JPH0197831A - Detecting apparatus of position of leak - Google Patents

Abstract

PURPOSE:To discover rapidly a defect in a large filter area, by a method wherein filters arranged on a ceiling or the like are inspected in a range equivalent to an interval between a light emitter and a photosensor and the position of a leak is inspected precisely when the leak is discovered. CONSTITUTION:An intermediate base block 2 is provided on a running truck 1 of a leak position inspecting apparatus so that it is rotatable and movable laterally in the horizontal direction, and a light emitter 4 and a photosensor 5 are fitted to a support arm 3 fitted to the base block 2, so that they face each other on the same axis at a prescribed interval between them. The running of this running truck 1 and the operation of the base block 2 are executed by a control device 6, and this control device 6 makes the running truck 1 run in the direction perpendicular to the optical axis B of the light emitter 4, while a defect in the direction X of a filter 7 to be measured is detected by a first detecting means 8. In addition, a change in the photosensing state of the photosensor 5 is detected by a second detecting means 9, the running truck 1 is stopped, the base block 2 is rotated to a position whereat the optical axis B is aligned with the running direction, and the defect in the direction Y of the filter 7 is detected in the direction perpendicular to the direction of the running truck 1.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a leak position detection device capable of detecting a leak position of an air purifying filter installed on a ceiling or the like.

[Conventional technology]

Conventionally, this type of leak position detection device is shown in Figures 7 and 8.
As shown in the figure, it is known that a support arm 31 is attached to a traveling vehicle chassis 30, and a suction nozzle 32 of a particulate amount measuring device is attached to the tip of this support arm 31.

The support arm 31 is movable on the XY plane, and after stopping the traveling vehicle platform 30 at predetermined distances, the support arm 31 is moved back and forth and left and right to position it on the ceiling.
The area under the PA filter 33 is scanned to detect defects such as pinholes.

[Problem that the invention seeks to solve]

However, in the conventional configuration described above, as shown in Fig. 8, measurement is performed by moving the detection point in a zigzag pattern, so it is often necessary to scan one of the filters to be measured arranged in a grid. The problem is that it takes time.
- The present invention has been made in view of the above-mentioned matters, and its purpose is to provide a leak position detection device that can quickly discover defects in filters arranged on a ceiling or the like.

[Means for solving problems]

In order to solve the above problems, the present invention has the following configuration.

An intermediate base 2 is provided on a traveling vehicle platform 1 so as to be rotatable and horizontally movable, and a support arm 3 is attached to the intermediate base 2.

A light emitter 4 and a light receiver 5 are attached to the support arm 3 facing each other at a predetermined interval, and the traveling vehicle platform 1 is further provided with a control device 6 for controlling its travel and the operation of the intermediate base 2. .

This control device 6 causes the traveling vehicle 1 to travel in a direction perpendicular to the optical axis B of the light emitter 4, and
A first detection means 8 is provided for detecting directional defects.

Further, when the light receiving state of the light receiver 5 changes, the control device 6 detects and stores the change, stops the traveling chassis 1, and rotates the intermediate base 2 to a position where the optical axis B is along the traveling direction. The apparatus further includes a second detection means 9 for detecting defects in the filter to be measured 7 in the Y direction by laterally moving the intermediate base 2 in a direction perpendicular to the direction of the traveling vehicle 1.

Each function of the first detection means 8 and the second detection means 9 can be replaced by a microcomputer, for example.

The light receiver 5 can use, for example, a photomultiplier, and detects the presence or absence of dust in the air, that is, the presence or absence of defects in the filter to be measured, by detecting the blocking state of light or detecting the state of light diffusion. can be detected.

In addition to the mode described above, the first detection means 8 rotates the intermediate base 2 to a position where the optical axis B is aligned with the traveling direction only when a defect is found after the search in the X direction is completed. It also has a control mode.

[Effect]

The traveling chassis I travels in a direction perpendicular to the optical axis B of the light emitter 4 according to a command from the control device 6, and travels in the X direction of the filter to be measured 7, with the distance between the light emitter 4 and the light receiver 5 as the width. progress while detecting defects.

Here, when the traveling vehicle l reaches a part where the filter 7 to be measured is defective and dust is spewing out, the light beam running between the light emitter 4 and the light receiver 5 is disturbed by the dust, and the light is received by the light receiver 5. Condition changes. As a result, the X of the filter to be measured 7
Orientation defects are detected.

