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JPH10114823A - Modified polyimide film - Google Patents

Modified polyimide film

Info

Publication number
JPH10114823A
JPH10114823A JP26974896A JP26974896A JPH10114823A JP H10114823 A JPH10114823 A JP H10114823A JP 26974896 A JP26974896 A JP 26974896A JP 26974896 A JP26974896 A JP 26974896A JP H10114823 A JPH10114823 A JP H10114823A
Authority
JP
Japan
Prior art keywords
film
polyimide film
modified polyimide
water absorption
polyimide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26974896A
Other languages
Japanese (ja)
Inventor
Hiroshi Inoue
浩 井上
Seiichiro Takabayashi
誠一郎 高林
Takuji Takahashi
卓二 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP26974896A priority Critical patent/JPH10114823A/en
Publication of JPH10114823A publication Critical patent/JPH10114823A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0346Organic insulating material consisting of one material containing N

Landscapes

  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a modified polyimide film which has a low water absorption, a high modulus, and a high heat resistance by specifying the surface Si-atom concn., tensile modulus, coefficient of linear thermal expansion, water absorption, and 5% thermal wt. loss temp. of the same. SOLUTION: This film has a surface Si-atom concn. (based on Si atoms bonded to phenyl groups at the film surface) of 1-20%, a tensile modulus of 470-1,000kg/mm<2> , a coefficient of linear thermal expansion of 5×10<-6> -25×10<-6> cm/ cm/ deg.C, a water absorption of 0.5-1.3%, a 5% thermal wt. loss temp. of 500 deg.C or higher, and a thickness of 10-125μm. Si atoms at the film surface are derived from a poly(phenyltrialkoxysilane), etc. The arom. tetracarboxylic acid units of the polyimide structural units in the film are derived from a component contg. at least 50mol% 3,3',4,4'-biphenyltetracarboxylic acid, and diamine units, from a component contg. at least 30mol% p-phenylenediamine.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、種々の環境下で
も優れた物性を有するポリイミドフィルムに関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polyimide film having excellent physical properties even under various environments.

【0002】[0002]

【従来の技術】芳香族ポリイミドフィルムは、高耐熱性
を有しており、種々の電気・電子部品用に使用されてい
るが、最近の高精度化・高密度化・高生産性の要求か
ら、さらに低吸水性・高弾性の芳香族ポリイミドフィル
ムが必要とされている。このため種々の提案がされてい
る。例えば、低吸水性を目的としてフッ素系のモノマ−
を使用したポリイミドが開発されているが、フッ素系の
モノマ−が非常に高価であるため、またフッ素系のモノ
マ−は反応性が低く高分子量のポリマ−が得にくいた
め、このモノマ−を使用したポリイミドは幅広く使用で
きるまでには到っていないのが実情である。また、脂肪
族系のモノマ−やシリコ−ンなどを使用して低吸水性に
することも検討されているが、これらのポリイミドフィ
ルムは弾性率が小さく腰が弱くなるといった欠点があ
る。
2. Description of the Related Art Aromatic polyimide films have high heat resistance and are used for various electric and electronic parts, but due to recent demands for higher precision, higher density, and higher productivity. Further, there is a need for an aromatic polyimide film having low water absorption and high elasticity. For this reason, various proposals have been made. For example, fluorine-based monomers for the purpose of low water absorption
Polyimides have been developed, but fluorine-based monomers are very expensive, and fluorine-based monomers have low reactivity and it is difficult to obtain high-molecular-weight polymers. The fact is that the obtained polyimide has not reached the point where it can be used widely. It has also been studied to reduce the water absorption by using aliphatic monomers or silicones, but these polyimide films have a drawback that their elastic modulus is small and their stiffness is weak.

【0003】また、弾性率を大きくする目的でゾル−ゲ
ル法によるテトラエトキシシランの加水分解縮合物から
生成したシリカとポリイミドとの組成物からなる成形体
も知られている。例えば、特開平3−287626号公
報、特開平7−331069号公報に記載されているポ
リイミド成形体である。しかし、これら公知のポリイミ
ド成形体は、吸水率が大きくなるという欠点がある。つ
まり、これら公知のポリイミド樹脂成形体は、弾性率が
ある程度以上でかつ低吸水性という条件を満足すること
ができなかったのである。
[0003] Further, a molded article comprising a composition of silica and polyimide formed from a hydrolytic condensate of tetraethoxysilane by a sol-gel method for the purpose of increasing the elastic modulus is also known. For example, it is a polyimide molded body described in JP-A-3-287626 and JP-A-7-331069. However, these known polyimide moldings have a disadvantage that the water absorption is increased. In other words, these known polyimide resin moldings could not satisfy the conditions of a certain degree of elasticity or more and low water absorption.

【0004】[0004]

【発明が解決しようとする課題】この発明の目的は、前
記の問題点を有しない、すなわちある程度以上の弾性率
と低吸水性とを兼ね備えたポリイミドフィルムを提供す
ることである。
SUMMARY OF THE INVENTION An object of the present invention is to provide a polyimide film which does not have the above-mentioned problems, that is, has both a certain degree of elasticity and low water absorption.

【0005】[0005]

【課題を解決するための手段】すなわち、この発明は、
フィルム表面におけるフェニル基と結合したSiに基づ
くSiの表面原子濃度が1%(重量%,以下同じ)以上
であり、引張弾性率が450kg/mm2 以上、線膨張
係数が25×10-6cm/cm/℃以下、吸水率が1.
4%以下、5%熱重量減少温度が500℃以上である改
質ポリイミドフィルムに関するものである。
That is, the present invention provides:
The surface atomic concentration of Si based on Si bonded to a phenyl group on the film surface is 1% (% by weight, the same applies hereinafter), the tensile modulus is 450 kg / mm 2 or more, and the linear expansion coefficient is 25 × 10 −6 cm. / Cm / ° C or less, and the water absorption is 1.
The present invention relates to a modified polyimide film having a thermogravimetric reduction temperature of 4% or less and a 5% thermal weight loss temperature of 500 ° C or more.

【0006】この発明の改質されたポリイミドフィルム
は、好適には厚みが10−125μmであり、フェニル
基含有アルコキシシラン化合物の加水分解・重合物によ
る表面のSi表面原子濃度が1%以上、好適には1〜2
0%、引張弾性率が450kg/cm2 以上、特に47
0〜1000kg/cm2 、線膨張係数が25×10 -6
cm/cm/℃以下、特に5×10-6〜25×10-6
m/cm/℃、吸水率が1.4%以下、特に0.5〜
1.3%であるポリイミドフィルムであることが好まし
い。
The modified polyimide film of the present invention
Preferably has a thickness of 10-125 μm,
By hydrolysis / polymerization of alkoxysilane compounds containing
Atomic concentration on the surface of the substrate is 1% or more, preferably 1 to 2
0%, tensile modulus is 450kg / cmTwoAbove, especially 47
0-1000kg / cmTwo, The coefficient of linear expansion is 25 × 10 -6
cm / cm / ° C or less, especially 5 × 10-6~ 25 × 10-6c
m / cm / ° C, water absorption is 1.4% or less, especially 0.5 to
It is preferable that the polyimide film is 1.3%.
No.

【0007】前記のフィルム表面のSiはフェニル基と
結合したSiであり、表面原子濃度が1%以上であるこ
とが必要である。Si表面原子濃度が1%以上であって
もアルキル基に結合したSiでは低吸水のポリイミドフ
ィルムを得ることはできず、またSi表面原子濃度が1
%未満であると吸水性が高くなる。さらに、フィルム全
体として高弾性でないと、電子部品や印刷部品などの用
途に使用が困難である。
[0007] The Si on the film surface is Si bonded to a phenyl group, and the surface atomic concentration must be 1% or more. Even if the Si surface atom concentration is 1% or more, a polyimide film having low water absorption cannot be obtained with Si bonded to an alkyl group.
%, The water absorption becomes high. Further, unless the film as a whole has high elasticity, it is difficult to use it for applications such as electronic parts and printed parts.

【0008】この発明の改質ポリイミドフィルムは、例
えば、高弾性のポリイミドフィルムを与えるポリアミッ
ク酸の有機極性溶媒溶液またはポリイミドの有機極性溶
媒溶液(好適にはポリアミック酸の有機極性溶媒溶液)
に、フェニルアルコキシシラン、ジフェニルアルコキシ
シランまたはその部分加水分解物を加え、得られた溶液
組成物を製膜用ド−プとして流延、乾燥して自己支持性
のフィルム状物を得、ついでさらに加熱するなどしてポ
リイミドフィルムを形成する方法によって、好適に製造
することができる。この工程中において、フェニルアル
コキシシラン、ジフェニルアルコキシシランまたはその
部分加水分解物は、系で生成したあるいは添加した少量
の水分と加熱とによってポリ(モノフェニルシロキサ
ン)またはポリ(ジフェニルシロキサン)に変化させ
る。
[0008] The modified polyimide film of the present invention is, for example, an organic polar solvent solution of polyamic acid or polyimide (preferably an organic polar solvent solution of polyamic acid) which gives a highly elastic polyimide film.
Then, phenylalkoxysilane, diphenylalkoxysilane or a partial hydrolyzate thereof was added thereto, and the obtained solution composition was cast as a dope for film formation and dried to obtain a self-supporting film. It can be suitably manufactured by a method of forming a polyimide film by heating or the like. During this step, phenylalkoxysilane, diphenylalkoxysilane or its partial hydrolyzate is converted to poly (monophenylsiloxane) or poly (diphenylsiloxane) by heating a small amount of water generated or added in the system and heating.

【0009】この発明におけるポリイミドの構成単位で
ある芳香族テトラカルボン酸成分としては、剛直な分子
構造を有する芳香族テトラカルボン酸類、例えば3,
3’,4,4’−ビフェニルテトラカルボン酸、2,
3,3’,4’−ビフェニルテトラカルボン酸、各種異
性体のベンゾフェノンテトラカルボン酸、ピロメリット
酸、各種異性体のナフタレンテトラカルボン酸、それら
の酸の二無水物、あるいはそれらの酸のエステル、ある
いはそれらのハロゲン化物(特にフッ素化物)や、その
酸の二無水物、あるいはその酸のエステル化物を組み合
わせて使用することができる。特に、3,3’,4,
4’−ビフェニルテトラカルボン酸二無水物が好まし
い。
The aromatic tetracarboxylic acid component which is a constituent unit of the polyimide in the present invention includes aromatic tetracarboxylic acids having a rigid molecular structure, for example, 3,4.
3 ', 4,4'-biphenyltetracarboxylic acid, 2,
3,3 ′, 4′-biphenyltetracarboxylic acid, various isomers of benzophenonetetracarboxylic acid, pyromellitic acid, various isomers of naphthalenetetracarboxylic acid, dianhydrides of those acids, or esters of these acids, Alternatively, their halides (especially fluorinated compounds), their acid dianhydrides, or their acid esterified compounds can be used in combination. In particular, 3,3 ', 4
4'-biphenyltetracarboxylic dianhydride is preferred.

【0010】この発明のポリイミドの構成単位である芳
香族ジアミン成分としては、剛直な分子構造を有する芳
香族ジアミン、特にパラフェニレンジアミン単独が好ま
しく、その一部を他の芳香族ジアミン(例えば、メタフ
ェニレンジアミン、主鎖中にO、プロピレン、エチレ
ン、メチレン、S、などの基を有する芳香族ジアミン)
60モル%以下で置き換えて使用してもよい。
As the aromatic diamine component which is a constituent unit of the polyimide of the present invention, an aromatic diamine having a rigid molecular structure, particularly paraphenylenediamine alone, is preferable, and a part of the aromatic diamine is replaced with another aromatic diamine (for example, meta-diamine). Phenylenediamine, aromatic diamine having a group such as O, propylene, ethylene, methylene, S in the main chain)
It may be replaced with 60 mol% or less.

【0011】前記の他の芳香族ジアミンとしては、メタ
フェニレンジアミン、4,4’−ジアミノジフェニルエ
−テル、4,4’−ジアミノジフェニルプロパン、4,
4’−ジアミノジフェニルエタン、4,4’−ジアミノ
ジフェニルメタン、4,4’−ジアミノジフェニルスル
フィドなどを挙げることができる。
The other aromatic diamines include metaphenylenediamine, 4,4′-diaminodiphenyl ether, 4,4′-diaminodiphenylpropane,
4'-diaminodiphenylethane, 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylsulfide and the like can be mentioned.

