JPH03199008A - Blade stretching device - Google Patents

Abstract

PURPOSE:To prolong the service life of a blade and to reduce the number of times of dressing by equipping an indexing part which detects a stretching bolt equipped to a tension ring, a thread fastening part which rotatably controls screwing of the streching bolt and a high-precision sensor part which detects displacement in the inner diameter of the inner diameter saw slicing blade of the blade. CONSTITUTION:The position of a screw on the outer circumference of a tension ring 1 is automatically indexed by the bolt detecting sensor 4 of an index part equipped to the thread fasteners 3, 3 of a thread fastening part. Further, the inner diameter is measured by touching a displacement gage sensor 5 in a high-precision sensor part to the inner circumferential knife 6' of a blade. The electric signal of the value of the inner diameter is outputted to an arithmetic display 13. Then, while actual value is compared with the indicated value, the thread fastner 3' is driven and stretching due to a pusher screw 8 is performed. When the screw 8 is rotated until the inner diameter of the inner circumferential knife 6' reaches the indicated stretching amount, the upper adjacent screw 8 is rotated. The position of the screw 8 is indexed together with rotation of the tension ring 1 due to a driving roller 2. This operation is repeated at every specified or indicated amount and the inner diameter of the blade 6 is approached to complete roundness.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an automatic tensioning device and a blade tensioning method for an internal slicing machine blade used for cutting wafer materials and highly hard substances such as ceramics.

[Prior technology] In order to cut parts such as wafers, lenses, and filters one by one in the production stage of semiconductor wafers and precision equipment parts, a high-tensile steel blade with diamond abrasive grains as the inner peripheral edge is used. Used in circumferential slicing machines. A blade attached between a tension ring and a limb ring of a slicing machine is fixed by a clamp screw arranged in an annular manner, and as the pressure screw is pushed in, the pressure ring is projected and the blade is tensioned. In order to make the inner diameter of the blade as close to a perfect circle as possible, frequently check the amount of tension while measuring the inner cutting edge of the blade with a dial gauge or microscope, and repeat the process of tightening each pressure shim one by one with a hex wrench over and over again. Since the roundness, which indicates the center runout of the inner peripheral blade, is less than 20μ, considerable skill is required to tension the blade, and the tensioning work can be done once per time.
The time required for 00μ praise is too long.

[Problems to be Solved by the Invention] The roundness of the high-tensile steel plate must be adjusted to 20 μm or less by increasing the tension by a specified amount.
Establish a device for tensioning. - 100 was the limit due to Junhari
We will significantly raise the micrometer level and create equipment with high work efficiency. If there is any inaccuracy, it will not be possible to achieve the uniformity of blade tension required to maintain the inner diameter roundness, and if it is even slightly outside the specified tolerance, the life of the blade will be shortened, and it will be necessary to adjust or sharpen the inner cutting edge. Wipe out the traditional problems of increasing number of dresses.

[Means for Solving the Problems] The present invention which solves the above-mentioned problems is based on the high tension n! In order to achieve highly accurate roundness and specified tensioning of the inner diameter of the blade made of No. 4, the sensor of the high-precision blade inner diameter displacement detection sensor unit is placed at the inner cutting edge of the blade, and the sensor is placed at approximately ten points at equal intervals in sequence. While detecting the state of tensioning displacement of the inner cutting edge, the tensioning bolt provided on the tension ring is detected by the indexing part and the screw tightening part is operated to tighten the tensioning bolt to a constant torque. The blade is rotated to uniformly tension the blade, and for these sequential operations, the tension ring of the internal blade slicing machine is rotated by the joint rotation of the rotating part, which is free to move in and out of the slicing machine.

In addition, the tensioning displacement is detected as an electrical signal using a displacement meter located on the inner edge of the blade, and the tensioning progress can be checked while viewing the display that displays the entire tensioning condition, allowing the required tensioning amount and roundness to be determined. The tensioning method, which advances the tensioning work while comparing the results, completes efficient tensioning of uniform high-strength steel blades.

[Operations and Examples] As shown in FIGS. 1(a) and 1(b), in order to tension the blade (6) on the inner peripheral blade slicing machine (B), a blade tensioning device (A) is installed in front of the inner peripheral blade slicing machine (B). Set up. The blade (6) is fixed with clamp screws (9) located at equal intervals on the outer periphery of the tension ring (1) located in the blade holding part (12) of the internal blade slicing machine (B). Attach the pressure neck 8).

A blade tensioning device (A) is attached to the tension ring (1).
be close to each other. While raising the driving roller (2) of the rotating part and rotating the tension ring (1) in contact with it,
The position of the above screw on the outer periphery of the tension ring (1) is automatically determined by the bolt detection sensor (4) in the indexing section provided in the screw tightening machine (3 and 3゛) in the screw tightening section, and Turn the tension ring (1) around while sequentially tightening the screws (8). At this time, the tightening machine (3), which controls high-speed torque in one rotation, tightens to the specified torque, and the blade (6) is tightened to the blade holding part (12>) between the tension ring (1) and the limb ring (11). As shown in Fig. 2, measure the inner diameter by applying the displacement meter sensor (5) of the high-precision sensor section to the blade inner peripheral edge (6') that is perpendicular to the center line C passing through the pressure screw (8> position). , outputs the inner diameter value electric signal obtained from the displacement sensor (5) to the calculation display (] 3).This calculation display (13) displays the overall amount of tension at each measurement point on the circuit and displays its value. Make sure to check the uniformity, and display and compare the required tension amount, actual tension amount, specified tension amount, and roundness.
The system displays the results of precise calculations that take into account the degree of empirical adjustment specific to each point. While comparing the indicated value and the actual value, precise rotation control at high torque and low speed is performed to drive the thread wringer (4), and tensioning by the pressure thread 8) is performed. The pressure ring (lO) pulls the play l'' (6) into the groove of the ring ring (11) (
Figure 3). When the pressure neck 8) is rotated until the inner diameter of the inner circumferential blade (6°) reaches the specified tension amount, the pressure neck 8) next to -L is rotated in turn. As the tension ring (1) is rotated by the drive roller (2) of the rotating part, the above sequential operations are performed while indexing the position of the pressure neck 8), and are repeated according to the specified or instructed amount to make the inner diameter of the blade (6) a perfect circle. getting closer to.

