JPH0258334U - - Google Patents
Info
- Publication number
- JPH0258334U JPH0258334U JP13647388U JP13647388U JPH0258334U JP H0258334 U JPH0258334 U JP H0258334U JP 13647388 U JP13647388 U JP 13647388U JP 13647388 U JP13647388 U JP 13647388U JP H0258334 U JPH0258334 U JP H0258334U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- lever
- ring
- loading
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 4
Landscapes
- Tests Of Electronic Circuits (AREA)
- Discharge Of Articles From Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案が使用される状態の説明図、第
２図は本考案の構成を示す断面図、第３図は部分
的側面図。
１……ウエハテーブル、２……搬送機構、３…
…ウエハ、４……支持ピン、５……中心軸、７…
…テーブル上下駆動用モータ、１０……レバー、
１１……垂直ロツド、１２……リング。
FIG. 1 is an explanatory view of the present invention in use, FIG. 2 is a sectional view showing the structure of the present invention, and FIG. 3 is a partial side view. 1... Wafer table, 2... Transfer mechanism, 3...
...Wafer, 4...Support pin, 5...Center shaft, 7...
...Table vertical drive motor, 10...Lever,
11...Vertical rod, 12...Ring.
Claims (1)
に搬入出する装置において、テーブルの上昇、下
降の駆動用モータの偏心カムの軸８に設けられた
レバー１０と、このレバーによつて上下動する垂
直ロツド１１と、このロツドに取付けられたリン
グ１２とリング上面に下端を位置し、かつテーブ
ルを貫通する複数本のウエハを支えるピン４とか
ら構成されるウエハ受渡し機構。 In a device for loading and unloading wafers onto and from a loading table that can feed wafers with a predetermined accuracy, a lever 10 is provided on the shaft 8 of an eccentric cam of a drive motor for raising and lowering the table, and the table is moved up and down by this lever. A wafer transfer mechanism consisting of a vertical rod 11, a ring 12 attached to this rod, and a pin 4 whose lower end is located on the upper surface of the ring and which extends through a table and supports a plurality of wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13647388U JPH0625010Y2 (en) | 1988-10-19 | 1988-10-19 | Wafer delivery mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13647388U JPH0625010Y2 (en) | 1988-10-19 | 1988-10-19 | Wafer delivery mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0258334U true JPH0258334U (en) | 1990-04-26 |
| JPH0625010Y2 JPH0625010Y2 (en) | 1994-06-29 |
Family
ID=31397018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13647388U Expired - Fee Related JPH0625010Y2 (en) | 1988-10-19 | 1988-10-19 | Wafer delivery mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625010Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002164423A (en) * | 2000-11-28 | 2002-06-07 | Tokyo Seimitsu Co Ltd | Wafer holding apparatus with wafer lift |
| JP2007158005A (en) * | 2005-12-05 | 2007-06-21 | Tokyo Electron Ltd | Substrate transport apparatus and substrate processing apparatus |
| WO2017094462A1 (en) * | 2015-12-03 | 2017-06-08 | 日本電気硝子株式会社 | Plate glass manufacturing method and manufacturing device |
-
1988
- 1988-10-19 JP JP13647388U patent/JPH0625010Y2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002164423A (en) * | 2000-11-28 | 2002-06-07 | Tokyo Seimitsu Co Ltd | Wafer holding apparatus with wafer lift |
| JP2007158005A (en) * | 2005-12-05 | 2007-06-21 | Tokyo Electron Ltd | Substrate transport apparatus and substrate processing apparatus |
| WO2017094462A1 (en) * | 2015-12-03 | 2017-06-08 | 日本電気硝子株式会社 | Plate glass manufacturing method and manufacturing device |
| CN108025415A (en) * | 2015-12-03 | 2018-05-11 | 日本电气硝子株式会社 | The manufacture method and manufacture device of plate glass |
| TWI683774B (en) * | 2015-12-03 | 2020-02-01 | 日商日本電氣硝子股份有限公司 | Manufacturing method and manufacturing device of flat glass |
| CN108025415B (en) * | 2015-12-03 | 2020-03-17 | 日本电气硝子株式会社 | Method and apparatus for manufacturing plate-shaped glass |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0625010Y2 (en) | 1994-06-29 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |