JPH03196979A - Three shaft mobile device - Google Patents

Abstract

PURPOSE:To reduce the inertial mass in case of shifting a moving member by attaching those of first, second and third driving means to each base, and shifting each moving member via a transfer means. CONSTITUTION:A first driving means 42 shifting a first moving member 22, a second driving means 44 shifting a second moving member 24 and a third driving means 46 shifting a third moving member 34 are attached to each of bases 12, 14. With this formation, when the first moving member 22 is shifted, the second driving means 44 and the third driving means 46 are not shifted together with the first moving member 22, so that the inertial mass in case of moving the first moving member 22 becomes lessened. Consequently, the first moving member 22 can be shifted at a high speed. In addition, even in the case where the second moving member 24 is shifted, the third driving means 46 is not shifted together with the second moving member 24, thus the inertial mass in case of the second moving member 24 shifted becomes lessened as well.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a three-axis moving device.

[Conventional technology]

A conventional three-axis moving device is constructed as shown in FIG. That is, the base 80 is provided with a guide groove 80A along the longitudinal direction of the base 80. Guide groove 80A
A first moving member 82 is supported so as to be movable along the longitudinal direction of the base 80 (hereinafter referred to as the direction along the X-axis). Further, a first driving means 84 is attached to one end of the base 80. The first driving means 84 drives a transmission means such as a gear train (not shown), and can move the first moving member 82 in the direction along the X-axis.

Further, the first moving member 82 is provided with a guide groove 82A along the longitudinal direction of the first moving member 82. A second moving member 86 is supported in the guide groove 82A so as to be movable along the longitudinal direction of the first moving member 82 (hereinafter referred to as the direction along the Y-axis). Further, a second driving means 88 is attached to one end of the first moving member 82. Second
The driving means 88 drives a transmission means such as a gear train (not shown), and can move the second moving member 86 in the direction along the Y-axis.

Further, the second moving member 86 is provided with a guide groove 86A along the longitudinal direction of the second moving member 86. A third moving member 90 is supported in the guide groove 86A so as to be movable along the longitudinal direction of the second moving member 86 (hereinafter referred to as the direction along the Z-axis). Further, a third driving means 92 is attached to one end of the second moving member 86. Third
The driving means 92 drives a transmission means such as a gear train (not shown), and can move the third moving member 90 in the direction along the Z-axis. Further, each of the first to third driving means is constituted by a stepping motor or the like, and is connected to a control device (not shown), and the driving thereof is controlled by the control device.

The three-axis moving device can perform various processes by attaching a device to the third moving member 90 according to the purpose of use. For example, if a suction device for sucking an object is attached to the third moving member 90, the object can be transported. That is, the control device moves the third moving member 90 to the position where the transported object is placed. Next, the suction device is activated to suction the object to be transported. Next, the third moving member is moved to the target position and the suction of the suction device is stopped. Thereby, the object to be transported can be transported to the target position.

[Problem to be solved by the invention]

However, in the conventional three-axis moving device, when moving the first moving member 82 in the direction along the X axis with respect to the base 80, the first moving member 82, the second moving member 8
6, third moving member 90, second driving means 88 and third
The driving means 92 move together. That is, a second driving means 88 and a third driving means 92 are attached to the first moving member 82 and the second moving member 86, respectively, and each driving means moves together with the moving member. Therefore, the inertial mass required to move the first moving member 82 is large, making it difficult to move the first moving member 82 at high speed.

Also, the second moving member 86 is Y relative to the first moving member.
Also when moving in the direction along the axis, the second moving member 86, the third moving member 90, and the third driving means 9
The two move as one.

In this case as well, the inertial mass required to move the second moving member 86 is large, as described above, and it is difficult to move the second moving member 86 at high speed.

Furthermore, when each drive means is constituted by a motor such as a stepping motor, it is difficult to route wiring such as a power supply line because the motor moves.

The present invention has been made in consideration of the above facts, and an object thereof is to obtain a three-axis moving device capable of moving a moving member at high speed.

