JPH0229905A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To relatively easily decrease the warpage of a substrate and films by application of a heat treatment thereto by first forming a thin amorphous alloy film on the substrate, then forming a thin 'SENDUST(R) film to serve as a core material of a head at the time of producing the thin 'SENDUST(R) film by a sputtering method. CONSTITUTION:The thin amorphous alloy film 2 is first formed on the substrate 1 consisting of a nonmagnetic oxide and the thin 'SENDUST(R) film 3 is formed thereon to a desired thickness at the time of producing the thin 'SENDUST(R) film 3 to serve as the main core on the substrate 1 of the mag netic head formed by using the substrate 1. The thin amorphous film 2 generally causes stress relieving when the heat treatment is applied thereto and, therefore, the stress relieving arises when the thin amorphous film 2 formed between the substrate 1 and the thin 'SENDUST(R) film 3 and the thin 'SENDUST(R) film 3 formed on the thin amorphous film 2 receives the influence thereof as well. As a result, the strain near the boundary of the two thin films 2, 3 de creased and the warpage quantity of the substrate 1 decreases as well. The production yield of the head is improved in this way.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a magnetic head suitable for recording information at high density on a high coercive force magnetic recording medium used in a VTR, DAT, or the like.

Conventional technology In high-density magnetic recording and reproduction, it is generally known that it is advantageous to increase the coercive force of the recording medium, but in order to record information on a recording medium with high coercive force, a strong magnetic field is required. Become. The ferrite material, which is the mainstream material for the head core, has a saturation magnetic flux density of about 4,000 to 5,000 Gauss, and therefore has the drawback that if the coercive force of the magnetic recording medium exceeds 1,000 Oersteds, recording becomes insufficient.

Therefore, amorphous alloys such as CoNbZr are used because they have a higher saturation magnetic flux density than ferrite. However, even in these cases, in order to increase the saturation magnetic flux density, it is necessary to increase the amount of Co in the alloy. Since this poses a problem in the manufacture of many heads, only heads with a saturation magnetic flux density of about 9000 Gauss or less can be manufactured.

Therefore, FeAISl alloy, which exhibits a saturation magnetic flux density of 10,000 or more, is being used as a material for the head. (For example, 9th Japanese Society of Applied Magnetics Academic Lecture Abstracts, 29pA-2).

Problems to be Solved by the Invention However, when forming a sendust thin film using a sputtering method, distortion may occur between the substrate and the film unless various conditions such as the thermal expansion coefficient of the substrate and the argon gas pressure during sputtering are carefully considered. This creates stress, which causes the substrate to warp, which poses a major hindrance to the manufacture of heads, reducing production volume.

Here, we will show a method for forming a Sendust thin film that can relatively easily reduce the warping of the film and substrate by adding a thermal process.

Means for Solving the Problems When producing a sendust thin film by sputtering, an amorphous alloy thin film is first formed on a substrate, and then a sendust thin film to be used as the core material of the head is formed.

Effect The effect of this technical means is as follows. Amorphous thin films generally undergo stress relaxation when heat-treated, so the amorphous thin film formed between the substrate and Sendust thin film undergoes stress relaxation when heat-treated, and for this reason, it is difficult to form on an amorphous alloy. The Sendust thin film produced by this process is also affected by this. As a result, the strain near the boundary between these two thin films is also reduced, and the amount of warpage of the substrate is also significantly reduced.

EXAMPLE Hereinafter, an example of the method for manufacturing a magnetic head of the present invention will be described in detail with reference to the drawings.

Figure 1+al, (bl is an example of a magnetic head formed according to the present invention, Figure 1al is a magnetic head using a non-magnetic substrate. 1 is a non-magnetic oxide substrate, 2 is an amorphous 3 is a Sendust thin film that serves as the core material of the head. Fig. 1 (ITJ uses a Sendust thin film 4 with a high saturation magnetic flux density near the gap, and the other magnetic paths are of the so-called MIG type using ferrite 5. The head 6 is made of glass. An amorphous thin film 7 is formed between the ferrite 5 and the sendust 4.

FIG. 2 ial~+81 is an example of a method for manufacturing a magnetic helad manufactured according to the present invention. Here, Figure 1 (alO
A method of manufacturing a type of head is shown.

Figure 2 (in al, first one non-magnetic semilux substrate 10
An amorphous thin film 11 is formed thereon by sputtering. This amorphous thin film has a composition that will not crystallize during the heat treatment in the subsequent head manufacturing process, such as CoNbZr.
It is an il film containing about 74 at 0% Co. The film thickness of this amorphous alloy is 0.3 μm to 1.0 μm.
There is no problem if the thickness is within the μm range.After this, the sendust thin film 12 is formed to a desired thickness. At this time, an insulator (for example, SiO□13) is used to improve the magnetic properties in the high frequency range.
It is desirable to have a laminated structure of and sendust.

On the other non-magnetic substrate, a glass layer 14 is formed with a thickness of 1 μm to 3 μm.
μm is formed.

In Fig. 2 (Mount 2), the two substrates produced in Fig. 2 +a) are bonded together under heat and pressure in an electric furnace to produce a composite block 15. At this time, the temperature is preferably about 600° C., and it is preferable to carry out the process in a nitrogen atmosphere.

In Fig. 2(e), this composite block is cut into strips, two bars 16 and 17 are made into a set, and each bar is machined with winding grooves (11, 13, and 14 are omitted in the figure). ).

In Figure 2+dl, the butt surface 18 of the two bars 16.17
．． After polishing 19 (gap surface), Si
O2 and Gauss (both omitted from the figure) are sequentially formed by sputtering, and bonded under pressure and heat in an electric furnace to form a head bar 20. The temperature at this time is preferably about 560°C, which is slightly lower than this temperature so that the bonding made in step 2 (bl) does not loosen.

In FIG. 2(e), the head par 20 is appropriately cut to complete a magnetic head.

It should be noted that the amorphous thin film used in the process shown in Figure 2 (al) should be one that does not crystallize in the subsequent pressure and heating process. For example, CoNbZr contains about 79 at% of CO.

Amorphous thin films such as CoNbTaZr can be used. Although the soft magnetic properties of this amorphous thin film are not particularly mentioned here, the effect is sufficient if the effective magnetic permeability is about 500 at IMHz, for example.

Effects of the Invention By the method of manufacturing the core material of a magnetic head according to the present invention, a sendust alloy thin film can be used as the core material of, for example, a VTR or DAT head, and a magnetic head with high saturation magnetic flux density and excellent recording efficiency can be produced compared to the past. Can be manufactured in fractional distillation.

[Brief explanation of the drawing]

Fig. 1 (al, (bl) is a perspective view of the magnetic head of the present invention, and Fig. 2 (a) to (el) show the steps of the manufacturing method of the magnetic head of the present invention. 1...Nonmagnetic oxidation Material substrate, 2...Amorphous thin film, 3...Sendust film. Name of agent: Patent attorney Toshio Nakao Figure 1/---Cit a Sumise Niric acid L Indication of the case Patent application No. 66633 of 1988 Name of the invention Person who amends the manufacturing method of a magnetic head Relationship to the case Patent application Colonel Office 1006 Kadoma, Kadoma City, Osaka Prefecture Name
(582) Matsushita Electric Industrial Co., Ltd. Representative Tani
Akio I

Claims (1)

[Scope of Claims] (1) A magnetic head characterized in that when producing a Sendust thin film to serve as the main core of the magnetic head, an amorphous thin film is formed on a substrate, and then a Sendust thin film is formed thereon. manufacturing method. (2) The method of manufacturing a magnetic head according to claim (1), wherein the amorphous thin film is formed using a sputtering method. (3) The main components of the amorphous thin film are CoNbZr and CoZrT
a, CoNbZrTa, and does not crystallize even after manufacturing the magnetic head.
2) The method for manufacturing a magnetic head according to any one of items 2).