JPH03263745A - Ion trap anode system - Google Patents

Abstract

PURPOSE:To freely fit or remove an ion trap anode and facilitate the fitting/ removing work by making the potential feed system to the ion trap anode a contact system. CONSTITUTION:An anode tip 2 and an ion trap electrode 3 are concentrically arranged with the center axis of an electron beam. An anode main body containing the anode tip 2, an anode base 5, an anode base 4, the ion trap electrode 3, insulators 6, 7, 8, a pin 10, and an insulating cylinder 9 can be fitted to or removed from an anode pedestal 12 by a screw section as appropriate. An electrode plate 11 is electrically shielded from the outside by an insulating plate 13 and an insulating spring pedestal 14 and fitted to the anode pedestal 12, and a potential is invariably applied to it by being connected to a wiring 15.

Description

[Detailed description of the invention]

"Industrial Application Field" The present invention relates to an ion trap anode system as part of an electron gun, and particularly relates to an ion trap anode that is easy to attach and detach and has a simple structure. [Prior Art] Conventionally, this type of ion trap anode has , the ion trap anode and the potential supply source were connected by wiring or the like.

[Problem to be solved by the invention]

In the conventional ion trap described above, the ion trap anode and the potential supply source are connected by wiring, etc., so when attaching and detaching the ion trap anode for filament replacement, etc., the wiring etc. must be attached and detached, making handling difficult. The drawback is that it is inconvenient. Furthermore, since wiring and other protrusions are exposed on the outer wall surface of the ion trap anode, there is a drawback that arcing is likely to occur when high voltage is applied to the electron gun. An object of the present invention is to solve the above problems and provide an ion trap anode system. [Both Means for Solving the Problems] In order to achieve the above object, the ion trap anode system according to the present invention includes: ■Tsudden L, which can be arranged concentrically with respect to the center axis of the electron beam; a pin that contacts the pin and supplies a potential; a depth ε that is arranged concentrically with the center axis of the electron beam and creates an electron beam shape; an electrode that contacts the pin t, i%; At least a spring that connects the electrode plate to the pins n and j, and wiring for supplying a potential to the electrode plate are installed, and the cylindrical electrode, pin, and chip maintain their positional relationship. The electrode plate, spring, and wiring are assembled into the anode pedestal and body while maintaining their positional relationship. The anode main body is attached to and detached from the anode pedestal by 11 points π.
It is a mountain that was attached to the mountain. (Embodiment 1) Next, the present invention will be explained with reference to the drawings. FIG. 1 is a longitudinal sectional view showing one embodiment of the present invention. ri + c = Come, the electron beam 8 moves in the direction of the arrow (,).The anode depth 2 and the ion trap electrode 3 are arranged in a concentric circle (1, Z) around the center axis of this electron beam.The anode tip 2 is The anode base 4 is fixed to the anode base 1) (7).The anode base 5 is insulated by M! pole 3 to 11q
1. Also, is there an ion trap? ! 1 God 13 (2 is the insulating cylinder i: + The anode pedestal 12L is connected to the anode pedestal 12L and is removable.The electrode plate !1 is electrically isolated from the outside by an insulating plate 13 and an insulating spring pedestal 14, and is attached to the anode pedestal 12, and is connected to the wiring 15. In addition, the spring 161T allows for strong electrical contact with the pin IO at all times.As described above, the anode base 2. 5. Anode base 4. Ion trap electrode 3, insulators 6, 7, 8. Pins 10. Insulation F] The anode body including the tube 9 can be attached and detached from the anode stand Pv: +2 by means of a threaded section. Moreover, the potential supply to the ion trap electrode 3 is always performed by the movable ffi electrode plate 11. Note that each structural part of the present invention can be changed as long as the function thereof is not impaired. (Effects of the Invention) As explained above, in the present invention, by using a contact method as the potential supply method to the ion I/wrap anode, it is possible to attach and detach the ion trap anode in n ways, reducing the attachment and detachment time. This invention has the effect of greatly shortening the length and facilitating the attachment/detachment work.Furthermore, the present invention eliminates protrusions around the ion I/wrap anode, which has the effect of reducing arcing and the like when high voltage is applied.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view showing one embodiment of the present invention. 1,・Electric f・Beam traveling direction Fl′ arrow view 2・・Anode tip 3・・Ion trap electron] 14, (r・
...Anode base 6,7.8...Insulator 9-=
4('! !& cylinder +o-=hin11・
...Electrode plate 12...Anode? seat 1
3... Insulating plate 14... Spring 6-inch I5.
・・Wiring 16・Spring Toku J1・Applicant 11 Electric Co., Ltd. 2 companies

Claims (1)

[Claims] (1) A cylindrical electrode arranged concentrically with respect to the central axis of the electron beam, a pin that contacts the electrode and supplies a potential, and a chip arranged concentrically with the central axis of the electron beam to create the electron beam shape; It has at least an electrode plate that contacts the pin and applies a potential to the pin, a spring that brings the electrode plate into elastic contact with the pin, and a wiring that supplies a potential to the electrode plate, and the cylindrical electrode, pin, and chip. are integrally incorporated into the anode body while maintaining a positional relationship, and the electrode plate, spring,
An ion trap anode system characterized in that the wiring is integrated into the anode pedestal while maintaining a positional relationship, and the anode main body is detachably attached to the anode pedestal.