JPH1010052A - Surface defect inspecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform a more precise detection without erroneously detecting an extremely thin irregularity as defect by extracting a defect candidate from the luminance change of an image data, and judging whether it is a defect or not from two images processed in time series. SOLUTION: A prescribed brightness pattern is projected on a surface 1a to be inspected by a lighting means 2, its image is taken by an image pickup means 3, and the brightness pattern is converted into an image data of electric signal. An image processing means 4 extracts, from the image data, only a high frequency component of spatial frequency components, or a component which is a luminance changed part and has a level of a prescribed value or more as defect candidate. A tracking processing means 5 executes a prescribed processing by the means 4 every optional time while moving the surface 1a to be inspected, or at least either one of the means 2 and the means 3. It is judged whether the resulting two continued images processed in time series are fitted to a prescribed comparing condition or not, and the fitted defect candidate is judged as defect.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface defect inspection apparatus used for inspecting a surface defect of an object to be inspected, for example, a painted surface of an automobile body.

[0002]

2. Description of the Related Art A conventional surface defect inspection apparatus is disclosed in, for example, Japanese Patent Application Laid-Open No. 2-73139.

In this surface defect inspection apparatus, a predetermined light and dark stripe pattern is projected on the surface to be inspected, and when there is a defect such as unevenness on the surface to be inspected, the lightness (luminance) due to the defect.
This method uses a method of detecting a defect on the surface of the surface to be inspected by differentiating a received light image having a difference or a change in brightness (luminance).

[0004]

However, the conventional surface defect inspection apparatus as described above has the following problems.

[0005] For example, in the coating of an automobile body, what is usually called a surface defect is a projection on the coating surface resulting from the application of dust and the like, for example, having a diameter of 0.5 mm to 0.5 mm. The thickness is about 2 mm and the thickness is about several tens of μm. In addition, since the height (thickness) of such a convex portion is relatively large as compared with its small diameter, the irregular reflection angle of light becomes large, so that it is easy to notice.

On the other hand, there are irregularities which do not become defects. That is, since the concentration of the paint is not strictly constant due to the eddy convection generated in the process of evaporating the paint solvent, extremely thin (low) irregularities are periodically generated in the thickness of the coating film. In this unevenness, for example, the interval between peaks is about 1 to 10 mm, and the height of the unevenness is about several μm.
Such extremely thin irregularities are of such a degree that they are usually not noticed and do not become defects.

However, when the light is adjusted or the like, it may look like a surface of "yuzu" or "orange", and is called "yuzu skin" or "orange skin".

In the conventional example as described above, since the luminance change is emphasized and detected, extremely thin irregularities which are not originally defects, such as the above-mentioned "yuzu skin", are also detected, and this is erroneously determined as a defect. There is a possibility that.

[0009] Therefore, in the prior art, there is a problem that even very thin irregularities which are not originally defects, such as so-called "yuzu skin", may be erroneously detected as defects.

[0010]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art, and it is intended to erroneously detect extremely thin irregularities such as so-called "yuzu skin" which are not originally defects as defects. It is an object of the present invention to provide a surface defect inspection apparatus capable of performing highly accurate defect detection without any defect.

[0011]

According to a first aspect of the present invention, there is provided a surface defect inspection apparatus for irradiating a surface of an object to be inspected with light and reflecting light from the surface to be inspected. In a surface defect inspection apparatus that creates a light-receiving image based on the light-receiving image and detects a defect on the surface to be inspected based on the light-receiving image, an illumination unit that forms a predetermined light and dark pattern on the surface to be inspected, and an image of the surface to be inspected Means for converting a received light image obtained as a result into image data of an electric signal, and image processing means for extracting only a component having a high frequency component and a level higher than a predetermined value among spatial frequency components in the image data as a defect candidate While moving at least one of the surface to be inspected or the illuminating means and the imaging means, the image processing means executes a predetermined process at any time and performs processing in a time series obtained therefrom. The number pixels moved calculated from the coordinate values of the defect candidate exists in each two consecutive images d1
And the moving direction are calculated based on the time difference t between the two images, the moving speed v, the visual field S of the imaging means in the moving direction, and the size (number of pixels) L of the image in the moving direction. A tracking process that determines whether or not the number of moving pixels d2 and the moving direction of the defect candidate between the two images match under a predetermined comparison condition, and when the matching is satisfied, the defect candidate area is determined as a defect. Means, a movement detecting means for detecting a physical quantity relating to movement of the inspection surface or the illumination means and the imaging means, and the tracking processing means correcting the number of moving pixels d2 based on a photographing distance from the imaging means to the inspection surface. It is characterized in that it is configured to perform.

