JPH0329600Y2 - - Google Patents

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a steam injection pump device that can automatically adjust the power supplied to a heater for heating a working fluid.

(Prior Art) A steam injection pump device is well known as a device for evacuating a vacuum chamber. This type of device vaporizes a working fluid such as oil, mercury, or water contained in the pump body by heating it with a heater, and blows out this vapor from a nozzle, as well as the gas in the vacuum chamber that has flown into this vapor jet stream. This device evacuates the vacuum chamber by splashing and discharging the steam in the direction in which the steam jet flows. In general, when operating this type of equipment, the pump startup time (the time from when the heater is switched on until normal steam is blown out) and the pump stop time (when the heater is turned off while normal steam is being generated) time until steam generation stops and the working fluid temperature drops below a certain temperature)
Management is performed by empirically estimating the temperature of the nozzle and the working fluid, taking into consideration the amount of power supplied to the heater and the time for supplying or stopping the power. In addition, when evacuation of the vacuum chamber is performed at predetermined time intervals, pump load is It was common practice to supply a large load power to the heater, the same as during operation.

(Problems to be solved by the invention) However, as mentioned above, in the method of empirically managing the pump start time and stop time from the magnitude of the heater supply power and its energization time, etc.,
Since the temperature of the nozzle and the working fluid cannot be accurately estimated, there is a problem in that appropriate management cannot be performed.

Furthermore, when the vacuum chamber is evacuated at predetermined time intervals, it is uneconomical to have to supply more power than necessary to the heater even during no-load operation of the pump, which wastes power consumption.

The present invention was developed to solve the above-mentioned conventional problems, and its purpose is to accurately manage pump startup and stop times, and to reduce power consumption during no-load operation of the pump. An object of the present invention is to provide a steam injection pump that can effectively prevent waste.

(Means for solving the problems) In order to achieve the above object, the present invention is constructed as follows. That is, the present invention provides a steam injection pump device that includes a working fluid contained in a pump body, a heater that heats the working fluid, and a nozzle that jets steam generated from the working fluid.
A temperature measuring terminal that measures the temperature of the working fluid in the pump body, a temperature measuring terminal that measures the temperature of the nozzle, and a heater power control device that controls the power supplied to the heater based on the temperature measurement information of the temperature measuring terminal. 1 is a steam injection pump device characterized by having:

(Function) In the present invention having the above configuration, when the pump is operating, power is supplied to the heating heater and the heater generates heat. At that time, the temperatures of the working fluid and the nozzle are accurately measured by the respective temperature measuring terminals. The temperature characteristics of the power supplied to the heater differ between the nozzle and the working fluid.The temperature characteristics of the nozzle are as shown in curve A in Figure 2, and the temperature characteristics of the working fluid are as shown in curve B. Become.

In the figure, P _L is the minimum power required for the steam injection pump device to maintain normal operation without exhaust gas load. The temperature information from these two temperature measurement terminals is then given to the heater power control device. The heater power control device receives the temperature measurement information and appropriately controls the power supplied to the heater. That is, for example, the pump startup time is accurately managed by the temperature measurement information of the nozzle temperature and the working fluid temperature, and the pump stop time is managed accurately by the temperature measurement information of the working fluid temperature. If the power supply to the heater is controlled only by the temperature of the working fluid, the lower limit of the control range is set to P _L , for example, control _range If a larger value is selected, the supplied power cannot be lowered sufficiently, resulting in wasted power consumption, but in this invention, the heater supplied power is also controlled by the nozzle temperature. The lower limit of the control range Y can be lowered to the minimum required power P _L , and power control with less waste becomes possible. In addition, even when the vacuum chamber is evacuated at predetermined time intervals, the power supplied to the heater is controlled by the control operation of the heater power control device based on the measured information of the nozzle and hydraulic fluid temperatures during no-load operation of the pump. It is possible to minimize the amount of power required and effectively prevent wasteful power consumption.

(Example) Hereinafter, an example of the present invention will be described based on the drawings. FIG. 1 shows the overall structure of a steam injection pump device according to the present invention. In the figure, a casing 1 wrapped with a water-cooled pipe is provided with an exhaust pipe 2 (not shown) projecting from the vacuum chamber for discharging gas, and a pump main body 3 including a chimney 3a and the like is accommodated in the casing 1. ing.

A heater plate 4 is installed on the bottom wall of the pump body 3.
is fixed, and a heater 5 is provided on the lower surface of the heater plate 4. Further, a working fluid 6 made of oil, mercury, water, etc. is injected into the bottom wall portion of the pump body 3. Therefore,
The heater plate 4 is heated by supplying power to the heater 5 from the power source 17, and further,
The temperature of the working fluid 6 is raised by receiving the heat from the heater plate 4. The upper part of each chimney 3a has a corresponding first stage nozzle 7, second stage nozzle 8 and third stage nozzle.
A stage nozzle 9 is provided.

As a result, heating of the hydraulic fluid 6 causes the hydraulic fluid 6 to
The steam evaporated from the chimney 3a is accelerated through the chimney 3a and ejected from the respective nozzles 7, 8 and 9. This jet of steam then hits the inner wall of the casing, condenses, and returns to the bottom wall. On the other hand, the gas in the vacuum chamber that has entered the casing 1 through the intake port 1a of the casing 1 is blown away by the jets from the nozzles 7, 8, and 9 in the advancing direction of the jets, and is exhausted. It is exhausted to the outside through pipe 2.

This evacuation achieves evacuation of the vacuum chamber. By the way, the first feature of this embodiment is that the pump body 3 has a working fluid temperature measuring terminal 11 for measuring the temperature of the working fluid 6 and a nozzle temperature measuring terminal 12 for measuring the temperature of the nozzle. This is what is provided. That is, the terminal frame 13 is airtightly fixed to the wall surface of the pump body 3.
3, the respective bases of a working fluid temperature measuring terminal 11 and a nozzle temperature measuring terminal 12 such as a thermocouple are fixed.
The tip of the hydraulic fluid temperature measuring terminal 11 is connected to the hydraulic fluid 6.
On the other hand, the nozzle temperature measuring terminal 12
The tip of the nozzle 7 is inserted into the first stage nozzle 7 in an extended manner. As a result, the temperature of the hydraulic fluid 6 is accurately detected by the hydraulic fluid temperature measuring terminal 11, and the temperature of the first stage nozzle 7 is accurately detected by the nozzle temperature measuring terminal 12, and this detection signal is transmitted to the terminal frame 13. It is extracted from the outside.

A second feature of this embodiment is that a heater power control device 14 is provided which receives temperature measurement information from the working fluid temperature measurement terminal 11 and the nozzle temperature measurement terminal 12 and controls the power supplied to the heater 5. It is that you are. In the figure, this heater power control device 14 includes a temperature regulator 15 and a heater power regulator 1.
6.

The temperature regulator 15 issues commands to control the pump operating temperature up and down to the heater power regulator 16 based on the nozzle temperature measurement information A and the working fluid temperature measurement information B while the heater switch (not shown) is on. Further, while the heater switch is in the OFF operation, a pump stop signal b is output based on the working fluid temperature measurement information B. In other words, the temperature controller 15 contains the optimal working fluid temperature setting value and steam jetting temperature setting value when normal steam is jetted out, and the maximum working fluid temperature value (hereinafter referred to as pump When the heater switch is on, the temperature controller 15 compares the temperature value of the nozzle temperature measurement information A with the steam ejection temperature setting value and compares the temperature value of the hydraulic fluid temperature measurement information B. The temperature value and the working fluid temperature set value are compared, and if the former temperature is high, a temperature decrease command a1 is output, and if the latter temperature is high, a temperature increase command a2 is output.

Furthermore, when the heater switch is off, the temperature value of the working fluid temperature measurement information B is compared with the pump stop temperature set value, and when the former temperature is lower than the latter, a pump stop signal b is output.

By using this pump stop signal b to shut off the pump switch, the pump stop time can be automatically managed.

By the way, the heater power regulator 16 receives the temperature decrease command a1 from the temperature regulator 15, reduces the power supplied to the heater 5, and receives the temperature increase command a1.
2, the power supplied to the heater 5 is increased. In this case, for example, by making the rate of increase and decrease in the supplied power proportional to the comparative difference between the temperature values of the nozzle and hydraulic fluid temperature measurement information A and B and the corresponding temperature setting values. Efficient power control can be performed.

Therefore, according to this embodiment, when the vacuum chamber is evacuated at predetermined time intervals, it is possible to supply the minimum necessary electric power to the heater 5 without interfering with the pump operation function during no-load operation of the pump. Then,
It is possible to prevent wasteful power consumption.

In addition, in this embodiment, the nozzle temperature measuring terminal 1
2 (nozzle temperature measurement information A) and the detection signal from the hydraulic fluid temperature measurement terminal 11 (hydraulic fluid temperature measurement information B), the pump startup time is determined by the detection signal from the hydraulic fluid temperature measurement terminal 11. Since the stop time of each pump can be automatically managed based on (working fluid temperature measurement information B), it is possible to manage the time accurately. Furthermore, even if the type of working fluid or the type of gas to be exhausted changes, the pump's operating conditions can be optimally set to suit the change, so pump performance can be improved.

In addition, in the above embodiment, the nozzle temperature measuring terminal 1
2, the temperature of the first stage nozzle 7 is measured, but the temperature of the second stage nozzle 8 and the third stage nozzle 9 may also be measured if necessary.

Further, in the above embodiment, the pump startup time is managed based on both the nozzle temperature measurement information A and the hydraulic fluid temperature measurement information B, but the invention is not necessarily limited to this. The starting time of the pump may be determined based on only one of the information.

(Effects of the invention) Since the present invention has the configuration and operation described above, it is possible to efficiently consume power during pump operation without waste, and it is also possible to manage the start time and stop time of the pump. It is possible to do this accurately. In addition, this invention can accurately measure the temperature of the working fluid and/or nozzle and control the power supplied to the heater based on the measured values, making it ideal for the type of working fluid and the type of gas to be exhausted. The pump operating conditions can be adjusted and set, thereby improving pump performance.

[Brief explanation of drawings]

FIG. 1 is an overall configuration diagram showing an embodiment of the steam injection pump according to the present invention, and FIG. 2 is a diagram showing the temperature characteristics of the nozzle and the working fluid with respect to the power supplied to the heater. 1...Casing, 1a...Intake port, 2...Exhaust pipe, 3...Pump body, 3a...Chimney, 4
... Heater plate, 5 ... Heater, 6 ...
Working fluid, 7... First stage nozzle, 8... Second stage nozzle, 9... Third stage nozzle, 11... Working fluid temperature measuring terminal, 12... Nozzle temperature measuring terminal, 13... Terminal frame,
14... Heater power control device, 15... Temperature controller, 16... Heater power regulator, 17... Power supply.

Claims (1)

[Scope of utility model registration request] Measuring the temperature of the working fluid inside the pump body in a steam injection pump device that has a working fluid contained in the pump body, a heater that heats the working fluid, and a nozzle that spouts steam generated from the working fluid. A steam injection pump device comprising: a temperature measuring terminal that measures the temperature of a nozzle; and a heater power control device that controls power supplied to the heater based on temperature measurement information of the temperature measuring terminal. .