JPH01114264U

JPH01114264U -

Info

Publication number: JPH01114264U
Application number: JP1088288U
Authority: JP
Priority date: 1988-01-29
Filing date: 1988-01-29
Publication date: 1989-08-01

Description

[Brief explanation of the drawing]

第１図は本考案に係る研摩用キヤリアの一実施
例を示す平面図、第２図は第１図―線拡大断
面図、第３図は本考案の他の実施例を示す平面図
、第４図は本考案の他の実施例を示す平面図、第
５図は第４図―線拡大断面図、第６図は本考
案のさらに他の実施例を示す要部平面図、第７図
ａ，ｂはそれぞれ被加工物の他の実施例を示す図
、第８図及び第９図は研摩装置の従来例を示す要
部断面図および上定盤を取り除いた要部平面図で
ある。２……上定盤、３……下定盤、４……被加工物
、５……キヤリア、６……太陽歯車、７……内歯
歯車、８……研摩材、１８……収納孔、２３……
離間部材、３０……板ばね。 FIG. 1 is a plan view showing one embodiment of the polishing carrier according to the present invention, FIG. 2 is an enlarged sectional view taken along the line of FIG. 1, and FIG. Fig. 4 is a plan view showing another embodiment of the present invention, Fig. 5 is an enlarged sectional view taken along the lines of Fig. 4, Fig. 6 is a plan view of main parts showing still another embodiment of the present invention, and Fig. 7 is a plan view showing another embodiment of the present invention. 8 and 9 are a sectional view of a main part and a plan view of a main part from which the upper surface plate is removed, respectively, showing a conventional example of a polishing apparatus. 2... Upper surface plate, 3... Lower surface plate, 4... Workpiece, 5... Carrier, 6... Sun gear, 7... Internal gear, 8... Abrasive material, 18... Storage hole, 23...
Spacing member, 30...plate spring.

Claims

[Scope of utility model registration request]

In a polishing carrier that has a storage hole for storing and holding a workpiece and is used for polishing the workpiece, an elastic spacing member is provided on the inner surface of the storage hole, and the side or circumferential surface of the workpiece is A polishing carrier characterized in that the carrier is prevented from coming into contact with the inner surface.