[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPH03202351A - Ink jet printer head - Google Patents

Ink jet printer head

Info

Publication number
JPH03202351A
JPH03202351A JP34384789A JP34384789A JPH03202351A JP H03202351 A JPH03202351 A JP H03202351A JP 34384789 A JP34384789 A JP 34384789A JP 34384789 A JP34384789 A JP 34384789A JP H03202351 A JPH03202351 A JP H03202351A
Authority
JP
Japan
Prior art keywords
shape memory
memory alloys
memory alloy
passageway
printer head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP34384789A
Other languages
Japanese (ja)
Inventor
Mitsuharu Takahashi
光治 高橋
Kazunao Kinugawa
衣川 一尚
Kiyomitsu Suga
須賀 清光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seikosha KK
Original Assignee
Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seikosha KK filed Critical Seikosha KK
Priority to JP34384789A priority Critical patent/JPH03202351A/en
Publication of JPH03202351A publication Critical patent/JPH03202351A/en
Pending legal-status Critical Current

Links

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To realize an simply constituted ink jet printer head which can heat/ cool shape memory alloys in a short time and quickly make a printing by providing a pressure mechanism having shape memory alloys and a Peltier element. CONSTITUTION:A fluid passageway 1a has an ink inlet member 1b, a common passageway 1c, a narrow passageway 1d and branched passageways each of which comprises an operation concavity 1e to operate shape memory alloys, a leading passageway 1f and a nozzle 1g. Reversible shape memory alloys 3 are adhered to an upper surface of a cap plate 2 facing to the operation concavity 1e, and a Peltier element 4 is adhered to he upper surface of the shape memory alloys 3. A Peltier element is an element having an effect of causing heat evolution differently from the joule heat at a contact portion of different conductors or semiconductors when electric current flows through the portion, namely, Peltier effect.

Description

【発明の詳細な説明】 [産業上の利用分野〕 この発明は、流体流路に付設された押圧機構を駆動して
流体を吐出させるインクジェットプリンタヘッドに関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an inkjet printer head that ejects fluid by driving a pressing mechanism attached to a fluid flow path.

[従来の技術] 従来、流体流路に付設された押圧機構を駆動して流体を
吐出させるインクジェットプリンタヘッドは押圧機構に
圧電素子を用いるものが多かった。
[Prior Art] Conventionally, many inkjet printer heads that eject fluid by driving a pressing mechanism attached to a fluid flow path use piezoelectric elements in the pressing mechanism.

しかし、圧電素子は変位量が小さくインク吐出量が少な
いため、印字が薄くなり、また圧電素子はセラミックで
あるため破損しやすく、さらに寿命が短いという欠点が
ある。
However, since the piezoelectric element has a small amount of displacement and a small amount of ink ejected, the printing becomes thin, and since the piezoelectric element is made of ceramic, it is easily damaged and has a short lifespan.

そこで特開昭63−57251号公報において、形状記
憶合金からなる駆動板とヒータ等の加熱手段を用いる発
明が開示されている。すなわち形状記憶合金からなる駆
動板を、例えば、常温では下方に撓んだ形に変形した状
態であり、常温以上の温度に加熱すると撓み変形がなく
なって平面状態に復帰するように形状記憶処理する。そ
して、印字信号に応じて加熱手段により駆動板を加熱し
、ついで加熱を中断して周囲の環境温度及びインクとの
接触により冷却することの繰り返しによって、駆動板を
振動させ、インクを吐出させて印字を行うものである。
Therefore, Japanese Patent Laid-Open No. 63-57251 discloses an invention using a drive plate made of a shape memory alloy and heating means such as a heater. That is, a drive plate made of a shape memory alloy is subjected to shape memory treatment such that, for example, at room temperature it is deformed into a downwardly bent shape, and when heated to a temperature above room temperature, the bending deformation disappears and it returns to a flat state. . Then, the driving plate is heated by the heating means in accordance with the printing signal, and then the heating is interrupted and the process is repeatedly cooled by the surrounding environmental temperature and contact with the ink, thereby vibrating the driving plate and causing the ink to be ejected. It is used for printing.

なお、駆動板の冷却手段として、エヤー、或いは低温エ
ヤー等の吹付は手段も開示されている。
Note that as a cooling means for the drive plate, means for blowing air, low-temperature air, or the like is also disclosed.

[解決しようとする課題] しかし、冷却を周囲の環境温度及びインクとの接触また
はエヤー若しくは低温エヤー等の吹付けにより行うもの
であるため、瞬時に冷却することはできないという問題
点があった。従って印字信号に応じて次々に加熱・冷却
を行い、駆動板を上下に振動させて、インクを吐出させ
る動作を速く行う行うことが出来なかった。
[Problem to be Solved] However, since cooling is performed by contact with the surrounding environment temperature and ink or by spraying air or low-temperature air, there is a problem that instantaneous cooling is not possible. Therefore, it was not possible to rapidly perform the operation of ejecting ink by sequentially heating and cooling in response to print signals and vibrating the drive plate up and down.

またエヤー若しくは低温エヤー等の吹付は手段を用いる
場合は、加熱手段と冷却手段をそれぞれ別個に設けなけ
ればならないため、装置構成が複雑になるという問題点
があった。
Further, when using means for blowing air or low-temperature air, heating means and cooling means must be provided separately, resulting in a problem that the apparatus configuration becomes complicated.

そこで本発明の目的は、形状記憶合金の加熱・l令却を
瞬時に行うことができ、従って速く印字を行うことが可
能であり、またその装置構成が簡単であるインクジェッ
トプリンタヘッドを提供することにある。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an inkjet printer head that can instantaneously heat and cool a shape memory alloy, can print quickly, and has a simple device configuration. It is in.

[課題を解決するための手段] 上記目的を達成するために、本発明は、流体流路に付設
された押圧機構を駆動して流体を吐出させるインクジェ
ットプリンタヘッドにおいて、押圧機構が、可逆性の形
状記憶合金及び形状記憶合金を加熱・冷却するベルチェ
素子により構成されたものである。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides an inkjet printer head that drives a pressing mechanism attached to a fluid flow path to eject fluid, in which the pressing mechanism is reversible. It is composed of a shape memory alloy and a Vertier element that heats and cools the shape memory alloy.

[作用] ベルチェ素子に流す電流方向を正・逆に切り換えること
により、加熱・冷却の双方を瞬時に行うことが出来る。
[Function] By switching the direction of current flowing through the Beltier element between forward and reverse, both heating and cooling can be performed instantaneously.

これにより形状記憶合金の形状を変化させて、押圧機構
を駆動し、流体を吐出させて印字を行う。
This changes the shape of the shape memory alloy, drives the pressing mechanism, and discharges fluid to perform printing.

[実施例] 以下、本発明の一実施例を図面に基づいて詳細に説明す
る。
[Example] Hereinafter, an example of the present invention will be described in detail based on the drawings.

第1図に示すように、基板1には流体流路1aが形成し
である。流体流路1aはインク入口部1b及び共通流路
1cが設けてあり、これより複数に流路が別れ(図示省
略)、分岐した各流路は狭路部1dを経て形状記憶合金
が作動する作動凹部1e、導路1f及びノズル1gから
なる構成となっている。
As shown in FIG. 1, the substrate 1 has a fluid flow path 1a formed therein. The fluid flow path 1a is provided with an ink inlet portion 1b and a common flow path 1c, from which the flow path is divided into multiple flow paths (not shown), and each branched flow path passes through a narrow path portion 1d, and the shape memory alloy is activated. It is composed of an actuation recess 1e, a guide path 1f, and a nozzle 1g.

基板1の上面には蓋板2が固着されている。そして動作
凹部1eに対向する蓋板2の上面には、可逆性の形状記
憶合金3が固着しである。形状記憶合金3は本実施例で
は、ニッケルとチタンとを1対1の割合に混合したもの
を熱処理し、オーステナイト変態温度50℃、マルテン
サイト変態温度40℃とし、オーステナイト変態で下方
向に弓なりに曲がった形状(第3図示)、マルテンサイ
ト変態で平板形状になるように記憶させである。
A cover plate 2 is fixed to the upper surface of the substrate 1. A reversible shape memory alloy 3 is fixed to the upper surface of the cover plate 2 facing the operating recess 1e. In this example, the shape memory alloy 3 is a mixture of nickel and titanium in a ratio of 1:1, and is heat treated to an austenite transformation temperature of 50°C and a martensitic transformation temperature of 40°C, so that the shape memory alloy 3 becomes arched downward during austenite transformation. The curved shape (as shown in the third diagram) is memorized so that it becomes a flat plate shape through martensitic transformation.

形状記憶合金3の上面にはベルチェ素子4が接着しであ
る。ここでペルチュ素子とは、異種の導体または半導体
の接点に電流を流すとき、接点でジュール熱以外に熱の
発生または吸収が起こる効果、いわゆるベルチェ効果を
起こす素子である。
A Vertier element 4 is adhered to the upper surface of the shape memory alloy 3. Here, the Pertsch element is an element that causes the so-called Beltier effect, which is an effect in which heat is generated or absorbed in addition to Joule heat at the contact when a current is passed through the contact between different types of conductors or semiconductors.

本実施例においては、ベルチェ素子4として、Bi  
 (Te   Se   )からなるN型半導体2  
 2.85  0.15 層と、(Bi   Sb   )Te3からなるP型1
.4  0.8 半導体層とを、絶縁層を介して交互に積層し、隣り合う
半導体層の端面間を導電体によって導通させ、これによ
って一端部に位置する半導体の端面から、他端部に位置
する半導体の端面までを直列に接続したものを用いた。
In this embodiment, as the Bertier element 4, Bi
N-type semiconductor 2 consisting of (TeSe)
2.85 0.15 layer and P type 1 consisting of (Bi Sb ) Te3
.. 4 0.8 Semiconductor layers are alternately stacked with insulating layers interposed in between, and the end faces of adjacent semiconductor layers are electrically connected by a conductor, so that the end face of the semiconductor located at one end is connected to the end face of the semiconductor located at the other end. We used semiconductors connected in series up to the end faces.

従って図示の状態においてベルチェ素子4の上下両面に
は、各半導体層の両端面がそれぞれ整列して位置してお
り、ベルチェ素子4の下面(各半導体層の下端面)が形
状記憶合金3に接着されている。この半導体層の下端面
の発熱・吸熱が形状記憶合金3に伝達されるようになっ
ている。
Therefore, in the illustrated state, both end surfaces of each semiconductor layer are aligned and positioned on both the upper and lower surfaces of the Beltier element 4, and the lower surface of the Beltier element 4 (the lower end surface of each semiconductor layer) is bonded to the shape memory alloy 3. has been done. Heat generation and heat absorption at the lower end surface of the semiconductor layer are transmitted to the shape memory alloy 3.

ベルチェ素子4の両端部に位置する各半導体層の端面に
は、それぞれ引出線6a、6bが接続されており、駆動
回路7から駆動信号が供給されるようになっている。ベ
ルチェ素子4の発熱はP型半導体層からN型半導体層に
向かって電流が流れる接合部に発生し、吸熱はN型半導
体層からP型半導体層に向かって電流が流れる接合部に
発生する。従ってベルチェ素子4の下面を発熱させるか
冷却させるかは、引出線6a、6bに供給される駆動信
号の向きを逆転させることによって可能である。なお本
実施例では、引出線6aを+、6bを−として電流を流
したときにベルチェ素子4の下面が発熱して形状記憶合
金3が約70℃に加熱され、引出線6bを+、6aを−
として電流を流したときにベルチェ素子4の下面が吸熱
して形状記憶合金3が20〜10°Cに冷却されるよう
に、印加電圧、電流値9通電時間等が設定されている。
Lead lines 6a and 6b are connected to the end faces of each semiconductor layer located at both ends of the Beltier element 4, respectively, and a drive signal is supplied from a drive circuit 7. Heat generation in the Bertier element 4 occurs at the junction where current flows from the P-type semiconductor layer to the N-type semiconductor layer, and heat absorption occurs at the junction where the current flows from the N-type semiconductor layer to the P-type semiconductor layer. Therefore, whether the lower surface of the Beltier element 4 is heated or cooled can be determined by reversing the directions of the drive signals supplied to the lead lines 6a and 6b. In this embodiment, when the lead wires 6a are + and 6b are - and a current is applied, the lower surface of the Beltier element 4 generates heat and the shape memory alloy 3 is heated to about 70°C, and the lead wires 6b are + and 6a. -
The applied voltage, current value, energization time, etc. are set so that when a current is applied, the lower surface of the Bertier element 4 absorbs heat and the shape memory alloy 3 is cooled to 20 to 10°C.

インク流路1aにはインク5が充満しである。The ink flow path 1a is filled with ink 5.

次にこのインクジェットプリンタヘッドの動作を説明す
る。
Next, the operation of this inkjet printer head will be explained.

第1図に示すように、引出線6a、6bに電流を流して
いない状態では、形状記憶合金3は室温(20℃とする
)状態であり、マルテンサイト変態温度は40℃である
ため、形状記憶合金3はマルテンサイト状態で、同図の
ように平板状態であり、従って蓋板2も平板状態である
As shown in FIG. 1, when no current is flowing through the lead wires 6a and 6b, the shape memory alloy 3 is at room temperature (assumed to be 20°C), and the martensitic transformation temperature is 40°C, so the shape The memory alloy 3 is in a martensite state and is in a flat plate state as shown in the figure, and therefore the cover plate 2 is also in a flat plate state.

