JPH023114A - Thin film for recording information - Google Patents
Thin film for recording informationInfo
- Publication number
- JPH023114A JPH023114A JP63148116A JP14811688A JPH023114A JP H023114 A JPH023114 A JP H023114A JP 63148116 A JP63148116 A JP 63148116A JP 14811688 A JP14811688 A JP 14811688A JP H023114 A JPH023114 A JP H023114A
- Authority
- JP
- Japan
- Prior art keywords
- recording
- film
- layer
- thin film
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000000203 mixture Substances 0.000 claims abstract description 25
- 239000011241 protective layer Substances 0.000 claims abstract description 20
- 239000010408 film Substances 0.000 claims description 74
- 239000000126 substance Substances 0.000 claims description 8
- 229910052758 niobium Inorganic materials 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- 229910052720 vanadium Inorganic materials 0.000 claims description 5
- 229910052783 alkali metal Inorganic materials 0.000 claims description 4
- 150000001340 alkali metals Chemical class 0.000 claims description 4
- 229910052793 cadmium Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
- 229910052703 rhodium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052706 scandium Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052727 yttrium Inorganic materials 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052702 rhenium Inorganic materials 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910052762 osmium Inorganic materials 0.000 claims 1
- 230000008859 change Effects 0.000 abstract description 12
- 239000000463 material Substances 0.000 abstract description 7
- 229910010272 inorganic material Inorganic materials 0.000 abstract description 4
- 150000002484 inorganic compounds Chemical class 0.000 abstract 1
- 150000002894 organic compounds Chemical class 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 51
- 238000002425 crystallisation Methods 0.000 description 19
- 230000008025 crystallization Effects 0.000 description 18
- 230000000694 effects Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000005566 electron beam evaporation Methods 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- -1 polyethylene Polymers 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 229920000515 polycarbonate Polymers 0.000 description 4
- 239000004417 polycarbonate Substances 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000012044 organic layer Substances 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 229910052714 tellurium Inorganic materials 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 239000004831 Hot glue Substances 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 241000796654 Axos Species 0.000 description 1
- 206010004966 Bite Diseases 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000005345 chemically strengthened glass Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 150000003346 selenoethers Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はレーザ光、電子線等の記録用ビームによって、
たとえば映像や音声などのアナログ信号をFM変調した
ものや、たとえば電子計算機のデータや、ファクシミリ
信号やディジタルオーディオ信号などのディジタル情報
を、リアルタイムで記録することが可能な情報の記録用
薄膜に関するものである。[Detailed Description of the Invention] [Industrial Field of Application] The present invention provides a recording method using a recording beam such as a laser beam or an electron beam.
For example, it relates to an information recording thin film that can record in real time FM modulated analog signals such as video and audio, computer data, facsimile signals, digital audio signals, and other digital information. be.
レーザ光によって薄膜に記録を行なう記録原理は種々あ
るが、膜材料の相転移(相変化とも呼ばれる)、フオト
ダークニングなどの原子配列変化による記録は、膜の変
形をほとんど伴わないので、2枚のディスクを直接貼り
合わせた両面ディスクができるという長所をもっている
。また、組成を適当に選べば記録の書き換えを行なうこ
ともできる。この種の記録に関する発明は多数出願され
ており、例えば特公昭47−26897号公報にもその
一例が開示されている。There are various recording principles for recording on thin films using laser light, but recording based on changes in atomic arrangement such as phase transition (also called phase change) of the film material and photodarkening involves almost no deformation of the film, so two sheets are used. It has the advantage of being able to create double-sided discs by directly bonding two discs together. Furthermore, if the composition is appropriately selected, it is also possible to rewrite records. Many inventions related to this type of recording have been filed, and one example is disclosed in Japanese Patent Publication No. 47-26897, for example.
また、Ge、Te、およびsbを主成分とする薄膜に関
しては、特開昭61−258787号公報に開示されて
おり、その記録膜組成は
((S b xT e z−x)yG e x−y)i
−zMz (ただし、又は0.2〜0.7、yは0.4
〜0.8.2は0.01〜0.5 の範囲の数であり、
MはAQ、Si。Furthermore, a thin film containing Ge, Te, and sb as main components is disclosed in Japanese Unexamined Patent Publication No. 61-258787, and its recording film composition is ((S b xT ez-x)yG e x- y)i
-zMz (or 0.2 to 0.7, y is 0.4
~0.8.2 is a number in the range of 0.01 to 0.5;
M is AQ, Si.
Tiなど37種の金属元素の群から選ばれる元素)であ
る。It is an element selected from a group of 37 metal elements such as Ti).
上記従来技術に示された薄膜はいずれも一回書き込み可
能あるいは書き換え可能な相転移記録膜として用いる場
合に非晶質記録点の結晶化の活性化エネルギーが小さい
ため、エネルギービーム照射中の結晶化速度が小さく、
常温での非晶質状態の安定性が悪いという欠点を有して
おり、また、再生信号強度が十分大きくない。書き換え
の繰り返し回数が十分でない、単一ビームで重ね書きを
行う際の前信号の消え残りが大きい、などの欠点を有し
ており、実用化が困難である。When the thin films shown in the above-mentioned prior art are used as one-time writable or rewritable phase change recording films, the activation energy for crystallization of amorphous recording points is small, so crystallization occurs during energy beam irradiation. The speed is small,
It has the disadvantage that the stability of the amorphous state at room temperature is poor, and the reproduced signal intensity is not sufficiently large. This method has drawbacks such as an insufficient number of rewriting repetitions and a large amount of residual signal remaining when overwriting with a single beam, making it difficult to put it into practical use.
したがって本発明の目的は上記した従来技術の欠点を無
くシ、記録・再生特性が良好で感度が高く、安定性の良
い情報記録用薄膜を提供することにある。Therefore, an object of the present invention is to eliminate the above-mentioned drawbacks of the prior art and to provide a thin film for information recording that has good recording/reproducing characteristics, high sensitivity, and good stability.
上記の目的を達成するために本発明の情報の記録用部材
においては、情報記録用薄膜の膜厚方向の平均組成を一
般式
%式%
ただし、X Hyg Z Hαおよびβはそれぞれ、8
0 、1 < z < 10 、0 < a < 20
、 O<βく20.1<α+βく20の範囲の値であ
り、Aは、Tl、ハロゲン元素およびアルカリ金属元素
のうち少なくとも一元索である。これらの元素は、Te
を含む材料中でTeの鎖状原子配列を切断し、結晶化速
度を速くする効果を持つ、ただし、結晶化温度の低下を
伴うので、結晶化温度の高い材料に添加しないと非晶質
状態の安定性を損うことになる。In order to achieve the above object, in the information recording member of the present invention, the average composition in the film thickness direction of the information recording thin film is expressed by the general formula %, where X Hyg Z Hα and β are each 8
0, 1 < z < 10, 0 < a < 20
, O<β20.1<α+β20, and A is at least one element among Tl, a halogen element, and an alkali metal element. These elements are Te
It has the effect of cutting the chain-like atomic arrangement of Te in materials containing Te and increasing the crystallization rate. However, since it is accompanied by a decrease in the crystallization temperature, it will become amorphous if it is not added to a material with a high crystallization temperature. This will impair the stability of
Bは、Co、Fe、Ni、Sc、Ti、V。B is Co, Fe, Ni, Sc, Ti, V.