In the embodiment of the surface defect inspection apparatus according to the present invention, the comparison condition in the tracking process changes based on the size of the number of moving pixels d2. And can be
As described in claim 3, the tracking processing means includes a distance measuring means for measuring a physical quantity relating to a distance from the imaging means to the surface to be inspected, and uses the measurement result of the distance measuring means to determine the number of moving pixels d2. A configuration for correction may be employed.

[0013]

FIG. 1 is a functional block diagram showing an embodiment of a surface defect inspection apparatus according to the present invention.
Is an object to be inspected, for example, an automobile body, and 1a is a surface to be inspected, for example, a painted surface.

Reference numeral 2 denotes an illuminating means for projecting a predetermined light and dark pattern on the surface 1a to be inspected, for example, an illuminating means shown in FIG.

Reference numeral 3 denotes an image pickup means for picking up an image of the surface 1a to be inspected and converting the light / dark pattern into image data of an electric signal, for example, a video camera such as a CCD (Charge Coupled Device) camera.

Further, reference numeral 4 denotes an image processing means for extracting only a component having a high frequency component and a level higher than a predetermined value among the spatial frequency components in the image data obtained by the image pickup means 3 as a defect candidate.

Further, reference numeral 5 denotes the image processing means 4 at any time while moving at least one of the inspection surface 1a or the illumination means 2 and the imaging means 3.
, The number of moving pixels d1 and the moving direction calculated from the coordinate values of the defect candidates existing in each of the two continuous images processed in time series obtained therefrom, Time difference t and speed v of the movement
And the number of moving pixels d2 calculated based on the field of view S of the imaging means in the moving direction and the size (number of pixels) L of the image in the moving direction, and the moving direction of the defect candidate between the two images. Is a tracking processing unit that determines whether or not the defect candidate matches under a predetermined comparison condition and determines that the defect candidate is a defect when the determination is satisfied. The image processing unit 4 and the tracking processing unit 5 include, for example, It is composed of a computer.

Reference numeral 6 denotes a movement detecting means for detecting a physical quantity relating to the movement of the inspection surface 1a or the illuminating means 2 and the imaging means 3, and is constituted by, for example, a speed detecting sensor.

Further, since the field of view S in the tracking processing means 5 changes according to the photographing distance from the image pickup means 3 to the inspection surface 1a, the number of moving pixels d2 calculated from the field of view S also changes.

The above configuration corresponds to, for example, an embodiment described later with reference to FIGS.

According to a second aspect of the present invention, the comparison condition in the tracking process changes based on the size of the moving pixel number d2.

The above configuration corresponds to, for example, an embodiment described later with reference to FIG.

Further, as described in claim 3, the number of moving pixels d2 in the tracking processing means 5 is determined by a measurement result obtained by a distance measuring means for measuring a physical quantity relating to a distance from the imaging means 3 to the inspection surface 1a. It is corrected by using.

[0024]

As described above, according to the first aspect of the present invention, a predetermined light-dark pattern is projected on the surface 1a to be inspected by the illuminating means 2, and the light-dark pattern is picked up by the image pickup means 3 and the light-dark pattern is converted Convert to signal image data.

Next, the image processing means 4 extracts only a component having a high frequency component and a level equal to or higher than a predetermined value among the spatial frequency components in the image data of the light and dark pattern. Here, the high-frequency component in the image data is a portion having a luminance change such as an irregular defect, and is considered to be a defect by extracting only the component whose level is equal to or more than a predetermined value as described above. Candidate regions can be extracted.

