JPH01122032A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH01122032A JPH01122032A JP28061087A JP28061087A JPH01122032A JP H01122032 A JPH01122032 A JP H01122032A JP 28061087 A JP28061087 A JP 28061087A JP 28061087 A JP28061087 A JP 28061087A JP H01122032 A JPH01122032 A JP H01122032A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- magnetic
- recording medium
- layer
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録装置に用いられる磁気ディスクなどの
磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic recording medium such as a magnetic disk used in a magnetic recording device.
第3図は従来用いられている磁気記録媒体の模式・的な
要部構成断面図を示したものである。第3図の磁気記録
媒体はA1−Mg合金基板1の上に非磁性金属基体層2
を被覆し、この非磁性金属基体層2上にさらに非磁性金
属下地層3を介して例えばCo−Ni−Cr合金薄膜の
磁性層4を被覆し、磁性層4上に保護潤滑層5を設けて
あり、基板1に非磁性金属基体層2から保護潤滑層5ま
でをこの符号順に積み重ねたように構成したものである
。FIG. 3 shows a schematic cross-sectional view of the main part of a conventionally used magnetic recording medium. The magnetic recording medium shown in FIG. 3 has a non-magnetic metal base layer 2 on an A1-Mg alloy substrate 1.
A magnetic layer 4 of, for example, a Co-Ni-Cr alloy thin film is further coated on the non-magnetic metal base layer 2 via a non-magnetic metal underlayer 3, and a protective lubricant layer 5 is provided on the magnetic layer 4. The structure is such that a nonmagnetic metal base layer 2 to a protective lubricant layer 5 are stacked on a substrate 1 in the order of the numbers.
このように構成された磁気記録媒体は製造過程で基板1
を所定の面粗さ、平行度および平面度に仕上げ、非磁性
金属基体層2はN1−P合金を無電解めっきもしくは基
板1自体をアルマイト処理することにより形成するのが
好ましく、いずれも所定の硬さを必要とし、表面は機械
的研磨を行って所定の面精度まで仕上げる。非磁性金属
下地層3は一般にCrを用いてスパッタ形成し、引き続
きCo−Ni−Cr合金などの磁性層4、さらにカーボ
ンもしくは5i02などの保護潤滑層5を連続的にスパ
ッタして被覆する。In the magnetic recording medium configured in this way, the substrate 1 is
The non-magnetic metal substrate layer 2 is preferably formed by electroless plating of N1-P alloy or by alumite treatment of the substrate 1 itself, both of which have a predetermined surface roughness, parallelism and flatness. Hardness is required, and the surface is mechanically polished to a specified surface accuracy. The non-magnetic metal underlayer 3 is generally sputter formed using Cr, followed by a magnetic layer 4 such as a Co--Ni--Cr alloy, and then a protective lubricant layer 5 such as carbon or 5i02 by successive sputtering.
かくして得られた磁気記録媒体は強度1寸法精度などの
機械的特性および磁気特性も良好であり、例えばΔp−
Mg合金基板1上に被覆したN1−P基体層2にCrの
非磁性金属下地層3を2000人、 Co−30at
%Ni−7,5at%Cr磁性層4を500人およびカ
ーボン保護潤滑層5を500人連続スパッタして形成し
たものの代表的な磁気特性として保磁力Haは9000
eである。The magnetic recording medium thus obtained also has good mechanical properties such as strength and dimensional accuracy, and magnetic properties, such as Δp-
A non-magnetic metal base layer 3 of Cr is coated on the N1-P base layer 2 coated on the Mg alloy substrate 1, and Co-30at is applied.
%Ni-7,5at%Cr magnetic layer 4 was continuously sputtered by 500 people and carbon protective lubricant layer 5 was formed by 500 people, and the coercive force Ha is 9000 as a typical magnetic property.
It is e.
以上のような磁気記録媒体は緒特性の向上とともに近年
ますます軽量化とコストの低減に対する要求が高められ
ている。As magnetic recording media such as those described above have improved in magnetic properties, there has been an increasing demand for lighter weight and lower costs in recent years.
〔発明が解決しようとする問題点〕
記録媒体の軽量化とコスト低減に対して考慮すべき点は
基板材料の選択である。すなわち、AAl−1A合金を
基板に用いているために、この上に硬いN+−P層を設
けねばならず、基板面とN1−P層の表面研廖加工に多
大の時間を要し、このことがコストに大きな比率を占め
ている。したがって、この加工工数を短縮するのがよい
が、所定の面粗さ、平行度および平面度に仕上げなけれ
ばならないので、大幅な工数省略は不可能であってコス
トの低減には・限界があり、Al−Mg合金を用いる限
り多くを期待することができない。[Problems to be Solved by the Invention] A point to be considered for reducing the weight and cost of a recording medium is the selection of the substrate material. In other words, since AAl-1A alloy is used for the substrate, a hard N+-P layer must be provided on top of it, and it takes a lot of time to polish the surface of the substrate and the N1-P layer. This accounts for a large proportion of costs. Therefore, it would be better to shorten this machining man-hour, but since the surface must be finished to a specified level of surface roughness, parallelism, and flatness, it is impossible to significantly reduce the man-hour, and there is a limit to cost reduction. , much cannot be expected as long as an Al-Mg alloy is used.
一方基板材料の選択に関しては記録媒体の軽量化も含め
て、プラスチックもしくはプラスチックとセラミックの
複合材料を用いるのが有望である。On the other hand, regarding the selection of the substrate material, it is promising to use plastic or a composite material of plastic and ceramic, which also reduces the weight of the recording medium.
これらの材料はAJ−Mg合金より軽く、金型を用いて
成形することができるので、金型の表面を高精度に加工
しておくことにより、成形後の表面研磨を行うことなく
十分に良好な面粗さや平行度が得られるという利点があ
るからである。These materials are lighter than AJ-Mg alloy and can be formed using a mold, so by processing the surface of the mold with high precision, they can be made in good condition without having to polish the surface after molding. This is because it has the advantage of providing good surface roughness and parallelism.
しかしながら、プラスチックまたはその複合材料を基板
に用いるときは、別な問題が起きる。それは、プラスチ
ックは金属とは異なり、吸湿性が高く水分を吸蔵するの
で、これがスバツタ工程で放出され磁性層に悪い影響を
及ぼし、磁気特性。However, other problems arise when plastic or composite materials thereof are used for the substrate. Unlike metal, plastic has high hygroscopicity and absorbs water, which is released during the splatter process and has a negative effect on the magnetic layer, which affects its magnetic properties.
特に保磁力を低下させてしまう。したがってAl−Mg
合金に代わり、プラスチックなどを基板に用いたときも
記録媒体の特性を損なわないようにするのが好ましい。In particular, it lowers the coercive force. Therefore, Al-Mg
Even when plastic or the like is used for the substrate instead of an alloy, it is preferable not to impair the characteristics of the recording medium.
本発明は上述の点に鑑みてなされたものであり、その目
的は磁気記録媒体をより軽量とし、コストを低減するた
めにプラスチックまたはプラスチックとセラミックの複
合材料を用い、しかも従来のスパッタ方式により良好な
磁気特性が得られる構造を有する磁気記録媒体を提供す
ることにある。The present invention has been made in view of the above-mentioned points, and its purpose is to make a magnetic recording medium lighter and to reduce costs by using plastic or a composite material of plastic and ceramic, and also by using the conventional sputtering method. An object of the present invention is to provide a magnetic recording medium having a structure that provides excellent magnetic properties.
C問題点を解決するための手段〕
本発明の磁気記録媒体はプラスチックなどの非磁性基板
上にZrO□薄膜からなるバッファ層、非磁性金属下地
層、磁性層および保護潤滑層をこの順に連続的にスパッ
タ形成したものである。Means for Solving Problem C] The magnetic recording medium of the present invention consists of a buffer layer made of a ZrO□ thin film, a nonmagnetic metal underlayer, a magnetic layer, and a protective lubricant layer successively formed on a nonmagnetic substrate such as plastic in this order. It is formed by sputtering.
プラスチックなどは水分を吸蔵しているために、これを
基板として用いると、スパッタ過程で放出するガスの影
響を受けて、特に磁性層の保磁力を低下させるが本発明
ではプラスチックなどの基板と非磁性金属下地層との間
にバッファ層としてZrO,薄膜が介在するようにスパ
ッタ形成したために、基板に吸蔵されている水分などの
ガス放出を防ぐことができるので、良好な磁気特性を保
持したまま、従来より軽量にして安価な磁気記録媒体が
一得られる。Since plastics absorb moisture, if they are used as a substrate, they will be affected by the gas emitted during the sputtering process, which will particularly reduce the coercive force of the magnetic layer. Since the ZrO thin film is sputter-formed as a buffer layer between the magnetic metal underlayer and the substrate, it is possible to prevent the release of gases such as moisture stored in the substrate, while maintaining good magnetic properties. Therefore, a magnetic recording medium that is lighter and cheaper than the conventional one can be obtained.
