JPH01146142U - - Google Patents
Info
- Publication number
- JPH01146142U JPH01146142U JP4393488U JP4393488U JPH01146142U JP H01146142 U JPH01146142 U JP H01146142U JP 4393488 U JP4393488 U JP 4393488U JP 4393488 U JP4393488 U JP 4393488U JP H01146142 U JPH01146142 U JP H01146142U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- section
- testing device
- control function
- function section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000006866 deterioration Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000001360 synchronised effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Description
第1図:本考案に係る信頼性試験装置の全体的
概略ブロツク構成図、第2図:同装置におけるワ
ークステーシヨンの一部断面正面図、第3図:第
2図中A―A線断面図、第4図:試料に与える温
度と引張変位の変化特性図、第5図:同装置の一
例を示す外観構成図。
尚図面中、1:信頼性試験装置、2:変位制御
機能部、3:温度制御機能部、4:劣化検出機能
部、5:駆動部、6:モータ、7:ボールネジ、
8:加熱部、9:冷却部、10:ヒータ、11:
送風フアン、S:接合部、W:試料。
Fig. 1: Overall schematic block diagram of the reliability testing device according to the present invention, Fig. 2: A partially sectional front view of a work station in the same device, Fig. 3: A sectional view taken along the line A-A in Fig. 2. , FIG. 4: Characteristic diagram of changes in temperature and tensile displacement applied to the sample, FIG. 5: External configuration diagram showing an example of the same apparatus. In the drawings, 1: reliability test device, 2: displacement control function section, 3: temperature control function section, 4: deterioration detection function section, 5: drive section, 6: motor, 7: ball screw,
8: heating section, 9: cooling section, 10: heater, 11:
Blower fan, S: joint, W: sample.
Claims (1)
期で変化する引張変位を付与する変位制御機能部
と、前記試料に所定周期で変化する温度を付与す
る温度制御機能部と、前記接合部の劣化を検出す
る劣化検出機能部を備えてなる信頼性試験装置。 (2) 引張変位の変化と温度の変化は同時に進行
させ、かつ同期させることを特徴とする請求項1
記載の信頼性試験装置。 (3) 変位制御機能部は試料の一側を変位させる
、ボールネジと正逆転制御されるモータを用いた
駆動部を備えることを特徴とする請求項1記載の
信頼性試験装置。 (4) 温度制御機能部は試料に直接取付けて加熱
するヒータを用いた加熱部を備えることを特徴と
する請求項1記載の信頼性試験装置。 (5) 温度制御機能部は試料を冷却する送風フア
ンを備えることを特徴とする請求項1または4記
載の信頼性試験装置。[Claims for Utility Model Registration] (1) A displacement control function section that holds both sides of a joint in a sample and applies a tensile displacement that changes at a predetermined cycle, and a temperature control unit that applies a temperature that changes at a predetermined cycle to the sample. A reliability testing device comprising a functional section and a deterioration detection function section that detects deterioration of the joint section. (2) Claim 1 characterized in that the change in tensile displacement and the change in temperature are caused to proceed simultaneously and are synchronized.
Reliability test equipment as described. (3) The reliability testing device according to claim 1, wherein the displacement control function section includes a drive section using a ball screw and a motor that is controlled in forward and reverse directions to displace one side of the sample. (4) The reliability testing device according to claim 1, wherein the temperature control function section includes a heating section using a heater that is directly attached to the sample and heats the sample. (5) The reliability testing device according to claim 1 or 4, wherein the temperature control function section includes a blower fan for cooling the sample.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4393488U JPH01146142U (en) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4393488U JPH01146142U (en) | 1988-03-31 | 1988-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01146142U true JPH01146142U (en) | 1989-10-09 |
Family
ID=31270315
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4393488U Pending JPH01146142U (en) | 1988-03-31 | 1988-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01146142U (en) |
-
1988
- 1988-03-31 JP JP4393488U patent/JPH01146142U/ja active Pending
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