次に第2図示のように、駆動回路7 (第1図示)によ
り、引出線6aに正電位が、また引出線6bに負電位か
与えられると、ベルチェ素子4の下面において、P型半
導体層からN型半導体層に向かって電流が流れて発熱し
、このために形状記憶合金3は70°Cに加熱されてオ
ーステナイト変態塩度50℃を超えるため、下方に弓な
りに湾曲する。
Next, as shown in the second diagram, when the drive circuit 7 (first diagram) applies a positive potential to the lead line 6a and a negative potential to the lead line 6b, a P-type semiconductor layer is applied on the bottom surface of the Bertier element 4. A current flows from the N-type semiconductor layer toward the N-type semiconductor layer and generates heat, which heats the shape memory alloy 3 to 70° C. and causes the austenite transformation salinity to exceed 50° C., so that the shape memory alloy 3 curves downward in an arched manner.

従って形状記憶合金3が固着されている蓋板2も作動凹
部1eの付近において下方に湾曲する。するとインク5
が押圧され、狭路部1dにより後方には押し戻されない
ため、インクは前方に押し出されてノズル1gより吐出
される。
Therefore, the lid plate 2 to which the shape memory alloy 3 is fixed also curves downward in the vicinity of the actuation recess 1e. Then ink 5
is pressed and is not pushed back backward by the narrow passage portion 1d, so the ink is pushed forward and ejected from the nozzle 1g.

次に第3図示のように駆動回路7により、引出線6aに
負電位が、また引出線6bに正電位が与えられると、ベ
ルチェ素子4の下面において、N型半導体層からP型半
導体層に向かって電流が流れて吸熱し、このために形状
記憶合金3は20〜10℃に冷却されてマルテンサイト
変態温度40℃以下となるため、平板状態に戻る。
Next, as shown in FIG. 3, when the drive circuit 7 applies a negative potential to the lead line 6a and a positive potential to the lead line 6b, the N-type semiconductor layer changes from the P-type semiconductor layer to the bottom surface of the Bertier element 4. A current flows toward the shape memory alloy 3, which absorbs heat, and thus the shape memory alloy 3 is cooled to 20 to 10°C, and the martensitic transformation temperature becomes 40°C or less, so that it returns to a flat plate state.

次に電流を停止すると形状記憶合金3は基塩状態となり
、前述の第1図示のように蓋板2は平板状態が維持され
る。
Next, when the current is stopped, the shape memory alloy 3 becomes a base state, and the cover plate 2 maintains a flat state as shown in the first diagram.

駆動信号に応じて以上の動作が繰り返されることにより
、記録紙にインクによる記録が行われる。
By repeating the above operations according to the drive signal, recording with ink is performed on the recording paper.

[効果コ 本発明のインクジェットプリンタヘッドは、押圧機構を
形状記憶合金及びベルチェ素子により構成したため、加
熱・冷却を瞬時に行えて応答特性を高めることが可能と
なり、速く印字を行うことが出来る。
[Effects] Since the inkjet printer head of the present invention has a pressing mechanism made of a shape memory alloy and a Beltier element, heating and cooling can be performed instantaneously to improve response characteristics, and printing can be performed quickly.

またベルチェ素子に加える電流を正逆に切り換えて発熱
・吸熱を切り換え、これを形状記憶合金に伝えるため、
極めて簡単な構成で形状記憶合金の加熱・伶却を行うこ
とが可能である。
In addition, the current applied to the Beltier element is switched between forward and reverse to switch between heat generation and heat absorption, and this is transmitted to the shape memory alloy.
It is possible to heat and cool a shape memory alloy with an extremely simple configuration.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す断面図、第2図、第3
図はその動作を説明する断面図である。 1a・・流体流路、 3・ ・形状記憶合金、 4・ ・ベルチェ素子、 5・ ・流体。 以  上 第1図 0 第2図 第3s
Figure 1 is a sectional view showing one embodiment of the present invention, Figures 2 and 3 are
The figure is a sectional view explaining the operation. 1a... Fluid flow path, 3. - Shape memory alloy, 4. - Vertier element, 5. - Fluid. Above Figure 1 0 Figure 2 3s

Claims (1)

【特許請求の範囲】 流体流路に付設された押圧機構を駆動して流体を吐出さ
せるインクジェットプリンタヘッドにおいて、 上記押圧機構が、可逆性の形状記憶合金及び上記形状記
憶合金を加熱・冷却するペルチェ素子により構成されて
いる ことを特徴とするインクジェットプリンタヘッド。
[Claims] In an inkjet printer head that drives a pressing mechanism attached to a fluid flow path to eject fluid, the pressing mechanism includes a reversible shape memory alloy and a Peltier that heats and cools the shape memory alloy. An inkjet printer head comprising an element.
JP34384789A 1989-12-28 1989-12-28 Ink jet printer head Pending JPH03202351A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34384789A JPH03202351A (en) 1989-12-28 1989-12-28 Ink jet printer head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34384789A JPH03202351A (en) 1989-12-28 1989-12-28 Ink jet printer head

Publications (1)

Publication Number Publication Date
JPH03202351A true JPH03202351A (en) 1991-09-04

Family

ID=18364699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34384789A Pending JPH03202351A (en) 1989-12-28 1989-12-28 Ink jet printer head

Country Status (1)

Country Link
JP (1) JPH03202351A (en)

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6306671B1 (en) * 1997-07-15 2001-10-23 Silverbrook Research Pty Ltd Method of manufacture of a shape memory alloy ink jet printer
US6557977B1 (en) 1997-07-15 2003-05-06 Silverbrook Research Pty Ltd Shape memory alloy ink jet printing mechanism
US6786574B2 (en) 1997-07-15 2004-09-07 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a chamber that is volumetrically altered for fluid ejection
US6824252B2 (en) 1997-07-15 2004-11-30 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a nozzle guard
US6986202B2 (en) 1997-07-15 2006-01-17 Silverbrook Research Pty Ltd. Method of fabricating a micro-electromechanical fluid ejection device
US7125103B2 (en) 1997-07-15 2006-10-24 Silverbrook Research Pty Ltd Fluid ejection device with a through-chip micro-electromechanical actuator
US7219982B2 (en) 1997-07-15 2007-05-22 Silverbrook Research Pty Ltd Printer nozzle for ejecting ink
US7234795B2 (en) 1997-07-15 2007-06-26 Silverbrook Research Pty Ltd Inkjet nozzle with CMOS compatible actuator voltage
US7293855B2 (en) 1997-07-15 2007-11-13 Silverbrook Research Pty Ltd Inkjet nozzle with ink supply channel parallel to drop trajectory
US7328975B2 (en) 1997-07-15 2008-02-12 Silverbrook Research Pty Ltd Injet printhead with thermal bend arm exposed to ink flow
US7334874B2 (en) 1997-07-15 2008-02-26 Silverbrook Research Pty Ltd Inkjet nozzle chamber with electrostatically attracted plates
US7360871B2 (en) 1997-07-15 2008-04-22 Silverbrook Research Pty Ltd Inkjet chamber with ejection actuator between inlet and nozzle
US7393083B2 (en) 1997-07-15 2008-07-01 Silverbrook Research Pty Ltd Inkjet printer with low nozzle to chamber cross-section ratio
US7401884B2 (en) 1997-07-15 2008-07-22 Silverbrook Research Pty Ltd Inkjet printhead with integral nozzle plate
US7410243B2 (en) 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with resiliently biased ejection actuator
US7410250B2 (en) 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with supply duct dimensioned for viscous damping
US7472984B2 (en) 1997-07-15 2009-01-06 Silverbrook Research Pty Ltd Inkjet chamber with plurality of nozzles
US7475965B2 (en) 1997-07-15 2009-01-13 Silverbrook Research Pty Ltd Inkjet printer with low droplet to chamber volume ratio
US7497555B2 (en) 1998-07-10 2009-03-03 Silverbrook Research Pty Ltd Inkjet nozzle assembly with pre-shaped actuator
US7527357B2 (en) 1997-07-15 2009-05-05 Silverbrook Research Pty Ltd Inkjet nozzle array with individual feed channel for each nozzle
US7578582B2 (en) 1997-07-15 2009-08-25 Silverbrook Research Pty Ltd Inkjet nozzle chamber holding two fluids
US7591539B2 (en) 1997-07-15 2009-09-22 Silverbrook Research Pty Ltd Inkjet printhead with narrow printing zone
US7628468B2 (en) 1997-07-15 2009-12-08 Silverbrook Research Pty Ltd Nozzle with reciprocating plunger
US7669970B2 (en) 1997-07-15 2010-03-02 Silverbrook Research Pty Ltd Ink nozzle unit exploiting magnetic fields
US7708372B2 (en) 1997-07-15 2010-05-04 Silverbrook Research Pty Ltd Inkjet nozzle with ink feed channels etched from back of wafer
US7712872B2 (en) 1997-07-15 2010-05-11 Silverbrook Research Pty Ltd Inkjet nozzle arrangement with a stacked capacitive actuator
US7753491B2 (en) 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Printhead nozzle arrangement incorporating a corrugated electrode
US7753469B2 (en) 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Inkjet nozzle chamber with single inlet and plurality of nozzles
US7775634B2 (en) 1997-07-15 2010-08-17 Silverbrook Research Pty Ltd Inkjet chamber with aligned nozzle and inlet
US7784902B2 (en) 1997-07-15 2010-08-31 Silverbrook Research Pty Ltd Printhead integrated circuit with more than 10000 nozzles
US8117751B2 (en) 1997-07-15 2012-02-21 Silverbrook Research Pty Ltd Method of forming printhead by removing sacrificial material through nozzle apertures
US8366243B2 (en) 1997-07-15 2013-02-05 Zamtec Ltd Printhead integrated circuit with actuators proximate exterior surface