Then, the control device 6 detects and stores this, stops the traveling vehicle platform 1, and rotates the intermediate base 2 to a position where the optical axis B is along the traveling direction. Then, the intermediate base 2 is laterally moved in a direction perpendicular to the direction of the traveling vehicle 1 to detect defects in the filter to be measured 7 in the Y direction.

As described above, since the defect in the Y direction is not inspected until the defect in the X direction of the filter to be measured 7 is detected, the presence or absence of a defect in the filter to be measured can be quickly inspected over a wide range. .

Note that the first detection means 8 operates to rotate the intermediate base 2 to a position where the optical axis B is along the traveling direction only when a defect is found after the search in the X direction is completed. You can also do it.

〔Example〕

An embodiment of the present invention will be described based on FIGS. 1 to 6.

<First embodiment> The traveling chassis l is equipped with four wheels PR, PL, RR, and RL, and the wheels PR and PL are equipped with independent motors RM and LM.
are coupled to each other, while the wheels R[, RL are free ladders, and can travel forward, backward, left and right by controlling motors RM and LM.

A rotary base 2a driven by a motor KM is provided on the upper surface of the traveling chassis l. The rotation base 2a is further provided with a lateral movement base 2b driven by a motor YM, and the rotation base 2a and the lateral movement base 2b constitute an intermediate base 2.

A support column 3a is erected on this intermediate base 2, and a support rod 3b is horizontally attached to the upper end of this support column 3a. It consists of

The support rod 3b is extendable and retractable, and a light emitter 4 and a light receiver 5 are attached to opposite ends of the support rod 3b with a predetermined distance therebetween.

The light emitter 4 emits a laser beam;
The light receiver 5 detects the intensity of this laser beam, and uses a photomultiplier (photomultiplier tube). These light emitters 4 and light receivers 5 are protected by taking advantage of the fact that when dust exists on the optical axis B of the laser beam, the laser beam is scattered and the sight that reaches the light receiver 5 is reduced, as shown in FIG. The position of the defect in the measurement filter 7 is detected. The light receiving window of the light receiver 5 is a pinhole P, which prevents light diffused by dust from entering the light receiver 5 again and causing malfunction.

Further, the traveling chassis 1 is provided with traveling control by controlling the motors RM and LM, and a motor K M .

A control device 6 is provided which centrally controls the operation of the intermediate base 2 by controlling YM.

The control device 6 includes a first detecting means 8 for causing the traveling vehicle l to travel in a direction perpendicular to the optical axis B of the light emitter 4 and detecting a defect in the X direction of the filter 7 to be measured, and a first detecting means 8 for detecting a defect in the X direction of the filter 7 to be measured; When the light reception state of the vehicle 5 changes, this is detected and the traveling vehicle I is stopped, the intermediate base 2 is rotated to a position where the optical axis B is along the traveling direction, and the intermediate base 2 is further moved. A second detection means 9 that detects defects in the Y direction of the filter 7 to be measured by moving it laterally in a direction perpendicular to the direction of the vehicle chassis l.
have.

The motors RM, LM, KM, YM and the driver 20 of the light emitter 4 are controlled by a computer C, and the motors RM and LM are driven via a drive circuit 21.

This computer C includes a random access memory 22,
When the read-only memory 23, printer 24, and display 25 are connected, a signal from the light receiver 5 is input.

Since it detects the dust present between the light emitter 4 and the light receiver 5, it cannot be expected to have high sensitivity like a particle counter, but in general, if there is a defect in the HEPA filter, the amount of leakage is 104 ~105 pieces/a
ft, so it can be detected without any problem.

An example of the operation will be described below with reference to the flowchart shown in FIG. 6(A).

First, when the inspection is started in step 40, step 41
At step 42, the traveling chassis 1 moves forward, and at step 42 an inspection for the presence or absence of leakage is started. If no leak (defect) is detected here, the negative branch N returns to step 41 and the running continues.

On the other hand, if a leak is detected, the process moves to step 43, and the X coordinate of the filter 7 to be measured, that is, the coordinate in the traveling direction of the traveling vehicle I is recorded. At this point, the traveling chassis 1 stops, and in step 44 the intermediate base 2 rotates by 90 degrees, and in step 45 it moves laterally to start inspecting the coordinate (X coordinate) orthogonal to the traveling direction of the traveling chassis 1. (Step 46).

Subsequently, in step 47, the X coordinate of the leak point is detected and recorded. Then, in step 48, the X coordinate and X coordinate of the leak point are displayed.

In this way, all the filters 7 to be measured are inspected, and when the inspection is completed, the process moves to the end step 50 via step 49, and if the inspection has not been completed, the process returns to step 41 to continue the inspection.

<Second Embodiment> In the embodiment described above, if dust exists on the optical axis B of the laser beam, the laser beam is scattered and the amount of sight reaching the light receiver 5 is reduced. In this embodiment, an optical trap T is provided on the light receiving surface of the light receiver 5, and only the light scattered by the dust is allowed to enter, and this is detected. The optical trap T is for removing the laser beam component that goes straight from the light source.

An example of the operation will be described below with reference to a flowchart shown in FIG. 6(B).

First, when the work is started in a start step 60, the traveling chassis 1 moves forward in a step 61, and in a step 62, an inspection for the presence or absence of a leak is started. If no leak is found in step 62, the process moves to step 63, where it is determined whether the inspection in the X direction has been completed.

If the inspection is not completed in step 63, step 6
On the other hand, if the process has ended, the process moves to step 74.

If a leak is discovered in step 62, step 6
4, where the position of the leak on the X coordinate is stored. Subsequently, in step 65, it is determined whether or not the inspection in the X direction has been completed, and if the test is negative, the process moves to step 61, while if the test is affirmative, the process moves to step 66. In step 66, the traveling chassis 1 is moved backward to the center coordinate in the X direction within the inspection area, and in step 67, the intermediate base 2 is
While rotating it, it is laterally moved in step 68, and a leak test at the coordinate (Y coordinate) orthogonal to the traveling direction of the traveling chassis 1 is started (step 69).

In step 69, it is determined whether or not there is a leak, and if the technique is affirmative, the process moves to step 70 in which the position of the leak in the Y coordinate is stored. On the other hand, in the negative technique, the process moves to step 71, and in step 71, it is checked whether or not the inspection in the Y direction has been completed.

Then, in step 72, the traveling chassis 1 is returned to its original position in the X direction, and in step 73, the XY coordinates are displayed.

Subsequently, in step 74, it is determined whether or not the test has been completed, and if the test is negative, the process returns to step 61, and if the test is positive, the process returns to step 7.
Step 5 and end.

[Effect of idea]

According to the present invention, the filters arranged on the ceiling etc. are first inspected using the width of the interval between the emitter 4 and the receiver 5, and only when a leak is found, the leak position is precisely inspected. Therefore, HEPA in clean rooms
Even when inspecting a vast area such as a filter, the location of the leak can be found extremely quickly.

[Brief explanation of the drawing]

Figures 1 to 6 show embodiments of the present invention, with Figure 1 being an overall perspective view, Figure 2 being a side view of the main parts, and Figure 3 being a side view of the main parts showing another embodiment. , Fig. 4 is a complaint correspondence diagram, Fig. 5 is a block diagram, Fig. 6 (A) and Fig. 6 (B) are flowcharts Fig. 1, and Fig. 7 and Fig. 8 show a conventional leak position detection device. , FIG. 7 is a side view, and FIG. 8 is a plan view showing the scanning locus under the filter. L... Traveling chassis, 2... Intermediate base, 3...
... Support arm, 4... Emitter, 5... Light receiver, 6... Control device, 7... Filter to be measured, 8... First detection means, 9... Second detection Means: B...optical axis. Patent applicant Takasago Thermal Engineering Co., Ltd. Maromura Figure 1 3t) 5 3□ 2 2b /2゜1~ノ/ Hat (Y'noko theory D (/ξ 7' 0 6 ゛~9 Figure 2 3) Figure 4 Figure 5 RM LM Figure 6 (A) Figure 7 Figure 8

Claims (1)

[Claims] (1) An intermediate base 2 is provided on the traveling vehicle platform 1 so as to be rotatable and horizontally movable, a support arm 3 is attached to the intermediate base 2, and a light emitter 4 and a light receiver 5 are attached to the support arm 3. The traveling vehicle chassis 1 is further provided with a control device 6 that controls the travel of the vehicle platform 1 and the operation of the intermediate base 2. a first detection means 8 for detecting a defect in the X direction of the filter 7 to be measured by running the traveling chassis 1 in a direction perpendicular to the axis B; and a first detection means 8 for detecting a defect in the X direction of the filter 7 to be measured; The traveling vehicle platform 1 is stopped and the intermediate base 2 is rotated to a position where the optical axis B is along the traveling direction, and the intermediate base 2 is further moved laterally in a direction perpendicular to the direction of the traveling vehicle chassis 1 to be measured. A leak position detection device comprising: second detection means 9 for detecting defects in the filter 7 in the Y direction.