以下本発明を実施例に基づき説明する。 The present invention will be explained below based on examples.
第1図は本発明により得られた磁気記録媒体の模式的な
要部構成断面図を示したものであり、第3図と共通部分
を同一符号で表しである。第1図は第3図と基本的な構
成は同じであるが、第1図が第3図と異なる点は基板1
aにプラスチックを用い、基板1aと非磁性金属下地層
3との間に、非磁性金属基体層2ではなく、バッファ層
6としてZrO2膜が介在するように構成した所にある
。FIG. 1 shows a schematic cross-sectional view of the main part of a magnetic recording medium obtained according to the present invention, and parts common to those in FIG. 3 are denoted by the same reference numerals. The basic configuration of Figure 1 is the same as Figure 3, but the difference between Figure 1 and Figure 3 is that the substrate 1
A is made of plastic, and a ZrO2 film is interposed between the substrate 1a and the nonmagnetic metal base layer 3 as a buffer layer 6 instead of the nonmagnetic metal base layer 2.
この記録媒体はまず基板材料にポリエーテルイミド樹脂
の商品名ウルテム1000を用い、所定の表面精度をも
った金型により成形して基板1aを作製し、この基板1
a上にバッファ層6のZrO2,非磁性金属下地層3の
Crを2000人、磁性層4のCo−3Qat%Ni−
7,5at%Cr合金を500人、保護潤滑15のカー
ボンを500人間−真空槽内で連続的にスパッタ形成し
たものであるが、本発明に係わるバッファ層6の膜厚に
ついてはその効果を確かめるためにバッファ層6を設け
ないものから2000人まで変化させた。また同時に基
板材料としてポリエステル樹脂と炭酸カルシウムとの複
合材料を用いた媒体を作製したが、このとき下地層3.
磁性層4および保護潤滑層5についてはプラスチック基
板を用いたものと全く同じ条件にしである。This recording medium is manufactured by first using polyetherimide resin (trade name Ultem 1000) as a substrate material and molding it with a mold having a predetermined surface precision to produce a substrate 1a.
ZrO2 for the buffer layer 6, Cr for the non-magnetic metal underlayer 3 and Co-3Qat%Ni- for the magnetic layer 4 on a.
7.5 at% Cr alloy was sputtered by 500 people and protective lubricant 15 carbon by 500 people.The thickness of the buffer layer 6 according to the present invention was confirmed by sputtering in a vacuum chamber. Therefore, the number of people was varied from one without the buffer layer 6 to 2,000 people. At the same time, a medium was prepared using a composite material of polyester resin and calcium carbonate as a substrate material, but in this case, the base layer 3.
The magnetic layer 4 and the protective lubricant layer 5 were under exactly the same conditions as those using the plastic substrate.
次に以上のごとくして得られたそれぞれの磁気記録媒体
について磁気特性の比較を行った。第2図は縦軸を媒体
の代表的な磁気特性である保磁力Hcとし、横軸をバッ
ファ層6のZrO2膜厚とし、それぞれの媒体について
10点測定の平均値をプロットしたものであり、基板に
プラスチック単独(○)。Next, the magnetic properties of each of the magnetic recording media obtained as described above were compared. In Figure 2, the vertical axis is the coercive force Hc, which is a typical magnetic property of the medium, and the horizontal axis is the ZrO2 film thickness of the buffer layer 6, and the average value of 10 measurements for each medium is plotted. Plastic alone on the board (○).
プラスチック複合材く△)を用いたものと、比較のため
にバッファ層を形成してないものおよび従来のA2合金
基板を用いたものを併記しである。One using the plastic composite material (△), one without a buffer layer formed thereon, and one using a conventional A2 alloy substrate are also shown for comparison.
第2図かられかるように、バッファ層を設けてない媒体
はHcが僅かに1000e程度で非常に小さな値しか得
られず、これに対して2r02バッファ層6を基板1a
と下地層3との間に形成しである本発明の媒体はバッフ
ァ層6の2rO,の膜厚が増すとともに保磁力が大きく
なり、このZrO2膜厚が500Å以上になると従来の
A1合金基板1にN1−Pめっき層2を被覆した媒体の
保磁力9000eと同等の値が得られる。As can be seen from FIG. 2, the medium without a buffer layer has a very small Hc of only about 1000e, whereas the 2r02 buffer layer 6 has a very small value of Hc on the substrate 1a.
