JPH10134705A - Forming method for fine partitioning wall - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an improved forming method for a fine partitioning implementing a fine patterning and a large scale picture place. SOLUTION: A material for a partitioning wall is fitted in a fine pattern groove 11 having a fine striped pattern or a fine checkered pattern in a mold. Afterwards these a glass substrate are fitted to each other. Next, after the partitioning wall material is somewhat cured the mold is separated from the glass substrate. Then, the material is subjected to complete curing. The mold is formed out of a semicured silicone rubber sheet 2 being subjected to heat press with a master metallic mold 1. Accordingly a fine partitioning wall having a required height is obtained at a time without making a lap printing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a partition wall in a plasma display panel and a fine partition wall required for other display panels and the like.

[0002]

BACKGROUND OF THE INVENTION For example, in a plasma display panel, as shown in FIG. 6, a front panel A and a rear panel B are formed by forming stripe electrodes A1 and B1 formed on both panels at right angles to each other. Light is emitted by causing a discharge in the stripe-shaped or lattice-shaped partition C at the intersection. The stripe-shaped or lattice-shaped barrier ribs C are provided to prevent light crosstalk and to provide a screen contrast.
This partition is very fine. For example, in the case of a stripe, the partition is now about 30 μm in width and about 2 μm in height.
It is required to be formed over the entire surface of the panel at intervals of about 100 μm at about 00 μm.

The partition walls are generally formed by screen printing, and are obtained by so-called overprinting, in which printing and drying of a glass paste is repeated about 10 times each time with positioning. As another method, a method of applying a glass paste on the entire surface of a glass substrate, coating with a photoresist, exposing, developing, sandblasting a portion that is not covered with a resist pattern, and then sintering has been attempted. .

However, in the former method of forming partition walls by screen printing, the alignment and the distortion of the screen each time are a major obstacle in forming a fine pattern and increasing the screen size. Further, in the latter method using sand blast, unevenness in blast depth is liable to occur, which is a major obstacle in forming a fine pattern and increasing the screen size.

[0005]

Accordingly, the present applicant has made various attempts based on the idea that fine partition walls in a plasma display panel or the like may be formed in a so-called intaglio printing method, and as a result, the present invention has been accomplished. An object of the present invention is to provide a new method of forming fine partition walls, which enables fine patterning and a large screen, which are problems of the conventional forming method.

[0006]

According to a first aspect of the present invention, there is provided a method of forming a fine partition wall, the step of embedding a partition material in a fine pattern groove of a fine stripe or a fine lattice in a molding die, and then forming a glass with the material. A step of superimposing the substrate, a step of releasing the mold from the glass substrate after the partition material is hardened at least, and a step of completely curing the partition material. A semi-cured silicone sheet, which was made into a sheet by semi-curing, was used as a starting material, and this was heat-pressed with a master mold to transfer and form the fine pattern grooves in the form of fine stripes or fine lattices. It is a feature. And, by using such specific features of the invention as a means, even in a method of forming a thick film by a so-called intaglio printing method,
Since the mold is released from the mold after the partition material is hardened to some extent, the sagging of the partition material is prevented, and the mold that is occupied until it can be removed,
Starting from a semi-cured silicone sheet, which is a semi-cured sheet made of silicone rubber, and heat-pressing this with a master mold so that any number can be easily duplicated. The above-mentioned problem can be solved while maintaining the characteristics.

The method of forming a fine partition according to a second aspect is characterized in that, in addition to the above requirements, the silicone rubber is a transparent silicone rubber containing hydrophobic silica by a wet method. By using such invention-specifying items as means, while further improving the durability of the mold, the embedding state of the partition wall material can be well confirmed, and the above-mentioned problem can be solved while maintaining mass productivity. It is.

According to a third aspect of the present invention, in addition to the above-described requirements, the molding die may be a plate-like body formed on a cured silicone sheet on which fine pattern grooves of a fine stripe or a fine lattice are transferred and formed. Are laminated. And, by using such invention specific items as means, handling of the mold, in particular, the step operation of overlapping the mold and the glass substrate and the step operation of removing the mold from the glass substrate become easy to perform, This solves the problem.

Further, in addition to the above requirements, the method for forming a fine partition according to claim 4 is characterized in that, as the partition material, an organopolysiloxane having a methyl group or a phenyl group is used as a main component, and an alkoxy group, an acyloxy group, and an oxime are used. It is characterized in that an organosiloxane having a functional side chain such as a group is used as a crosslinking agent and a curing catalyst is added thereto. By using such specific items of the invention as a means, it is possible to harden and vitrify the partition wall material even at a relatively low temperature while securing good workability, and the above-mentioned problem is solved.