【0012】前記の高弾性のポリイミドフィルムを与え
るポリアミック酸またはポリイミドの有機極性溶媒溶液
は、例えば、芳香族テトラカルボン酸、その酸二無水物
またはその酸のエステル、好適には3,3’,4,4’
−ビフェニルテトラカルボン酸二無水物と芳香族ジアミ
ン、好適にはパラフェニレンジアミンとをN,N−ジメ
チルアセトアミド、N−メチル−2−ピロリドン(ポリ
アミック酸の場合)やパラクロロフェノ−ル(ポリイミ
ドの場合)などのポリイミドフィルムの製造に通常使用
される有機極性溶媒中で、ポリアミック酸の場合には、
好ましくは10〜80℃で1〜30時間重合して得られ
た、好適にはポリマ−の対数粘度(測定温度:30℃、
濃度:0.5g/100ml溶媒、溶媒:N−メチル−
2−ピロリドン)が1〜5、ポリマ−濃度が15〜25
重量%であり、回転粘度(30℃)が500〜4500
ポイズであるポリアミック酸(イミド化率:5%以下)
溶液として得られる。
The organic polar solvent solution of a polyamic acid or polyimide which gives a highly elastic polyimide film is, for example, an aromatic tetracarboxylic acid, an acid dianhydride or an ester of the acid, preferably 3,3 ', 4,4 '
-Biphenyltetracarboxylic dianhydride and an aromatic diamine, preferably paraphenylenediamine, are combined with N, N-dimethylacetamide, N-methyl-2-pyrrolidone (in the case of polyamic acid) or parachlorophenol (of polyimide). In the case of a polyamic acid in an organic polar solvent usually used for the production of a polyimide film such as
It is preferably obtained by polymerizing at 10 to 80 ° C for 1 to 30 hours, and suitably has a logarithmic viscosity of the polymer (measuring temperature: 30 ° C,
Concentration: 0.5 g / 100 ml solvent, solvent: N-methyl-
2-pyrrolidone) 1-5, polymer concentration 15-25
% By weight, and the rotational viscosity (30 ° C.) is 500 to 4500.
Polyamic acid that is poise (imidation ratio: 5% or less)
Obtained as a solution.

【0013】この発明の改質ポリイミドフィルムを製造
する好適な一例である前記の方法において、ポリアミッ
ク酸の有機極性溶媒溶液に、フェニル基含有アルコキシ
シラン化合物、好適には、フェニルアルコキシシラン、
ジフェニルアルコキシシランまたはその部分加水分解物
を添加、混合して、フェニルアルコキシシラン、ジフェ
ニルアルコキシシランまたはその部分加水分解物を含有
するポリアミック酸溶液を得る。
In the above method, which is a preferred example of producing the modified polyimide film of the present invention, a phenyl group-containing alkoxysilane compound, preferably a phenylalkoxysilane, is added to an organic polar solvent solution of a polyamic acid.
Diphenylalkoxysilane or its partial hydrolyzate is added and mixed to obtain a polyamic acid solution containing phenylalkoxysilane, diphenylalkoxysilane or its partial hydrolyzate.

【0014】前記のフェニルアルコキシシラン、ジフェ
ニルアルコキシシランまたはその部分加水分解物として
は、例えば、フェニルトリメトキシシラン、フェニルト
リエトキシシラン、ジフェニルジメトキシシラン、ジフ
ェニルジエトキシシランやこれらの部分加水分解物が好
適に使用される。これらは1種のみを使用してもよくあ
るいは2種以上を混合して使用してもよい。また、他の
アルコキシシランと併用してもよい。これらのフェニル
アルコキシシラン、ジフェニルアルコキシシランまたは
その部分加水分解物はそのまま使用してもよく、また有
機極性溶媒、例えばN,N−ジメチルホルムアミド、
N,N−ジメチルアセトアミド、N−メチル−2−ピロ
リドンの溶解して使用してもよい。
As the above-mentioned phenylalkoxysilane, diphenylalkoxysilane or a partial hydrolyzate thereof, for example, phenyltrimethoxysilane, phenyltriethoxysilane, diphenyldimethoxysilane, diphenyldiethoxysilane or a partial hydrolyzate thereof is preferable. Used for These may be used alone or in combination of two or more. Moreover, you may use together with another alkoxysilane. These phenylalkoxysilanes, diphenylalkoxysilanes or partial hydrolysates thereof may be used as they are, and organic polar solvents such as N, N-dimethylformamide,
N, N-dimethylacetamide and N-methyl-2-pyrrolidone may be used after being dissolved.

【0015】前記のフェニル基含有アルコキシシラン化
合物の添加量は、ポリアミド酸100重量部に対して1
0〜80重量部、特に20〜70重量部であることが好
ましい。添加量が少なすぎると得られるフィルムの吸水
率の改良効果が少なく、また添加量が多すぎると吸水率
は改良されるもののフィルムがもろくなり、商品価値の
著しく劣ったものしか得られなくなる。また、必要に応
じて添加される水の量は通常ポリアミド酸100重量部
に対して0〜200重量部である。水の量が多すぎると
ポリアミド酸が加水分解し、得られるフィルムの物性が
低下するので好ましくない。
The amount of the phenyl group-containing alkoxysilane compound to be added is 1 to 100 parts by weight of the polyamic acid.
It is preferably from 0 to 80 parts by weight, particularly preferably from 20 to 70 parts by weight. If the addition amount is too small, the effect of improving the water absorption of the obtained film is small, and if the addition amount is too large, the film becomes brittle, but the film becomes brittle, and only those having extremely low commercial value can be obtained. The amount of water added as required is usually 0 to 200 parts by weight based on 100 parts by weight of the polyamic acid. If the amount of water is too large, the polyamic acid is hydrolyzed, and the physical properties of the obtained film are deteriorated.

【0016】このフェニル基含有アルコキシシラン化合
物の添加と同時にまたは別々に、好適にはポリアミック
酸100重量部に対して0.01〜1重量%の(ポリ)
リン酸エステルおよび/またはリン酸エステルのアミン
塩などのリン含有化合物および、ポリアミック酸100
重量部に対して0.1〜3重量部のコロイダルシリカの
ような無機フィラ−(好適には平均粒径0.005〜2
μm)を添加してポリアミック酸溶液組成物を調製す
る。
Simultaneously or separately with the addition of the phenyl group-containing alkoxysilane compound, preferably 0.01 to 1% by weight of (poly) per 100 parts by weight of polyamic acid.
Phosphorus-containing compounds such as phosphate esters and / or amine salts of phosphate esters and polyamic acid 100
0.1 to 3 parts by weight of inorganic filler such as colloidal silica (preferably 0.005 to 2 parts by weight)
μm) to prepare a polyamic acid solution composition.