The medium of the present invention, which is formed between the ZrO2 film and the base layer 3, has a coercive force that increases as the ZrO2 film thickness of the buffer layer 6 increases. A value equivalent to the coercive force of 9000e of the medium coated with the N1-P plating layer 2 can be obtained.
このことは基板1aにプラスチックまたはその複合材料
を用いたときにこれらを被覆するバッファ層6のもたら
す効果であって、基板に吸蔵されている水分などのガス
はバッファ層6のスパッタ過程でほぼ除去されるか、媒
体形成後はバッファ層6に閉じ込められて、下地層3や
磁性層4へ悪い影響を及ぼすのを防いでいるからである
。しかもプラスチックまたはその複合材料を基板1aと
して用いるときは、従来のAJ −M g合金基板1に
比べて約60%軽量になるとともに、複雑な研磨工程を
必要とせず、基板1a上に堆積させる各層は同一真空槽
内で順次スパッタさせればよく、バッファ層6を形成す
るための特別な手段も要らない。This is an effect brought about by the buffer layer 6 that covers the substrate 1a when plastic or a composite material thereof is used, and gas such as moisture occluded in the substrate is almost removed during the sputtering process of the buffer layer 6. Or, after the medium is formed, it is confined in the buffer layer 6 to prevent it from having a bad influence on the underlayer 3 and magnetic layer 4. Moreover, when plastic or a composite material thereof is used as the substrate 1a, it is approximately 60% lighter than the conventional AJ-Mg alloy substrate 1, and there is no need for a complicated polishing process. can be sputtered sequentially in the same vacuum chamber, and no special means is required to form the buffer layer 6.
最後に本発明により得られた磁気記録媒体を磁気記録装
置に組み込んでC8S試験を行った結果、2万回のコン
タクト・スタート・ストップに対してもこの記録媒体表
面にはなんら傷の発生は見られず、再生出力もほとんど
低下することなく、十分な耐久性をもっていることを確
認することができた。Finally, the magnetic recording medium obtained according to the present invention was incorporated into a magnetic recording device and a C8S test was conducted. As a result, no scratches were observed on the surface of this recording medium even after 20,000 contact starts and stops. It was confirmed that the device had sufficient durability, with almost no decrease in playback output.
磁気ディスクなどの磁気記録媒体は軽看にするとともに
、コストの低減が望まれており、従来の加工工数の多い
A1合金基板の代わりに、後加工なしで高い表面精度の
得られるプラスチックまたはその複合材料を用いるのが
合口的であるが、これらプラスチック系材料は水分など
を吸蔵しており、この上に形成される下地層や磁性層は
スパッタ時に基板から放出される水分などのガスの影響
を受けて酸化し、記録媒体の磁気特性を低下させるのに
対して、本発明によれば実施例で述べたように、プラス
チック系基板と非磁性金属下地層との間にバッファ層と
してZrO2膜を介在させるように構成したために、こ
のバッファ層によって基板からのガス放出の磁気特性に
対する悪影響はなくなり、本来の媒体の有するすぐれた
磁気特性を維持するこ・とができ、しかも基板上の薄膜
積層過程は連続スパッタが可能であって製造効率を低下
させることもない。Magnetic recording media such as magnetic disks are being taken lightly and cost reduction is desired, and instead of the conventional A1 alloy substrate that requires many processing steps, plastic or its composite material that can obtain high surface precision without post-processing is used. However, these plastic materials absorb moisture, and the underlying layer and magnetic layer formed on top of these materials are susceptible to the effects of moisture and other gases released from the substrate during sputtering. In contrast, according to the present invention, as described in the embodiment, a ZrO2 film is formed as a buffer layer between the plastic substrate and the non-magnetic metal underlayer. Since this buffer layer is configured to intervene, the adverse effect of gas released from the substrate on the magnetic properties is eliminated, and the excellent magnetic properties of the original medium can be maintained. It is possible to perform continuous sputtering without reducing manufacturing efficiency.