Further, the method for forming a fine partition according to a fifth aspect is characterized in that a perhydropolysilazane is similarly used as the partition material. Also, by using such specific features of the invention as a means, the partition material can be hardened and vitrified even at a relatively low temperature while ensuring good workability, and the above-mentioned problem can be solved. .

Further, in the method of forming a fine partition according to claim 6, in addition to the above requirements, the glass substrate is a glass substrate for a plasma display panel. By using such specific features of the invention as a means, the fine partition walls in the plasma display panel can be obtained at a desired height at one time without overprinting, and the above-mentioned problem is solved.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The method of forming a fine partition wall according to the present invention will be described with reference to the illustrated embodiment as an example while interweaving various embodiments. In FIG. 1, reference numeral 1 denotes a master mold, and the master mold 1 is formed by engraving a fine stripe groove or fine dot groove 11 as an inverted image of a fine pattern groove in a molding die described later. . The master mold 1 is made of a metal having excellent rust resistance, workability, finishability, dimensional accuracy, and the like, and the fine pattern groove 11 is formed by precision cutting or electric discharge machining. This fine pattern groove 11
Is, for example, a depth of 200 μm, a width of 60 μm, and an interval of 160 μm.
It is formed in a fine stripe shape of about μm. When a grid-like fine partition is required, a fine dot-like fine pattern groove is formed instead of the fine stripe-like fine pattern groove 11.

Reference numeral 2 denotes a semi-cured silicone sheet in which silicone rubber is semi-cured and formed into a sheet. The semi-cured silicone sheet is in a plastic state at this stage, but is completely cured by heating to become a rubber-like elastic body. Further, when the semi-cured silicone sheet 2 is heated and cured by pressing some fine uneven surface against the semi-cured silicone sheet 2, the fine unevenness can be reversely and precisely replicated. One such semi-cured silicone sheet is SOTEFA (trade name) sold by Dow Corning Toray Silicone Co., Ltd. This is in the form of a semi-cured sheet having a thickness of about 0.6 to 2 mm, and has an adhesive property and is sold as a film-like highly transparent silicone rubber adhesive. It is supposed that it will be cured to about 70 in JIS A hardness in about 30 minutes. In addition, this is disclosed in JP-B-61-56255 and JP-B-62-240.
As disclosed in No. 13, the silicone rubber contains hydrophobic silica obtained by a wet method, and is highly transparent and has enhanced physical properties. Reference numeral 3 denotes a plate-like body such as an aluminum plate, which is laminated on the semi-cured silicone sheet 2 so as to impart rigidity so that it can be easily handled as an integrated mold. Note that the rigidity only needs to be higher than the state in which only the semi-cured silicone sheet 2 is cured, so that the plate-like body 3 may be a tempered glass plate or a heat-resistant resin plate, instead of metal. Further, in order to strengthen the bonding with the semi-cured silicone sheet 2, the bonding surface of the plate-like body 3 is preferably roughened or primed in advance, and preferably has a low coefficient of thermal expansion.

Therefore, these are placed between the fixed plate P1 and the movable plate P2 of the heat press machine P from below in the master mold 1,
After arranging the semi-cured silicone sheet 2 and the plate-like body 3 in this order,
The movable platen P2 is lowered, for example, at a pressure of 50 gf / c.
The semi-cured silicone sheet 2 is completely cured by leaving it at m ² and a temperature of 130 ° C. for about 25 minutes. Although not shown, a cushion material having good thermal conductivity may be interposed between the fixed board P1 and the movable board P2 so that they can be pressed uniformly. Thereafter, when the movable platen P2 is lifted and taken out, the master mold 1 and the semi-cured silicone sheet 2 are removed.
Peel off the contact between the and. On the cured silicone sheet 20 in which the semi-cured silicone sheet 2 is completely cured, the fine pattern grooves 11 of the master mold 1 are transferred as an inverted image thereof, and fine stripe grooves 21 are formed. At the same time, the cured silicone sheet 20 is also in a state of being bonded to the plate-like body 3, as shown in FIG. Integrated mold 4
Is obtained. Needless to say, the molded body may be constituted only by a cured silicone sheet without laminating the plate-like bodies, but in this case, a thick semi-cured silicone sheet is required. In any case, the mold 4 can be easily duplicated from the master mold 1, so that many molds 4 can be prepared at low cost.