【0017】このポリアミド組成物には、周知の他の添
加剤等を加えて使用してもよい。例えば、酸化防止剤、
熱安定剤、紫外線吸収剤、無機フィラ−(アルミナ、タ
ルク、カ−ボン等)、有機・無機顔料等が挙げられる。
これらの添加量は、物性の低下しない範囲で選択され
る。
The polyamide composition may be used by adding other known additives and the like. For example, antioxidants,
Examples include heat stabilizers, ultraviolet absorbers, inorganic fillers (alumina, talc, carbon, etc.), organic and inorganic pigments, and the like.
These addition amounts are selected in a range where the physical properties do not decrease.

【0018】前記のようにして調製したポリアミック酸
溶液組成物を製膜用ド−プとして使用し、好ましくは約
150℃以下の流延温度、特に好ましくは0〜120℃
程度の流延温度で平滑な表面を有するガラス板、金属製
のドラムまたはベルトなどの支持体表面に流延して前記
溶液の薄膜を形成し、その薄膜を支持体上で好ましくは
約150℃以下の乾燥温度、特に好ましくは20〜14
0℃程度の乾燥温度で、好ましくは約0.1〜1時間乾
燥する溶液流延法などの製膜法で形成される自己支持性
の固化フィルムを得る。
The polyamic acid solution composition prepared as described above is used as a dope for film formation, and preferably has a casting temperature of about 150 ° C. or less, particularly preferably 0 to 120 ° C.
A thin film of the solution is formed by casting on a surface of a support such as a glass plate having a smooth surface, a metal drum or a belt at a casting temperature of the order of about 150 ° C. The following drying temperature, particularly preferably 20 to 14:
A self-supporting solidified film formed by a film-forming method such as a solution casting method, which is dried at a drying temperature of about 0 ° C., preferably for about 0.1 to 1 hour, is obtained.

【0019】また、前記のポリアミック酸の自己支持性
の固化フィルムは、例えば、前述の高分子量の芳香族ポ
リアミック酸が約2−50重量%の濃度で均一に溶解し
ている芳香族ポリアミック酸溶液組成物に、ピリジン、
ベ−タピコリン、イソキノリン、3,5−ルチジン、4
−メチルピリジン、3−メチルピリジンなどの第3アミ
ン化合物、無水酢酸のような脂肪酸無水物などの化学変
換剤、および前述のリン化合物を加えて溶解させて得ら
れた(これら角成分の添加順序には特に制限はなく、組
成物の安定性等から適宜選択すればよい)組成物を、製
膜用ド−プ液として使用して好ましくは約0〜150℃
の流延温度、特に好ましくは5〜120℃程度の流延温
度で支持体面上に液状の薄膜を形成し、その薄膜を支持
体上で好ましくは約150℃以下の乾燥温度、特に好ま
しくは20〜140℃程度の乾燥温度で、好ましくは約
0.1〜1時間乾燥する溶液流延法などの製膜法によっ
て自己支持性の固化フィルムを得る。
The above-mentioned solidified film of a polyamic acid self-supporting material is, for example, an aromatic polyamic acid solution in which the above-mentioned high molecular weight aromatic polyamic acid is uniformly dissolved at a concentration of about 2 to 50% by weight. In the composition, pyridine,
Betapicolin, isoquinoline, 3,5-lutidine, 4
A tertiary amine compound such as -methylpyridine or 3-methylpyridine, a chemical conversion agent such as a fatty acid anhydride such as acetic anhydride, and the above-mentioned phosphorus compound, and dissolved (addition order of these corner components). The composition is not particularly limited and may be appropriately selected depending on the stability of the composition and the like.) The composition is preferably used as a dope solution for film formation at about 0 to 150 ° C.
A liquid thin film is formed on the surface of the support at a casting temperature of particularly preferably about 5 to 120 ° C., and the thin film is dried on the support at a drying temperature of preferably about 150 ° C. or less, particularly preferably 20 ° C. A self-supporting solidified film is obtained by a film forming method such as a solution casting method in which drying is performed at a drying temperature of about 140 ° C., preferably for about 0.1 to 1 hour.

【0020】水の添加量、加熱条件、化学変換剤の量な
どのよってポリ(フェニルトリアルコキシシラン)やポ
リ(ジフェニルジアルコキシシラン)などの生成速度を
コントロ−ルする。前記自己支持性フィルムを加熱し
て、前記溶媒などの揮発成分を蒸発し除去するととも
に、ポリアミック酸をイミド化率95%以上にイミド化
するとともにフェニル基含有アルコキシシランを加水分
解・重合させる。
The rate of formation of poly (phenyltrialkoxysilane) or poly (diphenyldialkoxysilane) is controlled by the amount of water added, heating conditions, amount of chemical conversion agent, and the like. The self-supporting film is heated to evaporate and remove volatile components such as the solvent, imidize the polyamic acid to an imidation ratio of 95% or more, and hydrolyze and polymerize the phenyl group-containing alkoxysilane.

【0021】前記の加熱処理は、最初に約100〜40
0℃での温度においてポリアミック酸のイミド化および
溶媒の蒸発・除去を約0.1〜5時間、特に0.2〜3
時間で徐々に行うことが好ましい。特に、加熱処理を約
100〜170℃の比較的低い温度で約1−30分間第
一次加熱処理し、次いで170〜220℃の温度で約1
−30分間第二次加熱処理し、そして220〜400℃
の高温で約1〜30分間第三次加熱処理するように段階
的に行うことが好ましい。また、自己支持性フィルムは
加熱時に、好適には自己支持性表面から剥離後、100
g/mm2 以下の低張力下に約80〜250℃で乾燥し
て溶媒及び生成水を約5〜25重量%の範囲に含む固化
フィルムを形成後、フィルムの両端を固定して加熱して
もよい。250℃以上の連続加熱処理においては、ピン
テンタ−、クリップ、枠などで少なくとも長尺のフィル
ムの長手方向に直角の方向の両端を固定して行うことが
好ましい。前記加熱に加えて400〜550℃の範囲内
のいずれかの高い温度で第四次高温加熱してもよい。
The above heat treatment is first carried out for about 100 to 40
At a temperature of 0 ° C., the imidization of the polyamic acid and the evaporation / removal of the solvent are carried out for about 0.1 to 5 hours, in particular 0.2 to 3 hours.
It is preferable to perform the treatment gradually over time. In particular, the heat treatment is performed at a relatively low temperature of about 100-170 ° C. for about 1-30 minutes, and then at a temperature of 170-220 ° C. for about 1 hour.
Second heat treatment for -30 minutes, and 220-400 ° C
The third heat treatment is preferably performed stepwise at a high temperature for about 1 to 30 minutes. Also, the self-supporting film may be heated, preferably after peeling from the self-supporting surface,
After drying at about 80 to 250 ° C. under a low tension of not more than g / mm 2 to form a solidified film containing the solvent and the produced water in the range of about 5 to 25% by weight, both ends of the film are fixed and heated. Is also good. In the continuous heat treatment at a temperature of 250 ° C. or more, it is preferable that at least both ends of the long film in the direction perpendicular to the longitudinal direction are fixed with a pin tenter, a clip, a frame, or the like. In addition to the heating, the fourth high-temperature heating may be performed at any high temperature in the range of 400 to 550 ° C.