以上のように本発明の磁気記録媒体はプラスチック系の
基板を用いて表面研磨工程を省略したことによる軽量化
とコスト低減、およびスパッタ法を用いてZrO,バッ
ファ層を形成することによりプラスチック系基板のもつ
欠点を解消して媒体本来の特性を保持することができた
という点で磁気記録媒体に望まれるいくつかの重要な課
題を全て同時に達成したものである。As described above, the magnetic recording medium of the present invention is lightweight and cost-reduced by using a plastic substrate and omitting the surface polishing process, and by forming a ZrO and buffer layer using a sputtering method. In that it was able to eliminate the drawbacks of magnetic recording media and maintain the original characteristics of the medium, it simultaneously achieved several important goals desired for magnetic recording media.
第1図は本発明の磁気記録媒体の模式的な要部構成断面
図、第2図は本発明の磁気記録媒体における保磁力と2
rO,バッファ層の膜厚との間係をバッファ層なしの媒
体および従来の媒体との比較で示した線図、第3図は従
来の磁気記録媒体の模式的な要部構成断面図である。
1,1a−・基板、2 非磁性金属基体層、3・非磁性
金属下地層、4−・磁性層、5・保護潤滑層、6 バッ
ファ層。
o−1°ラス±・lり基板
1 x 1ラスチツグ系基棲の/ C
−771層−“し仔12(101
バッフ77t/)ZrO2ALl (A)耳 2
図FIG. 1 is a schematic cross-sectional view of the main part of the magnetic recording medium of the present invention, and FIG. 2 shows the coercive force and
A diagram showing the relationship between rO and buffer layer thickness in comparison with a medium without a buffer layer and a conventional medium. FIG. 3 is a schematic cross-sectional view of the main part configuration of a conventional magnetic recording medium. . 1, 1a--Substrate, 2--Nonmagnetic metal base layer, 3--Nonmagnetic metal underlayer, 4--Magnetic layer, 5--Protective lubricant layer, 6--Buffer layer. O-1° lath ±・L substrate 1 x 1 lath base/C
-771 layer-"Shiko 12 (101 buff 77t/) ZrO2ALl (A) Ear 2
figure
Claims (1)
下地層、磁性層および保護潤滑層をこの順に連続的にス
パッタ形成してなることを特徴とする磁気記録媒体。 2)特許請求の範囲第1項記載の媒体において、基板が
プラスチック成形体であることを特徴とする磁気記録媒
体。 3)特許請求の範囲第1項記載の媒体において、基板が
プラスチックとセラミックの複合材料の成形体であるこ
とを特徴とする磁気記録媒体。 4)特許請求の範囲第1項ないし第3項のいずれかに記
載の媒体において、バッファ層の酸化ジルコニウム膜厚
が少なくとも500Åであることを特徴とする磁気記録
媒体。Claims: 1) A magnetic recording medium comprising a zirconium oxide buffer layer, a nonmagnetic metal underlayer, a magnetic layer, and a protective lubricant layer successively formed on a substrate by sputtering in this order. 2) A magnetic recording medium according to claim 1, wherein the substrate is a plastic molded body. 3) A magnetic recording medium according to claim 1, wherein the substrate is a molded body of a composite material of plastic and ceramic. 4) A magnetic recording medium according to any one of claims 1 to 3, characterized in that the buffer layer has a zirconium oxide film thickness of at least 500 Å.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28061087A JPH01122032A (en) | 1987-11-06 | 1987-11-06 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28061087A JPH01122032A (en) | 1987-11-06 | 1987-11-06 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01122032A true JPH01122032A (en) | 1989-05-15 |
Family
ID=17627437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28061087A Pending JPH01122032A (en) | 1987-11-06 | 1987-11-06 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01122032A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0545802A (en) * | 1991-08-13 | 1993-02-26 | Fuji Photo Film Co Ltd | Film unit with lens |
US6911256B2 (en) | 2003-06-30 | 2005-06-28 | Imation Corp. | Buffer layers for magnetic media with a plastic substrate |
WO2006022350A1 (en) * | 2004-08-26 | 2006-03-02 | Omron Corporation | Chip antenna and method for manufacturing the same |
-
1987
- 1987-11-06 JP JP28061087A patent/JPH01122032A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0545802A (en) * | 1991-08-13 | 1993-02-26 | Fuji Photo Film Co Ltd | Film unit with lens |
US6911256B2 (en) | 2003-06-30 | 2005-06-28 | Imation Corp. | Buffer layers for magnetic media with a plastic substrate |
WO2006022350A1 (en) * | 2004-08-26 | 2006-03-02 | Omron Corporation | Chip antenna and method for manufacturing the same |
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