JPH01308847A - Glass substrate - Google Patents

Abstract

PURPOSE:To obtain a glass substrate excellent in a weather resistance by providing a specific amount of alkyl groups remaining in a calcined SiO2-TiO2-based oxide film applied to a glass substrate surface. CONSTITUTION:In a glass substrate having the surface coated with a calcined SiO2-TiO2-based oxide film prepared by calcining an alkyl group-containing organometallic compound, alkyl groups in an amount of 0.5-5wt.% based on the oxide are left in the calcined film. Although an optional glass substrate, such as soda-lime glass, borosilicate glass or aluminosilicate glass, is cited as the usable substrate, an alkaline metal-containing glass, such as the soda-lime glass, is preferably used to greatly reflect effects and reduce the cost. Any compound capable of initiating polycondensing or crosslinking reaction to increase the viscosity of solutions may be used as the above-mentioned organometallic compound. Si(OCH3)4, Ti(OC3H7)4, Zr(OC3H7)4, etc., are exemplified as the afore-mentioned compound.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a glass substrate with excellent weather resistance, and particularly to a glass substrate excellent in use as a magneto-optical disk substrate.

[Conventional technology]

Conventionally, as a glass substrate having an insulating film, 50% was deposited on a soda lime glass substrate by a chemical vapor deposition (CVO) method.
Those in which an in2 film is formed are widely known. (e.g. N, Goldsmitb and W, Kernt
RCA Review, 28, 153 (196
7)) Also, 5tCh h by the same chemical vapor deposition method.
Many glass substrates on which OS-based films are formed have been reported.

(For example, W. Kern, RCA Review
3 Sat [4].

On the other hand, as a glass substrate on which an insulating film is formed by a solution coating method, a SiO□ film is formed on a soda lime glass substrate (for example, S, 5akka, et al.

J, Non-Cryst, 5olids, 63.2
23 (1984)), those with composite oxide films based on SiO, -P, O, (e.g., JP-A-62-158136), and those with Sing-TiOz-based films (e.g., Th1n). Solid Films
, 77129 (1981)) are known.

Conventionally, as a magneto-optical disk substrate, a glass substrate in which irregularities are formed by etching is known. (For example, J.

Braar and K, S, Imn+ink, 5PI
B, 420 206 (1983)) It is also known to form irregularities by applying a solution containing silicon alkoxide onto a glass plate and pressing a mold against it. (For example, JP-A-62 [Problem to be Solved by the Invention]) However, when the above-mentioned conventional glass substrate is kept at high temperature and high humidity (for example, 70°C and relative humidity of 90%),
There were problems in that sodium carbonate was deposited on the surface and the substrate deteriorated.

In particular, the above problem is a serious problem for substrates such as magneto-optical disks 1 which require a high degree of reliability.

[Means to solve the problem]

The present invention has been made to solve the above-mentioned conventional problems, and includes a glass substrate whose surface is coated with a Sing-TiO□-based oxide fired film in which an alkyl group-containing metal organic compound is fired. The alkyl group is left in the fired film in an amount of 0.5 to 5 wt% based on the oxide.

As the substrate that can be used in the present invention, any glass substrate such as soda lime glass, borosilicate glass, aluminosilicate glass, etc. can be used, but it is essential to use an alkali metal-containing glass such as soda lime glass. This is preferable because the effect will be greatly reflected and the price will also be low.

The metal organic compound used in the present invention can be any compound that increases the viscosity of the solution by polycondensation or crosslinking reaction.

For example, 5i(QC)Is)n r 5t(OCJ,)t
, Ti(QC:)b)4°Ti(OC4Hq)4.
Zr(QC:+Ib)a, Zr(OCJ++)4゜8l
(QC:1)I7)! , Af (OCJq) *,
N (OR) of Na0CJs, l [M is Si, Ti
, Zr, Ca, Aj2. Na, Pb,
B. Sn.

metal such as Ge, R is an alkyl group such as methyl or ethyl, n
is an integer of 1 to 4] and -(J,
-COO)l, -COOR, -Nl(z.

