JPH03296622A - Flow rate monitoring apparatus - Google Patents
Flow rate monitoring apparatusInfo
- Publication number
- JPH03296622A JPH03296622A JP2100955A JP10095590A JPH03296622A JP H03296622 A JPH03296622 A JP H03296622A JP 2100955 A JP2100955 A JP 2100955A JP 10095590 A JP10095590 A JP 10095590A JP H03296622 A JPH03296622 A JP H03296622A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- gas
- error
- time
- meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012544 monitoring process Methods 0.000 title claims abstract description 16
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 238000012806 monitoring device Methods 0.000 claims description 7
- 230000002950 deficient Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 24
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分舒〕
この発明は、気体または液体を用いた各種の装置に使用
される流量監視装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application] The present invention relates to a flow rate monitoring device used in various devices using gas or liquid.
第２図は、例えばガス流量を制御する場合の従来の流量
監視装置の一例を示す構成図である。この図において、
１は気体または液体のボンベで、ここではガスボンベ、
２はガスの流量を調節する流量計、３はガスの流量を設
定する設定手段となるポテンション、メータ、４はガス
の実流量を表示する表示手段となるディジタルメータ、
５は前記ガスの供給が行われる、例えば半導体製造装置
を制御する制御手段となる制御部、６はガスのＯ′Ｎ１
０ＦＦを切り換える電磁弁である。FIG. 2 is a configuration diagram showing an example of a conventional flow rate monitoring device for controlling, for example, gas flow rate. In this diagram,
1 is a gas or liquid cylinder, here it is a gas cylinder,
2 is a flow meter that adjusts the gas flow rate; 3 is a potentiometer and meter that is a setting means for setting the gas flow rate; 4 is a digital meter that is a display means for displaying the actual gas flow rate;
Reference numeral 5 denotes a control unit to which the gas is supplied, which serves as a control means for controlling, for example, a semiconductor manufacturing device; 6 a gas O′N1;
This is a solenoid valve that switches 0FF.
次に動作について説明する。Next, the operation will be explained.
制御部５よりガスＯＮの信号が電磁弁６に出されると、
ガスボンベ１からガスが流れ、ポテンションメータ３で
設定された流量を流量計２が流す。When the control unit 5 sends a gas ON signal to the solenoid valve 6,
Gas flows from a gas cylinder 1, and a flowmeter 2 causes the flow rate set by a potentiometer 3 to flow.
流量計２より流れたガスの実流量がディジタルメタ４へ
表示される。The actual flow rate of gas flowing from the flow meter 2 is displayed on the digital meta 4.
従来の流量制御は、設定流量と実流量の比較を流量計２
の内部で行っているが、流量計２でのエラーの信号がな
いために、ディジタルメータ４の表示を見ることにより
実流量の確認をしなければならず、作業者が常時監視す
ることが必要で、また、デ、ｆジタル、メータ４の表示
が見にくいなどの問題点があった。Conventional flow control uses flow meter 2 to compare the set flow rate and actual flow rate.
However, since there is no error signal from the flow meter 2, the actual flow rate must be checked by looking at the display on the digital meter 4, which requires constant monitoring by the operator. In addition, there were other problems such as the digital, f-digital, and meter 4 displays being difficult to read.
この発明りよ、上記のような問題点を解消するためにな
されたもので、設定流量と実流量を比較し、設定範囲を
一定時間超えた場合に、流量エラーとして装置の処理を
停止させ、作業者に警報を出すことのできる流量監視装
置を得ることを目的とする。This invention was made to solve the above-mentioned problems.The set flow rate and the actual flow rate are compared, and if the set flow rate is exceeded for a certain period of time, it is determined as a flow rate error and the processing of the device is stopped. The purpose of this invention is to obtain a flow rate monitoring device that can issue an alarm to a person.
この発明に係る流量監視装置は、気体または液体の設定
流量と実流量とを常時監視して設定流量と実流量との誤
差を検出し、誤差が一定時間連続したとき警報を発生せ
しめる流量監視手段を具備したものである。The flow monitoring device according to the present invention constantly monitors a set flow rate and an actual flow rate of gas or liquid, detects an error between the set flow rate and the actual flow rate, and generates an alarm when the error continues for a certain period of time. It is equipped with the following.
この発明においては、設定流量と実流量との誤差を検出
し、この誤差が一定時間連続した場合には警報を出すよ
うにしたことから、気体または液体の設定流量と実流量
の誤差を生じたまま流し続けることがなくなる。In this invention, an error between the set flow rate and the actual flow rate is detected, and if this error continues for a certain period of time, an alarm is issued. You won't have to keep running the stream.
以下、この発明の一実施例を第１図について説明する。 An embodiment of the present invention will be described below with reference to FIG.
第１図において、１〜６は第２図のものと同しものであ
り、７は流量監視手段となる流量監視部であり、設定流
量、実流量、ガスＩＮ信号を入力し、流量エラー信号を
制御部５へ出力するものであり、これらで流量監視装置
が構成される。In Fig. 1, 1 to 6 are the same as those in Fig. 2, and 7 is a flow rate monitoring section serving as a flow rate monitoring means, which inputs the set flow rate, actual flow rate, and gas IN signal, and outputs a flow rate error signal. is output to the control unit 5, and these constitute a flow rate monitoring device.
このように構成された流量監視装置において、制御部５
よりガスＯＮの信号が電磁弁６に出力され、ポテンショ
ンメータ３で設定された流量で流量計２が動作し、実流
量がディジタルメータ４に表示される。これと同時に、
流量監視部７にガスＯＮの信号が入力され、ポテンショ
ンメータ３の値とディジタルメータ４の値との比較を開
始する。In the flow rate monitoring device configured in this way, the control section 5
A gas ON signal is output to the solenoid valve 6, the flowmeter 2 operates at the flow rate set by the potentiometer 3, and the actual flow rate is displayed on the digital meter 4. At the same time,
A gas ON signal is input to the flow rate monitoring unit 7, and a comparison between the value of the potentiometer 3 and the value of the digital meter 4 is started.
ところが、この状態でガスボンベ１が空になったとする
と、ポテンションメータ３で設定した設定流量と実流量
に誤差が生しる。そうすると、流量監視部７内でポテン
ションメータ３より設定された設定範囲を超えた時間を
計り、一定時間連続して設定範囲を超えるとガス流量エ
ラーとし、制御部５へ停止信号を送１、停止内容を流量
監視部７で表示させ、例えばブザーを鳴らして作業者へ
警報を出す。However, if the gas cylinder 1 becomes empty in this state, an error will occur between the set flow rate set by the potentiometer 3 and the actual flow rate. Then, the flow rate monitoring unit 7 measures the time when the set range set by the potentiometer 3 is exceeded, and if the set range is exceeded continuously for a certain period of time, a gas flow rate error is determined and a stop signal is sent to the control unit 5. The details of the stoppage are displayed on the flow monitoring unit 7, and a buzzer is sounded to issue a warning to the operator, for example.
なお、上記実施例では、ポテンションメータ３の信号を
流量監視部７に入力したものを示したが、流量監視部７
にポテンションメータ３を取り付けてもよい。In the above embodiment, the signal from the potentiometer 3 is input to the flow rate monitoring section 7, but the flow rate monitoring section 7
A potentiometer 3 may be attached to.
また、上記実施例ではガスの流量監視について説明した
が、その他の気体、ｗ１体でもよく、上記実施例と同様
の効果を秦する。Further, although the above embodiment describes monitoring the flow rate of gas, other gases or W1 bodies may be used, and the same effect as in the above embodiment can be obtained.
以上説明したように、この発明は、気体または液体の設
定流量と実流量とを常時監視して設定流量と実流量との
誤差を検出し、誤差が一定時間連続したとき警報を発生
せしめる流量監視手段を具備したので、例えばガスが無
くなったりした場合でも、そのままの状態で放置してお
くことがなくなり、不良製品の発生を最小限に抑えるこ
とができ、作業者の負荷を軽くすることができる等の効
果がある。As explained above, the present invention constantly monitors the set flow rate and the actual flow rate of gas or liquid, detects an error between the set flow rate and the actual flow rate, and generates an alarm when the error continues for a certain period of time. Since this means is equipped, even if the gas runs out, for example, there is no need to leave the product in that state, the occurrence of defective products can be minimized, and the burden on the workers can be reduced. There are other effects.
第１図はこの発明の一実施例を示す構成図、第２図は従
来例を示す構成図である。
図において、１はガスボンベ、２は流量計、３はポテン
ションメータ、４ばディジタルメータ、５は制御部、６
は電磁弁、７は流量監視部である。
なお、各図中の同一符号は同一または相当部分を示す。FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional example. In the figure, 1 is a gas cylinder, 2 is a flow meter, 3 is a potentiometer, 4 is a digital meter, 5 is a control unit, and 6 is a
is a solenoid valve, and 7 is a flow rate monitoring section. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
または液体の実流量を表示する表示手段と、前記気体ま
たは液体の流れを制御する制御手段とを備えた流量監視
装置において、前記気体または液体の設定流量と実流量
とを常時監視して前記設定流量と実流量との誤差を検出
し、前記誤差が一定時間連続したとき警報を発生せしめ
る流量監視手段を具備したことを特徴とする流量監視装
置。A flow rate monitoring device comprising a setting means for setting the flow rate of the gas or liquid, a display means for displaying the actual flow rate of the gas or liquid, and a control means for controlling the flow of the gas or liquid. Flow rate monitoring characterized by comprising a flow rate monitoring means that constantly monitors the set flow rate and the actual flow rate, detects an error between the set flow rate and the actual flow rate, and generates an alarm when the error continues for a certain period of time. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2100955A JPH03296622A (en) | 1990-04-16 | 1990-04-16 | Flow rate monitoring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2100955A JPH03296622A (en) | 1990-04-16 | 1990-04-16 | Flow rate monitoring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03296622A true JPH03296622A (en) | 1991-12-27 |
Family
ID=14287781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2100955A Pending JPH03296622A (en) | 1990-04-16 | 1990-04-16 | Flow rate monitoring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03296622A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2153743A1 (en) * | 1998-07-27 | 2001-03-01 | Valero Francisco Sanchez | Control system for measuring fuel fluids and similar elements in various installations |
| JP2013502596A (en) * | 2009-08-24 | 2013-01-24 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | Particle sensor whose flow rate is monitored |
| US10983040B2 (en) | 2013-03-15 | 2021-04-20 | Particles Plus, Inc. | Particle counter with integrated bootloader |
| US11169077B2 (en) | 2013-03-15 | 2021-11-09 | Particles Plus, Inc. | Personal air quality monitoring system |
| US11579072B2 (en) | 2013-03-15 | 2023-02-14 | Particles Plus, Inc. | Personal air quality monitoring system |
| US11835443B2 (en) | 2014-04-30 | 2023-12-05 | Particles Plus, Inc. | Real time monitoring of particle count data |
| US11988591B2 (en) | 2020-07-01 | 2024-05-21 | Particles Plus, Inc. | Modular optical particle counter sensor and apparatus |
| US12044611B2 (en) | 2013-03-15 | 2024-07-23 | Particles Plus, Inc. | Particle counter with integrated bootloader |
-
1990
- 1990-04-16 JP JP2100955A patent/JPH03296622A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2153743A1 (en) * | 1998-07-27 | 2001-03-01 | Valero Francisco Sanchez | Control system for measuring fuel fluids and similar elements in various installations |
| JP2013502596A (en) * | 2009-08-24 | 2013-01-24 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | Particle sensor whose flow rate is monitored |
| US8800383B2 (en) | 2009-08-24 | 2014-08-12 | Particle Measuring Systems, Inc. | Flow monitored particle sensor |
| US11579072B2 (en) | 2013-03-15 | 2023-02-14 | Particles Plus, Inc. | Personal air quality monitoring system |
| US11169077B2 (en) | 2013-03-15 | 2021-11-09 | Particles Plus, Inc. | Personal air quality monitoring system |
| US11519842B2 (en) | 2013-03-15 | 2022-12-06 | Particles Plus, Inc. | Multiple particle sensors in a particle counter |
| US10983040B2 (en) | 2013-03-15 | 2021-04-20 | Particles Plus, Inc. | Particle counter with integrated bootloader |
| US11913869B2 (en) | 2013-03-15 | 2024-02-27 | Particles Plus, Inc. | Personal air quality monitoring system |
| US12044611B2 (en) | 2013-03-15 | 2024-07-23 | Particles Plus, Inc. | Particle counter with integrated bootloader |
| US11835443B2 (en) | 2014-04-30 | 2023-12-05 | Particles Plus, Inc. | Real time monitoring of particle count data |
| US11846581B2 (en) | 2014-04-30 | 2023-12-19 | Particles Plus, Inc. | Instrument networking for optical particle counters |
| US11988591B2 (en) | 2020-07-01 | 2024-05-21 | Particles Plus, Inc. | Modular optical particle counter sensor and apparatus |
| US12055474B2 (en) | 2020-07-01 | 2024-08-06 | Particles Plus, Inc. | Modular optical particle counter sensor and apparatus |
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