[Means to solve the problem]

In order to achieve the above object, a three-axis moving device according to the present invention includes a base, a first moving member that is attached to the base so as to be movable with respect to the base and is moved by a first driving means, and a first a second moving member that is movably attached to the first moving member and moved by a second driving means; and a second moving member that is movably attached to the second moving member with respect to the second moving member; and a third moving member moved by a third driving means,
The first drive means, the second drive means, and the third drive means are each attached to a base, and each of the moving members is moved via a transmission means.

[Effect]

In the present invention, the first driving means for moving the first moving member, the second driving means for moving the second moving member,
and a third driving means for moving the third moving member, each of which is attached to the base.

As a result, when moving the first moving member, the second driving means and the third driving means are not moved together with the first moving member, and the inertial mass when moving the first moving member is is smaller than before. Therefore, the first moving member can be moved at high speed.

Also, when moving the second moving member, the third driving means is not moved together with the second moving member, and the inertial mass when moving the second moving member is lower than that of the conventional one. Since the second moving member can be moved at high speed, the second moving member can be moved quickly.

Furthermore, since each drive means is not moved relative to the base due to movement of each moving member, if the first to third drive means are configured with a motor such as a stepping motor, wiring such as a power supply line is not necessary. It does not need to be moved, making it easier to design wiring, etc.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 shows a three-axis moving device 10 according to the present invention. The three-axis moving device 10 has a pair of base members 12 and 14 that have a substantially U-shaped cross section and extend in the longitudinal direction. The pair of base members 12, 14 are arranged such that openings having substantially U-shaped cross sections face each other and are substantially parallel to each other in the longitudinal direction. A plate member 16 is fixed to one end of the base member 12.14 with a hook. Also,
As shown in FIG. 2, a leg 18.20 is attached to the underside of one end of each of the base members 12.14 to which the plate 16 is attached. A plate material 21 is fixed to the lower side of the legs 18 and 20 with a hook. Legs 18.20 and plates 16
．． 21 supports the base member 12.14 such that the distance between the base members 12 and 14 is constant over the longitudinal direction of the base member 12.14. Legs 18.
A rotatable work table 76 is installed at the base of 20. As shown in FIGS. 2 and 3, the work table 76 has an object 7 to be transported by the three-axis moving device 10
9A and 79B are placed.

A first moving member 22 is suspended between the base member 12 and the base member 14. The first moving member 22 has a substantially U-shaped cross section and is formed to extend in the longitudinal direction. The first moving member 22 is moved in the direction indicated by the arrow in FIG. 1 from the position shown in FIG. 1 to the position C shown by the imaginary line in FIG. It is supported so as to be movable in the B direction (hereinafter referred to as the direction along the X axis).

As shown in FIG. 1, a second moving member 24 is arranged on the side of the first moving member 22. As shown in FIG. Second moving member 2
4 is a spline shaft 56 and a ball screw 5, which will be described later.
8, the first movable member 22 is moved in the direction of the arrow F and the direction of the arrow G in FIG. movably supported).

As shown in FIGS. 2 and 3, two shafts 26 and 28, which are arranged substantially parallel to each other, pass through the second moving member 24, respectively. A support member 30.32 is attached to both ends of each of the two shafts 26.28. The two shafts 26.28 and the support member 30.32 constitute a third moving member 34. The third moving member 34 is
Until the support member 30 comes into contact with the upper surface of the second moving member 24 from the position shown in FIGS. 2 and 3, the arrow H direction in FIG. ). A shaft 36 is attached to the lower surface of the support member 32, and a suction cup 38 is attached to the tip of the shaft 36. The suction cups 3°, 8 are connected to a suction device 40 (see FIG. 5).

Further, as shown in FIG. 1, stepping motors 42 and 44 are attached to the base member 12, and a stepping motor 46 is attached to the base member 14.

The stepping motor 42 is used as a driving means for the first moving member 22, and the stepping motor 44 is used as a driving means for the second moving member 2.
The stepping motor 46 is used as a driving means for the third moving member 34.