Alternatively, metal organic compounds containing a general functional group that performs a crosslinking reaction can be exemplified.

The fired film of the metal-organic compound on the glass substrate can be formed by immersing the glass substrate in a solution containing the metal-organic compound (hereinafter referred to as solution) and then pulling it up (commonly known as dipping method), or by dropping the solution and then rotating it. It is produced by drying and baking a coating film produced by a commonly used film production method such as a spin-coating method or a spray method.

In the present invention, the fired film of Sing-TiO If the residual alkyl group is more than 5 wt%, the mechanical properties of the fired film will be extremely reduced. Further, if the residual alkyl group is less than 0.5 wt%, the effect of improving weather resistance of the present invention will not appear.

The present invention uses 5iOz-T as a fired film of a metal organic compound.
Although an iO□-based film is used, the Sing-TiO□-based film has significantly improved weather resistance. Among the SiO□-TiOz-based amorphous films, it is preferable to use a Sin, -Tj(h) two-component based amorphous film because it is easy to manufacture.

The Tie content in the 5in2TiO□-based amorphous film can be set arbitrarily, but it is preferably 6 to 70 mol percent. Whether the TiO□ content of the film is less than 6 mol percent or exceeds 70 mol percent, the effect of improving the weather resistance of the glass substrate on which the film is formed is less likely to appear.

In particular, a substrate having a TiOz content of 6 to 12 mol percent is preferable as a substrate for optical applications.

Whether the Ti0z content of the film is less than 6 mol percent or exceeds 12 mol percent, light reflection at the interface between the film and the glass substrate tends to increase.

In addition, especially when an organic polymer (such as polyethylene glycol) is included as a thickener in the coating film preparation solution, the fired film formed will have a high porosity and the refractive index will decrease. Therefore, it is preferable that the TiO2 content for the optical use is 10 to 25 mol%. Even if the content is less than 10 mol% or more than 25 mol%, light reflection at the interface between the film and the glass substrate tends to increase.

In particular, in the method of manufacturing a magneto-optical disk substrate by transferring the groove shape of a press mold or the like onto the coating film, it is preferable to add a thickener to the coating solution in terms of workability.
(For example, JP-A No. 62-225273) In such a case, the TiO2 content is preferably 10 to 25 mol % as described above. (When coating without adding a thickener to the coating solution, the concentration is preferably 6 to 12 mol %.) A metal in which the alkyl group of the starting metal organic compound remains in an amount of 0.5 to 5 wt % based on the oxide. The fired film of organic compound is
For example, it can be obtained by heat-treating the coating film of the metal organic compound at a temperature of 90 to 400°C.

In heat treatment at a temperature below 90°C, the residual alkyl group
When the amount is less than t%, a large amount of water remains in the film, and water-based problems tend to occur. Furthermore, as mentioned above, the film tends to have low mechanical strength.

In heat treatment at a temperature higher than 400°C, residual alkyl groups become 0.5 wt% or more, and alkali metal ions in the substrate glass diffuse into the fired film of the metal-organic compound during heat treatment, resulting in It tends to show only a lower effect than the effect of improving weather resistance by a film fired at ℃. Moreover, the firing temperature is 90 to 20
It is desirable to set the temperature to 0°C because particularly good weather resistance can be obtained.

The average film thickness of the fired film of the metal-organic compound such as the SiO□-TiO□-based amorphous film is preferably 0.02 to 2.0 μm.

When the thickness of the cough membrane body is less than 0.02μ1, the degree of improvement in weather resistance of the glass substrate due to the provision of the membrane body is low.

Moreover, if the film thickness of the film body exceeds 2.0 μm, peeling problems tend to occur.

Especially when used as a magneto-optical disk substrate, the S
The average film thickness of the iO□-Tifh-based amorphous film is 0.15~
The average film thickness is preferably 2.0 μm.

By providing the film on both sides of the glass plate, both sides of the glass plate can be protected. However, it can be implemented in any form, such as providing it on one side of the glass plate, if necessary.