When the molding die 4 is obtained in this manner, the molding die 4 is placed on a flat table with the fine pattern grooves 21 facing upward, and as shown in FIG. The partition wall material 5 is embedded in the groove 21, and excess partition wall material 5 is removed by squeegeeing. When SOTEFA is used as the semi-cured silicone sheet 2 and a transparent material is used for the plate-like body 3, the molded body 4 can be made transparent, and the embedding state of the partition wall material 5 and the filling defect can be reduced. The cause can be confirmed, and the cause of the defect can be removed in advance. Further, as shown in FIG. 3, instead of flowing the partition wall material 5 over the entire upper surface of the molded body 4, a portion other than the fine pattern grooves 21 is covered with a screen plate or a simple mask, and only the inside of the fine pattern 21 is covered. Partition wall material 5
Of course may be devised so as to be embedded.
The partition wall material 5 may be a glass paste of a conventional composition which densifies after firing to form a black insulating layer, but in this example, a heatless glass (HEATLESS GLASS-trade name) sold by Homer Technology Co., Ltd. −) To which black pigment and Tospearl (trade name) sold by Toshiba Silicone Co., Ltd. are added.

The heatless glass is a so-called one-part type silica solution, which forms an amorphous ceramic layer which is hard and has excellent adhesion to various substrates even when heated at low temperature or dried at room temperature. This product is composed of a base material, a cross-linking agent, and a curing catalyst, and contains silicon component (SiO ₂ ).
Contains 40% or more in terms of conversion and does not contain a solvent, water or a hydroxyl group. The main agent is an organopolysiloxane having a methyl group or a phenyl group, the crosslinking agent is an organosiloxane having a functional side chain such as an alkoxy group, an acyloxy group, and an oxime group, and the curing catalyst is Zn, Al, Co, Metal-containing organic compounds such as Sn; and halogens. Further, the curing mechanism is such that the functional group of the main component organopolysiloxane is firstly hydrolyzed by moisture in the air to change to a hydroxyl group, and then the hydroxyl group of the organopolysiloxane is attacked by the functional group of the crosslinking agent organosiloxane. However, it is considered that a dealcoholation reaction is caused by the action of a curing catalyst to form a cured polysiloxane, which is a polymer compound having a three-dimensional structure. It becomes a metal alkoxide condensate by a so-called sol-gel method.

Tospearl is a silicone resin fine particle having a network structure in which siloxane bonds extend three-dimensionally and having an intermediate structure between inorganic and organic in which one methyl group is bonded to a silicon atom. True spherical silica fine particles are obtained. Therefore, when Tospearl is added to the heatless glass and baked, the Tospearl is also converted to silica and vitrified as a whole while the heatless glass turns into a sol, gel, and hardens. The addition of tospearl improves the thixotropy of the heatless glass in a liquid state, and can reduce rejection and volume reduction during firing as compared to the case of using the heatless glass alone.

Next, as shown in FIG. 4, a glass substrate 6 for a plasma display panel is placed on the mold 4 in which the partition wall material 5 is embedded. The glass substrate 6
A transparent electrode or the like (not shown) is formed on the surface. That is, usually, an address electrode is formed on an AC type panel on a glass substrate, and then an anode / bus line etching, resistance printing, insulating layer printing, anode printing is performed on a DC type panel. later,
Fine partition walls are formed. Then, the glass substrate 6 and the molding die 4 are left for a predetermined period of time at a predetermined temperature in a state where they are clamped or a load is applied so that they are pressed somewhat. The predetermined time at the predetermined temperature is a temperature and a time at which the partition material 5 hardens to some extent and can be removed from the mold, and the partition material does not sag even after the removal from the mold. It cannot be said unconditionally from the relationship with, and will be determined empirically. In any case, when the partition wall material is hardened somewhat and the mold can be removed, the mold 4 is removed from the glass substrate 6 as shown in FIG.
After that, if heat baking or the like according to the used partition wall material is performed, for example, the width is 60 μm, the height is less than 200 μm, and the interval is 16 μm.
Thus, a glass substrate for a plasma display panel on which fine-striped partition walls 50 of 0 μm are formed is completed. The removed mold 4 can be reused as long as it has not been deformed or has a fine scratch or the like, so that the mold 4 is returned to the first step and used again. Of course, if there is damage, the mold may be discarded.

Although the above description has been made on the assumption that heatless glass is used as the partition wall material, for example, an inorganic polymer such as perhydropolysilazane can also be used. Perhydropolysilazane structural formula [SiH _a NH _{b] n} (where, _a is 1 to 3, _b is 0 or 1) a thermosetting inorganic silazane represented by (ceramic precursor polymer), this The partition wall material containing perhydropolysilazane is embedded in the fine pattern grooves in the form of fine stripes or fine lattices and fired at a predetermined atmosphere and temperature to form a ceramic hard layer. In addition,
As such perhydropolysilazane, there is Tonen polysilazane (trade name) sold by Tonen Corporation. Of course, the present invention is not limited to these, and other ceramic precursor polymers and the like can also be used as the partition wall material.

[0020]

The method for forming a fine partition according to the present invention has the features specified in claims 1 to 6 embodied by the above-described embodiments. Various effects as described below are exhibited by having various invention specific items. That is,
According to the invention specifying matter described in claim 1, even if the formation method is so-called intaglio printing type thick film printing, the mold is released from the mold after the partition material is hardened to some extent. The molding material that is prevented from sagging of the partition wall material and is occupied until it can be removed is used as a starting material, with a semi-cured silicone sheet made from silicone rubber semi-cured as a starting material, which is heated by a master mold. By pressing, any number of copies can be easily copied, and fine partition walls can be obtained corresponding to fine patterns and large screens while maintaining mass productivity.

According to the second aspect of the present invention, while the durability of the mold is further improved, the embedding state of the partition wall material can be confirmed well, and the mass productivity can be maintained.
Fine partition walls can be obtained corresponding to fine patterning and large screen.

Furthermore, in the present invention, it is easy to handle a mold, and particularly to perform a step of superimposing a mold on a glass substrate and a step of removing a mold from a glass substrate. Become a fine pattern,
It is possible to obtain fine partition walls corresponding to a large screen.

Further, according to the present invention, the partition wall material can be hardened and vitrified even at a relatively low temperature while ensuring good workability, and a fine pattern can be formed. In addition, it is possible to obtain fine partition walls corresponding to a large screen.

Further, according to the present invention, the fine partition walls in the plasma display panel can be formed at a desired height at a time without overprinting, and can be formed into a fine pattern and a large screen. Can be obtained. Although the description has been given by taking the plasma display panel as an example, the present invention is not limited to the plasma display panel, and it is needless to say that the present invention can be similarly applied to those requiring a partition in a fine pattern.

[Brief description of the drawings]

FIG. 1 shows a step of obtaining a mold from a master mold using a semi-cured silicone sheet as a starting material in one example of the method for forming a fine partition wall of the present invention.

FIG. 2 is a side view of the obtained mold.

FIG. 3 shows a step of embedding a partition material in a molding die.

FIG. 4 shows a step of pressing a glass substrate against a molding die to cure a partition wall material.

FIG. 5 shows a step of releasing the mold from the glass substrate.

FIG. 6 is a schematic perspective view showing an example of the structure of a plasma display.

[Explanation of symbols]

 Reference Signs List A Front panel A1 Stripe electrode B Back panel B1 Stripe electrode C Partition wall Heat press P1 Fixed plate P2 Movable plate 1 Master mold 11 Fine pattern groove 2 Semi-cured silicone sheet 20 Cured silicone sheet 21 Fine pattern groove 3 Plate shape Body 4 Mold 5 Partition material 50 Fine-striped partition 6 Glass substrate

Claims (6)

[Claims] 1. A step of embedding a partition wall material in a fine pattern groove of a fine stripe or grid pattern in a molding die, a step of thereafter overlapping these with a glass substrate, and a step after the partition material is hardened to some extent In the method, a step of removing the mold from the glass substrate and a step of completely curing the partition material are provided, and the mold is a semi-cured silicone sheet obtained by semi-curing silicone rubber as a starting material. A method for forming a fine partition wall, wherein a fine pattern groove having a fine stripe shape or a fine lattice shape is transferred and formed by heat-pressing an object with a master mold. 2. The method according to claim 1, wherein the silicone rubber is a transparent silicone rubber containing hydrophobic silica by a wet method. 3. The molding die according to claim 1, wherein a plate-like body is laminated on a cured silicone sheet on which a fine pattern groove of a fine stripe or a fine lattice is transferred and formed. A method for forming fine partition walls. 4. As a material for the partition wall, an organopolysiloxane having a methyl group or a phenyl group is used as a main component, and an organosiloxane having a functional side chain such as an alkoxy group, an acyloxy group, an oxime group is used as a cross-linking agent. 4. The method according to claim 1, wherein a catalyst is used. 5. The method for forming a fine partition according to claim 1, wherein a perhydropolysilazane is used as the partition material. 6. The method according to claim 1, wherein the glass substrate is a glass substrate for a plasma display panel.