiber 8 at the center as the rotation center, thereby adjusting the both. The wick has gone. After the alignment is completed, the laser diode array 2 and the fiber array 3 are fixed to each other by YAG laser welding from the side surfaces at the positions, as shown in FIG.

FIGS. 9A to 9E are views showing an example of a centering method in the order of steps. First, in the centering device 1 in advance,
The laser diode array 2 and the fiber array 3 are brought into contact with each other by moving the fiber array 3 in the Z-axis direction, and a device capable of measuring the amount of light such as a photodiode array connected via the laser diode 7 and the optical fiber 8 is provided. First, as shown in FIG. 9A, the laser diode array 2 is moved in the X and Y axis directions from the dotted line position to the solid line position in the CH1 laser diode 7 and the optical fiber 8 at one end of the laser diode array 2. Perform centering. The alignment is determined at a position where the amount of light measured by a device such as a photodiode array becomes the maximum, and that the two alignments match.

Next, as shown in FIG. 9 (b), by rotating from the dotted line position to the solid line position by θz,
In the laser diode 7 and the optical fiber 8, the alignment is performed in the same manner. Then, θz at that time is obtained. Thereafter, as shown in FIG. 9 (c), it is rotated in the opposite direction by θz / 2 from the position of the dotted line to the position of the solid line. Then, FIG.
As shown in (d), in CH1 or CH7, the same alignment is performed by moving the X and Y axes from the dotted line position to the solid line position. Finally, as shown in FIG. 9E, the adjustment is completed by moving only the Y-axis from the position indicated by the dotted line to the position indicated by the solid line to obtain a predetermined optical power.

In the above-described example, a laser diode array and a fiber array have been described as examples of optical modules to be aligned. However, if the optical module is related to light emission, transmission, and light reception, another example is a photodiode. It can also be applied to arrays and the like. As an example, by receiving light emitted from the optical fibers of the fiber array by the photodiodes of the photodiode array, the present invention can be suitably applied to alignment between the fiber array and the photodiode array. Further, the present invention can be suitably applied to, for example, a single-core optical module even if it is not an array-shaped module. Further, the configurations of the first chuck device 11, the first moving device 21, the second chuck device 31, and the second moving device 51 are not limited to the above-described embodiments, but fall within the scope of the present invention. Needless to say, it can be changed.

[0021]

As apparent from the above description, according to the present invention, the first optical module and the second optical module are movably chucked, and the first optical module and the second optical module are moved by the control means in that state. Since the optical module and the second optical module are relatively moved to measure the amount of light generated from the first optical module via the second optical module, the first optical module second Even if this optical module is of an array shape, the first optical module and the second optical module can be suitably aligned and fixed as required.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of an example of an optical module centering device of the present invention.

FIG. 2 is a plan view for explaining a method of chucking a laser diode array and a fiber array according to the present invention.

FIG. 3 is a side view of FIG. 2;

FIG. 4 is a view for explaining another example of the fiber array chucking method according to the present invention.

FIG. 5 is a side view of FIG. 4;

FIG. 6 is a diagram showing the configuration of another example of the second chuck device of the fiber array according to the present invention.

FIG. 7 is a diagram showing the concept of a method for aligning a laser diode array and a fiber array in the present invention.

FIG. 8 is a diagram showing fixing after alignment of a laser diode array and a fiber array according to the present invention.

FIG. 9 is a diagram showing an example of a centering method in the present invention in the order of steps.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Alignment device of an optical module, 2 Laser diode array, 3 Fiber array, 11 First chuck device, 21 First moving device, 31 Second chuck device, 51 Second moving device, 60 Control device, 61 C
CD camera, 71 probe device

Claims (13)

[Claims] 1. An optical module alignment apparatus for aligning and fixing a first optical module and a second optical module, wherein: first chuck means for holding the first optical module; First moving means for moving the chuck means, second chuck means for holding the second optical module, second moving means for moving the second chuck means, these first chuck means, By controlling the operation of the one moving means, the second chuck means and the second moving means,
By measuring the amount of light generated from the first optical module through the second optical module, comprising a control means for aligning the first optical module and the second optical module, Alignment device for optical modules. 2. The optical module centering device according to claim 1, wherein said first optical module is a laser diode array, and said second optical module is a fiber array. 3. The first chucking means comprises: vacuum suction means for vacuum-sucking the bottom of the first optical module to chuck the first optical module; side-face chucking means for holding the first optical module from the side; 3. The centering device for an optical module according to claim 1, further comprising centering means for centering the first optical module by pressing a main surface of the optical module. 4. The optical module centering device according to claim 3, wherein the side chuck means and the centering means have an R-shaped tip. 5. The apparatus according to claim 1, wherein said first moving means takes a Z-axis perpendicular to the X-axis in a plane of the device and parallel to a joint surface of the first optical module and the second optical module. The optical module alignment device according to any one of claims 1 to 4, wherein the optical module is configured to be movable in the X, Y, and Z axis directions when the Y axis is taken perpendicular to the plane. 6. The vacuum chucking means for vacuum-sucking the bottom of the second optical module by chucking the second optical module and a connector mounted on the second optical module to integrate the second optical module to hold the connector. The optical module centering device according to any one of claims 1 to 5, comprising a connector chuck means. 7. The optical module centering device according to claim 6, wherein the connector chuck means includes a pressing means for directly pressing the second optical module. 8. The apparatus according to claim 1, wherein said second chuck means includes a pressing means for controlling a pressing force for pressing the second optical module toward the first optical module. 2. The optical module centering device according to claim 1. 9. The apparatus according to claim 1, wherein said second moving means takes a Z-axis perpendicular to the X-axis on a plane of the apparatus and parallel to a joint surface between the first optical module and the second optical module. The centering of the optical module according to any one of claims 1 to 8, wherein when the Y axis is taken perpendicular to the plane, the optical module is configured to be movable in a Z axis direction and a rotation direction θz direction around the Z axis. apparatus. 10. The optical module alignment apparatus according to claim 1, wherein the second moving means has a clamp module for fixing the second moving means. 11. The optical module centering device according to claim 1, further comprising a laser welding machine used for fixing the first optical module and the second optical module. 12. The optical module centering device according to claim 1, further comprising a CCD camera for observing a state of the first optical module and the second optical module. 13. The optical module centering device according to claim 1, further comprising a movable probe for supplying electric power to said first optical module.