Cr、Mn、Cu、Zn、Y、Zr、Nb、MowRu
、Rh、Pd、Ag、Cd、Hf、Ta、W。Cr, Mn, Cu, Zn, Y, Zr, Nb, MowRu
, Rh, Pd, Ag, Cd, Hf, Ta, W.
Re、○s、Ir、Pt、、およびA +iから選ばれ
た少なくとも一元素である。At least one element selected from Re, ○s, Ir, Pt, and A +i.
本発明の記録用薄膜は膜厚方向の平均組成が上記の範囲
内に有れば膜厚方向に組成が変化していてもよい、ただ
し組成の変化は不連続的でない方がより好ましい、Bで
表わされる元素である。The recording thin film of the present invention may have a composition change in the thickness direction as long as the average composition in the film thickness direction is within the above range, but it is more preferable that the composition change is not discontinuous.B It is an element represented by
Co等の遷移金属元素は、半導体レーザ光などの長波長
光の吸収を容易にして記録感度を高め、また、結晶化温
度の高温化、すなわち非晶質状態の安定性を増す効果を
持ち、かつそれ自身が600℃以上の高融点であるか高
融点の化合物を作るものであって、レーザ光によって結
晶化させる際高温にしても融解しないので高速結晶化が
可能なものである。Transition metal elements such as Co easily absorb long-wavelength light such as semiconductor laser light, increasing recording sensitivity, and also have the effect of raising the crystallization temperature, that is, increasing the stability of the amorphous state. Moreover, it itself has a high melting point of 600° C. or higher, or forms a compound with a high melting point, and when crystallized by laser light, it does not melt even at high temperatures, so high-speed crystallization is possible.
上記の組成範囲に有る本発明の情報記録用薄膜は優れた
記録・再生特性を持ち、記録および消去に用いるレーザ
光のパワーが低くてよい。また、安定性も優れている。The information recording thin film of the present invention having the above composition range has excellent recording and reproducing properties, and requires low power of laser light used for recording and erasing. It also has excellent stability.
Xr y+Z+ αおよびβのより好ましい範囲は20
< x < 45 、55 < V < 70 、1
−< z < 10 。A more preferable range of Xr y+Z+ α and β is 20
< x < 45, 55 < V < 70, 1
−<z<10.
0くα<20.O<β<20.1<α+βり20である
。また−Xr y+Z+ αおよびβの特に好ましい範
囲は、
20 < x < 40 、60 < y< 70 、
1 < Z< 10 。0 α<20. O<β<20.1<α+β20. Particularly preferable ranges of −Xry+Z+ α and β are: 20 < x < 40, 60 < y < 70,
1 < Z < 10.
0くα<15.O<β<15.1<α+β<20である
。0 α<15. O<β<15.1<α+β<20.
成分元素が、Ge、Te、およびsbのみの記録膜では
非晶質記録点の結晶化の活性化エネルギ−が小さく、消
去に必要な最短照射時間(消去時間)が長く、非晶質記
録点の安定性も悪い。ここに、八で表わされる元素を添
加することにより、消去時間が短くなり、Bで表わされ
る元素を添加することにより、非晶質記録点の安定性が
向上する。In a recording film whose component elements are only Ge, Te, and sb, the activation energy for crystallization of an amorphous recording point is small, the shortest irradiation time (erasing time) required for erasing is long, and the amorphous recording point The stability is also poor. By adding the element represented by 8, the erasing time is shortened, and by adding the element represented by B, the stability of the amorphous recording point is improved.
ここで、Aで表わされる元素のうち、特に好ましいもの
はTl、次いでIおよびNaである。また、Aで表わさ
れる元素のうち、特に好ましいものはCo、次いで好ま
しいものはTi、Ni次いで好ましいものはV、Cr次
いで好ましいものはPd、Zr、Nb、Mn、である。Among the elements represented by A, particularly preferred are Tl, followed by I and Na. Further, among the elements represented by A, Co is particularly preferred, Ti is the next most preferred, V is the next most preferred Ni, V is the next most preferred, and Pd, Zr, Nb and Mn are the most preferred.
本発明の記録膜の少なくとも一方の面は他の物質で密着
して保護されているのが好ましい。両側が保護されてい
ればさらに好ましい。これらの保護層は、基板でもある
アクリル樹脂板、ポリカーボネイト板、エポキシ樹脂板
など、あるいは、たとえば、アクリル樹脂、エポキシ樹
脂、ポリイミド、ポリアミド、ポリスチレン、ポリエチ
レンなどの有機物より形成されていてもよく、酸化物。It is preferable that at least one surface of the recording film of the present invention is closely protected by another substance. It is even better if both sides are protected. These protective layers may be formed of an acrylic resin board, a polycarbonate board, an epoxy resin board, etc. which is also a substrate, or an organic material such as acrylic resin, epoxy resin, polyimide, polyamide, polystyrene, polyethylene, etc. thing.
弗化物、窒化物、硫化物、炭化物、ホウ化物、ホウ素、
炭素、あるいは金属などを主成分とする無機物より形成
されていてもよい。また、これらの複合材料でも良い、
記録膜に隣接する保護層のうちの少なくとも一方は無機
物であるのが好ましい。Fluoride, nitride, sulfide, carbide, boride, boron,
It may be formed from an inorganic material whose main component is carbon or metal. Also, these composite materials may be used.
At least one of the protective layers adjacent to the recording film is preferably inorganic.
ガラス、石英、サファイア、鉄、あるいはアルミニウム
を主成分とする基板も一方の無機物保護層として働き得
る。有機物、無機物のうちでは無機物と密着している方
が耐熱性の面で好ましい。しかし無機物層(基板の場合
を除く)を厚くするのは、クラック発生、透過率低下、
感度低下のうちの少なくとも1つを起こしやすいので、
上記の無機物層の記録膜と反対の側には、機械的強度を
増すために厚い有機物層が密着している方が好ましい。Substrates based on glass, quartz, sapphire, iron, or aluminum can also serve as one inorganic protective layer. Among organic substances and inorganic substances, those in close contact with inorganic substances are preferable in terms of heat resistance. However, increasing the thickness of the inorganic layer (except for the substrate) may cause cracks to occur, decrease in transmittance,
Because it is likely to cause at least one of the following:
It is preferable that a thick organic layer be closely attached to the side of the inorganic layer opposite to the recording film in order to increase mechanical strength.
この有機物層は基板であってもよい。これによって変形
も起こりにくくなる。有機物としては、例えば、ポリス
チレン、アクリル樹脂、ポリカーボネート、エポキシ樹
脂、ポリイミド、ポリアミド、ホットメルト接着剤とし
て知られているエチレン−酢酸ビニル共重合体など、お
よび粘着剤などが用いられる。紫外線硬化樹脂でもよい
、無機物より成る保護層の場合は、そのままの形で電子
ビーム蒸着、スパッタリング等で形成してもよいが、反
応性スパッタリングや、金属、半金属、半導体の少なく
とも一元素よりなる膜を形成した後。This organic layer may be a substrate. This also makes deformation less likely to occur. As the organic material, for example, polystyrene, acrylic resin, polycarbonate, epoxy resin, polyimide, polyamide, ethylene-vinyl acetate copolymer known as a hot melt adhesive, adhesive, etc. are used. In the case of a protective layer made of an inorganic material, which may be an ultraviolet curable resin, it may be formed as it is by electron beam evaporation, sputtering, etc., but it may be formed by reactive sputtering or a protective layer made of at least one element of a metal, semimetal, or semiconductor. After forming the membrane.
酸素、硫黄、窒素のうちの少なくとも一者と反応させる
ようにすると製造が容易である。無機物保護層の例を挙
げると、Ca、La、Si、In。Production is facilitated by reacting with at least one of oxygen, sulfur, and nitrogen. Examples of inorganic protective layers include Ca, La, Si, and In.
AQ、Ge、Pb、Sn、Bi、Te、Ta。AQ, Ge, Pb, Sn, Bi, Te, Ta.
Sc、Y、Ti、Zr、V、Nb、Cr、およびWより
なる群より選ばれた少なくとも一元素の酸化物、Cd、
Zn、Ga、In、Sb+ Ge。An oxide of at least one element selected from the group consisting of Sc, Y, Ti, Zr, V, Nb, Cr, and W, Cd,
Zn, Ga, In, Sb+Ge.
Sn、Pdよりなる群より選ばれた少なくとも一元素の
硫化物、またはセレン化物、Mg + Ce +Caな
どの弗化物、S i、fi、Q、Ta、Bなどの窒化物
、Tiなどのホウ化物、ホウ素などの炭化物、ホウ素、
炭素より成るものであって、たとえば主成分がCe0z
、LazOa+ Sin、5iOz。Sulfides of at least one element selected from the group consisting of Sn and Pd, or selenides, fluorides such as Mg + Ce + Ca, nitrides such as Si, fi, Q, Ta, and B, borides such as Ti , carbides such as boron, boron,
It consists of carbon, for example, the main component is CeOz
, LazOa+Sin, 5iOz.
I n 20a、 A Q zos、 G e○、 G
e Oz、 P b O。I n 20a, A Q zos, G e○, G
eOz, PbO.
Sn○、SnO2,Biz○a、 T e Ox、 W
OzrWOs、T axos、S czoa、Yy、O
s、T i 0xtZrC)z、CdS、ZnS、Cd
Se、Zn5e。Sn○, SnO2, Biz○a, T e Ox, W
OzrWOs, T axos, S czoa, Yy, O
s, T i 0xtZrC)z, CdS, ZnS, Cd
Se, Zn5e.
I nzsg、I nxs 8s、S biss、S
bzs e3+G azss+ G azs all
、M g Fil Ce Fz。I nzsg, I nxs 8s, S biss, S
bzs e3+G azss+ G azs all
, M g Fil Ce Fz.
Ce F3.Ca Fz、GeS、Ge S e、Ge
Sez+SnS、5nSe、PbS、Pb5e、Biz
Ses。Ce F3. Ca Fz, GeS, Ge S e, Ge
Sez+SnS, 5nSe, PbS, Pb5e, Biz
Ses.
BizSz、TaN、S 1sN5 AQN、Si。BizSz, TaN, S 1sN5 AQN, Si.
Ti Bi B4C,B、Cのうちの一者に近い組成を
持ったものである。It has a composition close to one of Ti Bi B4C, B, and C.
これらのうち、窒化物では表面反射率があまり高くなく
、膜が安定であり、強固である点でTaN。Among these nitrides, TaN is preferred because its surface reflectance is not very high and the film is stable and strong.
Si3H4またはAl2Nに近い組成のものが好ましい
。酸化物で好ましいのはYxOs、5cxos。Preferably, the composition is close to Si3H4 or Al2N. Preferred oxides are YxOs and 5cxos.
Ce0z、Ti0z、Zr()z、InzOg、AQz
○δ。Ce0z, Ti0z, Zr()z, InzOg, AQz
○δ.
5nOxまたは5iOzに近い組成ものである。The composition is close to 5nOx or 5iOz.
SiまたはCの水素を含む非晶質も好ましい。相転移に
よって記録を行なう場合、記録膜の全面をあらかじめ結
晶化させておくのが好ましいが、基板に有機物を用いて
いる場合には基板を高温にすることができないので、他
の方法で結晶化させる必要がある。その場合、紫外線照
射と加熱、フラッシュランプよりの光の照射、高出力ガ
スレーザからの光の照射、あるいは加熱とレーザ光照射
との組み合わせなどを行なうのが好ましい。ガスレーザ
からの光の照射の場合、光スポツト径(半値幅)を5μ
m以上5m以下とすると能率が良い。Amorphous materials containing Si or C hydrogen are also preferred. When recording by phase transition, it is preferable to crystallize the entire surface of the recording film in advance, but if the substrate is made of an organic substance, it is not possible to heat the substrate to a high temperature, so crystallization can be performed using other methods. It is necessary to do so. In that case, it is preferable to perform ultraviolet irradiation and heating, light irradiation from a flash lamp, light irradiation from a high-power gas laser, or a combination of heating and laser light irradiation. In the case of light irradiation from a gas laser, the light spot diameter (half width) is set to 5μ.
Efficiency is good if the length is between m and 5 m.
結晶化は記録トラック上のみで起こらせ、トラック間は
非晶質のままとしてもよい。非晶質状態の記録用薄膜に
結晶化によって記録することももちろん可能である。Crystallization may occur only on recording tracks, and the space between tracks may remain amorphous. Of course, it is also possible to record on an amorphous recording thin film by crystallization.
一般に薄膜に光を照射すると、その反射光は薄膜表面か
らの反射光と薄膜裏面からの反射光との重ね合せになる
ため干渉をおこす。反射率の変化で信号を読みとる場合
には、記録膜に近接して光反射(吸収)層を設けること
により、干渉の効果を大きくし、読み出し信号を大きく
できる。干渉の効果をより大きくするためには記録膜と
反射(吸収)層の間に中間層を設けるのが好ましい。Generally, when a thin film is irradiated with light, the reflected light is a superposition of the reflected light from the surface of the thin film and the reflected light from the back surface of the thin film, causing interference. When reading signals based on changes in reflectance, by providing a light reflecting (absorbing) layer close to the recording film, the interference effect can be increased and the readout signal can be increased. In order to further enhance the interference effect, it is preferable to provide an intermediate layer between the recording film and the reflective (absorbing) layer.
中間層は記録書き換え時に記録膜と反射層との相互拡散
が起こるのを防止する効果も有する。中間層には読み出
しに用いる光があまり吸収されない物質が好ましい、上
記中間層の膜厚は3nm以上、400nm以下で、かつ
、記録状態または消去状態において読み出し光の波長付
近で記録用部材の反射率が極小値に近くなる膜厚とする
のが好ましい。反射層は記録膜と基板との間、およびそ
の反対側のうちのいずれの側に形成してもよい。中間層
の特に好ましい膜厚範囲は5nm以上150nm以下の
範囲である。反射層の中間層と反対の側にも上記の無機
物より成る保護層を形成するのが好ましい。The intermediate layer also has the effect of preventing mutual diffusion between the recording film and the reflective layer during recording and rewriting. The intermediate layer is preferably made of a material that does not absorb much of the light used for reading. The thickness of the intermediate layer is 3 nm or more and 400 nm or less, and the reflectance of the recording member near the wavelength of the reading light in the recording state or erasing state. It is preferable to set the film thickness to a value close to the minimum value. The reflective layer may be formed either between the recording film and the substrate or on the opposite side. A particularly preferable thickness range of the intermediate layer is from 5 nm to 150 nm. It is preferable to form a protective layer made of the above-mentioned inorganic material also on the side of the reflective layer opposite to the intermediate layer.
また、記録層の光入射側には、記録光、消去光。In addition, recording light and erasing light are provided on the light incident side of the recording layer.
読み出し光のうちの少なくとも一者の反射率を減少させ
る反射防止層を形成するのが好ましい。反射防止層は記
録膜の保護層を兼ねてもよいし、反射防止層と記録膜と
の中間に保護層を形成してもよい0反射防止層と保護層
とは、記録層−保護層−反射防止層一基板あるいは接着
剤あるいは気体の順に熱膨張係数が順次変化しているの
が好ましく、保護層反射防止層の一方が形成されない場
合やそれぞれが2層以上から成る場合も熱膨張係数が順
次変化しているのが好ましい。Preferably, an antireflection layer is formed that reduces the reflectance of at least one of the readout lights. The antireflection layer may also serve as a protective layer for the recording film, or a protective layer may be formed between the antireflection layer and the recording film. It is preferable that the coefficient of thermal expansion changes sequentially in the order of anti-reflection layer - substrate, adhesive or gas, and even when one of the protective layer and anti-reflection layer is not formed or each consists of two or more layers, the coefficient of thermal expansion changes sequentially. It is preferable that the values change sequentially.
本発明の記録膜は、共蒸着や共スパッタリングなどによ
って、保護膜として使用可能と述べた酸化物、弗化物、
窒化物、有機物などの中に分散させた形態としてもよい
、そうすることによって光吸収係数を調節し、再生信号
強度を大きくすることができる場合が有る。混合比率は
、酸素、弗素。The recording film of the present invention can be produced by co-deposition, co-sputtering, etc. using oxides, fluorides, etc., which can be used as a protective film.
It may also be in the form of being dispersed in nitrides, organic substances, etc. By doing so, it may be possible to adjust the light absorption coefficient and increase the reproduction signal intensity. The mixing ratio is oxygen and fluorine.
窒素、炭素が膜全体で占める割合が40%以下が好まし
い。このような複合膜化を行なうことにより、結晶化の
速度が低下し、感度が低下するのが普通である。ただし
有機物との複合膜化では感度が向上する。The proportion of nitrogen and carbon in the entire film is preferably 40% or less. By forming such a composite film, the speed of crystallization generally decreases and the sensitivity decreases. However, forming a composite film with an organic material improves sensitivity.
各部分の膜厚の好ましい範囲は下記のとおりである。The preferred range of film thickness for each portion is as follows.
記録膜重層膜の場合60nm以上350nm以下、80
nm以上200
nm以下の範囲が再生信
号強度および記録感度の
点で特に好ましい。For recording film multilayer film: 60 nm or more and 350 nm or less, 80 nm
A range of from nm to 200 nm is particularly preferable in terms of reproduction signal strength and recording sensitivity.
反射層との2層以上の構造の場合
15nm以上1100n
以下
無機物保護層 5nm以上200nm以下ただし
無機物基板自体
で保護する時は、0.1
〜20mm
有機物保護膜 : 10nm以上、10mm以下中間
層 : 3nm以上400nm以下光反射層 :5.
nm以上、300nm以下以上の各層の形成方法は、真
空蒸着、ガス中蒸着、スパッタリング、イオンビームス
パッタリング、イオンビーム蒸着、イオンブレーティン
グ。In the case of a two or more layer structure with a reflective layer, 15 nm or more and 1100 nm or less Inorganic protective layer 5 nm or more and 200 nm or less However, when protecting with the inorganic substrate itself, 0.1 to 20 mm Organic protective film: 10 nm or more and 10 mm or less Intermediate layer: 3 nm 400 nm or more Light reflective layer: 5.
The method for forming each layer with a thickness of 300 nm or more is vacuum evaporation, gas evaporation, sputtering, ion beam sputtering, ion beam evaporation, or ion blating.
電子ビーム蒸着、射出成形、キャスティング、回転塗布
、プラズマ重合などのうちのいずれかを適宜選ぶもので
ある。Any one of electron beam evaporation, injection molding, casting, spin coating, plasma polymerization, etc. is selected as appropriate.
本発明の記録膜は必ずしも非晶質状態と結崩状態の間の
変化を記録に利用する必要は無く、何らかの原子配列変
化によって光学的性質の変化を起こさせればよい。The recording film of the present invention does not necessarily need to utilize a change between an amorphous state and a collapsed state for recording, but it is sufficient to cause a change in optical properties by some kind of atomic arrangement change.
本発明の記録用部材は、ディスク状としてばかりでなく
、テープ状、カード状などの他の形態でも使用可能であ
る。The recording member of the present invention can be used not only in the form of a disk but also in other forms such as a tape or a card.
本発明の情報記録用薄膜は結晶化の速度が速く、非晶質
状態の安定性が高く、半導体レーザ光の吸収が多く、再
生信号強度が大きくかつ、耐酸化性が良い。従って、記
録・消去特性が良好で、感度が高く、記録状態の安定性
が良い。The information recording thin film of the present invention has a high crystallization speed, high stability in the amorphous state, high absorption of semiconductor laser light, high reproduction signal intensity, and good oxidation resistance. Therefore, the recording/erasing characteristics are good, the sensitivity is high, and the stability of the recording state is good.
〔実施例1〕 以下に本発明を実施例により、詳細に説明する。[Example 1] The present invention will be explained in detail below using Examples.
直径131、厚さ1.2mのディスク状化学強化ガラス
板の表面に紫外線硬化樹脂によって保護層を兼ねるトラ
ッキング用の溝のレプリカを形成し、−周を32セクタ
ーに分割し、各セクターの始まりで、溝と溝の中間の山
の部分に凹凸ピットの形でトラックアドレスやセクター
アドレスなどを入れた(この部分をヘッダ一部と呼ぶ)
基板14上にマグネトロンスパッタリングによってまず
反射防止層兼保護層である厚さ約1100nの5isN
a層を形成した。次にこの基板を第3図に示したような
内部構造の真空蒸着装置中に配置した。蒸着装置中には
、4つの蒸発源1,2,3゜4が配置されている。これ
らのうちの3つは抵抗加熱による蒸着ボートであり、こ
れらのうちの1つは電子ビーム蒸発源である。これらの
ボートおよび電子ビーム蒸発源は、基板14に情報を記
録しようとする部分の下であって、基板回転の中心軸5
と中心を同一にうる円周上にほぼ位置する。A replica of a tracking groove that also serves as a protective layer is formed on the surface of a disk-shaped chemically strengthened glass plate with a diameter of 131 mm and a thickness of 1.2 m using ultraviolet curing resin. , the track address, sector address, etc. are inserted in the form of uneven pits in the mountainous part between the grooves (this part is called the header part).
First, a 5isN layer with a thickness of about 1100 nm, which is an anti-reflection layer and a protective layer, is formed on the substrate 14 by magnetron sputtering.
A layer was formed. Next, this substrate was placed in a vacuum evaporation apparatus having an internal structure as shown in FIG. Four evaporation sources 1, 2, 3.4 are arranged in the vapor deposition apparatus. Three of these are resistive heated deposition boats and one of these is an electron beam evaporation source. These boats and the electron beam evaporation source are located below the portion where information is to be recorded on the substrate 14 and aligned with the central axis 5 of substrate rotation.
It is located approximately on the circumference of a circle whose center is the same as that of .
2つの蒸着ボートに、それぞれG e −T e化合物
、Sb、およびTlを入れ、電子ビーム蒸発源にCOを
入れた。各ボートと基板の間にはそれぞれ、扇のスリッ
トをもつマスク6.7,8.9とシャッター10.11
,12.13が配置されている。Two deposition boats were charged with G e -Te compounds, Sb, and Tl, respectively, and an electron beam evaporation source was charged with CO. Masks 6.7 and 8.9 with fan-shaped slits and shutters 10.11 are provided between each boat and the board, respectively.
, 12.13 are arranged.
基板14を12Orpmで回転させておいて、各ボート
に電流を流し、また、電子ビームを当てて蒸着原料を蒸
発させた。While the substrate 14 was being rotated at 12 rpm, a current was applied to each boat, and an electron beam was applied to evaporate the deposition raw material.
各蒸発源からの蒸発量は水晶振動子式膜厚モニター15
.16,17.18で検出し、蒸発速度が一定になるよ
うに電流を制御した。The amount of evaporation from each evaporation source is measured by the crystal oscillator type film thickness monitor 15.
.. 16, 17, and 18, and the current was controlled so that the evaporation rate was constant.
第1図に示したように、基板19上の5isNa層20
上にGezsTaezSbsT Q aの組成の記録膜
21を約1100nの膜厚に蒸着した++ S is
N a層は屈折率が基板より高いので適当な膜厚とする
ことによって半導体レーザ光に対する反射防止層も兼ね
ている。この膜厚は記@膜の表面と裏面で反射した光が
干渉し、記録膜が非崩質状態あるいは結晶性の悪い状態
にある時、読出しに用いるレーザ光の波長付近で反射率
がほぼ極小になるような膜厚である。続いて再びマグネ
トロンスパッタリングによって5isNaに近い組成の
保護層22を約1100nの膜厚にした。同様にしても
う1枚の同様な基板19′上にS i !1N4に近い
組成の保護層20 ’ 、 GezgTeeaSb4T
Q sの組成の記録膜21’ 、51gNaに近い組
成の保護M22′を蒸着した。このようにして得た2枚
の基板19゜19′のそれぞれの蒸着膜上に紫外線硬化
樹脂保護層23.23’ を約50μmの厚さに塗布、
形成した後、両者を紫外線硬化樹脂層23および23′
側を内側にして有効物接着剤層24によって貼り合わせ
てディスクを作製した。As shown in FIG. 1, a 5isNa layer 20 on a substrate 19
A recording film 21 having a composition of GezsTaezSbsT Q a is deposited thereon to a thickness of about 1100 nm.
Since the Na layer has a higher refractive index than the substrate, it also serves as an anti-reflection layer for semiconductor laser light by making the film thickness appropriate. This film thickness is noted below.@When the recording film is in a non-collapsible state or a state with poor crystallinity, the reflectance is almost minimal near the wavelength of the laser beam used for reading. The film thickness is such that Subsequently, the protective layer 22 having a composition close to 5 is Na was made to have a thickness of about 1100 nm by magnetron sputtering again. Similarly, S i ! is placed on another similar substrate 19'. Protective layer 20' with a composition close to 1N4, GezgTeeaSb4T
A recording film 21' having a composition of Q s and a protective film M22' having a composition close to 51 g Na were deposited. An ultraviolet curable resin protective layer 23 and 23' is applied to a thickness of about 50 μm on each of the vapor deposited films of the two substrates 19 and 19' thus obtained.
After forming, both are coated with ultraviolet curing resin layers 23 and 23'.
A disk was produced by laminating the disks with the sides inward using the active material adhesive layer 24.
上記のように作製したディスクは150℃で約1時間加
熱した後、ディスクを回転させ、半径方向に動かしなが
ら両面から開口比(Nu+aericalApertu
re)が0.05 のレンズで集光したアルゴンイオン
レーザ光(波長488 n m)を照射し、記録膜21
.21’ を十分結晶化させた。After heating the disk prepared as above at 150°C for about 1 hour, the disk was rotated and moved in the radial direction to increase the numerical aperture ratio (Nu+aerial Apertu) from both sides.
The recording film 21 is irradiated with argon ion laser light (wavelength 488 nm) focused by a lens with re) of 0.05.
.. 21' was sufficiently crystallized.
記録は次のようにして行なった。ディスクを1200r
pmで回転させ、半導体レーザ(波長820nm)の光
を記録が行なわれないレベルに保って、記録ヘッド中の
レンズで集光して基板を通して一方の記録膜に照射し、
反射光を検出することによって、トラッキング用の溝と
溝の中間に光スポットの中心が常に一致するようにヘッ
ドを駆動した。こうすることによって溝から発生するノ
イズの影響を避けることができる。このようにトラッキ
ングを行ないながら、さらに記録膜上に焦点が来るよう
に自動焦点合わせを行ない、レーザパワーを情報信号に
従って強めたり、元のレベルに戻したりすることによっ
て記録を行なった。Recording was done as follows. 1200r disc
pm, the light from the semiconductor laser (wavelength 820 nm) is kept at a level that does not allow recording, and the light is focused by a lens in the recording head and irradiated through the substrate onto one recording film.
By detecting the reflected light, the head was driven so that the center of the light spot was always aligned between the tracking grooves. By doing this, the influence of noise generated from the groove can be avoided. While tracking in this manner, automatic focusing was performed so that the focus was on the recording film, and recording was performed by increasing the laser power according to the information signal or returning it to the original level.
また、必要に応じて別の溝にジャンプして記録を行なっ
た。In addition, recordings were made by jumping to other grooves as necessary.
上記の記録によって、記録膜には反射率変化を生じた。The above recording caused a change in reflectance in the recording film.
この記録膜では、パワーを下げた記録光スポット、ある
いはトラック方向の長さが記録光スポットよりも長く、
隣接するトラック方向への広がりは記録光スポットと同
程度のレーザ光を照射することによって記録を消去する
こともできる。In this recording film, a recording light spot with reduced power or a length in the track direction is longer than the recording light spot.
Expansion in the direction of adjacent tracks can also be erased by irradiating laser light of the same magnitude as the recording light spot.
アドレスを表わすピットの最隣接ピット間の距離は、消
去用光スポットのトラック方向の長さの1/2以上2倍
以上の長さとすると、消去光スポットによってもトラン
クやセクターのアドレスが読める。アドレスを表わすピ
ットの長さも、消去光スポットのトラック方向の長さの
172以上であるのが好ましい、ヘッダ一部に設けられ
るその他のピットも同様である。記録・消去は3×10
δ回以上繰返し可能であった。記録膜の上下に形成する
5iaNa層を省略した場合は、数回の記録・消去で多
少の雑音増加が起こった。If the distance between the nearest adjacent pits representing addresses is set to 1/2 or more and twice or more the length of the erasing light spot in the track direction, the addresses of trunks and sectors can be read by the erasing light spot as well. The length of the pit representing the address is preferably 172 or more lengths of the erasing light spot in the track direction, and the same applies to other pits provided in a part of the header. Recording/erasing is 3×10
It was possible to repeat it more than δ times. When the 5iaNa layers formed above and below the recording film were omitted, a slight increase in noise occurred after several times of recording and erasing.
読出しは次のようにして行なった。ディスクを1200
rpmで回転させ、記録時と同じようにトラッキングと
自動焦点合すせを行ないながら、記録および消去が行な
われない低パワーの半導体レーザ光で反射光の強弱を検
出し、情報を再生した。Reading was performed as follows. 1200 disks
While rotating at rpm and performing tracking and automatic focusing in the same manner as during recording, the strength of the reflected light was detected using a low-power semiconductor laser beam that was not used for recording or erasing, and information was reproduced.
本実施例では約100mVの信号出力が得られた。In this example, a signal output of about 100 mV was obtained.
本実施例の記録膜は耐酸化性が優れており、5isNi
保護膜を形成しないものを60℃相対湿度95%の条件
下に置いてもほとんど酸化されなかった。本実施例の記
録膜は、非晶質の安定性が優れており、レーザ光照射に
より形成された非晶質点の結晶化の活性化エネルギーは
2.8eV と大きな値を示した。The recording film of this example has excellent oxidation resistance, and the 5isNi
Even when a sample without a protective film was placed under conditions of 60° C. and 95% relative humidity, almost no oxidation occurred. The recording film of this example had excellent amorphous stability, and the activation energy for crystallization of the amorphous points formed by laser beam irradiation was as large as 2.8 eV.
上記のG e −T e −S b −T O系記録膜
において、Tlを5原子%とし、GeとTeの含有量の
相対的な比率を一定に保ってsbの含有量(z)を変化
させた場合、消去に必要な最短照射時間(消去時間)お
よび、非晶質記録点の結晶化の活性化エネルギー(Ea
)は、次1表のように変化した。In the above G e -T e -S b -T O-based recording film, Tl is set to 5 at%, and the sb content (z) is varied while keeping the relative ratio of Ge and Te contents constant. In the case of
) changed as shown in Table 1 below.
第 1 表
第2表
上記のG a −T e −S b −T It系記録
膜において、Tlを5原子%とし、Geとsbの含有量
の相対的な比率を一定に保ってTeの含有量(y)を変
化させた場合、記録に必要なレーザ光のパワー(記録光
パワー)、消去時間、及び結晶化温度は第2表のように
変化した。Table 1 Table 2 In the above Ga-T e -S b -T It-based recording film, Tl is set at 5 atomic %, and Te content is maintained constant while keeping the relative ratio of Ge and sb contents constant. When the amount (y) was changed, the laser light power required for recording (recording light power), erasing time, and crystallization temperature changed as shown in Table 2.
また、上記のG e −T e −S b −T Q系
記録膜において、Ge、Te、およびsbの含有量の相
対的な比率を一定に保ってTflの含有量(α)を変化
させた場合、消去時間、およびEaは第3表のように変
化した。Furthermore, in the above G e -T e -S b -T Q system recording film, the Tfl content (α) was varied while keeping the relative proportions of Ge, Te, and sb contents constant. In this case, the erasure time and Ea varied as shown in Table 3.
第 3 表
元素を添加してもよく似た特性が得られる。ハロゲン元
素F、CΩ、Br、Iのうちでは工が特に好ましく、次
いでCQである。アルカリ金属元素。Very similar properties can be obtained by adding Table 3 elements. Among the halogen elements F, CΩ, Br, and I, C is particularly preferred, followed by CQ. Alkali metal element.
Li、Na、に、Rb、CsのうちではNaが特に好ま
しく、次いでKが好ましい。Among Li, Na, Rb, and Cs, Na is particularly preferred, followed by K.
また、上記のG e −T a −S b −T rl
系記録膜において、Ge、Teおよびsbの相対的な比
率を一定に保って、Tlの代わりに(TRの含有量はO
原子%)Coを添加し、coの含有量(β)を変化させ
た場合、記録光パワーおよび結晶化温度は第4表のよう
に変化した。In addition, the above G e -T a -S b -Trl
In the system recording film, the relative proportions of Ge, Te and sb are kept constant, and the content of TR (TR content is O
When Co was added (at %) and the Co content (β) was changed, the recording light power and crystallization temperature changed as shown in Table 4.
ここで、上部保護膜を形成する前に、記録膜を温度60
℃、相対湿度95%の雰囲気中に放置したところ、酸化
による劣化はTΩ含有量が15fiK子%以上で大きく
なり、20原子%以上の時に顕著となった。Here, before forming the upper protective film, the recording film was heated to 60°C.
When left in an atmosphere of 95% relative humidity and 95% relative humidity, deterioration due to oxidation increased when the TΩ content was 15 atomic % or more, and became significant when the TΩ content was 20 atomic % or more.
ここで、Tlの一部または全部を置換してハロゲン元素
、アルカリ金属元素のうち少なくとも一部 4 表
第 5 表
また、上記のG e −T e −S b −T Q系
記録膜において、Ge、Te、Sb、およびTuの含量
量の相対的な比率を一定に保って、COを添加し、Co
の含有量(β)を変化させた場合、再生信号強度および
結晶化温度は第5表のように変化した。Here, at least part of the halogen element or alkali metal element is substituted for part or all of Tl. , Te, Sb, and Tu contents by adding CO and keeping the relative proportions of the contents of Co
When the content (β) was changed, the reproduced signal intensity and crystallization temperature changed as shown in Table 5.
ここで、上記のGe−Ta−8b−Co系または、G
e −Te −S b −T O−G o系において。Here, the above Ge-Ta-8b-Co system or G
In the e-Te-Sb-T O-G o system.
COの一部または全部を置換して、Fe、Ni。Part or all of CO may be replaced with Fe or Ni.
S c HT x g V r Cr + M n H
Cu HZ n g Y gZr、Nb、Mo、Ru、
Rh、Pd、Ag。S c HT x g V r Cr + M n H
Cu HZ n g Y gZr, Nb, Mo, Ru,
Rh, Pd, Ag.
Cd、Hf、Tar W、Re、Os、I r、pt、
およびAuのうち、少なくとも一元素を添加しても、よ
く似た性質が得られる。これらのうちで、記録光パワー
の点ではT x r N x + P dが好ましく、
再生信号強度の点ではV、Crが好ましく、消去時間の
点ではFe、Rhが好ましく、結晶化温度の点ではZr
、Mnが好ましく、耐環境性の点ではNb、Pt、Au
が好ましい。Cd, Hf, Tar W, Re, Os, I r, pt,
Even if at least one element among Au and Au is added, similar properties can be obtained. Among these, T x r N x + P d is preferable in terms of recording light power;
V and Cr are preferred in terms of reproduction signal strength, Fe and Rh are preferred in terms of erasing time, and Zr is preferred in terms of crystallization temperature.
, Mn are preferable, and from the viewpoint of environmental resistance, Nb, Pt, Au
is preferred.
〔実施例2〕
第2図に示したように、基板として、射出成形法によっ
てポリカーボネート板の表面にトラッキング用の溝を形
成したもの25を用い、スパッタリングにより5iOz
に近い組成の厚さ200nmの保護膜26を形成した。[Example 2] As shown in Fig. 2, a polycarbonate plate 25 with tracking grooves formed on the surface by injection molding was used as the substrate, and 5iOz was formed by sputtering.
A protective film 26 with a thickness of 200 nm and having a composition close to that of 200 nm was formed.
次にこの上にGex5TlBsSbbT Q !1cO
4の組成で膜厚が60nmの記録膜27を形成した。続
いてSiO2に近い組成の厚さ250nmの中間!jI
28を形成し、さらに厚さ80nmのB i7S b+
の組成の耐層29.5iOzに近い組成の厚さ1100
nの保護層30を形成した。同様な方法でもう一枚の基
板を作製し1両基板の最上部の5iOz層30上にそれ
ぞれポリイミド31を約0.5μmの厚さにスパッタリ
ングした後、ポリイミド層側を内側にして黒色顔料を混
入したホットメルト接着剤32で両基板を貼り合わせて
ディスクを作製した。ポリカーボネート板25.25’
の表面にもポリイミド層をスパッタリング法で形成し
ておけばさらに安定なディスクとなる。Next on top of this is Gex5TlBsSbbT Q! 1cO
A recording film 27 having a film thickness of 60 nm was formed with the composition No. 4. Next is the middle one with a thickness of 250 nm and a composition close to SiO2! jI
28 and further a B i7S b+ with a thickness of 80 nm.
A breakdown layer with a composition of 29.5 iOz and a thickness of 1100 with a composition close to
A protective layer 30 of n was formed. Another substrate was prepared in the same manner, and after sputtering polyimide 31 to a thickness of about 0.5 μm on the topmost 5iOz layer 30 of both substrates, a black pigment was applied with the polyimide layer side inside. Both substrates were bonded together using the mixed hot melt adhesive 32 to produce a disk. Polycarbonate board 25.25'
If a polyimide layer is also formed on the surface by sputtering, a more stable disk can be obtained.
結晶化方法、記録方法、消去方法、読出し方法は実施例
1とほぼ同様である。The crystallization method, recording method, erasing method, and reading method are almost the same as in the first embodiment.
中間層にはSi○の代わりに実施例1で保護層として使
用可能と述べたGe0z、AQz○δ。For the intermediate layer, Ge0z and AQz○δ, which were mentioned in Example 1 as being usable as a protective layer, were used in place of Si○.
Ge0y、、YzOa、S i○、Zr○zt T a
2o!IIAQN、TaN等の他の無機透明物質を用
いてもよいし、有機物層を用いてもよい。この中間層は
膜厚を3〜40nmとすれば記録書き換え時の記録膜と
反射層との相互拡散を防ぐが光学的にはほとんど存在し
ないのと同じである。従って、光の干渉による反射率の
波長による変化は、記録膜と反射層との2層構造の場合
に近い。Ge0y,, YzOa, S i○, Zr○zt T a
2o! Other inorganic transparent materials such as IIAQN and TaN may be used, or an organic layer may be used. If this intermediate layer has a thickness of 3 to 40 nm, it will prevent mutual diffusion between the recording film and the reflective layer during recording and rewriting, but optically it almost does not exist. Therefore, the change in reflectance due to light interference depending on the wavelength is similar to that in the case of a two-layer structure of a recording film and a reflective layer.
反射層も記録時に原子配列変化を起こすと、再生信号が
少し大きくなる。If the reflective layer also undergoes a change in atomic arrangement during recording, the reproduced signal will become a little larger.
記録膜の膜厚は1Snm以上1100n以下の範囲で記
録膜が非晶質状態に在る時の反射率が干渉によって低く
なり大きな再生信号が得られる。When the thickness of the recording film is in the range from 1 Sn to 1100 nm, the reflectance when the recording film is in an amorphous state becomes low due to interference, and a large reproduced signal can be obtained.
反射層の膜厚はSnm以上300nm以下の範囲、より
好ましくは40nm以上200nm以下の範囲に有るの
が好ましい。反射層を設けることにより、記録膜の膜厚
が上記のように単層の場合よりも薄い領域で大きな再生
信号を得られることから、記8n!Jの吸収係数が単層
の場合より大きい組成領域でも良い特性が得られる。The thickness of the reflective layer is preferably in the range of S nm or more and 300 nm or less, more preferably in the range of 40 nm or more and 200 nm or less. By providing a reflective layer, a large reproduced signal can be obtained in a region where the thickness of the recording film is thinner than in the case of a single layer as described above. Good characteristics can be obtained even in a composition range where the absorption coefficient of J is larger than in the case of a single layer.
記録膜と中間層の膜厚を変化させた時、読出し光の反射
率の干渉による極小が起こる波長が変化する。自動焦点
合わせやトラッキングのために最小限必要が反射率は1
0〜15%であるから、反射率の極小値がこの値以下の
場合は、読出し光の波長より長波長側あるいは短波長側
に極小値が来るようにする必要が有る。短波長側に極小
値が来るようにした方が記録膜の膜厚を薄くでき、熱伝
専によるエネルギー損失を防げる6しかし長波長側に極
小値が来るようにした方が膜厚が厚くなり、記録膜の寿
命および記録書き換え時のノイズ発生防止の点では好ま
しい。When the film thicknesses of the recording film and the intermediate layer are changed, the wavelength at which the minimum reflectance of read light occurs due to interference changes. The minimum reflectance required for automatic focusing and tracking is 1.
Since it is 0 to 15%, if the minimum value of reflectance is less than this value, it is necessary to make the minimum value on the longer wavelength side or shorter wavelength side than the wavelength of the readout light. If the minimum value is on the short wavelength side, the thickness of the recording film can be made thinner, and energy loss due to heat transfer can be prevented.6 However, if the minimum value is on the long wavelength side, the film thickness will be thicker. This is preferable in terms of the life of the recording film and the prevention of noise generation during recording and rewriting.
反射層の材質としては、本実施例のB1−3bの代わり
にBi、BizTe8.Te、Sn、Sb。As for the material of the reflective layer, Bi, BizTe8. Te, Sn, Sb.
A Q 、 A u 、 P b 、 N i 、 N
i −Crなどの多くの半導体、半金属、金属やそれ
らの混合物、化合物が使用可能である。AQ, Au, Pb, Ni, N
Many semiconductors, semimetals, metals, and mixtures and compounds thereof, such as i-Cr, can be used.
本実施例の記録膜も実施例1の記録膜と同様に耐酸化性
が優れており、たとえ保護膜にピンホールが有ってもそ
の周辺に酸化が進行することは無い。Like the recording film of Example 1, the recording film of this example also has excellent oxidation resistance, and even if there is a pinhole in the protective film, oxidation will not proceed around the pinhole.
以上説明したように1本発明によれば、製造プロセスが
簡単で、再現性がよく、記録・再生特性が良く、かつ長
期間安定な情報の記録用部材を得ることができる。記録
の書換えも多数回可能である。As explained above, according to the present invention, it is possible to obtain an information recording member that has a simple manufacturing process, good reproducibility, good recording/reproducing characteristics, and is stable for a long period of time. The record can also be rewritten many times.
第1図は本発明の記録用部材の作製に用いる真空蒸着装
置の内部構造を示す図、第2図、第3図はそれぞれ本発
明の実施例における記録用部材の構造を示す断面図であ
る。
1.2.3・・・蒸着ポート、4・・・電子ビーム蒸発
源、6.7,8.9・・・扇形スリットを持ったマスク
。
10.11,12.13・・シャッター、14・・・基
板、15,16,17.18・・・水晶振動子式膜厚モ
ニター、19.19’・・・基板、20.20’22.
22’・・・5iaNn層、21.21’・・・記録膜
、23.23’・・・紫外線硬化樹脂層、24・・・有
機接着剤層、25.25’・・・基板、26.26’2
8.28’ 、30.30’−8iOz層、27゜27
′・・・記録膜、29.29’・・・B1−8b膜。
31.31’・・・ポリイミド樹脂層、32・・・ホッ
ト第2回
どう、g、(5TLFIG. 1 is a diagram showing the internal structure of a vacuum evaporation apparatus used for producing the recording member of the present invention, and FIGS. 2 and 3 are cross-sectional views showing the structure of the recording member in the embodiment of the present invention, respectively. . 1.2.3... Vapor deposition port, 4... Electron beam evaporation source, 6.7, 8.9... Mask with fan-shaped slit. 10.11,12.13...Shutter, 14...Substrate, 15,16,17.18...Crystal resonator type film thickness monitor, 19.19'...Substrate, 20.20'22.
22'...5iaNn layer, 21.21'...recording film, 23.23'...ultraviolet curing resin layer, 24...organic adhesive layer, 25.25'...substrate, 26. 26'2
8.28', 30.30'-8iOz layer, 27°27
'...Recording film, 29.29'...B1-8b film. 31.31'...Polyimide resin layer, 32...Hot 2nd time, g, (5TL
Claims (1)
少なくとも一者からなる保護層を介して形成された記録
用エネルギービームの照射を受けて変形を伴わずに原子
配列変化を生ずる情報記録用薄膜において、上記情報記
録用薄膜はその膜厚方向の平均組成が一般式Ge_xT
e_ySb_zA_αB_β (ただし、x、y、z、αおよびβは、それぞれ原子パ
ーセントで、20≦x≦60、40≦y≦80、1≦z
≦10、0≦α≦20、0≦β≦20、1≦α+β≦2
0の範囲の値であり、AはTl、ハロゲン元素、および
アルカリ金属元素のうち、少なくとも一元素、BはCo
、Fe、Ni、Sc、Ti、V、Cr、Mn、Cu、Z
n、Y、Zr、Nb、Mo、Ru、Rh、Pd、Ag、
Cd、Hf、Ta、W、Re、Os、Ir、Pt、およ
びAuから選ばれた少なくとも一元素)であることを特
徴とする情報記録用薄膜。 2、Aで表わされる元素がTlであることを特徴とする
特許請求の範囲第1項記載の情報記録用薄膜。 3、Bで表わされる元素がCoであることを特徴とする
特許請求の範囲第1項記載の情報記録用薄膜。[Claims] 1. Changes in atomic arrangement without deformation upon irradiation with a recording energy beam formed directly on a substrate or through a protective layer made of at least one of an inorganic substance and an organic substance. In the resulting information recording thin film, the information recording thin film has an average composition in the film thickness direction of the general formula Ge_xT.
e_ySb_zA_αB_β (where x, y, z, α and β are each atomic percent, 20≦x≦60, 40≦y≦80, 1≦z
≦10, 0≦α≦20, 0≦β≦20, 1≦α+β≦2
A is a value in the range of 0, A is at least one element among Tl, a halogen element, and an alkali metal element, and B is Co
, Fe, Ni, Sc, Ti, V, Cr, Mn, Cu, Z
n, Y, Zr, Nb, Mo, Ru, Rh, Pd, Ag,
1. A thin film for information recording, characterized in that it is at least one element selected from Cd, Hf, Ta, W, Re, Os, Ir, Pt, and Au. 2. The information recording thin film according to claim 1, wherein the element represented by A is Tl. 3. The information recording thin film according to claim 1, wherein the element represented by B is Co.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63148116A JP2664207B2 (en) | 1988-06-17 | 1988-06-17 | Thin film for information recording |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63148116A JP2664207B2 (en) | 1988-06-17 | 1988-06-17 | Thin film for information recording |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH023114A true JPH023114A (en) | 1990-01-08 |
JP2664207B2 JP2664207B2 (en) | 1997-10-15 |
Family
ID=15445614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63148116A Expired - Lifetime JP2664207B2 (en) | 1988-06-17 | 1988-06-17 | Thin film for information recording |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2664207B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007063687A1 (en) * | 2005-12-02 | 2007-06-07 | Matsushita Electric Industrial Co., Ltd. | Information recording medium and method for manufacturing same |
CN111244271A (en) * | 2020-01-19 | 2020-06-05 | 中国科学院上海微系统与信息技术研究所 | Phase change material, phase change memory unit and preparation method thereof |
-
1988
- 1988-06-17 JP JP63148116A patent/JP2664207B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007063687A1 (en) * | 2005-12-02 | 2007-06-07 | Matsushita Electric Industrial Co., Ltd. | Information recording medium and method for manufacturing same |
US8075973B2 (en) | 2005-12-02 | 2011-12-13 | Panasonic Corporation | Information recording medium and method for manufacturing the same |
CN111244271A (en) * | 2020-01-19 | 2020-06-05 | 中国科学院上海微系统与信息技术研究所 | Phase change material, phase change memory unit and preparation method thereof |
Also Published As
Publication number | Publication date |
---|---|
JP2664207B2 (en) | 1997-10-15 |
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