JPH0242358U - - Google Patents
Info
- Publication number
- JPH0242358U JPH0242358U JP11990888U JP11990888U JPH0242358U JP H0242358 U JPH0242358 U JP H0242358U JP 11990888 U JP11990888 U JP 11990888U JP 11990888 U JP11990888 U JP 11990888U JP H0242358 U JPH0242358 U JP H0242358U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- grounding
- piezoelectric element
- electron beam
- sample holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000609 electron-beam lithography Methods 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Description
第１図は本案の一実施例の概略構成図、第２図
は第１図の詳細図、第３図は他の実施例の詳細図
である。
１……試料ホルダ、２……基準面、３……接地
部材、４……試料、５……圧電素子、６……電源
、７……ばね。
FIG. 1 is a schematic configuration diagram of one embodiment of the present invention, FIG. 2 is a detailed diagram of FIG. 1, and FIG. 3 is a detailed diagram of another embodiment. DESCRIPTION OF SYMBOLS 1... Sample holder, 2... Reference plane, 3... Grounding member, 4... Sample, 5... Piezoelectric element, 6... Power supply, 7... Spring.
Claims (1)
と試料の導体部を接地する部材からなる試料ホル
ダにおいて、圧電素子を使用して接地部材を試料
に押しつける機構を有することを特徴とした電子
線描画装置の試料ホルダ。 ２ 請求の範囲第１項において、圧電素子を使用
し、接地部材を試料に押しつけた状態で微動させ
接地能力を向上させる機能を有することを特徴と
した電子線描画装置の試料ホルダ。[Claims for Utility Model Registration] 1. A sample holder consisting of a member for holding the sample, a member for fixing the sample, and a member for grounding the conductor of the sample, with a mechanism for pressing the grounding member against the sample using a piezoelectric element. A sample holder for an electron beam lithography apparatus, characterized by comprising: 2. The sample holder for an electron beam lithography apparatus according to claim 1, which uses a piezoelectric element and has a function of slightly moving the grounding member while it is pressed against the sample to improve the grounding ability.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11990888U JPH0242358U (en) | 1988-09-14 | 1988-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11990888U JPH0242358U (en) | 1988-09-14 | 1988-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0242358U true JPH0242358U (en) | 1990-03-23 |
Family
ID=31365551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11990888U Pending JPH0242358U (en) | 1988-09-14 | 1988-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0242358U (en) |
-
1988
- 1988-09-14 JP JP11990888U patent/JPH0242358U/ja active Pending