JPH03185326A - Piezoelectric pressure sensor - Google Patents
Piezoelectric pressure sensorInfo
- Publication number
- JPH03185326A JPH03185326A JP32504789A JP32504789A JPH03185326A JP H03185326 A JPH03185326 A JP H03185326A JP 32504789 A JP32504789 A JP 32504789A JP 32504789 A JP32504789 A JP 32504789A JP H03185326 A JPH03185326 A JP H03185326A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- piezoelectric
- piezoelectric element
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000013459 approach Methods 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 238000010292 electrical insulation Methods 0.000 claims description 2
- 238000002485 combustion reaction Methods 0.000 abstract description 16
- 239000000463 material Substances 0.000 abstract description 4
- 238000007789 sealing Methods 0.000 abstract description 3
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010008 shearing Methods 0.000 abstract 1
- 230000005540 biological transmission Effects 0.000 description 7
- 230000002159 abnormal effect Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 238000005219 brazing Methods 0.000 description 2
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical group [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 101100110009 Caenorhabditis elegans asd-2 gene Proteins 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は内燃機関のシリンダ内燃焼圧力等の圧力検出に
適した圧力センサに関すん
従来の技術
応力を加えて電荷を発生する圧電効果を利用した圧電型
圧力センサは 従来よりよく用いられていも 特に最近
では内燃機関のシリンダ内燃焼圧力等の検出に適した圧
力センサの開発が盛んであん 本発明の前提となるこの
種の新規な圧電型圧力センサの基本構成を第３図に示も
同図はセンサの縦断面図であり、ここでは特に圧電素
子にせん断応力を印加する構成のものを示していも セ
ンシング部１２の内部に設置された圧電素子１５は上部
固定ネジ１６によって圧力伝達部材１４を介してダイア
フラム１３に押しつけられて固定及び予備応力を与えら
れていも この予備応力は特に内燃機関のシリンダ内燃
焼圧力を計測する場合には負圧を計測するためにも必要
であも ダイアフラム１３に印加された圧力（上 電気
的にセンシング部１２と絶縁された圧力伝達部材１４を
介して圧電素子１５の内周部に伝達されも ここで圧電
素子１５の上端部は上部固定ネジ１６にて外周部を固定
されているたへ 圧電素子１５にせん断応力が発生ずん
このせん断応力に応じた電荷が圧電素子！５の内外周
に発生し これを内外周面にＩ＋１４成した電極により
電気信号として検出する構成となっていも さらに セ
ンシング部１２は取付ネジ部１１にシール部材１７を介
して接触部ｌＩａに押し付けられて固定されており、取
付ネジ部１１を供試体に取り付けた際に 軸方向歪が生
じてもセンシング部１２の内部には軸方向歪が生じない
構造となっていも
また これとは別に センサを点火プラグに内蔵し被測
定領域からダイアフラムまでを圧力導管で結び、取付の
容易性を考慮した構造のもの（特開昭６１−２３４３２
５公報）や圧力導管を用いることによってセンサの小径
化を図るものが考えられていも
発明が解決しようとする課題
以上ような構成の圧電型圧力センサで：よ センサを供
試体に取り付けた際にダイアフラムと固定ネジとの間隔
に変化が生じＵ 圧電素子に印加されている予備応力が
変動しないたべ 検出精度を大幅に向上できるという利
点があった しかしセンサ筐体が取付ネジ部とセンシン
グ部の二重構造となるために 取付ネジ径が若干大きく
なってしまう欠点があっｔも 現在 シリンダヘッド
に４パルプを配置するものが多い自動車用エンジンでは
センサを取り付けることができるスペースが少なく、
上述のようなネジ径の大きいセンサでは取り付けに若干
の不具合が生じる可能性があったまた 圧力導管を用い
てセンサの小スペース化を図った構造のものでは気柱共
鳴が生じたり、圧力導管にデポジットが堆積し異常燃焼