When used as a magneto-optical disk substrate, the glass substrate may be etched using an etching method or a sol-gel stamping method (Japanese Patent Application Laid-Open No. 1983-1999).
102445) or the like, and then a fired film of a metal organic compound may be formed. However, a method of providing a film body having an uneven surface on a smooth glass substrate is preferable because productivity is high. The unevenness may be provided on at least one side.

The residual alkyl group in the metal organic compound can be measured, for example, by infrared spectrophotometry, thermogravimetric analysis, or the like.

The amount of alkyl groups in the metal-organic compound contained in the solution used for coating changes as the degree of polymerization of the metal-organic compound changes, but in the present invention, the residual amount of alkyl groups in the metal-organic compound refers to The evaluation is based on the weight when it completely becomes an oxide. (For example, if the raw material Si (OCJs) is not hydrolyzed at all and exists as a monomer, the unreacted alkyl group becomes the oxide Sing.
This means that it contains 247 wt% based on the weight of . In addition, three alkyl groups are present as monomers through hydrolysis, i.e., Si (OCzHs) (OH)
3, the unreacted alkyl group is 61
This means that it contains wt%. The degree of polymerization further increases,
As the degree of hydrolysis progresses, the amount of unreacted alkyl groups decreases. That is, when there is one unreacted ethoxy group in an inorganic polymer consisting of 10 silicon (Si) atoms, it means that 6 wt % of alkyl groups are contained. ) [Function] According to the present invention, the fired film of the Sin, -Tie, metal organic compound acts as a diffusion prevention layer for sodium ions from the glass substrate side, and provides protection for improving the weather resistance of the glass substrate. It plays the role of a membrane.

When using a fired film of the metal-organic compound in which 0.5 to 5 wt% of the alkyl group of the metal-organic compound remains based on the oxide, the alkyl group in the fired film will not have the effect of alkali metal hunting. It is believed that good weather resistance can be achieved by doing so.

In addition, such a fired film having 0.5 to 5 wt % of residual alkyl groups already has a sufficiently developed inorganic skeleton, and its mechanical strength is not significantly impaired.

〔Example〕

Example-1 Silicon tetraethoxide (Si (
OCzHs) #) and titanium tetra n-butoxide (Tf(0-netHq) t) were used, ethanol was used as a solvent, and hydrogen chloride was used as a hydrolysis catalyst. The amount of water added was 4 times that of silicon tetraethoxide in terms of molar ratio. Dilute hydrochloric acid (1 wt%) was added to an ethanol solution of silicon tetraethoxide, and the mixture was stirred at room temperature for 30 minutes. Thereafter, an ethanol solution of titanium tetra n-butoxide was gradually added, and the reaction was continued for another 30 minutes at room temperature. The molar ratio of silicon tetraethoxide and titanium tetra-n-butoxide was 91:9.

The solution thus obtained is yellow to colorless and transparent, and has an oxide concentration of 8.5 wt%. The solution was diluted to twice the volume with ethanol to prepare a coating solution.

By immersing a soda lime glass substrate in the coating solution and pulling it up at a constant speed (1.6 m/Sec),
A 1Si02.9TiO□ coating film was formed on a glass substrate. The coating film is quickly coated with a peak height of 0.15 μm and a peak height of 2 μm.
m, thickness 5 made of acetyl cellulose (elastic modulus 10' kg f/crA) having many peaks with a peak interval of 4 μm
Bonding was performed by pressing a 0 μm mold.

Thereafter, the glass substrate with the coated film bonded with the mold release was dried at room temperature for 15 minutes, and then primary baking was performed in the air using a clean oven at 90°C for 30 minutes, after which the acetylose mold was released. .

After the mold release, the coated glass substrate was subjected to final firing at 400° C. for 15 minutes.

After this final baking, the coating film became an amorphous film (M refraction index: 1.52) with an average thickness of 210 nm.

Observation of the surface and cross section of the magneto-optical disk substrate produced by the above procedure using a scanning electron microscope revealed that good groove shapes were formed with a groove depth of about 75 nm, a width of 2 μm, and a groove spacing of about 4 μm.

FIG. 1 shows a schematic cross section of the magneto-optical disk substrate manufactured according to the above embodiment.

Next, a weather resistance test was conducted on the magneto-optical disk substrate. The weather resistance test was conducted by condensing the sample and then holding it in an atmosphere of 70° C. and 90% relative humidity for 4 days.

The surface of the magneto-optical disk substrate after the weather resistance test was as uniform as before the weather resistance test, and no surface deterioration or precipitation was observed.

The same weather resistance test was conducted on magneto-optical disk substrates manufactured by the same manufacturing method as in this example, except that the final firing temperature was changed to 90°C and 200°C.

The surface of these magneto-optical disk substrates after the weather resistance test was uniform, and there was no surface deterioration, whether the final heat treatment was carried out at 90℃ or 200℃, as was the case with the final heat treatment at 400℃. No occurrence of precipitates was observed.

When the residual alkyl groups in the fired films fired at the temperatures of 90°C, 200°C, and 400°C were measured by thermogravimetric analysis, the alkyl groups of the starting metal-organic compound (before dehydration condensation) were compared to the oxides. each 4.4゜3.7.0.8wt%5
The composition of the iOz-TiOz amorphous film is the above 91Si
The composition is not limited to O□.9TiOz, but magneto-optical disk substrates with similar weather resistance were obtained in the composition range containing 6 to 12 mole percent of TiO2.

Comparative Example-1 A weather resistance test similar to Example 1 was conducted on a glass substrate with an SiO□ amorphous film having an uneven surface instead of a Sing-TiOz-based glass substrate with an amorphous film having an uneven surface. Ta.

In the method for producing the Sin and amorphous films, silicon tetraethoxide was used as the starting material, and hydrogen chloride was used as the solvent and ethanol hydrolysis catalyst. The amounts of water and ethanol added were 6 and 5, respectively, relative to silicon tetraethoxide.

Dilute hydrochloric acid (1 wt%) was added to an ethanol solution of silicon tetraethoxide, and the mixture was stirred at room temperature for 1 hour.

The solution thus obtained was colorless and transparent, and was diluted with ethanol to 3 times the volume to prepare a coating solution.

Using this coating solution, the same operation as in Example 1 was carried out to prepare a glass substrate with an SiO□ amorphous film having an uneven surface. The 5i (h
The amorphous film had an average thickness of 200 nm and a refractive index of 1.45.

FIG. 2 shows a schematic cross section of the magneto-optical disk substrate produced by the above operation. The same weather resistance test as in Example 1 was conducted on the magneto-optical disk substrate produced in this comparative example.

After the weather resistance test, the surface of the magneto-optical disk substrate has a diameter of 0.
．． Precipitated particles of 1 μfi1 to 0.2 μm were deposited on the front surface at a density of 32 particles per 1 square micrometer. Analysis revealed that the precipitated particles were sodium carbonate. FIG. 3 shows a schematic cross section of the magneto-optical disk substrate after the weather resistance test.

The same weather resistance test was conducted on magneto-optical disk substrates manufactured by the same manufacturing method as in this comparative example, except that the final firing temperature was changed to 90°C and 200°C.

The final heat treatment at 90℃ and the final heat treatment at 200℃ are the same as the final heat treatment at 400℃.
The surface of these magneto-optical disk substrates has a diameter of 0.1 to 0.
．． Precipitated particles of 2 μm were observed to the same extent.

The residual alkyl groups in each of the films fired at 90°C, 200°C, and 400°C were measured in the same manner as in Example-1, and the results were 4.3 and 4.3, respectively.
4.1, 1.1 wt% of alkyl groups are oxides (
It was found that it remained with respect to SiO□).

Comparative Example-2 A photoresist film was formed on a chemically strengthened soda lime glass substrate using a spin code method, and selectively exposed using an exposure device in the shape of a groove as a magneto-optical disk substrate. After development, a continuous groove with a width of about 1.6 μm and a depth of about 70 nm was formed on the substrate by dry etching. FIG. 4 shows a schematic cross-sectional view of the glass substrate after removing the photoresist.

The same weather resistance test as in Example 1 was conducted on the magneto-optical disk substrate produced by the above procedure.

After the weather resistance test, the surface of the magneto-optical disk substrate was extremely deteriorated, with a thickness of 1 to 5 μm on both sides.
A network-like precipitate with pores of approximately 100 mm in diameter was observed.

Analysis revealed that the network precipitate was sodium carbonate. FIG. 5 shows a schematic cross section of the magneto-optical disk substrate after the weather resistance test.

Example-2 Polyethylene glycol (PEG600) with an average molecular weight of 600 was added to the coating solution prepared in Example-1 at a weight ratio of (PEG600)/(oxidation A coating solution was prepared by adding an amount of 1% of the solution and dissolving it uniformly.

Using the coating solution, the same operation as in Example-1 was carried out to obtain PEG600-added 91SfO□9 having unevenness on the surface.
A glass substrate with a TiO□ amorphous film was produced.

After final firing at 400°C for 15 minutes, the average thickness of the adhered film is 400 nm.
It had become a thick amorphous film. Also, the refractive index was 1.46 after the final firing due to the addition of PEG; due to the increased porosity of the thin film.
It had declined to .

When the surface and cross section of the magneto-optical disk substrate produced by the above procedure was observed using a scanning electron microscope, it was found that good groove shapes were formed with a groove depth of 69 nm, a groove width of about 2 μm, and an interval of about 4 μI.

The same weather resistance test as in Example 1 was conducted on the magneto-optical disk substrate produced in this example.

The surface of the magneto-optical disk substrate after the weather resistance test was as uniform as before the weather resistance test, and no surface deterioration or precipitation was observed.

The same weather resistance test was conducted on magneto-optical disk substrates manufactured by the same manufacturing method as in this example, except that the final firing temperature was changed to 90°C and 200°C.

The surface of these magneto-optical disk substrates after the weather resistance test was uniform, and there was no surface deterioration, whether the final heat treatment was carried out at 90℃ or 200℃, as was the case with the final heat treatment at 400℃. No occurrence of precipitates was observed.

The amount of unreacted alkyl groups remaining in each film fired at 400°C was measured to be 1.2wt% (vs. 91SiOz:9TiO).
z oxide).

The composition of the PEG600-added 5iOz Ti0t-based amorphous film is not limited to the above-mentioned 91SiOz・9TiO□. A substrate was obtained.In particular, a film body of this composition containing 17 mol percent TiOz and added with PEG600 was obtained.
After heat treatment at 00°C for 15 minutes, it has a refractive index of 1.51,
The light reflectance at the interface between the film and the glass substrate was low and excellent. (The above 83Si(h ・17TtOz4
The residual alkyl group in the 00″C fired film is 0 compared to the oxide.
．． It was 7iyt%. ) Example 3 A soda lime glass plate was immersed in the coating solution prepared in Example 1, and pulled up at a constant speed (1.8 is/5 ec) to produce a coating film.

The applied glass substrate was heated at 090°C for 30 minutes.
Heat treatment was performed at 0° C. for 15 minutes and at 400 t for 15 minutes.

The thickness of the film body heat-treated at 90°C is approximately 280 nm, 20
The wavelength was 260 nm for the one heat-treated at 0°C, and 220 nm for the one heat-treated at 400°C.

All membrane bodies were amorphous. A weather resistance test was conducted on each glass substrate at different heat treatment temperatures.

For the weather resistance test, first, each glass substrate was heated to 70℃ relative humidity 90℃.
% atmosphere for 4 days.

The surface of each glass substrate after this weather resistance test was as uniform as before the weather resistance test, and no surface deterioration or precipitation was observed.

Further, a dew condensation test was conducted in which each glass substrate was once subjected to dew condensation and then held in an atmosphere of 70° C. and 90% relative humidity for 4 days.

After this dew condensation test, the surface of each glass substrate heat-treated at 400°C showed very slight precipitated particles of about 0.1 μm, but those heat-treated at 90°C and 200°C showed no deterioration. No deposits or deposits were observed, and it was found that the glass substrate produced by this method as a whole had extremely excellent weather resistance.

In particular, the weather resistance of the glass substrate on which the film body is formed is 90%.
Those heat-treated at ℃ to 200℃ were very good.

Example-4 Silicon tetraethoxide was added to an ethanol solution of titanium tetra-n-butoxide, stirred at room temperature for 20 minutes, concentrated hydrochloric acid (36 wt%) was added, and the mixture was stirred for 20 minutes at room temperature.
Allowed to react for minutes. Next, an insufficient amount of water was added so that the molar ratio was 4 times that of all the metal alkoxides, and stirring was continued for 20 minutes at room temperature.

The molar ratio of titanium tetra n-butoxide and silicon tetraethoxide was set to 70:30.

The solution thus obtained was diluted with ethanol to 4 times the volume to prepare a coating solution.

3g? Perform the same operation as in Example ① using liquid g to obtain 3.
A coating film of 0SiO,.70TiQ2 was formed on a soda lime board.

The glass substrate with the coating film was heated in the same manner as in Example-4.
Each heat treatment was performed for 1 minute.

The thickness of the film body heat-treated at 90°C is about 240 nm, 20
Those heat-treated at 0°C had a diameter of 210 nm, and those heat-treated at 400°C had a diameter of 180 nn+.

All membrane bodies were amorphous. Also 90℃, 200"C,
4.2. Residual alkyl groups in the fired film were measured at various temperatures of 400°C. 3.9. 0.6wt% (vs. 30
StO, 70TiO, oxide).

The same weather resistance test and dew condensation test as in Example-1 were conducted on the glass substrate produced in the above example.

As a result, 3QStO□・70 produced according to this example
As with the glass substrate with the TiO, amorphous film described in the previous example-〇, no surface deterioration or precipitates were observed after the test, and the weather resistance was improved. I found it to be excellent. Also 90℃~200℃
Those heat-treated at ℃ were particularly excellent in terms of weather resistance.

The composition of the SiO□-TiO□-based amorphous film is the same as in the above example-
4, and 915t (h 9 TiCh or 30SiO□ 70TiOt in Example 5, but in the next prefecture, there are glass substrates with similar weather resistance in the composition range containing 6 to 70 mole percent TiO□. Obtained.

Comparative Example-3 Example of soda lime glass plate without film body-
A weather resistance test similar to that in 4 was conducted.

After being held at 70°C and 90% relative humidity for 4 days, the surface of the glass substrate without a film was scratched and severely deteriorated, and the entire surface was covered with network-like precipitates with pores of 1 to 7 μm in diameter. Precipitated particles with a diameter of 0.2 to 0.4 μm were observed.

As a result of analysis, these precipitates were found to be sodium carbonate.

Example-3 of glass substrate with SiO□ amorphous film instead of SiO□-Tie, glass substrate with system amorphous film
A weather resistance test similar to that was conducted.

Using the coating solution prepared in Example 2, the same operation as in Example 3 was performed to form a SiO□ coating film on a soda lime glass plate.

The glass substrate with the coating film is heated to ■90℃ for 30 minutes■200℃
Heat treatment was performed at 400° C. for 15 minutes and at 400° C. for 15 minutes, respectively.

The thickness of the film body heat-treated at 90°C is approximately 280 nm.

260nm and 400℃ for those heat treated at 200℃
The wavelength was 230 nm after heat treatment.

All membrane bodies were amorphous.

Regarding the glass substrate produced according to this comparative example, Example-
A weather resistance test similar to No. 3 was conducted.

The surface of the glass substrate after the dew condensation test has a diameter of 0.1 to 0.
Precipitated particles of 2 μm were deposited over the entire surface.

In addition, the amount of particles precipitated increases as the heat treatment temperature increases;
In particular, streak-like precipitates with a width of 2 to 4 μm were observed over the entire surface of the sample heat-treated at 400°C.

Analysis revealed that these precipitates were sodium carbonate.

Table 1 shows the weather resistance of the glass substrates and other glass substrates produced in the above Examples and Comparative Examples and the residual alkyl groups in the fired films (versus the final oxide).

The weather resistance in Table 1 was evaluated by inspecting the surface of the glass substrate after the weather resistance test using a scanning electron microscope (SEM), and the ◎ mark indicates good weather resistance, and the order is ◎〉○〉 △
>x>xx>xxxx indicates deterioration, and XXXX indicates poor weather resistance.

As is clear from the table above, glass substrates with alkyl group residual fired films using metal-organic compounds as starting materials include glass substrates with metal-organic compounds fired at a temperature of 500°C or higher,
It has excellent weather resistance compared to glass substrates that do not have a film.

The film-attached glass substrate obtained by low-temperature firing of the metal-organic compound of the present invention can be used not only as a substrate for magneto-optical disks, but also as a substrate for magneto-optical disks.
It can also be applied as a glass substrate for forming display elements such as electroluminescent elements, electrochromic elements, and liquid crystal elements, and electronic components such as thin film transistors. Furthermore, the film body can be formed on optical components and the like to improve their environmental resistance.

〔Effect of the invention〕

As is clear from the Examples and Comparative Examples, the glass substrate of the present invention is extremely superior in weather resistance compared to glass substrates produced by conventional methods. Therefore, it can be used as a more reliable substrate than conventional glass substrates.

[Brief explanation of the drawing]

Fig. 1 is a cross-sectional view schematically showing the magneto-optical disk substrate manufactured in Example-1, Fig. 2 is a cross-sectional view schematically showing the magneto-optical disk substrate fabricated in Comparative Example-1, and Fig. 3 is a comparative example. FIG. 2 is a cross-sectional view schematically showing the magneto-optical disk substrate manufactured in Example 1-1 after a weather resistance test. Further, FIG. 4 is a cross-sectional view schematically showing the magneto-optical disk substrate manufactured in Comparative Example-2, and FIG. 5 is a cross-sectional view schematically showing the magneto-optical disk substrate manufactured in Comparative Example-2 after a weather resistance test. It is. Figure 1 Figure 2 Figure 3 Figure 5 Procedures Amendment/Indication of Case Patent Application No. Sho 63-97538 Patent Publication No. J0 Name of Invention Glass Substrate 3 Person making the amendment Relationship to the case Patent applicant Address: 4-8 Doshomachi, Higashi-ku, Osaka-shi, Osaka Name:
(lθθ) Shin Toga, Representative of Nippon Sheet Glass Co., Ltd.
Yugu Agent 7, contents of amendment (1) l'JIIKichi, page 1, line 20, "C ■ 0" is corrected to "CVDJ." (2) Specification N, page 4, line 11, rN(OR ).” is rM(OR). ” he corrected. (3) On page 10, line 16 of the specification, the phrase “games, etc.” was replaced with “
``Capture, etc.'' (4) On page 12, line 16 of the specification, the phrase “ditch width sub” should be changed to “
``Full breadth contract'' is corrected. (5) ro, 8wt%SiO on page 20 of Akira m1113
It was found that 8 wt % of RO remained in the column labeled ``2''. Correct it to 5iO2J. (6) On page 14, line 11 of the specification, the phrase "in the solvent used" is corrected to "in the solvent used." (7) Details! On page 14, line 14, "6 for each" is corrected to "6 for each in molar ratio." (8) In the 11th line of page 1114iF15, the word "front" is corrected to "full surface." (9) In the 17th line of page 21 of the specification, "Example ■" is corrected to "Example-3." (10) On page 21, line 18 of the specification, the phrase "on a soda lime board" is corrected to "on a soda lime glass substrate." (11) In the 16th line of page 22 of Specification 1F, correct "■ in" to "3". (12) In the second line of page 23 of the specification, "Example 5" is corrected to "Example-5."

Claims (3)

[Claims] (1) Si in which an alkyl group-containing metal organic compound is fired
A glass substrate whose surface is coated with a fired film of O_2-TiO_2-based oxide, characterized in that the fired film has the alkyl group remaining in an amount of 0.5 to 5 wt% based on the oxide. (2) The glass substrate according to claim 1, wherein the fired film is fired at a temperature of 90 to 400°C. (3) The glass substrate according to claim 1 or 2, wherein the fired film is a film body having an uneven surface.