JPH0326048U - - Google Patents
Info
- Publication number
- JPH0326048U JPH0326048U JP8594989U JP8594989U JPH0326048U JP H0326048 U JPH0326048 U JP H0326048U JP 8594989 U JP8594989 U JP 8594989U JP 8594989 U JP8594989 U JP 8594989U JP H0326048 U JPH0326048 U JP H0326048U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- sample
- measured
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Description
第１図及び第２図は本考案にかかる荷電粒子線
走査型試料映像装置の一実施例を説明するための
図であつて、第１図は荷電粒子線走査型試料映像
装置でも真空チヤンバの内部の様子を示す模式図
、第２図はＣＲＴ表示回路の回路構成図である。
１０ａ……反射電子検出器、１０ｂ……Ｘ線検
出器、１０ｃ……透過電子検出器、１０ｄ……試
料電流計、２０……電子光学系、２５……走査コ
イル、３０……分析試料、５１……マルチプレク
サ、５２……ビデオ回路、５３……フイルタ、６
０……ＣＲＴ、ａ……電子線。
1 and 2 are diagrams for explaining an embodiment of the charged particle beam scanning sample imaging device according to the present invention. FIG. 2 is a schematic diagram showing the internal state, and is a circuit configuration diagram of a CRT display circuit. 10a... Backscattered electron detector, 10b... X-ray detector, 10c... Transmission electron detector, 10d... Sample ammeter, 20... Electron optical system, 25... Scanning coil, 30... Analysis sample, 51... Multiplexer, 52... Video circuit, 53... Filter, 6
0...CRT, a...Electron beam.
Claims (1)
して照射し、照射された当該被測定試料から出た
二次荷電粒子線の信号を検出器で検出し、この検
出信号に基づいて当該被測定試料の画像を一次荷
電粒子線の走査速度を可変にすることにより少な
くとも２段階の分解能でデイスプレイ上に写し出
す荷電粒子線走査型試料映像装置において、前記
デイスプレイの前段における前記検出信号を信号
処理するためのビデオ回路には、前記一次荷電粒
子線の走査速度に応じて高域遮断周波数が可変に
されるフイルタを備えたことを特徴とする荷電粒
子線走査型試料映像装置。 A primary charged particle beam is scanned and irradiated onto the sample to be measured, and a detector detects the signal of the secondary charged particle beam emitted from the irradiated sample to be measured. Based on this detection signal, the sample to be measured is detected. In a charged particle beam scanning sample imaging device that displays an image of a sample on a display with at least two levels of resolution by varying the scanning speed of a primary charged particle beam, for signal processing the detection signal at the front stage of the display. 2. A charged particle beam scanning sample imaging device, characterized in that the video circuit includes a filter whose high cutoff frequency is made variable in accordance with the scanning speed of the primary charged particle beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8594989U JPH0326048U (en) | 1989-07-20 | 1989-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8594989U JPH0326048U (en) | 1989-07-20 | 1989-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0326048U true JPH0326048U (en) | 1991-03-18 |
Family
ID=31635333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8594989U Pending JPH0326048U (en) | 1989-07-20 | 1989-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0326048U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06199233A (en) * | 1992-02-28 | 1994-07-19 | Hitachi Ltd | Structure of car coupling part |
| JPH07172307A (en) * | 1993-12-22 | 1995-07-11 | East Japan Railway Co | Connection bellows device for rolling stock |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5014272A (en) * | 1973-06-06 | 1975-02-14 |
-
1989
- 1989-07-20 JP JP8594989U patent/JPH0326048U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5014272A (en) * | 1973-06-06 | 1975-02-14 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06199233A (en) * | 1992-02-28 | 1994-07-19 | Hitachi Ltd | Structure of car coupling part |
| JPH07172307A (en) * | 1993-12-22 | 1995-07-11 | East Japan Railway Co | Connection bellows device for rolling stock |
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