As shown in FIG. 4, the base member 12 has a spline shaft 4 having a rectangular cross section and extending in the longitudinal direction of the base.
8, and a ball screw 50 which is threaded on its outer periphery and extends in the longitudinal direction of the base. A bevel gear 52A is attached to the tip of the drive shaft of the Stella Big motor 42. A bevel gear 52B is attached to the ball screw 50 at a position corresponding to the bevel gear 52A, and meshes with the bevel gear 52A. 'A moving block 54 protruding from the first moving member 22 is fixed to one end of the second moving member 22 on the base member 12 side. The moving block 54 has two holes 54A and 54B. Hole 5
4A is penetrated by a spline shaft 48. Hole 5
The inner diameter of the spline shaft 4A is larger than the outer diameter of the spline shaft 48.

A female thread corresponding to the ball screw 50 is cut on the inner peripheral surface of the hole 54B, and the ball screw 50 is screwed into the hole 54B. Therefore, when the drive shaft of the stepping motor 42 rotates, the ball screw 50 is rotated, and the moving block 54 and the first moving member 22 are moved in the direction along the X-axis.

A bevel gear 52C is attached to the tip of the drive shaft of the stepping motor 44. A bevel gear 52D is located on the spline shaft 48 at a position corresponding to the bevel gear 52C.
is attached and meshes with the bevel gear 52C. The spline shaft 48 includes the spline shaft 4
Bevel gear 5 provided with a rectangular hole corresponding to the cross section of 8.
2E is inserted. The bevel gear 52E is movable in the longitudinal direction of the spline shaft 48, that is, in the direction along the X axis, and when the first moving member 22 is moved, a guide (not shown) is projected from the first moving member 22. It moves integrally with the first moving member 22 while being guided by the member. The first moving member 22 is the spline shaft 5
6 and a ball screw 50. ball screw 50
A bevel gear 52F is attached to the tip on the zero base member 12 side, and the bevel gear 52F meshes with the bevel gear 52E. A moving block 60 that protrudes toward the first moving member 22 is fixed to the second moving member 24 . The moving block 60 has two holes 60A and 60B. The spline shaft 56 passes through the hole 60A. The inner diameter of the hole 60A is larger than the outer diameter of the spline shaft 56. A female thread corresponding to the ball screw 58 is cut on the inner peripheral surface of the hole 60B.
8 are screwed together. For this reason, the stepping motor 44
When the drive shaft rotates, the spline shaft 48 is rotated, and the rotational force is transmitted to the ball screw 58 via the bevel gears 52E and 52F, and the ball screw 58 is rotated.
The moving block 60 and the second moving member 24 are moved in the direction along the Y axis.

A bevel gear 5 is attached to the tip of the drive shaft of the Stella Pig motor 46.
2G is installed. Base member 14 accommodates splined shaft 62. Spline shaft 62
The bevel gear 52 is located at the position corresponding to the bevel gear 52G.
H is attached and meshes with bevel gear 52G. A bevel gear 52I, which has a rectangular hole corresponding to the cross section of the spline shaft 62, is inserted into the spline shaft 62. The bevel gear 521 is movable in the longitudinal direction of the spline shaft 62, that is, in the direction along the X axis, and when the first moving member 22 is moved, a guide (not shown) is projected from the first moving member 22. The member 1 is guided and moves together with the first moving member 22. A bevel gear 52J is attached to the tip of the spline shaft 56 housed in the first moving member 22 on the base member 14 side, and the bevel gear 52J meshes with the bevel gear 52I. A pinion gear 64 having a rectangular hole corresponding to the cross section of the spline shaft 56 is inserted into the spline shaft 56 . Further, a pinion gear 66 is meshed with the pinion gear 64 . The pinion gear 64 and the pinion gear 66 are movable in the longitudinal direction of the spline shaft 56, that is, in the direction along the Y axis, and when the second moving member 24 is moved, they protrude from the second moving member 24. The second moving member 24 moves together with the second moving member 24 while being guided by a guide member (not shown). A rack 26A is provided along the longitudinal direction of the shaft 26 on the second moving member 24 side of the shaft 26, which constitutes a part of the third moving member 34 and passes through the second moving member 22. There is. The rack 26A is meshed with the pinion gear 66. As a result, when the drive shaft of the stepping motor 46 rotates, the spline shaft 62 rotates, and the rotational force is transmitted to the bevel gear 521.
52J to the spline shaft 56, and the pinion gears 64, 66 are rotated, thereby moving the shaft 26 and the third moving member 34 in the direction along the Z axis.