【0022】前記の方法によって、好適には厚みが10
〜125μmであり、フィルム表面のフェニル基に基づ
くSiの表面原子濃度が1%以上、好ましくは1〜20
%、引張弾性率が450kg/cm2 以上、特に470
〜1000kg/cm2 、線膨張係数が25×10-6
m/cm/℃以下、特に5×10-6〜25×10-6cm
/cm/℃、吸水率が1.4%以下、特に0.5〜1.
3%であるポリイミドフィルムを製造することができ
る。この発明の改質されたポリイミドフィルムは、芳香
族ポリイミドフィルムが本来有する高弾性を高いレベル
で保持し、フェニル基と結合したSiによる低吸水性も
兼ね備えたものであり、またあわせて屈曲性、端裂抵抗
性及び打ち抜き性を有しているため、エポキシ樹脂など
の公知の接着剤あるいは好適には熱可塑性ポリイミド、
熱可塑性ポリアミドイミド、芳香族ジアミンとのコポリ
マ−系ポリイミドシロキサンなどの耐熱性の熱可塑性接
着剤をその少なくとも一面に設けて他の基材と積層し
て、種々の用途、例えばFPC、多層配線板、絶縁材料
等に使用することができる。
According to the method described above, preferably the thickness is 10
And the surface atomic concentration of Si based on phenyl groups on the film surface is 1% or more, preferably 1 to 20 μm.
%, Tensile modulus of 450 kg / cm 2 or more, especially 470
~ 1000 kg / cm 2 , linear expansion coefficient 25 × 10 -6 c
m / cm / ° C. or less, especially 5 × 10 −6 to 25 × 10 −6 cm
/ Cm / ° C, the water absorption is 1.4% or less, especially 0.5 to 1.
A 3% polyimide film can be produced. The modified polyimide film of the present invention retains the high elasticity inherent to the aromatic polyimide film at a high level, and also has low water absorption by Si bonded to a phenyl group, and also has flexibility, Because it has edge crack resistance and punching properties, a known adhesive such as an epoxy resin or preferably a thermoplastic polyimide,
A heat-resistant thermoplastic adhesive such as a thermoplastic polyamideimide or a copolymer-based polyimide siloxane with an aromatic diamine is provided on at least one surface thereof and laminated with another base material for various uses such as FPC and multilayer wiring boards. , Insulating materials and the like.

【0023】[0023]

【実施例】以下にこの発明の実施例を示す。以下の各例
において、ポリイミドフィルムにおける各成分の分析
は、例えば、フィルム表面の各元素の重量割合は、X線
光電子分光装置(VG社ESCALAB・200X型)
でMg KaのX線源(300W)を用い、2×3mm
のフィルムの極く表面(約数10Å)に存在する元素を
調べることにより求めた。
Embodiments of the present invention will be described below. In each of the following examples, analysis of each component in the polyimide film is performed by, for example, determining the weight ratio of each element on the film surface by using an X-ray photoelectron spectrometer (VG, ESCALAB 200X type)
2x3mm using Mg Ka X-ray source (300W)
Was determined by examining the elements present on the very surface (about several tens of degrees) of the film.

【0024】吸水率測定:ASTM D570−63に
従って測定(23℃×24時間) 引張弾性率測定:ASTM D882−64Tに従って
測定 線膨張係数(50〜200℃)測定:300℃で30分
加熱して応力緩和したサンプルをTMA装置(引張りモ
−ド、2g荷重、試料長10mm、20℃/分)で測定 伸び測定:ASTM D882−64Tに従って測定 5%熱重量減少温度測定:TGA装置で空気中10℃/
分の速度で加熱し、5%熱重量減少温度を求めた。 フェニル基含有アルコキシシラン化合物の加水分解・重
合物のSiO2 換算含有量(重量% )測定:ポリイミ
ドフィルムを800℃まで空気中で加熱してポリイミド
を酸化分解し、残渣(SiO2 )から求めた。
Water absorption measurement: Measured according to ASTM D570-63 (23 ° C. × 24 hours) Tensile modulus measurement: Measured according to ASTM D882-64T Linear expansion coefficient (50-200 ° C.) Measurement: heated at 300 ° C. for 30 minutes Measure the stress-relaxed sample with a TMA device (tensile mode, 2 g load, sample length 10 mm, 20 ° C./min). Elongation measurement: Measure according to ASTM D882-64T. 5% Thermogravimetric loss temperature measurement: TGA device in air 10 ° C /
Heat at a rate of 1 minute and determine the 5% thermal weight loss temperature. In terms of SiO 2 content of the hydrolysis-polymerization product of the phenyl group-containing alkoxysilane compound (wt%) Measurement: The polyimide film was heated in air up to 800 ° C. to oxidize and decompose polyimide was determined from the residue (SiO 2) .

【0025】参考例1 重合槽に、N,N−ジメチルアセトアミド(DMAc)
2470重量部を加え、次いで3,3’,4,4’−ビ
フェニルテトラカルボン酸二無水物(s−BPDA)2
94.22重量部とパラフェニレンジアミン108.1
4重量部とを加え、30℃で10時間重合反応させてポ
リマ−の対数粘度(測定温度:30℃、濃度:0.5g
/100ml溶媒、溶媒:N−メチル−2−ピロリド
ン)が2.66、ポリマ−濃度が14重量%であるポリ
アミック酸(イミド化率:5%以下)溶液を得た。この
ポリアミック酸溶液組成物の回転粘度は3100ポイズ
であった。
Reference Example 1 N, N-dimethylacetamide (DMAc) was placed in a polymerization tank.
2470 parts by weight, and then 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride (s-BPDA) 2
94.22 parts by weight and paraphenylenediamine 108.1
4 parts by weight, and polymerized at 30 ° C. for 10 hours to give a polymer having a logarithmic viscosity (measuring temperature: 30 ° C., concentration: 0.5 g).
/ 100 ml solvent, solvent: N-methyl-2-pyrrolidone) 2.66, and a polyamic acid (imidization ratio: 5% or less) solution having a polymer concentration of 14% by weight was obtained. The rotational viscosity of this polyamic acid solution composition was 3,100 poise.

