JPH0325232U - - Google Patents
Info
- Publication number
- JPH0325232U JPH0325232U JP8600789U JP8600789U JPH0325232U JP H0325232 U JPH0325232 U JP H0325232U JP 8600789 U JP8600789 U JP 8600789U JP 8600789 U JP8600789 U JP 8600789U JP H0325232 U JPH0325232 U JP H0325232U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- surface plate
- rotating surface
- fixed
- rotational center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 4
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
第１図は、偏向荷重アームの荷重ホイールがリ
ングに接触した本考案の実施例１の研磨装置の斜
視図であり、第２図は上記荷重ホイールがプレツ
シヤプレートに接触した本考案の実施例２の研磨
装置の斜視図である。
１……回転定盤（Ａ内周、Ｂ外周）、２……リ
ング、３……シリンダ、４……プレツシヤプレー
ト、５……リングおさえネジ、６……逆転用歯車
、７……シヤフト、８……偏向荷重アーム、９…
…ネジ、１０……荷重ホイール、１１……調整用
荷重、Ａ，Ｂ……偏向荷重付加機構。
FIG. 1 is a perspective view of the polishing apparatus according to the first embodiment of the present invention in which the load wheel of the deflection load arm is in contact with a ring, and FIG. FIG. 3 is a perspective view of a polishing apparatus of Example 2. 1... Rotating surface plate (A inner circumference, B outer circumference), 2... Ring, 3... Cylinder, 4... Pressure plate, 5... Ring holding screw, 6... Reverse gear, 7... Shaft, 8... Deflection load arm, 9...
...Screw, 10...Load wheel, 11...Adjustment load, A, B...Deflection load adding mechanism.
Claims (1)
に設置され回転定盤の回転に連動して回転するリ
ングと、該リングの回転中心を固定しかつ該リン
グに荷重を加えるリング荷重用シリンダとからな
る研磨装置において、 上記リング荷重用シリンダ下方に位置するリン
グの回転中心と回転定盤の回転中心とを結ぶ直線
に対して、このリングの回転中心から見て任意の
角度の方向にあるリング上の局部に一定の偏向荷
重を付加できる機構を備えたことを特徴とする研
磨装置。[Scope of Claim for Utility Model Registration] A rotating surface plate to which abrasive is supplied, a ring installed on the rotating surface plate and rotating in conjunction with the rotation of the rotating surface plate, and a rotation center of the ring fixed and fixed. In a polishing device consisting of a ring loading cylinder that applies a load to the ring, the rotational center of this ring is relative to the straight line connecting the rotational center of the ring located below the ring loading cylinder and the rotational center of the rotating surface plate. A polishing device characterized by being equipped with a mechanism that can apply a fixed deflection load to a local part of a ring at an arbitrary angle when viewed from above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600789U JPH0325232U (en) | 1989-07-21 | 1989-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600789U JPH0325232U (en) | 1989-07-21 | 1989-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325232U true JPH0325232U (en) | 1991-03-15 |
Family
ID=31635415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8600789U Pending JPH0325232U (en) | 1989-07-21 | 1989-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325232U (en) |
-
1989
- 1989-07-21 JP JP8600789U patent/JPH0325232U/ja active Pending
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