Next, in the tracking processing means 5, predetermined processing is executed by the image processing means 4 at any time while moving at least one of the inspection surface 1a or the illuminating means 2 and the imaging means 3. Then, the number of moving pixels d1 and the moving direction calculated from the coordinate values of the defect candidates present in each of the two consecutive images processed in time series obtained therefrom are calculated from the physical quantities related to the movement detected by the movement detecting means 6. The number of moving pixels d2 calculated based on the calculated moving speed v, the time difference t between the two images, the visual field S of the imaging means 3 in the moving direction, and the size (number of pixels) L of the images in the moving direction. Also, it is determined whether or not the moving direction of the defect candidate between the two images matches under a predetermined comparison condition, and if the moving direction matches, the defect candidate is determined to be a defect.

The moving speed v is calculated from the physical quantity relating to the movement detected by the movement detecting means 6. And
By moving either the inspected surface 1a or the illuminating means 2 and the imaging means 3, that is, fixing the other, the defect on the inspected surface 1a moves in the processing image in synchronization with the movement. I do. Therefore, if the defect candidate in the image is synchronized with the above movement, it can be determined as a defect, and it can be distinguished from a luminance change area that does not move in the image such as “Yuzu skin”.

Further, the number of moving pixels d2 is determined by the imaging means 3.
Is corrected based on the photographing distance from the object to the surface 1a to be inspected. Even if the apparent speed of the defect in the image changes due to the photographing distance changing with time due to the shape of the object 1 to be inspected, the defect is corrected. , A tracking process with high accuracy without missing is realized.

As described above, according to the first aspect of the present invention, to inspect the entire inspection surface 1a, the inspection object 1 or the illuminating means 2 and the imaging means 3 are sequentially moved so that the field of view of the camera is The whole inspection surface 1a is configured to scan.

Next, in the second aspect of the present invention,
The comparison condition in the tracking process is configured to change based on the size of the moving pixel number d2. For example, the time difference t or the moving speed v between the two images is large and the moving pixel numbers d1 and d2 are large. Increases, the comparison range also increases accordingly, so that defects are not missed.

Next, in the invention according to claim 3,
Since the tracking process is performed by correcting the moving pixel number d2 using the measurement result of the distance measuring unit that measures the physical quantity related to the distance from the imaging unit 3 to the inspection surface 1a, the field of view of the camera changes. Can be detected without overlooking the defect.

[0032]

According to the surface defect inspection apparatus according to the first aspect of the present invention, since the above-described configuration is employed, extremely thin irregularities which are not originally defects, such as "yuzu skin", are not plane surfaces, for example. Even when it is formed as described above, there is an extremely excellent effect that it is possible to detect only the defect with high accuracy without detecting such "yuzu skin" as a defect as in the related art.

In the surface defect inspection apparatus according to the second aspect of the present invention, since the above-described configuration is adopted, for example,
Even if the time difference or the moving speed between the two images is large and the number of moving pixels is large, the range of comparison in the tracking processing is increased accordingly, so that defects can be prevented from being overlooked. The effect is brought.

Further, in the surface defect inspection apparatus according to the third aspect of the present invention, since the above configuration is adopted, for example, the distance from the imaging means to the surface to be inspected changes, and the field of view of the camera of the imaging means changes. Even if is changed, a remarkably excellent effect that a defect can be detected without overlooking it is brought.

[0035]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a surface defect inspection apparatus according to the present invention will be described below with reference to the drawings.

FIGS. 2 to 9 show an embodiment of the surface defect inspection apparatus according to the present invention.

In the present embodiment, the painted surface of the body of the automobile will be described as the inspected object 1 as the inspected surface 1a.

In FIG. 2, reference numeral 2 denotes an illuminating means for projecting a predetermined light-dark pattern on the inspection surface 1a. Reference numeral 3 denotes an imaging unit which images the surface 1a to be inspected and converts the light / dark pattern into image data of an electric signal, for example, a video camera such as a CCD camera. Here, the size of the camera visual field in the moving direction of the inspection target surface 1a is represented by S.

Reference numeral 4 denotes an image processing means for processing image data obtained by the camera 3.

Further, reference numeral 5 denotes a tracking processing means for detecting a defect 7 from a time-series continuous image processed by the image processing means 4, which is a computer such as a personal computer.

Further, reference numeral 6 denotes a speed detection sensor as a movement detecting means for detecting a physical quantity relating to the movement of the inspection surface 1a or the illuminating means 2 and the camera 3.