【0026】参考例2 重合槽に、N−メチル−2−ピロリドン1980重量部
を加え、次いでs−BPDA147.2重量部、ピロメ
リット酸二無水物100.1重量部、パラフェニレンジ
アミン75.7重量部、4,4’−ジアミノジフェニル
エ−テル60.6重量部を加え、30℃で6時間重合反
応させてポリマ−の対数粘度(測定温度:30℃、濃
度:0.5g/100ml溶媒、溶媒:N−メチル−2
−ピロリドン)が2.51、ポリマ−濃度が16.2重
量%であるポリアミック酸(イミド化率:5%以下)溶
液を得た。このポリアミック酸溶液組成物の回転粘度は
2900ポイズであった。
Reference Example 2 1980 parts by weight of N-methyl-2-pyrrolidone was added to a polymerization tank, and then 147.2 parts by weight of s-BPDA, 100.1 parts by weight of pyromellitic dianhydride, and 75.7 parts of paraphenylenediamine. Parts by weight, 60.6 parts by weight of 4,4'-diaminodiphenyl ether, polymerized at 30 ° C. for 6 hours, and the logarithmic viscosity of the polymer (measuring temperature: 30 ° C., concentration: 0.5 g / 100 ml solvent) , Solvent: N-methyl-2
A solution of polyamic acid (imidation ratio: 5% or less) having a concentration of 2.51 and a polymer concentration of 16.2% by weight was obtained. The rotational viscosity of this polyamic acid solution composition was 2900 poise.

【0027】実施例1 参考例1で調製したポリアミック酸溶液に、ポリアミッ
ク酸100重量部に対する割合でモノステアリルリン酸
エステルトリエタノ−ルアミン0.1重量部を加え、室
温(約 ℃)で6時間攪拌してポリアミック酸溶液組
成物を得た。この溶液組成物のポリアミック酸100重
量部に対して、ジフェニルジメトキシシラン40重量部
と水50重量部を添加し、2時間攪拌して均一な溶液を
調製した。この溶液をガラス板上に流延し、120℃で
20分間乾燥した後、ガラス板から剥離して自己支持性
フィルムを得た。
Example 1 To the polyamic acid solution prepared in Reference Example 1, 0.1 part by weight of monostearyl phosphate triethanolamine was added in a ratio of 100 parts by weight of polyamic acid, and the mixture was added at room temperature (about ° C) for 6 hours. The mixture was stirred to obtain a polyamic acid solution composition. To 100 parts by weight of the polyamic acid of this solution composition, 40 parts by weight of diphenyldimethoxysilane and 50 parts by weight of water were added and stirred for 2 hours to prepare a uniform solution. This solution was cast on a glass plate, dried at 120 ° C. for 20 minutes, and then peeled from the glass plate to obtain a self-supporting film.

【0028】この自己支持性フィルムをピンシ−トで4
辺を固定し、150℃で5分間加熱し、次いで200℃
に昇温してその温度で7分間加熱し、さらに250℃に
昇温し、その温度で9分間加熱し、最後に420℃にま
で昇温し、その温度で5分間加熱して、厚さ75μmの
改質ポリイミドフィルムを製造した。
This self-supporting film is pinched to 4
Fix the sides, heat at 150 ° C for 5 minutes, then 200 ° C
And heated at that temperature for 7 minutes, further heated to 250 ° C., heated at that temperature for 9 minutes, finally raised to 420 ° C., heated at that temperature for 5 minutes, A 75 μm modified polyimide film was produced.

【0029】このポリイミドフィルムは、SiO2 換算
から求めたフェニル基含有アルコキシシラン化合物の加
水分解・重合物含有量が19.8重量%、フィルムのガ
ラス面のSi表面原子濃度が4.5%、空気面のSi表
面原子濃度が2.0%、引張弾性率が610kg/mm
2 、伸びが20%、線膨張係数が17×10-6cm/c
m/℃であり、吸水率が1.1%、5%熱重量減少温度
が590℃であった。
This polyimide film has a phenyl group-containing alkoxysilane compound hydrolyzed / polymerized content of 19.8% by weight calculated from SiO 2 conversion, a Si atom concentration on the glass surface of the film of 4.5%, The atomic concentration of Si on the air surface is 2.0%, and the tensile modulus is 610 kg / mm.
2 , elongation 20%, coefficient of linear expansion 17 × 10 -6 cm / c
m / ° C., the water absorption rate was 1.1%, and the 5% thermal weight loss temperature was 590 ° C.

【0030】実施例2 水を添加しなかった以外は実施例1と同様に実施して改
質ポリイミドフィルムを得た。この改質ポリイミドフィ
ルムは、SiO2 換算から求めたフェニル基含有アルコ
キシシラン化合物の加水分解・重合物含有量が16.9
重量%、フィルムのガラス面のSi表面原子濃度が3.
1%、空気面のSi表面原子濃度が1.5%、引張弾性
率が630kg/mm2 、伸びが20%、線膨張係数が
14×10-6cm/cm/℃であり、吸水率が1.2
%、5%熱重量減少温度が598℃であった。
Example 2 A modified polyimide film was obtained in the same manner as in Example 1 except that no water was added. This modified polyimide film had a hydrolysis / polymer content of 16.9 of the phenyl group-containing alkoxysilane compound calculated from SiO 2 conversion.
2. wt%, the atomic concentration of Si on the glass surface of the film is 3.
1%, Si surface atomic concentration of air surface is 1.5%, tensile modulus is 630 kg / mm 2 , elongation is 20%, linear expansion coefficient is 14 × 10 −6 cm / cm / ° C., and water absorption is 1.2
%, 5% thermal weight loss temperature was 598 ° C.