を起こす可能性がある振 多くの問題があっ１゜
本発明は上記問題点を解決し 取付ネジ部の小径化を図
り、かつ気柱共鳴やデポジットの堆積等の不具合を解消
することを目的とすも
課題を解決するための手段
本発明１上 内部に圧電素子を有し この圧電素子の軸
方向に予備応力を角丸 かつダイアフラムにに１１加さ
れた圧力を伝達するように構成されたセンシング部と円
管状に加工された取付ネジ部にセンサ筺体を分割し 取
付ネジ部にセンシング部の一部をネジ止めあるいはその
他の方法で接触固定す瓜 さらに 取付ネジ部の被測定
領域側先端からダイアフラムに至る管状部分に内接する
ように円柱状のプッシュロッドを挿入し このプッシュ
ロッドをダイアフラムに溶接・ろう付けあるいはその他
の方法によって接合する構造とすも作用
上述の構成により、容易に取付ネジ部の小径化が可能と
なり、かス 気柱共鳴が生じたり、圧力導管にデポジッ
トが堆積し異常燃焼を起こす等の不具合を解決できるた
めに 高精度℃ 信頼性に優れ かつ、圧電素子を高温
の燃焼室から離れた位置に設置できるために耐熱性に優
れた圧電型圧力センサを構成できも
実施例
以下添付図面を参照して本発明の一実施例について説明
すも
第１図は本実施例における圧電型圧力センサの断面図で
あ−Ｌ２．ｌは取付ネジＫ ２１ ａは接触部 ２２
はプッシュロッド、 ２３はセンシングａ２３ａは固定
ネジ、 ２４はダイアフラム ２５は圧力伝達部材、
２６は圧電素子、 ２７は上部固定ネジ、 ２８はシー
ル部材であも
センシング部２３は取り付はネジ部２１にシール部材２
８を介して、固定ネジ２３ａの締め付は力によって接触
部２１ａのみで接触固定されていも また プッシュロ
ッド２２はダイアフラム２４に溶接やろう付けあるいは
その他の方法で接合されており、その側面は取付ネジ２
１の内周面に接触しているが固定されていなし１ すな
わ板 プッシュロッド２２は印加圧力に応じて軸方向に
移動できる構造となっており、ダイアフラム２４に確実
に圧力を伝達できも さらに センシング部２３に構成
されたダイアフラム２４の内側には圧力伝達部材２５が
接触していも この圧力伝達部材２５には特に電気絶縁
性及び断熱性に優れたムライト系あるいはこれに類似し
たセラミック材料が用いられており、ダイアフラム２４
と圧電素子２６との絶縁及び断熱が図られていも 圧力
伝達部材２５のダイアフラム２４と反対側にＣヨ 長
さ方向に分極軸を有し内外周面に電極を有する圧電素子
２６が位置し その内周部分を保持されていも さらに
圧電素子２６の圧力伝達部材２５と反対側には上部固
定ネジ２７が位置し圧電素子２６の外周部分を保持して
いも この上部固定ネジ２７の締め付は力によって圧電
素子２６及び圧力伝達部材２５をダイアフラム２４に押
し打法 各部材の固定及び圧電素子２６への予備応力を
印加してい＆ａ この上部固定ネジ２７は圧電素子２
５の外周に構成された電極と電気的に導通しており、
リード線取り出しの役目も果たしていも本実施例の圧電
型圧力センサで１．ｔ、被測定領域内に生じた圧力変動
によってプッシュロッド２２に印加された圧力は正確に
ダイアフラム２４に伝辻され さらに 圧力伝達部材２
５によって圧電素子２６の内周部分に伝達されも ここ
玄 圧電素？−２６は上部固定ネジ２７にその外周部を
固定されているために伝達された圧力によって圧電素子
２６内部にせん断応力が生じも このせん断応力に応じ
た電荷が圧電素子２６の内外周電極部分に発生する構成
となっていも
まｆ−第２図は本発明における第２の実施例を示したも
ので取付ネジ部３１がダイアフラム３４に接近している
部分の一部に凹部３１ｂを設けており、ダイアフラムが
大きく変形した場合に取付ネジ部と接触しないような構
造としていもこの様に 本発明の構成の圧電型圧力セン
サでＩＬ 容易にセンサ取付ネジ部の小径化が可能と
なり、かス 気柱共鳴を生じたり、圧力導管にデポジッ
トが堆積し異常燃焼を起こしセンサを破損する等の不具
合を解決できも また 圧電素子を高温の燃焼室から離
れた位置に設置できるために耐熱性の向上も可能であも
直 本実施例ではせん断方向の応力を利用するせん断効
果型の圧電型圧力センサを示した力ｔ この他にも圧縮
方向や横方向等の応力を利用しても一センサを構成する
ことは可能であも
また せん断方向の応力を利用してセンサを構成した場
合は 圧電材料が有する焦電出力の影響をセンサ出力に
対して非常に小さくできるという利点があも さらに
圧電素子に耐熱性と同時に高温下での安定な特性を示す
チタン酸鉛を主成分とした圧電材料を使用することによ
り、センサの高温下での出力特性を向上できも この様
にせん断方向の応力を利用し チタン酸鉛系圧電材料を
用いることによって高温下での圧力計測にさらに適した
圧電型圧力センサを構成できも
この様に本発明で１１ センサ取付ネジ部の小径化が
可能となり、かス 気柱共鳴を生じたり、圧力導管にデ
ポジットが堆積し異常燃焼を起こしセンサが破損するな
どの不具合を除去できも さらに 圧電素子を燃焼室か
ら離れた位置に設置できるたべ 耐熱性も向上できるた
べ 高精度でかつ信頼性の高い圧電型圧力センサを供給
することができも
発明の効果
以上のように本発明において（よ センサ取付ネジ部の
小径化が可能となり、かコ 気柱共鳴を生じたり、圧力
導管にデポジットが堆積し異常燃焼を起こしセンサが破
損するなどの不具合を除去できも さらに 圧電素子を
燃焼室から離れた位置に設置できるたべ 耐熱性も向上
できも このたべ 取り付けが容易でかつ信頼性の高い
圧電型圧力センサを供給できも[Detailed Description of the Invention] Industrial Application Field The present invention relates to a pressure sensor suitable for detecting pressure such as combustion pressure in a cylinder of an internal combustion engine. Piezoelectric pressure sensors have been commonly used in the past, but recently, pressure sensors suitable for detecting combustion pressure in the cylinders of internal combustion engines have been actively developed. The basic configuration of the sensor is shown in FIG. Although the element 15 is fixed and prestressed by being pressed against the diaphragm 13 via the pressure transmission member 14 by the upper fixing screw 16, this prestress is a negative pressure, especially when measuring the combustion pressure in the cylinder of an internal combustion engine. The pressure applied to the diaphragm 13 is transmitted to the inner circumference of the piezoelectric element 15 via the pressure transmission member 14 electrically insulated from the sensing section 12. The outer periphery of the upper end of the element 15 is fixed with the upper fixing screw 16. Shear stress is generated in the piezoelectric element 15. Electric charges corresponding to this shear stress are generated on the inner and outer peripheries of the piezoelectric element 5. Even though the sensing part 12 is configured to be detected as an electric signal by the electrodes formed on the inner and outer peripheral surfaces, the sensing part 12 is fixed to the mounting screw part 11 by being pressed against the contact part lIa via the seal member 17, Although the structure is such that axial strain does not occur inside the sensing part 12 even if axial strain occurs when the sensor 11 is attached to the specimen, a separate sensor is built into the spark plug and separated from the area to be measured. A structure that connects the diaphragm with a pressure conduit and takes into consideration ease of installation (Japanese Patent Laid-Open No. 61-23432)
Although it has been considered to reduce the diameter of the sensor by using a pressure conduit or a piezoelectric pressure sensor having the above configuration: The distance between the diaphragm and the fixing screw changes, and the prestress applied to the piezoelectric element does not fluctuate.This has the advantage of greatly improving detection accuracy. Due to the heavy structure, there is a drawback that the diameter of the mounting screw becomes slightly larger.Currently, many automobile engines have 4-pulp installed in the cylinder head, and there is less space to install the sensor.
Sensors with large screw diameters such as those mentioned above may have some problems with installation.Moreover, sensors with a structure that uses a pressure conduit to reduce the space required for the sensor may cause air column resonance or may cause problems with the pressure conduit. There are many problems in which deposits may accumulate and cause abnormal combustion.1゜The present invention solves the above problems, reduces the diameter of the mounting screw part, and eliminates problems such as air column resonance and deposit accumulation. Means for Solving the Problems The present invention (1) has a piezoelectric element inside, applies prestress in the axial direction of the piezoelectric element to rounded corners, and transmits the pressure applied to the diaphragm. The sensor housing is divided into a sensing part configured as shown in FIG. A structure in which a cylindrical push rod is inserted so as to be inscribed in the tubular portion from the tip on the measurement area side to the diaphragm, and this push rod is joined to the diaphragm by welding, brazing, or other methods. It is possible to easily reduce the diameter of the mounting screw part, and it is possible to solve problems such as air column resonance and abnormal combustion caused by deposits accumulating in pressure pipes. Since the element can be installed at a location away from the high-temperature combustion chamber, a piezoelectric pressure sensor with excellent heat resistance can be constructed. -L2. is a sectional view of the piezoelectric pressure sensor in this example. l is the mounting screw K 21 a is the contact part 22
is a push rod, 23 is a sensing a23a is a fixing screw, 24 is a diaphragm, 25 is a pressure transmission member,
26 is a piezoelectric element, 27 is an upper fixing screw, 28 is a sealing member, and the sensing part 23 is attached to the threaded part 21 with the sealing member 2.
8, the fixing screw 23a may be tightened by force to contact and fix only the contact portion 21a. The push rod 22 is also connected to the diaphragm 24 by welding, brazing, or other methods, and its side surface is attached to the mounting surface. screw 2
The push rod 22 is in contact with the inner peripheral surface of the diaphragm 24 but is not fixed. Although the pressure transmitting member 25 is in contact with the inside of the diaphragm 24 configured in the sensing section 23, this pressure transmitting member 25 is made of mullite or a similar ceramic material that has particularly excellent electrical insulation and heat insulation properties. diaphragm 24
Even if insulation and heat insulation between the diaphragm 24 and the piezoelectric element 26 is attempted, the piezoelectric element 26 having a polarization axis in the longitudinal direction and electrodes on the inner and outer circumferential surfaces is located on the opposite side of the pressure transmitting member 25 from the diaphragm 24. Even if the inner peripheral part is held, the upper fixing screw 27 is located on the opposite side of the piezoelectric element 26 from the pressure transmitting member 25, and even if the outer peripheral part of the piezoelectric element 26 is held, the tightening of the upper fixing screw 27 is done with force. The piezoelectric element 26 and the pressure transmission member 25 are pressed against the diaphragm 24 by pressing the piezoelectric element 26 and the pressure transmitting member 25 to the diaphragm 24.
It is electrically connected to the electrode configured on the outer periphery of 5,
Although the piezoelectric pressure sensor of this embodiment also plays the role of taking out the lead wire, the following functions are possible: t, the pressure applied to the push rod 22 due to pressure fluctuations occurring within the measurement area is accurately transmitted to the diaphragm 24, and furthermore, the pressure transmission member 2
5 to the inner circumference of the piezoelectric element 26. -26 has its outer periphery fixed to the upper fixing screw 27, so that shear stress is generated inside the piezoelectric element 26 due to the transmitted pressure.Electric charges corresponding to this shear stress are applied to the inner and outer electrode portions of the piezoelectric element 26. Fig. 2 shows a second embodiment of the present invention, in which a recess 31b is provided in a part of the part where the mounting screw part 31 approaches the diaphragm 34. Even if the diaphragm is structured so that it does not come into contact with the mounting screw part even if it is greatly deformed, the piezoelectric pressure sensor configured according to the present invention can easily reduce the diameter of the sensor mounting screw part, and the air column can be easily reduced. It can solve problems such as resonance, deposits build up in pressure pipes, which can cause abnormal combustion and damage the sensor. It can also improve heat resistance because the piezoelectric element can be installed away from the high-temperature combustion chamber. In this example, a shear effect type piezoelectric pressure sensor that uses stress in the shear direction is shown as a force t.In addition to this, a sensor can also be constructed using stress in the compressive direction, lateral direction, etc. However, if the sensor is constructed using stress in the shear direction, there is an additional advantage that the influence of the pyroelectric output of the piezoelectric material on the sensor output can be made very small.
By using a piezoelectric material whose main component is lead titanate, which exhibits heat resistance and stable characteristics at high temperatures, for the piezoelectric element, the output characteristics of the sensor at high temperatures can be improved. By utilizing stress and using a lead titanate-based piezoelectric material, a piezoelectric pressure sensor that is more suitable for pressure measurement under high temperatures can be constructed. It is possible to eliminate problems such as air column resonance, deposits accumulating in the pressure pipe, causing abnormal combustion and damage to the sensor.Furthermore, the piezoelectric element can be installed at a location away from the combustion chamber, and heat resistance can be improved. In addition to being able to provide a piezoelectric pressure sensor with high accuracy and reliability, the present invention has the following advantages: It is possible to reduce the diameter of the sensor mounting screw part, which causes air column resonance. It also eliminates problems such as deposits accumulating in the pressure pipe, causing abnormal combustion and damaging the sensor.Furthermore, the piezoelectric element can be installed at a location away from the combustion chamber.It also improves heat resistance. We can also supply highly reliable piezoelectric pressure sensors.
第１図は本発明の一実施例における圧電型圧力センサの
断面は 第２図は本発明の第２の実施例における圧電型
圧力センサの断面は 第３図は従来の圧電型圧力センサ
の断面図であも
１１・・−・・取付ネジ敵 １１ａ・・−・・接触餓１
２・・−・・センシング敵 １２ａ・・−・・固定ネジ
、 １３・・・・・・ダイアツクｋ １４・・−・・
圧力伝達部材 １５・・・・・・圧電素子、 １６・・
−・・上部固定ネジ、 １７・・−・・シール部抹 ２
１・・−・・取付ネジ臥 ２１ａ・・−・・接触餓 ２
２−・・プッシュロッド、 ２３・・−・・センシング
ｉｌＬ ２３ａ・・−・・固定ネジ、 ２４・・−・
・ダイアフラム ２５・・−・・圧力伝達部材、 ２６
・・−・・圧電素子、２７・・−・・上部固定ネ−ｊ、
２８・・−・・シール部抹 ３１・・−・・取付ネジ！
３１ｂ・・−・・取付ネジ凹部 ３４・・−・・ダ
イアツクちFIG. 1 is a cross section of a piezoelectric pressure sensor according to an embodiment of the present invention. FIG. 2 is a cross section of a piezoelectric pressure sensor according to a second embodiment of the present invention. FIG. 3 is a cross section of a conventional piezoelectric pressure sensor. In the figure 11...Mounting screw 11a...Contact star 1
2...Sensing enemy 12a...Fixing screw, 13...Diac k 14...
Pressure transmission member 15...Piezoelectric element, 16...
-...Top fixing screw, 17...Seal part 2
1...Mounting screw 21a...Contact star 2
2-... Push rod, 23... Sensing IL 23a... Fixing screw, 24...
・Diaphragm 25...Pressure transmission member, 26
...Piezoelectric element, 27...Top fixing neck j,
28...Seal part blank 31...Mounting screw!
31b...Mounting screw recess 34...Diak hole
Claims (4)
フラムに印加された圧力を伝達するように構成されたセ
ンシング部と円管状に加工された取付ネジ部にセンサ筺
体を分割し、前記取付ネジ部に前記センシング部の一部
を接触固定し、さらに、前記取付ネジ部の被測定領域側
先端から前記センシング部に構成されたダイアフラムに
至る管状部分に内接するように円柱状のプッシュロッド
を挿入し、このプッシュロッドを前記ダイアフラムに接
合するように構成したことを特徴とする圧電型圧力セン
サ。(1) The sensor housing is divided into a sensing part configured to apply prestress in the axial direction of the piezoelectric element and transmit the pressure applied to the diaphragm, and a mounting screw part machined into a circular tube shape, and the mounting A part of the sensing part is fixed in contact with the threaded part, and a cylindrical push rod is further inscribed in a tubular part extending from the tip of the mounting threaded part on the side to be measured to a diaphragm configured in the sensing part. A piezoelectric pressure sensor characterized in that the push rod is inserted into the diaphragm and connected to the diaphragm.
て、前記取付ネジ部の一部に凹部を設け、前記ダイアフ
ラム部分の変形を妨げないような構成としたことを特徴
とする請求項１記載の圧電型圧力センサ。(2) A piezoelectric device according to claim 1, characterized in that a recess is provided in a part of the mounting screw portion in a portion where the mounting screw portion approaches the diaphragm, so that deformation of the diaphragm portion is not hindered. type pressure sensor.
伝達する圧力伝達部材として電気絶縁性に優れ、かつ熱
伝導率が低いセラミック材料を使用することを特徴とす
る請求項１または２記載の圧電型圧力センサ。(3) The piezoelectric device according to claim 1 or 2, wherein a ceramic material having excellent electrical insulation and low thermal conductivity is used as a pressure transmitting member for transmitting pressure to the piezoelectric element inside the sensing portion. type pressure sensor.
加し、このせん断応力によって発生する電荷を検出する
よう構成したことを特徴とする請求項１、２または３記
載の圧電型圧力センサ。(4) The piezoelectric pressure sensor according to claim 1, 2 or 3, wherein pressure is applied to the piezoelectric element so as to generate shear stress, and an electric charge generated by the shear stress is detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32504789A JPH03185326A (en) | 1989-12-14 | 1989-12-14 | Piezoelectric pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32504789A JPH03185326A (en) | 1989-12-14 | 1989-12-14 | Piezoelectric pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03185326A true JPH03185326A (en) | 1991-08-13 |
Family
ID=18172561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32504789A Pending JPH03185326A (en) | 1989-12-14 | 1989-12-14 | Piezoelectric pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03185326A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10140678A1 (en) * | 2001-08-24 | 2003-03-13 | Sew Eurodrive Gmbh & Co | Combined sealing plug and vibration sensor for sealing a drive sump or oil reservoir and for providing vibration measurements, whereby the sensor is mounted in the head of the sealing plug in a tapped hole |
| CN100373145C (en) * | 2004-03-03 | 2008-03-05 | 株式会社电装 | Pressure sensor |
| KR100982746B1 (en) * | 2008-05-09 | 2010-09-20 | 군산대학교산학협력단 | Pressure sensor and pressure detection device having the same |
| JP2011522263A (en) * | 2008-06-04 | 2011-07-28 | キストラー ホールディング アクチエンゲゼルシャフト | Pressure sensor for chamber measurement of internal combustion engines |
| JP2012220201A (en) * | 2011-04-04 | 2012-11-12 | Toyota Central R&D Labs Inc | Pressure sensor |
-
1989
- 1989-12-14 JP JP32504789A patent/JPH03185326A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10140678A1 (en) * | 2001-08-24 | 2003-03-13 | Sew Eurodrive Gmbh & Co | Combined sealing plug and vibration sensor for sealing a drive sump or oil reservoir and for providing vibration measurements, whereby the sensor is mounted in the head of the sealing plug in a tapped hole |
| CN100373145C (en) * | 2004-03-03 | 2008-03-05 | 株式会社电装 | Pressure sensor |
| KR100982746B1 (en) * | 2008-05-09 | 2010-09-20 | 군산대학교산학협력단 | Pressure sensor and pressure detection device having the same |
| JP2011522263A (en) * | 2008-06-04 | 2011-07-28 | キストラー ホールディング アクチエンゲゼルシャフト | Pressure sensor for chamber measurement of internal combustion engines |
| JP2012220201A (en) * | 2011-04-04 | 2012-11-12 | Toyota Central R&D Labs Inc | Pressure sensor |
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