In this embodiment, the illumination means 2 and the camera 3
Is fixed, and the inspection surface 1a is moving at a speed v in the direction of arrow A in FIG.

Therefore, in this case, the speed detection sensor 6 is, for example, a pulse generator for detecting rotation information of the conveyor driving device, and is a computer (tracking processing means).
5 calculates the speed v from the obtained rotation information.
Therefore, the computer (tracking processing means) 5 also performs calculations other than tracking processing, and plays a role of a host computer of the entire apparatus.

FIG. 3 shows an example of the illuminating means 2, in which a plurality of fluorescent lamps 10 are mounted on a housing 9. Reference numeral 11 denotes a bright / dark pattern illuminating plate which forms a bright / dark pattern light by applying a matte black light shielding portion to a diffusion plate such as a milky white acrylic plate. In the present embodiment, it is assumed that illumination of a stripe pattern as shown in FIG. 3 is used.

Next, an example of a procedure for extracting a defect candidate area in the image processing means 4 will be described.

As shown in FIG. 2, when the inspection surface 1a on which the stripe pattern is projected is imaged by the monochrome camera 3, a gray-scale image (original image) as shown in FIG.
Is obtained. At this time, the inspection surface 1 in the field of view of the camera 3
If there is an irregular defect 7 on a, light is irregularly reflected at the defect 7, so that the defect 7 appears in the image as an area having a different brightness (luminance) from the surroundings. For example, if there is a defect 7 in the bright stripe as in the original image shown in FIG. 4A, it is displayed as a dark area.

When the above-mentioned “yuzu skin” is formed on the inspected surface 1a, which is the painted surface, the boundary of the stripe pattern in the original image is disturbed by the influence of the “yuzu skin”. Appear as isolated points with brightness different from the surroundings.

After inputting the original image in step S1 shown in FIG. 5, edge detection processing such as differentiation is performed on the original image in step S2 in FIG. 5, and a predetermined luminance level is determined in step S3 in FIG. With a threshold of 2
When the binarization is performed, a binary image is obtained in which an area having a luminance change as shown in FIG. 4B is white and other areas are black.

Subsequently, labeling (labeling) is performed on the white area of the image in step S4 in FIG. 5, and the area and the coordinates of the center of gravity are calculated in step S5.
Here, in the binary image, the defect 7 is an isolated point having a small area, and the boundary of the stripe pattern is a region having a large area vertically crossing the screen. When the area determination processing for removing the image is performed in step S6 in FIG. 5, an area determination result image in which only isolated points having a small area remain as shown in FIG. 4C is obtained. At this time, in addition to the defect 7, an isolated point having a small area caused by “yuzu skin” remains as noise.

Next, an example of a tracking process and a defect detection procedure in the computer (tracking processing means) 5 will be described.

FIG. 6 shows an example of an area determination result image processed continuously in a time series from a certain time T to T + 5t. The image has an x-axis in the horizontal direction and a y-axis in the vertical direction. FIG. 7 shows the images of FIG. 6 superimposed for easy understanding.

In this embodiment, as shown in FIGS. 6 and 7, a defect 7 in the image is shifted from right to left in the x-axis direction (arrow B in FIG. 7).
), And the image size (the number of pixels) in this moving direction is L. Therefore, for example, in the images at times T and T + t, if the defect 7 moves right beside and there is no change in the y-direction coordinate, the difference between the barycentric coordinates of the defect 7 in the x-direction is the number of moving pixels d1, and Represents That is, the moving pixel number d1 is the amount of the defect candidate actually moved in the image = the actual moving amount.

Next, the number of moving pixels d2 will be described.

The number of moving pixels d2 is a calculated value of the moving amount of the inspection surface 1a in the image, and can be calculated by the following equation (1) if the moving is performed without a change in the coordinate in the y direction.

The number of moving pixels d2 = (inter-image time t × moving speed v × image size L) / camera visual field S (1) inter-image time t: a time difference between two temporally different images to be compared.

Moving speed v: Computer 5 calculates from the detection result of speed detecting sensor 6.

Image size L: the number of pixels in the body moving direction in the image. For example, if the body 1 moves in the x direction with x × y = 512 × 480 pixels, L = 512
Becomes

Camera field of view S: The size of the camera field of view in the moving direction of the surface 1a to be inspected. For example, t = 0.1
If [S], v = 100 [mm / s], L = 512 [pixels], and S = 120 [mm], d2 = 42.7.
[Pixel].

The method of calculating the number of moving pixels d2 is as follows.
It is not limited to this embodiment.

Next, a method of determining a defect by the tracking process will be described.

The tracking processing of this embodiment is to detect a moving object synchronized with the movement of the inspected surface 1a from two images processed in time series, and to perform the same movement as the inspected surface 1a. Is determined to be a defect, and the noise generated by the aforementioned “yuzu skin” is not determined to be a defect because the noise is generated irrespective of the movement of the inspection surface 1a.

In FIG. 9A, a defect 7 at a certain time is shown.
Is represented by ●, the defect after t seconds is represented by ○, and the defect position after t seconds predicted from the number of moving pixels d2 for t seconds calculated by the equation (1) from the detection result of the speed detection sensor 6 is ×. Expressed by At this point, ● and ○ are defect candidates, and whether or not they are defects is determined by the following procedure.

Here, the difference between the center of gravity of the defect ● and the center of gravity of the defect ○ after t seconds, that is, the difference between the coordinates of the center of gravity of the moving pixel number d1 in the x and y directions is dx1 and dy1, and the coordinates of the center of gravity of the defect ● in the x direction and The difference between the predicted position of the defect after t seconds and the barycentric coordinates is dx2. If the position of the defect の after t seconds coincides with the predicted defect position x calculated from the movement amount of the inspection surface 1a, it can be determined that the probability of the defect is high. Therefore, the above processing is repeated for images obtained in time series, and 1
If the number of matches in one defect candidate is equal to or greater than a predetermined number, the defect candidate is determined to be a defect. For example, as shown in FIG. 6, if the defect 7 appears six times from when it appears on the screen to when it passes, the judgment value of the number of matches is six or less, and the setting of the judgment value is experimental. You can go to

However, when the defect does not move linearly in the image due to the influence of the vibration of the surface to be inspected 1a or the like, the position of the defect O after t seconds does not coincide with the expected defect position X as shown in FIG. . Even in such a case, a tracking range based on the expected defect position is set in order to reliably detect the defect. This tracking range is, for example, a rectangular area 8 having widths hx and hy centered on the predicted defect position x as shown in FIG. 9B. If there is a defect ｔ after t seconds in the area 8 of this tracking range, that is, | dx1−dx2 | <hx / 2, and | dy1-d
If y2 | <hy / 2 (here, dy2 = 0), it is determined that the probability that the defect candidate is a genuine defect is high. Hereinafter, defect determination processing is performed in the same manner as described above.

The defect determination method and the tracking range (area) are not limited to the present embodiment.

Although the defect can be detected by the configuration and procedure described above, even if the surface 1a to be inspected is not a flat surface as shown in FIG. A method for performing defect detection will be described below.

As shown in FIG. 8, when the surface 1a to be inspected is not a simple plane but changes like the surfaces 1a-1 and 1a-2 to be inspected, the shooting distance D of the camera 3 also changes to D1 and D2. Therefore, the size S of each visual field also changes to S1 and S2. Therefore, an error occurs in the calculation result of the number d2 of moving pixels by the above equation (1). Such an inspected surface 1
In order to prevent the influence of the shape of “a”, equation (1) is calculated using the visual field S corresponding to the shooting distance of the camera 3 and the number of moving pixels d2 is calculated.
May be calculated. This is, for example, the inspection surface 1a-
If the shapes of 1, 1a-2 are known, this can be realized by switching the fields of view S1 and S2 at a predetermined timing and calculating the formula (1).

Next, a second embodiment of the present invention will be described.

According to the present invention, the size of the tracking range changes according to the size of the number of moving pixels d2 from an image at a certain time to the next time. For example, as shown in FIG. 10, if a rectangular area 8 that contacts a fan shape with a defect candidate at a certain time as a reference is set as the tracking range, the distance to the defect candidate at the next time in the image is large, and is proportional to the distance. Even if the error is large, the defect can be tracked without missing.

Next, a third embodiment will be described.

In the first embodiment, the case where the shape of the surface 1a to be inspected is known is described. In the present embodiment, when the shape of the surface 1a to be inspected is not known, the camera 3 causes the surface 1a to be inspected. A physical quantity related to the distance to the object is measured by a distance measuring means such as a distance measuring sensor, and the number of moving pixels d2 is corrected based on the measurement result.

For example, as shown in FIG.
Of the camera visual fields S1, S by a distance measuring sensor 12 as a distance measuring means fixed at substantially the same height as the camera 3.
The distance K to the inspection surface 1a near 2 is measured. Since the distance K is proportional to the photographing distance D, the relationship between the distance K and the camera field of view S as shown in FIG. 11 may be obtained in advance, and the number of moving pixels d2 may be calculated based on this.

[Brief description of the drawings]

FIG. 1 is a functional block diagram showing an embodiment of a surface defect inspection apparatus according to the present invention.

FIG. 2 is an explanatory view of a main part showing a surface defect inspection apparatus according to one embodiment of the present invention together with a functional block diagram.

FIG. 3 is a schematic perspective explanatory view showing an example of a lighting unit.

FIG. 4 is an explanatory diagram showing a change of an image in a process of processing by an image processing means, divided into (a) to (c).

FIG. 5 is an explanatory diagram showing a processing flow in a processing process by an image processing means and a tracking processing means.

FIG. 6 is an explanatory diagram showing changes in the area determination result image in the process of the tracking processing means, divided into (a) to (f).

FIG. 7 is an explanatory diagram of a tracking process by a tracking processing unit.

FIG. 8 is an explanatory diagram showing a processing procedure when the surface to be inspected is not a simple plane but the distance between the surface to be inspected and the camera changes in the embodiment of the present invention.

FIG. 9 is an explanatory diagram showing a comparison range at the time of tracking processing, divided into (a) and (b).

FIG. 10 is an explanatory diagram showing a change in a comparison range with time during a tracking process.

FIG. 11 is an explanatory diagram illustrating an example of a relationship between a distance K and a visual field S obtained in advance.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Inspection object (automobile body) 1a, 1a-1, 1a-2 Inspection surface 2 Illumination means 3 Imaging means (camera) 4 Image processing means (computer) 5 Tracking processing means (computer) 6 Movement detection means (speed detection Sensor) 7 Defect 8 Tracking area 10 Fluorescent light 11 Light / dark pattern illumination plate 12 Distance measuring means (distance sensor)

Claims (3)

[Claims] 1. A surface for irradiating a surface to be inspected of an object to be inspected with light, forming a light-receiving image based on reflected light from the surface to be inspected, and detecting a defect on the surface to be inspected based on the light-receiving image. In a defect inspection apparatus, an illumination unit for forming a predetermined light and dark pattern on a surface to be inspected, an imaging unit for converting a received image obtained by imaging the surface to be inspected into image data of an electric signal, and a spatial frequency component in the image data Image processing means for extracting only a component having a high frequency component and a level equal to or higher than a predetermined value as a defect candidate, and at any time while moving at least one of the surface to be inspected or the illumination means and the imaging means A predetermined process is executed by the image processing means, and two consecutive time-series processed images obtained therefrom are obtained.
The number of moving pixels d1 and the moving direction calculated from the coordinate values of the defect candidates existing in each of the two images are the time difference t between the two images, the moving speed v, the visual field S of the image pickup means in the moving direction, and With respect to the moving pixel number d2 calculated based on the image size (the number of pixels) L in the moving direction and the moving direction of the defect candidate between the two images,
A tracking processing unit for determining whether or not the defect candidate area is determined to be a defect when the determination is made under predetermined comparison conditions; and detecting a physical quantity relating to the movement of the inspection surface or the illumination unit and the imaging unit. A surface defect inspection apparatus characterized in that the movement detection means and the tracking processing means correct the number of moving pixels d2 based on a photographing distance from an imaging means to a surface to be inspected. 2. The surface defect inspection apparatus according to claim 1, wherein a comparison condition in the tracking process changes based on the size of the moving pixel number d2. 3. The tracking processing means includes a distance measuring means for measuring a physical quantity related to a distance from the imaging means to the surface to be inspected, and corrects the number of moving pixels d2 using a measurement result of the distance measuring means. The surface defect inspection apparatus according to claim 1, wherein: