JPH02215098A - Accelerator electrode plate and manufacture thereof - Google Patents

Abstract

PURPOSE:To improve cooling efficiency and heat resistance and prevent the occurrence of deformation during the operation for a long period by overlapping and connecting flat side metal plates on both sides of a center metal plate, and boring neutron passing beam holes in the thickness direction of the metal plate. CONSTITUTION:Metal plates 1-3 are made of a molybdenum material, the metal plates 1 and 3 are flat plates, and the metal plate 2 has cooling water passage grooves 4 with through grooves by discharge machining. When the cooling water passage grooves 4 are made through grooves, there is no restriction on the machining precision, size precision and machining time of the cooling grooves 4, and the machining time can be sharply shortened. The cooling grooves 4 can be designed and manufactured in an optional shape, particularly in the shape required to increase the cooling efficiency. The cooling efficiency is increased, the deformation of an electrode plate is prevented, and its life is extended.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an electrode plate of a beam accelerator for accelerating neutrons and the like, and a method of manufacturing the same.

(Prior art) Materials generally used for beam acceleration electrode plates include:
In order to ensure electrical properties, cooling capacity, etc., a copper plate with excellent electrical and thermal conductivity is used.

Generally, beam acceleration electrode plates are heated to a high temperature during use, so cooling operations are required. In a conventional beam acceleration electrode plate, as shown in FIG. 8(a), a cooling pipe (43) made of copper is fixed to an electrode plate body (41) formed of a copper plate with a brazing material (42). In addition, in order to increase the cooling area of the cooling pipe and improve the cooling capacity, a cooling pipe (43) with a rectangular cross section is connected to the electrode plate body (43) as shown in Fig. 8(b).
1) may be constructed by brazing.

During use, a cooling fluid flows in the cooling pipe (43), and the beam acceleration electrode plate is cooled to a predetermined temperature.

However, when a beam acceleration electrode plate using a brazing filler metal (42) as shown in FIGS. 8(a) and (b) is used in a high vacuum, the high vapor pressure contained in the brazing filler metal (42) is reduced. These components evaporate over time, greatly impeding beam acceleration performance. Therefore, prior to use, a long period of baking is performed to remove the volatile components that generate steam, but complete removal is difficult, and as a result, there is a limit to maintaining the performance of the beam accelerator.

Therefore, as shown in Fig. 8(C) and (d), the brazing material (4
2) A method has also been developed in which a plurality of electrode plate elements (44) are butted against each other and their joint end surfaces (47) are welded or diffusion bonded to each other to integrate them. There is.

Figure 8(d) shows the structure and fabrication of an electrode plate for a beam accelerator disclosed in ``New Manufacturing Method for C6RNBI Electrode Plates'', p. 29 of the proceedings of the 4th Annual Conference of the Plasma and Nuclear Fusion Society (1987). Shows how.

That is, the electrode plate shown in FIG. 8(d) has an electrode plate main body (41
) and a cover plate (45), the lower electrode plate body (41
) are machined and formed with narrow grooves (46) for cooling holes. The cover plate (45) is assembled to cover the narrow groove (46) of the electrode plate body (41).

Next, the electrode plate main body (41) and the cover plate (45) are joined by solid-phase diffusion in a vacuum to obtain an integrated electrode plate, and at the same time, cooling grooves (48) are formed by narrow grooves inside the electrode plate. be done. After that, a beam hole is made by machining.

However, in the beam accelerator electrode plate shown in FIG. 8(d), when the beam irradiation time is increased, the copper plate, which is the material of the conventional beam accelerator electrode plate, is deformed by heating, causing deformation of the beam hole. .

In order to solve this problem, it is possible to increase the irradiation time by replacing the copper plate with a molybdenum plate, which is a heat-resistant material, and an electrode plate made of molybdenum with the structure shown in Figure 8(d) has also been developed. .

(Problem to be Solved by the Invention) However, molybdenum materials have poor machinability such as cutting, compared to copper materials. In particular, machining beam holes and cooling grooves that require highly accurate positioning, such as beam accelerator electrode plates, is difficult.

The present invention has been made to solve the above problems, and aims to provide an accelerator electrode plate that has good cooling and heat resistance and does not deform even after long-term operation, and a method for manufacturing the same. purpose.

[Structure of the invention]

(Means for solving the problem) Accelerator fl of the present invention! The electrode plate has a configuration in which flat side metal plates are stacked and bonded on both sides of a central metal plate with a through groove for cooling channels, and beam holes for neutron passage are drilled in the thickness direction of the metal plate. .

In addition, the manufacturing method is electric discharge elm; therefore, flat side metal plates are superimposed on both sides of a central metal plate provided with a through groove for the I cooling channel, the joint is vacuum-sealed, and hot isostatic The bonding portion is diffusion bonded by applying pressure.

(Function) In the present invention, since the cooling channel groove is a through groove,
Electric discharge machining becomes possible. Electrical discharge machining improves the positional accuracy and groove machining accuracy of cooling channel grooves, and also reduces the time required for groove machining.

According to electrical discharge machining, cooling grooves that were conventionally straight can be made into meandering cooling grooves along the neutron passing beam, thereby increasing cooling efficiency.

Furthermore, since the metal plates are bonded to the upper and lower surfaces of the metal plate having the through grooves by diffusion bonding, it is possible to provide a heat-resistant accelerator electrode plate having cooling grooves and having excellent airtightness.

Using isostatic pressure using gas pressure as the pressure means for diffusion bonding makes it possible to uniformly press the thin plate and provides a manufacturing method that is not restricted by the size of electrode plates of various sizes.

By making the electrode plate a composite material of a heat-resistant molybdenum plate and a thermally conductive copper plate, we can take advantage of the heat-resistant and thermally conductive features of the material and provide an electrode plate with a long irradiation life.

(Example 1) (Configuration of Example 1) Next, an example of the present invention will be described with reference to the accompanying drawings.

FIG. 1 is an exploded perspective view showing the structure of an accelerator electrode plate according to this embodiment.

Metal plates made of molybdenum material■,■,■are metal plates■
, (2) are flat plates, and the metal plate (2) has a cooling channel groove (2) having a through groove formed by electrical discharge machining.

The thickness of the metal plates ■, ■, and ■ is 1 mm. The shape of the cooling channel groove 0) is extremely narrow, with a groove width of 0.5 strokes.

FIG. 2 is a sectional view showing an embodiment of an apparatus for carrying out the method for manufacturing the electrode plate shown in FIG. 1.

Insert material 0.0. After inserting (2) into each and combining them, set them in the diffusion bonding device (c).

The diffusion bonding device ■ is equipped with a heating heater ■, a reflector (lO
), support stand (11), pressure jig (12), heat insulating material (13
), a vacuum pump (14), etc.

No insert material on the joint surface. After inserting ■ and combining 1,
Set to the diffusion bonding device (c). After setting, the vacuum pump (14) consisting of a rotary pump and an oil diffusion pump of the diffusion bonding device (1) is used to reduce the pressure inside the device to I
Make it below orr. After that, a current is passed through the heater (2), which is a molybdenum heater, to reduce the ambient temperature within the device and the molybdenum metal plate (2), which is the bonded body, I2. (2) Heat to maintain the surface temperature at 800°C to 1100°C.

Next, a pressure jig (12) is lowered using a hydraulic pump (not shown), and uniform pressure is applied to the molybdenum metal plates (1), (2), and (2). The uniform pressure is approximately 3 to 10 kgf/mu
” value. In order to apply uniform pressure, a pressure jig (
12) uses a composite material made of graphite material, which is relatively less likely to deform even at high temperatures, and stainless steel, which is less susceptible to high temperature oxidation.

The insert material inserted into the joint surface (O20 uses titanium foil with a thickness of 5 to 10 microns.

(Effect of Example 1) As described in the above configuration, 1 of the molybdenum metal plate
2. Sandwich titanium foil insert material 0 and ■ on the joint surface of
When a uniform pressing force of gf/mm2 is applied for 30 minutes to 2 hours, the metal plates (2), (2), and (2) and the insert material (0°) interdiffuse, resulting in a metal-like bond.

Therefore, the metal plates (1), (2), and (2) of this configuration make it possible to manufacture an accelerator electrode plate having a three-piece configuration of a flat plate and a plate having grooves for cooling channels.

In particular, according to this embodiment, since the cooling grooves () are formed into through grooves by electric discharge machining, extremely narrow cooling grooves or cooling grooves with high pitch or dimensional accuracy can be obtained. Also,
Since the diffusion bonding method is used for bonding, it is possible to manufacture accelerating electrode plates with extremely high precision.

(Effects of Example 1) According to this example, since the cooling channel groove is a through groove,
Conventionally, it has been difficult to manufacture beam accelerator electrode plates from molybdenum materials. Machining Accuracy 9 of Cooling Grooves There are no restrictions on dimensional accuracy, machining time, etc., and machining time can be significantly shortened. Further, since the cooling grooves can be designed and manufactured into any shape, especially the shape required to improve the cooling efficiency, the cooling efficiency can be improved.

Furthermore, by increasing the cooling efficiency, the beam accelerator electrode plate will not be deformed and its life can be extended.

(Example 2) (Configuration of Example 2) Next, other embodiments will be described.

FIG. 3 shows the shape of the cooling channel grooves formed on the accelerator electrode plate according to this embodiment, and is a plan view of the metal plate (2) shown in FIG. 1.

As shown in Figure 3, the processing of the cooling channel groove 0) is carried out at the neutron passage beam hole (15) whose position is determined from the drawing.
A meandering groove is formed by electrical discharge machining.

The other configurations are the same as those shown in the first embodiment.

(Operation of Example 2) In order to take advantage of the fact that the beam holes (15) for neutron passage are arranged in two rows and staggered as shown in FIG. 2) is grooved along the beam hole (15). Therefore, the cooling channel groove (2) is longer than in the conventional structure, which was linear.

In this way, the cooling water flows along the beam hole (15), which is one heat source, so that the vicinity of the beam hole (15) can be cooled.

(Effects of Embodiment 2) According to this embodiment, the cooling channel groove is formed into a meandering shape along the beam hole for neutron passage, so the cooling channel groove becomes longer and the cooling efficiency increases. Furthermore, since the cooling water flows very close to the beam hole, cooling efficiency is increased and thermal deformation can be minimized.

By increasing cooling efficiency and suppressing thermal deformation, it is possible to extend the life of the beam accelerator electrode plate.

(Example 3) Next, Example 313 will be explained.

Figure 4 shows metal plates ■ and ■ made of molybdenum material.

After combining ■, seal welding in vacuum (16)
5(a) and (b) are perspective views of the metal plate and the container (18) and lid (19) for vacuuming the metal plate. Show the diagram.

The purpose shown in FIGS. 4 and 5 is to create a vacuum atmosphere on the bonding surfaces of the metal plates (1), (2), (3) to be bonded, and other methods may be used for this purpose.

The thus obtained combination of metal plates (1), (2), and (2) is placed in a bonding device (20) shown in FIG.

Incidentally, in any case, an insert material is used at the joint surfaces of the metal plates ω, 2, and 2 as described in Example 1.

The procedure after entering the bonding device (20) is to start the vacuum pump (14) consisting of a rotary pump and an oil diffusion pump, and move the bonding device i! (20) inside 1×lO″″’T
Make the pressure about orr. After that, argon gas, which is an inert gas, is supplied to the bonding device from the gas supply device (21)! (2
0) and pressurize the gas pressure in the bonding device (20) to approximately 390 kgf/-.

Thereafter, the heater 0) consisting of a molybdenum heater is heated to gradually increase the atmospheric temperature and gas pressure within the bonding apparatus (20).

Finally, the atmospheric temperature is set to 800° C. to 1100° C. and the gas pressure is set to 300 kgf/csr to 100,100 O/aJ, and maintained for approximately 30 minutes to 2 hours.

Thereafter, it is cooled and the seal welds (16) and (17) are processed into the final shape of the beam accelerator electrode plate. Alternatively, the container (18) and lid (19) are removed and processed in the same manner.

According to this embodiment, since Flucon gas is used as the pressurization source, it is possible to join by uniform pressurization.

The bonding conditions are gas pressure 300kgf/L31~100
100O/ai.

Atmosphere temperature: 800°C to 1100°C, holding time: 30 minutes to 2
Under these conditions, the metal plates ■, ■, and ■ made of molybdenum material interdiffuse through the insert material,
A metallurgical bond can be obtained.

Therefore, it becomes possible to manufacture a beam accelerator electrode plate having this configuration.

According to this embodiment, since the gas pressure of argon gas is utilized, a pressurizing mechanism is not required in the bonding apparatus. Therefore, variations in temperature of the bonding surfaces caused by the pressure jig are eliminated, and high-quality bonding can be obtained.

Further, since a pressure jig corresponding to the size of the accelerator electrode plate is not required, the accelerator electrode plate can be manufactured in large and small sizes. Furthermore, the shape of the accelerator electrode plate is not limited to a rectangular or electric type, and it is also possible to manufacture an electrode plate with a complicated shape.

(Example 4) Next, Example 4 will be explained.

FIG. 7 is a sectional view showing the configuration of the accelerating electrode plate.

A metal plate (31) made of molybdenum material, which is a heat-resistant material,
(33) and a copper plate (32) with excellent thermal conductivity.

This composite electrode plate is placed in the bonding apparatus shown in FIG. 2 or FIG. 6, and bonding as described in Examples 1 and 3 is performed. Note that no insert material is used in this embodiment.

With such a configuration, the bonding temperature can be maintained at 700 to 900°C.

Pressure force is 0.5 kgf/m” to 2 kgf/m”
Molybdenum and copper are bonded by holding the temperature at a relatively low value for approximately 30 minutes to 2 hours.

In the electrode plate made of a composite material of copper and molybdenum obtained in this way, a molybdenum plate is placed on the surface that is irradiated with neutrons, which requires heat resistance, and a metal plate with grooves for cooling channels is , with copper plates arranged. In terms of heat resistance and cooling efficiency, synergistic effects can be obtained by utilizing the physical properties of molybdenum plates and copper plates, respectively.

In addition, the electrode plates can be transformed by combining three plates.

In particular, thermal deformation caused by differences in linear expansion coefficients of different materials can be minimized.

According to this embodiment, the heat resistance and cooling efficiency required for the electrode plate can be improved.

Therefore, it is possible to manufacture an electrode plate with extremely little thermal deformation, which contributes to improved irradiation resistance time and extended service life.

〔Effect of the invention〕

As explained above, the present invention has the following effects.

Since the cooling channel grooves of the beam accelerator electrode plate made of molybdenum material can be machined into any shape, cooling efficiency is greatly improved, thermal deformation is small, and the life of the electrode plate can be extended.

In addition, as the electrode plate manufacturing method uses a bonding device that uses gas pressure, it is possible to improve bonding performance, resulting in an electrode plate with excellent airtightness, and is not limited by the size and shape of the electrode plate. It is possible to manufacture an electrode plate as designed with a relatively high degree of freedom.

Furthermore, 1! By combining the configurations of the electrode plates, the cooling efficiency is greatly improved and a beam accelerator electrode plate with high heat resistance can be obtained.

[Brief explanation of the drawing]

FIG. 1 is an exploded perspective view showing an accelerator electrode plate according to a first embodiment of the present invention, FIG. 2 is a sectional view showing an embodiment of an apparatus for carrying out the method for manufacturing the electrode plate, and FIG. is a plan view of a metal plate according to a second embodiment of the present invention, FIG. 4 is a perspective view of a combination of metal plates according to a third embodiment of the present invention, and FIG. 5(a) is a plan view of a metal plate according to a third embodiment of the present invention. A perspective view of a combination of metal plates, FIG. 5(b)
6 is a perspective view of a container and a lid for vacuum sealing a metal plate, FIG. 6 is a cross-sectional view showing an embodiment of a device for vacuum sealing the metal plate, and FIG. 7 is a fourth embodiment of the present invention. FIG. 3 is a perspective view of an electrode plate. FIGS. 8(a), (b), (c), and (d) are cross-sectional views showing conventional accelerator electrode plates. 1.2.3... Metal plate 4... Cooling channel groove 5...
・Hole for water supply and drainage 6.7...Insert material ・8...
・Diffusion bonding device 9... Heater 10... Reflector 11... Support stand 12... Pressure jig
13...Insulating material 14...Vacuum pump 15.
...Beam holes 16, 17...Seal welding 18...
Container 19...Lid 20...Joining device 2
1... Gas supply device 22... Argon gas cylinder 31, 32. 33... Metal plate 41... Electrode plate body 42... Brazing material 43... Cooling pipe 44...
・Electrode plate element 45...Cover plate 46...Small groove
47... Joint end surface 48... Cooling groove
49...Weld bead Fig. 1/4 Fig. 2 Fig. Fig. (mu)

Claims (4)

[Claims] (1) Flat side metal plates are stacked and bonded on both sides of a central metal plate provided with a through groove for cooling channels, and beam holes for neutron passage are bored in the thickness direction of the metal plates. accelerator electrode plate. (2) The accelerator electrode plate according to claim (1), wherein the cooling water passage through groove is meandering. (3) Claim (1) characterized in that the side metal plates are made of a heat-resistant material such as molybdenum or tungsten, and the central metal plate is made of a metal with good thermal conductivity and electrical conductivity such as copper.
) Accelerator electrode plate described. (4) Lay flat side metal plates on both sides of a central metal plate with a through groove for cooling channels formed by electrical discharge machining, vacuum seal the joint, and seal the joint by hot isostatic pressing. A method for manufacturing an accelerator electrode plate characterized by diffusion bonding.