Cited By (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7540592B2 (en) 1997-07-15 2009-06-02 Silverbrook Research Pty Ltd Micro-electromechanical nozzle assembly with an arcuate actuator
US7404625B2 (en) 1997-07-15 2008-07-29 Silverbrook Research Pty Ltd Ink jet nozzle arrangement having paddle forming a portion of a wall
US6786574B2 (en) 1997-07-15 2004-09-07 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a chamber that is volumetrically altered for fluid ejection
US6824252B2 (en) 1997-07-15 2004-11-30 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a nozzle guard
US6938992B2 (en) 1997-07-15 2005-09-06 Silverbrook Research Pty Ltd Nozzle arrangement with an electrically heated actuator
US6986202B2 (en) 1997-07-15 2006-01-17 Silverbrook Research Pty Ltd. Method of fabricating a micro-electromechanical fluid ejection device
US7066575B2 (en) 1997-07-15 2006-06-27 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a buckle-resistant actuator
US7086720B2 (en) 1997-07-15 2006-08-08 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device that incorporates a shape memory alloy based actuator
US7125103B2 (en) 1997-07-15 2006-10-24 Silverbrook Research Pty Ltd Fluid ejection device with a through-chip micro-electromechanical actuator
US7125102B2 (en) 1997-07-15 2006-10-24 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device with guided actuator movement
US7147792B2 (en) 1997-07-15 2006-12-12 Silverbrook Research Pty Ltd Method of fabricating inkjet nozzle chambers
US7175774B2 (en) 1997-07-15 2007-02-13 Silverbrook Research Pty Ltd Method of fabricating inkjet nozzles
US7178903B2 (en) 1997-07-15 2007-02-20 Silverbrook Research Pty Ltd Ink jet nozzle to eject ink
US7192119B2 (en) 1997-07-15 2007-03-20 Silverbrook Research Pty Ltd Printhead nozzle arrangement with a micro-electromechanical shape memory alloy based actuator
US7219982B2 (en) 1997-07-15 2007-05-22 Silverbrook Research Pty Ltd Printer nozzle for ejecting ink
US7553001B2 (en) 1997-07-15 2009-06-30 Silverbrook Research Pty Ltd Inkjet printhead with laterally reciprocating paddle
US7252366B2 (en) 1997-07-15 2007-08-07 Silverbrook Research Pty Ltd Inkjet printhead with high nozzle area density
US7255424B2 (en) 1997-07-15 2007-08-14 Silverbrook Research Pty Ltd Ink nozzle
US7275811B2 (en) 1997-07-15 2007-10-02 Silverbrook Research Pty Ltd High nozzle density inkjet printhead
US7284837B2 (en) 1997-07-15 2007-10-23 Silverbrook Research Pty Ltd Fluid ejection device with micro-electromechanical fluid ejection actuators
US7287834B2 (en) 1997-07-15 2007-10-30 Silverbrook Research Pty Ltd Micro-electromechanical ink ejection device with an elongate actuator
US7293855B2 (en) 1997-07-15 2007-11-13 Silverbrook Research Pty Ltd Inkjet nozzle with ink supply channel parallel to drop trajectory
US7328975B2 (en) 1997-07-15 2008-02-12 Silverbrook Research Pty Ltd Injet printhead with thermal bend arm exposed to ink flow
US7334874B2 (en) 1997-07-15 2008-02-26 Silverbrook Research Pty Ltd Inkjet nozzle chamber with electrostatically attracted plates
US7350903B2 (en) 1997-07-15 2008-04-01 Silverbrook Research Pty Ltd Inkjet printhead with common chamber and actuator material
US7360871B2 (en) 1997-07-15 2008-04-22 Silverbrook Research Pty Ltd Inkjet chamber with ejection actuator between inlet and nozzle
US7364270B2 (en) 1997-07-15 2008-04-29 Silverbrook Research Pty Ltd Fluid ejection device having an elongate micro-electromechanical actuator
US7387365B2 (en) 1997-07-15 2008-06-17 Silverbrook Research Pty Ltd Nozzle for an inkjet printer incorporating a plunger assembly
US7393083B2 (en) 1997-07-15 2008-07-01 Silverbrook Research Pty Ltd Inkjet printer with low nozzle to chamber cross-section ratio
US7398597B2 (en) 1997-07-15 2008-07-15 Silverbrook Research Pty Ltd Method of fabricating monolithic microelectromechanical fluid ejection device
US7401884B2 (en) 1997-07-15 2008-07-22 Silverbrook Research Pty Ltd Inkjet printhead with integral nozzle plate
US7401900B2 (en) 1997-07-15 2008-07-22 Silverbrook Research Pty Ltd Inkjet nozzle with long ink supply channel
US6306671B1 (en) * 1997-07-15 2001-10-23 Silverbrook Research Pty Ltd Method of manufacture of a shape memory alloy ink jet printer
US7410243B2 (en) 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with resiliently biased ejection actuator
US7410250B2 (en) 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with supply duct dimensioned for viscous damping
US7416280B2 (en) 1997-07-15 2008-08-26 Silverbrook Research Pty Ltd Inkjet printhead with hollow drop ejection chamber formed partly of actuator material
US7448728B2 (en) 1997-07-15 2008-11-11 Silverbrook Research Pty Ltd Nozzle assembly having a sprung electromagnetically operated plunger
US7472984B2 (en) 1997-07-15 2009-01-06 Silverbrook Research Pty Ltd Inkjet chamber with plurality of nozzles
US7527357B2 (en) 1997-07-15 2009-05-05 Silverbrook Research Pty Ltd Inkjet nozzle array with individual feed channel for each nozzle
US8366243B2 (en) 1997-07-15 2013-02-05 Zamtec Ltd Printhead integrated circuit with actuators proximate exterior surface
US7475965B2 (en) 1997-07-15 2009-01-13 Silverbrook Research Pty Ltd Inkjet printer with low droplet to chamber volume ratio
US6557977B1 (en) 1997-07-15 2003-05-06 Silverbrook Research Pty Ltd Shape memory alloy ink jet printing mechanism
US7234795B2 (en) 1997-07-15 2007-06-26 Silverbrook Research Pty Ltd Inkjet nozzle with CMOS compatible actuator voltage
US7566113B2 (en) 1997-07-15 2009-07-28 Silverbrook Research Pty Ltd Inkjet nozzle incorporating serpentine actuator
US7568788B2 (en) 1997-07-15 2009-08-04 Silverbrook Research Pty Ltd Printhead with barrier at chamber inlet
US7578582B2 (en) 1997-07-15 2009-08-25 Silverbrook Research Pty Ltd Inkjet nozzle chamber holding two fluids
US7591539B2 (en) 1997-07-15 2009-09-22 Silverbrook Research Pty Ltd Inkjet printhead with narrow printing zone
US7628468B2 (en) 1997-07-15 2009-12-08 Silverbrook Research Pty Ltd Nozzle with reciprocating plunger
US7635178B2 (en) 1997-07-15 2009-12-22 Silverbrook Research Pty Ltd Nozzle apparatus for an inkjet printhead with a solenoid piston
US7658473B2 (en) 1997-07-15 2010-02-09 Silverbrook Research Pty Ltd Inkjet printhead with arcuate actuator path
US7669970B2 (en) 1997-07-15 2010-03-02 Silverbrook Research Pty Ltd Ink nozzle unit exploiting magnetic fields
US7669971B2 (en) 1997-07-15 2010-03-02 Silverbrook Research Pty Ltd Inkjet printer with low nozzle to chamber cross-section ratio
US7699440B2 (en) 1997-07-15 2010-04-20 Silverbrook Research Pty Ltd Inkjet printhead with heater element close to drive circuits
US7703890B2 (en) 1997-07-15 2010-04-27 Silverbrook Research Pty Ltd. Printhead with backflow resistant nozzle chambers
US7708381B2 (en) 1997-07-15 2010-05-04 Silverbrook Research Pty Ltd Fluid ejection device with resistive element close to drive circuits
US7708372B2 (en) 1997-07-15 2010-05-04 Silverbrook Research Pty Ltd Inkjet nozzle with ink feed channels etched from back of wafer
US7712872B2 (en) 1997-07-15 2010-05-11 Silverbrook Research Pty Ltd Inkjet nozzle arrangement with a stacked capacitive actuator
US7717542B2 (en) 1997-07-15 2010-05-18 Silverbrook Research Pty Ltd Inkjet chamber with plurality of nozzles and shared actuator
US7731334B2 (en) 1997-07-15 2010-06-08 Silverbrook Research Pty Ltd Inkjet nozzle utilizing electrostatic attraction between parallel plates
US7731336B2 (en) 1997-07-15 2010-06-08 Silverbrook Research Pty Ltd Inkjet nozzle arrangement
US7753491B2 (en) 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Printhead nozzle arrangement incorporating a corrugated electrode
US7753469B2 (en) 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Inkjet nozzle chamber with single inlet and plurality of nozzles
US7753492B2 (en) 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection mechanism having a shape memory alloy actuator
US7758166B2 (en) 1997-07-15 2010-07-20 Silverbrook Research Pty Ltd Inkjet nozzle with paddle layer sandwiched between first and second wafers
US7771018B2 (en) 1997-07-15 2010-08-10 Silverbrook Research Pty Ltd Ink ejection nozzle arrangement for an inkjet printer
US7775632B2 (en) 1997-07-15 2010-08-17 Silverbrook Research Pty Ltd Nozzle arrangement with expandable actuator
US7775634B2 (en) 1997-07-15 2010-08-17 Silverbrook Research Pty Ltd Inkjet chamber with aligned nozzle and inlet
US7784902B2 (en) 1997-07-15 2010-08-31 Silverbrook Research Pty Ltd Printhead integrated circuit with more than 10000 nozzles
US7794053B2 (en) 1997-07-15 2010-09-14 Silverbrook Research Pty Ltd Inkjet printhead with high nozzle area density
US7815290B2 (en) 1997-07-15 2010-10-19 Silverbrook Research Pty Ltd Inkjet printhead with paddle for ejecting ink from one of two nozzles
US7905574B2 (en) 1997-07-15 2011-03-15 Silverbrook Research Pty Ltd Method of fabricating resistor and proximate drive transistor for a printhead
US7914119B2 (en) 1997-07-15 2011-03-29 Silverbrook Research Pty Ltd Printhead with columns extending across chamber inlet
US7934806B2 (en) 1997-07-15 2011-05-03 Silverbrook Research Pty Ltd Inkjet nozzle incorporating piston actuator
US7934808B2 (en) 1997-07-15 2011-05-03 Silverbrook Research Pty Ltd Inkjet printhead with nozzle chambers each holding two fluids
US7934797B2 (en) 1997-07-15 2011-05-03 Silverbrook Research Pty Ltd Printhead with reciprocating coils
US7950774B2 (en) 1997-07-15 2011-05-31 Silverbrook Research Pty Ltd Inkjet printhead with narrow printing zone
US7950775B2 (en) 1997-07-15 2011-05-31 Silverbrook Research Pty Ltd Printhead integrated circuit having glass nozzle chambers
US7950773B2 (en) 1997-07-15 2011-05-31 Silverbrook Research Pty Ltd Nozzle with magnetically actuated reciprocating plunger
US7959263B2 (en) 1997-07-15 2011-06-14 Silverbrook Research Pty Ltd Printhead integrated circuit with a solenoid piston
US8117751B2 (en) 1997-07-15 2012-02-21 Silverbrook Research Pty Ltd Method of forming printhead by removing sacrificial material through nozzle apertures
US7497555B2 (en) 1998-07-10 2009-03-03 Silverbrook Research Pty Ltd Inkjet nozzle assembly with pre-shaped actuator

Similar Documents

Publication Publication Date Title
JPH03202351A (en) Ink jet printer head
US4532530A (en) Bubble jet printing device
JP3155548B2 (en) Temperature control device for inkjet printhead
TWI325820B (en) Printhead having embedded memory device
US5622897A (en) Process of manufacturing a drop-on-demand ink jet printhead having thermoelectric temperature control means
EP0124312A2 (en) Resistor structures for thermal ink jet printers
JPH0365349A (en) Ink jet head
EP0665106A2 (en) Ink jet printing machine
CN109624509B (en) Printing method based on fluid jet chip
US6193349B1 (en) Ink jet print cartridge having active cooling cell
JPH1058691A (en) Jetting unit and jetting method for ink jet printer
JP5103951B2 (en) Driving device and droplet discharge head
US7988250B2 (en) Continuous printing using temperature lowering pulses
US6412919B1 (en) Transistor drop ejectors in ink-jet print heads
JP3862587B2 (en) Inkjet recording head
US20080106578A1 (en) Thermal inkjet printhead
JPH064328B2 (en) Inkjet recording head
JP3467030B2 (en) Ink jet recording head and ink jet recording apparatus
JPH0551461B2 (en)
JP2002046282A (en) Liquid drop ejection head and microactuator
US6422826B1 (en) Fluid pump and method
JPS6317053A (en) Ink jet recorder
JP3812058B2 (en) Inkjet recording head
JPH09226102A (en) Recorder
JP3637388B2 (en) Cooling method and apparatus using Peltier effect