【0031】実施例3 ジフェニルジメトキシシランに代えてフェニルトリメト
キシシランを使用した以外は実施例1と実施して改質ポ
リイミドフィルムを得た。この改質ポリイミドフィルム
は、SiO2 換算から求めたフェニル基含有アルコキシ
シラン化合物の加水分解・重合物含有量が23.6重量
%、フィルムのガラス面のSi表面原子濃度が17.3
%、空気面のSi表面原子濃度が3.5%、引張弾性率
が550kg/mm2 、伸びが18%、線膨張係数が1
8×10-6cm/cm/℃であり、吸水率が0.8%、
5%熱重量減少温度が600℃であった。
Example 3 A modified polyimide film was obtained in the same manner as in Example 1 except that phenyltrimethoxysilane was used instead of diphenyldimethoxysilane. In this modified polyimide film, the content of the hydrolyzed / polymerized phenyl group-containing alkoxysilane compound in terms of SiO 2 was 23.6% by weight, and the Si concentration on the glass surface of the film was 17.3%.
%, The atomic concentration of Si on the air surface is 3.5%, the tensile modulus is 550 kg / mm 2 , the elongation is 18%, and the linear expansion coefficient is 1
8.times.10.sup.- 6 cm / cm / .degree. C. and a water absorption of 0.8%,
The 5% thermal weight loss temperature was 600 ° C.

【0032】実施例4 ジフェニルジメトキシシランに代えてフェニルトリメト
キシシランを使用し、水を添加しなかった以外は実施例
1と同様に実施して改質ポリイミドフィルムを得た。こ
の改質ポリイミドフィルムは、SiO2 換算から求めた
フェニル基含有アルコキシシラン化合物の加水分解・重
合物含有量が16.9重量%、フィルムのガラス面のS
i表面原子濃度が3.1%、空気面のSi表面原子濃度
が1.5%、引張弾性率が580kg/mm2 、伸びが
24%、線膨張係数が10×10-6cm/cm/℃であ
り、吸水率が1.0%、5%熱重量減少温度が602℃
であった。
Example 4 A modified polyimide film was obtained in the same manner as in Example 1 except that phenyltrimethoxysilane was used instead of diphenyldimethoxysilane, and water was not added. This modified polyimide film had a phenyl group-containing alkoxysilane compound hydrolysis / polymer content of 16.9% by weight calculated from SiO 2 ,
The i-surface atomic concentration is 3.1%, the air-surface Si surface atomic concentration is 1.5%, the tensile modulus is 580 kg / mm 2 , the elongation is 24%, and the linear expansion coefficient is 10 × 10 −6 cm / cm /. ° C, water absorption 1.0%, 5% thermal weight loss temperature 602 ° C
Met.

【0033】実施例5 参考例2のポリアミック酸を使用した他は実施例1と同
様に実施して改質ポリイミドフィルムを得た。この改質
ポリイミドフィルムは、SiO2 換算から求めたフェニ
ル基含有アルコキシシラン化合物の加水分解・重合物含
有量が20.4重量%、フィルムのガラス面のSi表面
原子濃度が4.6%、空気面のSi表面原子濃度が2.
1%、引張弾性率が480kg/mm2 、伸びが44
%、線膨張係数が21×10-6cm/cm/℃であり、
吸水率が1.4%、5%熱重量減少温度が590℃であ
った。
Example 5 A modified polyimide film was obtained in the same manner as in Example 1 except that the polyamic acid of Reference Example 2 was used. This modified polyimide film has a phenyl group-containing alkoxysilane compound hydrolyzed / polymerized content of 20.4% by weight calculated from SiO 2 conversion, an Si concentration on the glass surface of the film of 4.6%, and air. 1. The surface Si concentration of the surface is 2.
1%, tensile modulus 480 kg / mm 2 , elongation 44
%, The coefficient of linear expansion is 21 × 10 −6 cm / cm / ° C.,
The water absorption was 1.4%, and the 5% thermal weight loss temperature was 590 ° C.

【0034】比較例1 ジフェニルジメトキシシランと水を使用しない他は実施
例1と同様にしてポリイミドフィルムを得た。このポリ
イミドフィルムは、フィルムのガラス面のSi表面原子
濃度が0.1%、空気面のSi表面原子濃度が0.1
%、引張弾性率が650kg/mm2 、伸びが24%、
線膨張係数が17×10-6cm/cm/℃であり、吸水
率が1.6%、5%熱重量減少温度が620℃であっ
た。比較例1のポリイミドフィルムと実施例1〜5の改
質ポリイミドフィルムとについて、屈曲性、端裂抵抗性
を比較したところ、実質的に差がないことが確認され
た。
Comparative Example 1 A polyimide film was obtained in the same manner as in Example 1 except that diphenyldimethoxysilane and water were not used. This polyimide film has an atomic concentration of Si surface on the glass surface of the film of 0.1% and an atomic concentration of Si surface on the air surface of 0.1%.
%, Tensile modulus 650 kg / mm 2 , elongation 24%,
The coefficient of linear expansion was 17 × 10 −6 cm / cm / ° C., the water absorption was 1.6%, and the 5% thermal weight loss temperature was 620 ° C. A comparison was made between the polyimide film of Comparative Example 1 and the modified polyimide films of Examples 1 to 5 in terms of flexibility and edge crack resistance, and it was confirmed that there was substantially no difference.

【0035】比較例2 ジフェニルジメトキシシランに代えてテトラメトキシシ
ランを使用した他は実施例1と同様にしてポリイミドフ
ィルムを得た。この改質ポリイミドフィルムは、SiO
2 換算のテトラメトキシシランの加水分解・加熱変性物
含有量が26.2重量%、フィルムのガラス面のSi表
面原子濃度が9.9%、空気面のSi表面原子濃度が
4.6%、引張弾性率が710kg/mm2 、伸びが1
4%、線膨張係数が19×10-6cm/cm/℃であ
り、吸水率が4.5%、5%熱重量減少温度が603℃
であった。
Comparative Example 2 A polyimide film was obtained in the same manner as in Example 1 except that tetramethoxysilane was used instead of diphenyldimethoxysilane. This modified polyimide film is made of SiO
The content of the hydrolyzed / heat-modified product of tetramethoxysilane in terms of 2 is 26.2% by weight, the Si surface atomic concentration on the glass surface of the film is 9.9%, the Si surface atomic concentration on the air surface is 4.6%, Tensile modulus of elasticity is 710 kg / mm 2 , elongation is 1
4%, coefficient of linear expansion 19 × 10 −6 cm / cm / ° C., water absorption 4.5%, 5% thermal weight loss temperature 603 ° C.
Met.

【0036】[0036]

【発明の効果】この発明は以上説明したように構成され
ているので、以下に記載のような効果を奏する。
Since the present invention is configured as described above, the following effects can be obtained.