As shown in FIG. 5, stepping motors 42, 44.
46 are each connected to an input/output capo 74D of a control circuit 74 via a drive control device 68, 70, 72. The control device 74 includes a CPU 74A, a ROM 74B, and a RAM 7.
4C and an inlet/outlet cupo door 4D are connected to each other. The control circuit 74 converts the amount of rotation of each Stella Pig motor for moving each moving member to a target position into the number of pulses, and sets the pulse number in the drive control circuit. Each drive control circuit 6
8.70.72 applies a set number of pulse voltages to each stepping motor 42, 44, 46. As a result, the stepping motors 42, 44, 46 rotate in steps according to the number of pulses of the applied pulse voltage.

Further, a suction device 40 is connected to the passenger capo door 4D via a relay 78. The control circuit 74 is a relay 78
The suction device 40 is turned on and off by
Controls the activation and deactivation of 0. When activated, the suction device 40 sucks air between the suction cup 38 and the object to be transported, and causes the suction cup 38 to attract the object.

Next, the process of transporting objects as an effect of this embodiment will be explained with reference to the flowchart of FIG.

First, in steps 100 to 106, the suction cup 38 is brought into contact with the object to be transported. That is, in step 100, the amount of movement of the suction cup 38 from its current position to the transported object in the X-axis direction, Y-axis direction, and Z-axis direction is calculated. The object to be transported is placed on a work table 76. The amount of movement is in the X-axis direction and the Y-axis direction between the current position of the suction cup 38 and the position of the transported object.
It is obtained by calculating the differences in each of the axial direction and the Z-axis direction.

In step 102, the stepping motor 42 is driven based on the amount of movement in the X-axis direction determined in step 100, and the first moving member 22 is moved in the X-axis direction. At this time, the stepping motor 44 that moves the second moving member 24 and the stepping motor 46 that moves the third moving member 34 do not move together with the first moving member 22, which is different from the conventional method. The first moving member 22 can be moved at high speed.

In step 104, the stepping motor 44 is driven based on the amount of movement in the Y-axis direction determined in step 100, and the second moving member 24 is moved in the Y-axis direction. At this time, the stepping motor 46 that moves the third moving member 34 does not move together with the second moving member 24, and the second moving member 24 is moved at a higher speed than in the past. I can do it.

In step 106, the stepping motor 46 is driven based on the amount of movement in the Z-axis direction determined in step 100, and the third moving member 34 is moved in the Z-axis direction (downward direction). As a result, the tip of the suction cup 38 comes into contact with the object to be transported.

In the next step 108, the control circuit 74 activates the suction device 40. The suction device 40 sucks air between the suction cup 38 and the object to be transported. As a result, the object to be transported is attracted to the suction cup 38. After that, in step 109, the stepping motor 46 is driven to move the third moving member 34 and the suction cup 38.
is moved in the Z-axis direction (upward direction) to the position before executing step 106. Along with this, the object to be transported adsorbed by the suction cup 38 is also sucked up.

Thereafter, in steps 110 to 118, the object to be transported is transported to the target transport position. That is, step 110
Then, the amount of movement of the suction cup 38 from the current position to the transportation target position in the X-axis direction, Y-axis direction, and Z-axis direction is calculated.

In step 112, the stepping motor 42 is driven based on the amount of movement in the X-axis direction determined in step 110, and the first moving member 22 is moved in the X-axis direction. Also at this time, the stepping motor 44 that moves the second moving member 24 and the stepping motor 46 that moves the third moving member 34 do not move together with the first moving member 22, compared to the conventional case. and the first moving member 22
can move at high speed.

In step 114, the stepping motor 44 is driven based on the amount of movement in the Y-axis direction determined in step 110, and the second moving member 24 is moved in the Y-axis direction. Also at this time, the stepping motor 46 that moves the third moving member 34 does not move together with the second moving member 24, and the second moving member 24 is moved at a higher speed than in the past. be able to.

In step 116, the stepping motor 46 is driven based on the amount of movement in the Z-axis direction determined in step 110, and the third moving member 34 is moved in the Z-axis direction. As a result, the object to be transported that is attracted to the suction cup 38 is transported to the target transport position.

In step 118, the operation of the suction device 40 is stopped.

As a result, the suction device 40 stops sucking air between the suction cup 38 and the object to be transported, and the object to be transported leaves the suction cup 38. With this, the transportation process of the transported object is completed.

In this way, in this embodiment, the stepping motor 42.4
4.46 was attached to the base member 12 and base member 14, which do not move even when each moving member moves, so the first
The inertial mass when moving the moving member 22 and the second moving member 24 is smaller than that in the past. For this reason,
The first moving member 22 and the second moving member 24 can be moved at high speed.

In addition, since the stepping motors 42, 44, 46 are not moved relative to the base member 12, 14 due to the movement of each moving member, the wiring such as the power supply line is not moved, and the wiring can be easily routed. It becomes easier to design the wiring, and there are fewer failures such as disconnection of the wiring.

Furthermore, since the inertial mass when moving each moving member is small, when the stepping motor is stopped while each moving member is moving, the movement of the moving member is immediately stopped. Therefore, the positioning accuracy of each moving member is improved.

In this embodiment, a stepping motor 22, which rotates stepwise in proportion to the number of pulses of the applied pulse voltage, is used as the driving means, but a motor with a fixed speed may also be used. In this case, a sensor or the like is required to detect the amount of rotation of the motor or the amount of movement of the moving member.

Further, in this embodiment, the transmission means is the spline shaft 4.
8, 56, 62, a ball screw 50, 58, a bevel gear 52, and a pinion gear 64, 66, but the invention is not particularly limited to these. for example,
The movable member may be moved by a flexible elongated body, such as a wire, or the portion of the transmission means of this embodiment constituted by a bevel gear may be replaced by a transmission means consisting of a rack and a pinion. May be replaced.

Furthermore, in this embodiment, a suction cup 38 is attached to the third moving member 34 and connected to the suction device 40 to transport objects to be transported. A packet or the like may be attached to transport the object, or a pen or the like may be attached to the third moving member to transport the object.
It can also be used in the same way as the Y block.

〔Effect of the invention〕

As explained above, in the present invention, the first drive means, the second
Since each of the driving means and the third driving means is attached to the base and each moving member is moved via the transmission means, the inertial mass when moving the moving member can be reduced. This has an excellent effect in that the moving member can be moved at high speed.

[Brief explanation of drawings]

Fig. 1 is a plan view of the 3-axis moving device according to this embodiment, Fig. 2 is a side view of the 3-axis moving device, and ζ Fig. 3 is the l-In of Fig. 1.
4 is a perspective view showing the transmission means of the three-axis moving device, FIG. 5 is a block diagram of the three-axis moving device, FIG. 6 is a flowchart explaining the processing procedure of this embodiment, and FIG. FIG. 7 is a perspective view showing a conventional three-axis moving device. DESCRIPTION OF SYMBOLS 10... Three-axis moving device, 12... Base member, 14... Base member, 22... First moving member, 4 34 2 4 6 - Second moving member, - Third movement Components, ・Stepping motor, ・Stepping motor, ・Stepping motor.

Claims (1)

[Claims] (1) a base, a first moving member that is movably attached to the base and moved by a first driving means, and a first moving member that is movable with respect to the first moving member; a second moving member attached to the second moving member and moved by the second driving means; and a third moving member movably attached to the second moving member and moved by the third driving means with respect to the second moving member. In a three-axis moving device having a member, the first driving means, the second driving means, and the third driving means are each attached to a base, and each of the moving members is moved via a transmission means. A three-axis moving device characterized by: