JPH0221741U - - Google Patents
Info
- Publication number
- JPH0221741U JPH0221741U JP10021188U JP10021188U JPH0221741U JP H0221741 U JPH0221741 U JP H0221741U JP 10021188 U JP10021188 U JP 10021188U JP 10021188 U JP10021188 U JP 10021188U JP H0221741 U JPH0221741 U JP H0221741U
- Authority
- JP
- Japan
- Prior art keywords
- wall
- chucks
- workpiece
- attaching
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
Description
第１図ａ，ｂ及び第２図ａ，ｂは、本考案の一
実施例を示すレチクル運搬ケースの正面視及び平
面視断面図である。第３図は従来の運搬ケースの
正面視断面図である。
１００……ワーク（レチクル）、１０１……外
囲壁、１０２……機、１０４……運搬ケース、１
０５……バルーン式チヤツク、１０６……コツク
。
FIGS. 1a and 1b and 2a and 2b are front and plan cross-sectional views of a reticle carrying case showing an embodiment of the present invention. FIG. 3 is a front sectional view of a conventional transportation case. 100...Work (reticle), 101...Outer wall, 102...Machine, 104...Transportation case, 1
05...Balloon chuck, 106...Kottuku.
Claims (1)
流体を封入・排出制御可能なバルーン式チヤツク
を取付けて、ワークをチヤツクすることを特徴と
するレチクル運搬ケース。 A reticle transport case that chucks a workpiece by attaching a balloon chuck that can control fluid injection and discharge from the outside to a machine installed on the inner periphery of the outer wall of a sealed structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10021188U JPH0221741U (en) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10021188U JPH0221741U (en) | 1988-07-28 | 1988-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221741U true JPH0221741U (en) | 1990-02-14 |
Family
ID=31328085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10021188U Pending JPH0221741U (en) | 1988-07-28 | 1988-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221741U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06104331A (en) * | 1992-08-04 | 1994-04-15 | Internatl Business Mach Corp <Ibm> | Pressurized and hermetically sealed portable container |
-
1988
- 1988-07-28 JP JP10021188U patent/JPH0221741U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06104331A (en) * | 1992-08-04 | 1994-04-15 | Internatl Business Mach Corp <Ibm> | Pressurized and hermetically sealed portable container |