【0037】この改質されたポリイミドフィルムは、吸
水率が小さく、しかも弾性率が高く、耐熱性も高い。
The modified polyimide film has a low water absorption, a high elastic modulus, and a high heat resistance.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 フィルム表面におけるフェニル基と結合
したSiに基づくSiの表面原子濃度が1%以上であ
り、引張弾性率が450kg/mm2 以上、線膨張係数
が25×10-6cm/cm/℃以下、吸水率が1.4%
以下、5%熱重量減少温度が500℃以上である改質ポ
リイミドフィルム。
1. A film having a surface atomic concentration of Si based on Si bonded to a phenyl group on a film surface of 1% or more, a tensile modulus of 450 kg / mm 2 or more, and a linear expansion coefficient of 25 × 10 −6 cm / cm. / ° C or less, water absorption is 1.4%
Hereinafter, a modified polyimide film having a 5% thermal weight loss temperature of 500 ° C. or more.
【請求項2】 フィルム表面におけるSiがポリ(フェ
ニルトリアルコキシシラン)またはポリ(ジフェニジア
ルコキシシラン)に基づくものである請求項1記載の改
質ポリイミドフィルム。
2. The modified polyimide film according to claim 1, wherein Si on the film surface is based on poly (phenyltrialkoxysilane) or poly (diphenyldialkoxysilane).
【請求項3】 フィルム中のポリイミド構成単位の、芳
香族テトラカルボン酸成分が3,3’,4,4’−ビフ
ェニルテトラカルボン酸、その酸二無水物またはその酸
エステルを50モル%以上含む芳香族テトラカルボン酸
成分から導かれ、ジアミン成分がパラフェニレンジアミ
ンを30モル%以上含むジアミンから導かれるものであ
る請求項1記載の改質ポリイミドフィルム。
3. The polyimide constituent unit in the film, wherein the aromatic tetracarboxylic acid component contains 3,3 ′, 4,4′-biphenyltetracarboxylic acid, an acid dianhydride or an acid ester thereof in an amount of 50 mol% or more. The modified polyimide film according to claim 1, wherein the modified polyimide film is derived from an aromatic tetracarboxylic acid component, and the diamine component is derived from a diamine containing at least 30 mol% of paraphenylenediamine.
【請求項4】 熱可塑性ポリイミド、熱可塑性ポリアミ
ドイミド、芳香族ジアミン成分を含むコポリマ−系ポリ
イミドシロキサンなどの低吸水で耐熱性の熱可塑性接着
剤をその少なくとも一面に設けて樹脂層を低吸水性にし
てなる請求項1記載の改質ポリイミドフィルム。
4. A low-water-absorbing and heat-resistant thermoplastic adhesive such as thermoplastic polyimide, thermoplastic polyamide-imide, or a copolymer-based polyimide siloxane containing an aromatic diamine component is provided on at least one surface of the resin layer so that the resin layer has a low water-absorbing property. The modified polyimide film according to claim 1, wherein
JP26974896A 1996-10-11 1996-10-11 Modified polyimide film Pending JPH10114823A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26974896A JPH10114823A (en) 1996-10-11 1996-10-11 Modified polyimide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26974896A JPH10114823A (en) 1996-10-11 1996-10-11 Modified polyimide film

Publications (1)

Publication Number Publication Date
JPH10114823A true JPH10114823A (en) 1998-05-06

Family

ID=17476612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26974896A Pending JPH10114823A (en) 1996-10-11 1996-10-11 Modified polyimide film

Country Status (1)

Country Link
JP (1) JPH10114823A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002292659A (en) * 2001-03-30 2002-10-09 Konica Corp Optical film and method for manufacturing the same
JP2003198105A (en) * 2001-12-28 2003-07-11 Hitachi Chem Co Ltd Resin paste and flexible wiring board using the same
JP2006116759A (en) * 2004-10-20 2006-05-11 Nippon Zeon Co Ltd Die for optical material injection-molding, and manufacturing method for optical material
JP2006176582A (en) * 2004-12-21 2006-07-06 Du Pont Toray Co Ltd Polyimide film
JP2007227981A (en) * 2007-06-11 2007-09-06 Hitachi Chem Co Ltd Resin paste and flexible wiring board using the same
JP2007308710A (en) * 2007-06-11 2007-11-29 Hitachi Chem Co Ltd Resin paste and flexible wiring board using the same
JP2008066735A (en) * 2007-09-10 2008-03-21 Hitachi Chem Co Ltd Method for forming protective film of flexible wiring board
JP2009111424A (en) * 2009-02-05 2009-05-21 Hitachi Chem Co Ltd Resin paste and flexible wiring board using the same
US20120164557A1 (en) * 2005-03-04 2012-06-28 Ube Industries, Ltd. Method for producing a polymer electrolyte membrane
JP2014501301A (en) * 2010-12-31 2014-01-20 コーロン インダストリーズ インク Transparent polyimide film and method for producing the same
US11873371B2 (en) 2017-11-03 2024-01-16 Lg Chem, Ltd. Polyimide film for display substrate

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002292659A (en) * 2001-03-30 2002-10-09 Konica Corp Optical film and method for manufacturing the same
JP2003198105A (en) * 2001-12-28 2003-07-11 Hitachi Chem Co Ltd Resin paste and flexible wiring board using the same
JP2006116759A (en) * 2004-10-20 2006-05-11 Nippon Zeon Co Ltd Die for optical material injection-molding, and manufacturing method for optical material
JP2006176582A (en) * 2004-12-21 2006-07-06 Du Pont Toray Co Ltd Polyimide film
US20120164557A1 (en) * 2005-03-04 2012-06-28 Ube Industries, Ltd. Method for producing a polymer electrolyte membrane
JP2007227981A (en) * 2007-06-11 2007-09-06 Hitachi Chem Co Ltd Resin paste and flexible wiring board using the same
JP2007308710A (en) * 2007-06-11 2007-11-29 Hitachi Chem Co Ltd Resin paste and flexible wiring board using the same
JP2008066735A (en) * 2007-09-10 2008-03-21 Hitachi Chem Co Ltd Method for forming protective film of flexible wiring board
JP2009111424A (en) * 2009-02-05 2009-05-21 Hitachi Chem Co Ltd Resin paste and flexible wiring board using the same
JP2014501301A (en) * 2010-12-31 2014-01-20 コーロン インダストリーズ インク Transparent polyimide film and method for producing the same
US11873371B2 (en) 2017-11-03 2024-01-16 Lg Chem, Ltd. Polyimide film for display substrate

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