(Experimental Example) The graphs in FIGS. 4(a) and 4(b) show the state in which the degree of tension suppression specific to each point on the circuit is adjusted according to empirical rules. In this graph, the solid line is the value after tensioning the inner peripheral blade,
The dotted line represents the set value or indicated value, the -dot chain line represents the value before tensioning, and the two-dot chain line represents the ideal value (ideal circle).

The amount of tension at each point, which varies depending on the direction, requires precise tension according to the indicated value. Graph (a) showing the transition of the inner peripheral edge (6') is from the start to the third and 240
This is a case where tensioning set values between 0 and 320° are recorded, and the relationship between the set values and the tensioning instruction value differs slightly at each point. Graph (b) shows the case where the set value is constant at all pressure tensions 8), and there is a large deviation between the set value and the tensioning result value between 140° and 300°. Inner peripheral blade (6
゛) Since the previous tensioning progress differs depending on the direction, in order to improve the roundness, it is necessary to follow the calculated value of the accurate instruction amount while checking the tensioning state on the display (13).

(Application example 1) Displacement meter (5
), the device (A) can be used as a blade roundness measuring device when converting the measured value of the inner diameter into an electrical signal and displaying it on the calculation display (13). When the blade inner diameter sensor (5) is brought into contact with the blade surface, it can also be used as a highly accurate measuring device for the flatness of the blade surface.

(Application example 2) The pressure ring rotating part (2
), it can also be used as a semi-automated device that allows you to check the results of manual tensioning operations using this measured and displayed data.

Since you can know in advance how the inner cutting edge of the blade will change during tensioning, you can accurately perform work while predicting the degree of pressure tightening.

[Effects of the Invention] The blade tensioning device of the present invention can accurately check the entire tensioning amount while accurately measuring the blade inner diameter using a high-precision sensor unit that detects the inner diameter displacement of the blade, and can achieve high torque and low speed. Precise control of rotation allows the tightening part to tighten the pressure screw according to slightly different tensioning amounts at each point on the circumference, achieving highly accurate tensioning. Accurately suppresses variations in blade tension and the roundness of the inner peripheral blade, allows the inner peripheral blade with high tensioning accuracy to be set with high efficiency, improves the cutting accuracy of the internal peripheral blade slicing machine, and improves the cutting surface. It can also be made very smooth, flat, and uniform.

Furthermore, the overall roundness and total tensioning amount obtained from the data of the measured blade inner diameter position are displayed on the calculation display and saved in the recorder, and it is possible to not only tension the work according to the accurate data, but also predict the slicer's cut surface and the next one. Useful as a reference for achieving roundness in blade tensioning sets. Compared to using a hexagonal wrench when fixing or tensioning the blade to the internal blade slicing machine, the use of an automatic screw driver with torque control saves a lot of labor and time. Furthermore, highly accurate blade tensioning extends the life of the blade, reduces the number of dressings, and further improves the quality of the cut surface.

[Brief explanation of drawings]

Fig. 1(a) is a perspective view of the blade tensioning device installed in the internal blade slicing machine, Fig. 1(b) is a side view of the blade tensioning device, Fig. 2 is an enlarged view of the tensioning part, and Fig. 3
The figure shows the blade tensioning mechanism, and FIGS. 4(a) and 4(b) show the experimental results when the amount of tension was partially suppressed and when it was kept constant. (A) (B) (1) (2) (3) (3゜(4) (5) (6) Blade tensioning device Inner peripheral blade slicing machine Tension ring Drive roller mounting screw tightening machine) For tensioning Tightening machine bolt detection sensor High precision blade inner diameter displacement sensor Blade (6') Inner peripheral blade (7) Drive motor (8) Pressure screw (9> Clamp screw (10) Pressure ring (11) Limbling (12) Blade holding Part (13) Calculation display

Claims (2)

[Claims] (1) A rotating part that rotates the tension ring of the internal blade slicing machine, an indexing part that detects the tensioning bolt provided on the tension ring, and a screw tightening part that controls the threading of the tensioning bolt with torque or rotation. A blade tensioning device characterized by having a high-precision sensor section that detects the inner diameter displacement of an inner circumferential blade. (2) A displacement meter is placed on the inner edge of the blade attached to the tension ring of the inner edge slicing machine, and the inner diameter of the blade is detected using an electrical signal, and the condition of the inner diameter of the blade is displayed on the display as shown above. A blade tensioning method, characterized in that a tensioning instruction is issued based on the tensioning amount and roundness of the blade displayed on the display.